Semiconductor wafer and susceptor heating

Information

  • Patent Grant
  • D1052547
  • Patent Number
    D1,052,547
  • Date Filed
    Tuesday, March 28, 2023
    a year ago
  • Date Issued
    Tuesday, November 26, 2024
    24 days ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 199
    • D25 199
    • D15 138
    • D15 144
    • D15 1441
    • 438 006000
    • 438 067000
    • 438 107000
    • 438 149000
    • 438 106000
    • 257 625000
    • 257 618000
    • 118 715000
    • 118 720000
    • 118 724000
    • 118 725000
    • 118 728000
    • 118 729000
    • 204 298010
    • CPC
    • C23C16/46
    • C23C16/48
    • C23C16/481
    • C23C16/463
    • C23C16/466
    • C23C16/458
    • C23C16/4581
    • C23C16/4583
    • C23C16/4587
    • C23C16/50
    • C23C16/00
    • C23C16/4584
    • C23C16/44
    • C23C16/0236
    • C23C16/24
    • C23C14/50
    • C23C14/505
    • C23C14/54
    • C23C14/541
    • H01L21/67005
    • H01L21/67011
    • H01L21/67063
    • H01L21/67103
    • H01L21/67109
    • H01L21/67115
    • H01L21/00
    • H01L21/67017
    • H01L21/67023
    • H01L21/67098
    • H01L21/6875
    • H01L21/68735
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a perspective view of a semiconductor wafer and susceptor heating showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a left side elevational view thereof;



FIG. 5 is a right side elevational view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof; and,



FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.


The broken lines are shown in the views for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a semiconductor wafer and susceptor heating as shown and described.
Priority Claims (1)
Number Date Country Kind
2022-022683 D Oct 2022 JP national
US Referenced Citations (30)
Number Name Date Kind
3796182 Rosler Mar 1974 A
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4496828 Kusmierz Jan 1985 A
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5844205 White Dec 1998 A
6217662 Kong Apr 2001 B1
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11222772 Kim Jan 2022 B2
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Foreign Referenced Citations (1)
Number Date Country
10-208855 Aug 1998 JP
Non-Patent Literature Citations (1)
Entry
Semiconductor and Wafer Processing Solutions,https://www.castaluminumsolutions.com/semiconductor-wafer-heaters/,2024. (Year: 2024).