A first embodiment of the present invention is a semiconductor resistor 3 as illustrated in
According to the above description, parameters of the semiconductor resistor 3 are as follows, a range of the ion concentration of the deep N-well 32 is from 1E12 to 5E13 per square centimeter, a range of a depth of the deep N-well 32 is from 2 to 10 um, a range of the ion concentration of each of the contact regions 33,34 is from 1E15 to 5E16 per square centimeter, a range of an ion concentration of the doped region 35 is from 1E12 to 3E13 per square centimeter, a range of a depth of the doped region 35 is from 1 to 5 um, and a range of the distance W is from 0 to 20 um.
The distance W between the deep N-well 32 and the doped region 35 adjusts a breakdown voltage of the semiconductor resistor 3. When the distance W increases, the breakdown voltage also increases. In conditions of determined ion concentrations and depths of each region, the breakdown voltage stops increasing till the distance W exceeds a predetermined value.
Although the above embodiment takes the p-type of ions as the P-substrate 31 and the doped region 35, and takes the n-type ions as the deep N-well 32 and the contact regions 23, 24. Those skilled in the art can easily understand that the n-type of ions and the p-type of ions are configured to be complementary. The p-type of ions can be replaced by the n-type of ions, and the n-type of ions can be replaced correspondingly by the p-type of ions, so that the replacement forms a complementary structure of the first embodiment and still works.
A second embodiment of the present invention is a semiconductor process for forming a semiconductor resistor as illustrated in
Wherein the first type of ions and the second type of ions are complementary, an ion concentration of one of the contact regions is higher than that of the deep well, and the doped region and the deep well are separated a distance. Alternatively, the doped region may be formed before the deep well being formed. That is, step 501 can be executed posterior to step 502. Moreover, the sequence of the aforementioned steps is for the purpose of an example. The sequence is not intended to be a limitation of the present invention.
Accordingly, the present invention is capable to provide a semiconductor resistor with a high breakdown voltage. The corresponding semiconductor processes are also provided. A doped region being doped the p-type of icons of the semiconductor resistor is separated from a deep N-well of the same by a distance to increase the breakdown voltage. And the distance between the doped region and the deep well can adjust the breakdown voltage. The present invention can achieve the goal without extra masks and processes.
The above disclosure is related to the detailed technical contents and inventive features thereof. People skilled in this field may proceed with a variety of modifications and replacements based on the disclosures and suggestions of the invention as described without departing from the characteristics thereof. Nevertheless, although such modifications and replacements are not fully disclosed in the above descriptions, they have substantially been covered in the following claims as appended.