Claims
- 1. A method of manufacturing a semiconductor light receiving device, comprising the steps of:
- stacking a plurality of semiconductor layers of a first conductivity type to form a multilayered semiconductor substrate;
- diffusing one of Sn and Zn in the multilayered semiconductor substrate to form a region of the second conductivity type in the multilayered semiconductor substrate;
- wet etching a surface of the region of the second conductivity type in the multilayered semiconductor substrate using hydrochloric acid as a liquid phase etchant having a face orientation dependency, wherein said surface consists of an InP layer; and
- stirring the liquid phase etchant during the wet etching step, wherein the wet etching step produces an uneven surface having V-grooves.
- 2. A method according to claim 1, wherein the step of stacking to form said multilayered semiconductor substrate comprises the step of sequentially stacking an InP buffer layer, an InGaAs light-absorbing layer, an InGaAsP anti-melt-back layer, and an InP window layer on an InP crystal substrate.
- 3. A method according to claim 1, wherein a shape of said uneven surface is determined depending on a size of a wafer, a flow rate of etching solution, a concentration of an etchant.
- 4. A method according to claim 1, wherein said uneven surface is made of a plurality of continuous inclined crystal faces.
- 5. A method according to claim 4, wherein said inclined crystal faces are formed as V-shaped grooves which are arranged in the same direction.
- 6. A method according to claim 1, wherein the stirring step occurs in a petri dish having a rotor, and wherein the rotor is driven at a rotational speed of about 1,000 rpm for about 10 minutes.
Priority Claims (1)
Number |
Date |
Country |
Kind |
4-219600 |
Jul 1992 |
JPX |
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Parent Case Info
This application is a continuation of application Ser. No. 08/188,123, now abandoned filed Jan. 28, 1994, which is a continuation of application Ser. No. 08/088,528, filed Jul. 9, 1993, now abandoned.
US Referenced Citations (22)
Continuations (2)
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Number |
Date |
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Parent |
188123 |
Jan 1994 |
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Parent |
88528 |
Jul 1993 |
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