This application claims the benefit of Korean Patent Application No. 10-2014-0006666 filed on Jan. 20, 2014, with the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference.
The present disclosure relates to a semiconductor light emitting device.
A light emitting diode (LED) is a device including a material emitting light when electrical energy is applied thereto, in which energy generated through electron-hole recombination in semiconductor junction parts is converted into light to be emitted therefrom. LEDs are commonly employed as light sources in illumination devices, display devices, and the like, and thus, development of LEDs has been accelerated.
In particular, the development and employment of gallium nitride (GaN)-based LEDs has recently increased, and mobile keypads, turn signal lamps, camera flashes, and the like, using such gallium nitride-based LEDs, have been commercialized. Thus, development of general illumination devices using LEDs has accelerated. Like the products to which they are applied, such as the backlight units of large TVs, the headlamps of vehicles, general illumination devices, and the like, applications of light emitting devices are gradually moving toward large-sized products having high outputs and high degrees of efficiency. Accordingly, a method for enhancing light extraction efficiency of a light emitting device used for the purposes is required. In particular, methods for reducing internal defects of semiconductor layers degrading internal light extraction efficiency and enhancing external light extraction efficiency are required.
An aspect of the present disclosure may provide a semiconductor light emitting device having enhanced luminous efficiency.
According to an aspect of the present disclosure, a semiconductor light emitting device may include a base semiconductor layer formed on a substrate and having defect regions therein; cavities disposed in regions corresponding to the defect regions on the base semiconductor layer; a capping layer disposed to cover at least one region of the base semiconductor layer and the cavities; and a light emitting structure disposed on the capping layer and including a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer.
The capping layer may include regions protruded from the defect regions.
The cavities may be surrounded by the base semiconductor layer and the capping layer.
The cavities may be disposed to be spaced apart from one another in the form of a plurality of islands.
The defective regions may be regions in which threading dislocations are formed.
The capping layer may have a substantially uniform thickness on the cavities and on the base semiconductor layer.
The capping layer may have a composition of AlxInyGa1-x-yN (0<x≦1, 0≦y<1).
The cavities may be air gaps filled with air.
The cavities may have a width greater than a thickness thereof.
The cavities may have a quadrangular or trapezoidal cross-section in a direction perpendicular to the substrate.
The base semiconductor layer and the first conductivity-type semiconductor layer may have the same composition.
The base semiconductor layer may be an undoped semiconductor layer.
The light emitting structure may have an uneven lower surface along the capping layer.
The capping layer may have a first thickness on the defective regions and a second thickness greater than the first thickness in regions other than the defective regions.
According to another aspect of the present disclosure, a semiconductor light emitting device may include: a base semiconductor layer formed on a substrate and having a defect region therein; a capping layer covering at least one region of the base semiconductor layer, having a cavity in a region corresponding to the defect region, and having a refractive index value higher than that of the cavity; and a light emitting structure formed on the capping layer and including a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer each having a refractive index value higher than that of the capping layer.
According to the other aspect of the present disclosure, a semiconductor light emitting device comprising: a base semiconductor layer formed on a substrate and having defect regions therein; cavities in regions corresponding to any defect regions on the base semiconductor layer; a capping layer covering at least one region of the base semiconductor layer and the cavities; and a light emitting structure disposed on the capping layer and including a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer.
The capping layer has a refractive index value higher than that of the cavities.
The cavities are gaps filled with air.
The cavities are spaced apart from one another in the form of a plurality of islands.
The capping layer includes regions protruding from any defect regions in the base layer.
The above and other aspects, features and other advantages of the present disclosure will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.
The disclosure may, however, be exemplified in many different forms and should not be construed as being limited to the specific embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. In the drawings, the shapes and dimensions of elements may be exaggerated for clarity, and the same reference numerals will be used throughout to designate the same or like elements.
Referring to
In the present disclosure, unless otherwise mentioned, terms such as ‘upper portion’, ‘upper surface’, ‘lower portion’, ‘lower surface’, ‘lateral surface’, and the like, are determined based on the drawings, and in actuality, the terms may be changed according to a direction in which a device is actually disposed.
The substrate 110 may be provided as a semiconductor growth substrate and may be formed of an insulating, a conductive, or a semiconductive material such as sapphire, SiC, MgAl2O4, MgO, LiAlO2, LiGaO2, GaN, or the like. A sapphire substrate is a crystal having Hexa-Rhombo R3c symmetry, of which lattice constants in c-axial and a-axial directions are approximately 13.001 Å and 4.758 Å, respectively, and has a C-plane (0001), an A-plane (11-20), an R-plane (1-102), and the like. In this case, the C-plane of sapphire crystal allows a nitride thin film to be relatively easily grown thereon and is stable at high temperatures, so the sapphire substrate is commonly used as a nitride growth substrate. When the substrate 110 is formed of silicon (Si), diameter may be increased and price accordingly reduced, facilitating mass-production. Although not shown, a depression and protrusion pattern may be formed on an upper surface of the substrate 110, namely, on a growth surface of the semiconductor layers, and crystallinity, luminous efficiency, and the like, of the semiconductor layers may be enhanced thereby.
The base semiconductor layer 120 is a semiconductor layer grown on the substrate 110. The base semiconductor layer 120 may be formed as an undoped semiconductor layer formed of a nitride such as AlN, GaN, InGaN, or AlGaN. Here, undoped refers to a semiconductor layer which has not undergone an impurity doping process, and the semiconductor layer may have an inherent level of impurity concentration. For example, the base semiconductor layer 120 may relax difference in lattice constants between the substrate 110 formed of, for example, sapphire and the first conductivity-type semiconductor layer 151 formed of GaN to increase crystallinity of the GaN layer. Also, the base semiconductor layer 120 may be formed as a semiconductor layer having a composition identical to that of the first conductivity-type semiconductor layer 151, as described hereinafter.
As illustrated in
The capping layer 140 is formed to cover the base semiconductor layer 120, and have spaces separated from the base semiconductor layer 120 to form the cavities 130 on the defect regions of the base semiconductor layer 120. Also, the capping layer 140 may be formed of a nitride semiconductor, for example, a material having a composition of AlxInyGa1-x-yN(0≦x≦1, 0≦y≦1, 0≦x+y≦1). The capping layer 140 may be configured as a single layer or may be formed as a plurality of layers each having different characteristics such as a doping concentration, a composition, and the like. For example, the capping layer 140 may be formed of a nitride semiconductor such as AlN, AlInN, or AlGaN.
The capping layer 140 may have a thickness sufficient so as not to be damaged by the weight of the light emitting structure 150 formed thereon. Also, the capping layer 140 may be formed to have a thickness sufficient for a sacrificial layer 130a used for forming the cavities 130 to be volatilized during a semiconductor manufacturing process to be described hereinafter.
The capping layer 140 may be formed to cover a region or the entire surface of the base semiconductor layer 120 As shown in
Each cavity 130 is a space by which one surface of the capping layer 140 and the base semiconductor layer 120 are separated from one another. Each cavity 130 may be formed in various shapes. Each cavity 130 may have a quadrangular or trapezoidal cross-sectional shape and may have a thickness T1 ranging from 0.01 μm to 0.5 μm, and a width A1 ranging from 0.5 μm to 0.6 μm.
The cavity 130 may be formed as a gap filled with air and may have a polyhedral or a dome shape to have a quadrangular or trapezoidal cross-section in a surface perpendicular to the substrate 110.
As mentioned in the manufacturing process described hereinafter, each cavity 130 is formed on the defect region of the base semiconductor layer 120. This is because, the sacrificial layer 130a disposed on the upper surface of the base semiconductor layer 120 is grown to be interspaced apart in an island form in regions region of an upper surface of the base semiconductor layer 120 in which threading dislocations are formed, before the cavities 130 are formed. Thus, since the cavities 130 are formed on the defective region of the base semiconductor layer 120, a defect such as threading dislocation D formed in the base semiconductor layer 120 is prevented from extending to the upper light emitting structure 150. Thus, formation of defects in the light emitting structure 150 can be prevented, alleviating reductions in light extraction efficiency of the semiconductor light emitting device 100. The process of growing the sacrificial layers 130a to be interspaced apart in an island form in the regions of the upper surface of the base semiconductor layer 120 in which threading locations are formed will be described in detail in a manufacturing process described hereinafter.
Also, since the cavities 130 are filled with air, the cavities 130 may also serve as reflectors enhancing light reflectivity due to a difference in refractive indices between the cavities 130 and the light emitting structure 150 formed on the cavities 130. In this case, the refractive index value of the light emitting structure 150 may be greater than that of the capping layer 140 to further enhance light reflectivity.
The light emitting structure 150 may include the first conductivity-type semiconductor layer 151, the active layer 152, and the second conductivity-type semiconductor layer 153. The light emitting structure 150 may be formed on the capping layer 140 and have a lower surface uneven along the capping layer 140.
The first and second conductivity-type semiconductor layers 151 and 153 may respectively be formed of semiconductor doped with an n-type impurity and a p-type impurity, but the present disclosure is not limited thereto and, conversely, the first and second conductivity-type semiconductor layers 151 and 153 may respectively be formed of p-type and n-type semiconductors. The first and second conductivity-type semiconductor layers 151 and 153 may be formed of a nitride semiconductor, e.g., a material having a composition of AlxInyGa1-x-yN (0≦x<1, 0≦y<1, 0≦x+y<1). Each of the semiconductor layers 151 and 153 may be configured as a single layer, or may include a plurality of layers having different characteristics such as different doping concentrations, compositions, and the like. Here, the first and second conductivity-type semiconductor layers 151 and 153 may be formed of an AlInGaP or AlInGaAs semiconductor, in lieu of a nitride semiconductor.
The active layer 152, disposed between the first and second conductivity-type semiconductor layers 151 and 153, emits light having a certain level of energy according to the recombination of electrons and holes and may have a multi-quantum well (MQW) structure in which quantum well layers and quantum barrier layers are alternately laminated. For example, in the case of the nitride semiconductor, a GaN/InGaN structure may be used. A single quantum well (SQW) structure may also be used as needed.
The first and second electrodes 170 and 180 are electrically connected to the first and second conductivity-type semiconductor layers 151 and 153, respectively. The first and second electrodes 170 and 180 may be formed by depositing an electrically conductive material, for example, one or more of silver (Ag), aluminum (Al), nickel (Ni), and chromium (Cr). According to an exemplary embodiment, the first and second electrodes 170 and 180 may be transparent electrodes and may be formed of indium tin oxide (ITO), aluminum zinc oxide (AZO), indium zinc oxide (IZO), ZnO, GZO (ZnO:Ga), In2O3, SnO2, CdO, CdSnO4, or Ga2O3. Also, as illustrated in
The positions and shapes of the first and second electrodes 170 and 180 illustrated in
Since threading dislocations formed in the base semiconductor layer 120 are blocked by cavities 130 in the semiconductor light emitting device 100 configured as described above, threading dislocation reaching the light emitting structure 150 formed on the base semiconductor layer 120 is reduced, enhancing light extraction efficiency. Also, stress due to a difference in lattice constants or coefficients of thermal expansion between the substrate 110 and the base semiconductor layer 120 may be reduced, and external light extraction efficiency may be further enhanced due to the cavities 130 having an air-gap structure filled with air.
Hereinafter, a method for manufacturing the semiconductor light emitting device 100 according to an exemplary embodiment of the present inventive concepts will be described with reference to
First, as illustrated in
Thereafter, as illustrated in
Specifically, the sacrificial layer 130a may be formed of an indium nitride (InN). When the sacrificial layer 130a is formed of a nitride semiconductor including indium (In), it may have qualities of being relatively easily removed under predetermined conditions such as temperature and atmosphere, and may be spontaneously decomposed under a high temperature condition, for example. However, the material of the sacrificial layer 130a is not limited to a nitride semiconductor including indium (In) and may include, for example, ZnO. Also, the sacrificial layer 130a may be formed of a material obtained by doping Ga, Al, In, Si, C, B, and the like, in the foregoing material.
The sacrificial layer 130a may be formed to be interspaced in an island form, rather than being formed as a continuous layer, on the upper surface of the base semiconductor layer 120 due to a difference in lattice constants from the base semiconductor layer 120. A material used to form the sacrificial layer 130a has a lattice constant significantly different from that of the base semiconductor layer 120. Thus, precursors of a source gas forming the sacrificial layer 130a may be easily adsorbed to have difficulty in making nucleation. Here, however, since the regions of the upper surface of the base semiconductor layer 120 in which the threading dislocations D are unstable in terms of energy due to a strain field, the precursors tend to be adsorbed to the regions in which the threading dislocations D are formed in order to alleviate the unstable energy state.
Thus, nucleation occurs in the regions of the base semiconductor layer 120 in which threading dislocations are formed, automatically forming the islands in the regions. In particular, when the sacrificial layer 130a is formed of a material such as indium nitride (InN), the sacrificial layer 130a has a lattice constant significantly different from that of the base semiconductor layer 120 formed of a material such as GaN, and thus, the sacrificial layer 130a tends to be formed as islands on the base semiconductor layer 120.
In order to form such a sacrificial layer 130a, appropriate process conditions and deposition thickness may be selected. For example, the sacrificial layer 130a may be formed through a heat treatment at a temperature ranging from approximately 500° C. to 700° C. under a reaction gas atmosphere including N2 and NH3 and may have a thickness ranging from 0.01 μm to 0.5 μm and a width ranging from 0.5 pm to 0.6 μm. Also, the sacrificial layer 130a has a width greater than a thickness thereof, allowing cavities formed in a follow-up process to have a more stable structure.
Thereafter, as illustrated in
As described above, the capping layer 140 may be formed of a material having a composition of AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦x+y≦1). For example, the capping layer 140 may be formed of a nitride semiconductor such as AlN, AlInN, or AlGaN. The capping layer 140 may be formed in the same manner as that of the sacrificial layer 130a, namely, through a heat treatment at a temperature ranging from approximately 500° C. to 700° C. under a reaction gas atmosphere including N2 and NH3, in order to minimize deformation of the sacrificial layer 130a therebelow.
The capping layer 140 may have a substantially uniform thickness and be formed on the sacrificial layer 130a and the base semiconductor layer 120 such that the capping layer 140 has regions protruding from upper portions of the sacrificial layer 130a. Also, the capping layer 140 may be formed to be relatively thin in a region in contact with the sacrificial layer 130a and relatively thick in a region in contact with the base semiconductor layer 120.
Thereafter, as illustrated in
In the case in which the sacrificial layer 130a is formed of a nitride semiconductor including indium (In), the atmosphere gas of the process of forming the sacrificial layer 130a described above may be changed into the reaction gas atmosphere including N2 and NH3 or the temperature for a heat treatment may be increased to be higher by about 50° C. to 500° C. than the growth temperature of the sacrificial layer, and in this state, when the sacrificial layer 130 is heated for approximately five minutes, the sacrificial layer 130a becomes volatile so as to be spontaneously decomposed to be removed. Also, the sacrificial layer 130a may be removed under a hydrogen (H2) gas atmosphere. The change of the atmosphere gas and the change of the temperature for heat treatment may be individually applied or simultaneously applied. In this manner, since the regions from which the sacrificial layer 130a has been removed are filled with air, the cavities 130 may be formed as air gaps. After the sacrificial layer 130a is removed, re-heating the capping layer 140 may be performed to recover the capping layer 140 that may have been damaged during the volatilization process of the sacrificial layer 130a. For example, the capping layer 140 may be heated at a temperature ranging from approximately 1,020° C. to 1,080° C. to recrystallize the capping layer 140 to recover the capping layer 140 which has been damaged.
Cavities formed as a plurality of layers may be formed by repeating the operations as described above.
Thereafter, as illustrated in
A transparent electrode layer 160 (
Referring to
Referring to
The mounting board 2010 may include a board body 2011, an upper electrode 2013, and a lower electrode 2014. Also, the mounting board 2010 may include a through electrode 2012 connecting the upper electrode 2013 and the lower electrode 2014. The mounting board 2010 may be provided as a board such as PCB, MCPCB, MPCB, FPCB, or the like, and the structure of the mounting board 2010 may be altered to have various forms.
The encapsulant 2003 may be formed to have a lens structure with an upper surface having a convex dome shape. However, according to an exemplary embodiment, the encapsulant 2003 may have a lens structure having a convex or concave surface to adjust beam angle of light emitted through an upper surface of the encapsulant 2003. Also, a wavelength conversion unit 2002 may be formed on an upper surface and lateral surfaces of the semiconductor light emitting device 2001.
In the present exemplary embodiment, the semiconductor light emitting device package 2000 may include the semiconductor light emitting device 100 illustrated in
Referring to
Unlike the backlight unit 3000 in
Referring to the exploded perspective view of
The external housing 5006 may serve as a heat dissipation unit and may include a heat dissipation plate 5004 disposed to be in direct contact with the light emitting module 5003 to enhance heat dissipation and heat dissipation fins 5005 surrounding the lateral surfaces of the lighting device 5000. Also, the cover unit 5007 may be installed on the light emitting module 5003 and have a convex lens shape. The driving unit 5008 may be installed in the internal housing 5009 and be connected to the external connection unit 5010 having a socket structure to receive power from an external power source. The driving unit 5008 may serve to convert power into an appropriate current source for driving the semiconductor light emitting device 5001 of the light emitting module 5003, and provide the same. For example, the driving unit 5008 may be configured as an AC-DC converter, a rectifying circuit component, or the like.
Also, although not shown, the lighting device 5000 may further include a communications module.
Referring to
As set forth above, according to exemplary embodiments of the present inventive concepts, a semiconductor light emitting device having luminous efficiency enhanced by reducing a lattice defect formed in a light emitting structure may be provided.
Advantages and effects of the present disclosure are not limited to the foregoing content and may be easily understood from the described specific exemplary embodiments of the present inventive concepts.
While exemplary embodiments have been shown and described above, it will be apparent to those skilled in the art that modifications and variations could be made without departing from the spirit and scope of the present disclosure as defined by the appended claims.
Number | Date | Country | Kind |
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10-2014-0006666 | Jan 2014 | KR | national |