Patent Application
20210185447
The present disclosure relates to a sensitive diaphragm, and more particularly, to a sensitive diaphragm for a sensor, for example, a sensitive diaphragm applied to a microphone, a speaker, a pressure sensor, or the like.
With the development of technology, sensors have become indispensable components in electronic products, such as microphones used for picking up sound, speakers used for making sound, or pressure sensors used for measuring pressure.
These sensors basically utilize a deformation of a sensitive diaphragm to acquire detected information. For example, a microphone structure comprises a sensitive diaphragm and a backplate plate which form a plate capacitor structure. When the sensitive diaphragm senses a sound coming from an ambient environment, a deformation occurs to change a distance between the sensitive diaphragm and the backplate plate, thereby causing the plate capacitor structure to output a varying electrical signal with which the sound information is represented.
Generally, in order to increase the deformation amplitude of the sensitive diaphragm, an annular rim structure, that is a corrugated structure, is provided at an edge of the sensitive diaphragm. The rim structure can increase the deformation amplitude of a central region of the sensitive diaphragm and the detection effect is improved. However, when the sensitive diaphragm is subjected to a relatively strong impact, the rim structure may cause an excessive deformation of the central region of the sensitive diaphragm, which may lead to a failure in the sensitive diaphragm.
An object of the present disclosure is to provide a novel technical solution of a sensitive diaphragm.
According to a first aspect of the present disclosure, there is provided a sensitive diaphragm comprising a diaphragm body, an edge region of the diaphragm body being provided with a rim structure, wherein the rim structure is in a non-closed annular shape, a non-closed region is located at a part not closed by the rim structure 4, and the non-closed region are integral and continuous with parts of the diaphragm body adjacent to the rim structure.
Optionally, the non-closed region comprises one non-closed region, the annular rim structure being interrupted by the one non-closed region.
Optionally, the non-closed region comprises at least two non closed regions, the annular rim structure being separated into at least two sections by the at least two non-closed regions.
Optionally, at least two of the non-closed regions have unequal lengths.
Optionally, at least two of the sections have unequal lengths.
Optionally, all the non-closed regions to the annular rim structure are equal in length and are uniformly distributed in a circumferential direction of the rim structure.
Optionally, the rim structure comprises a plurality of rim structures, the plurality of rim structures being sequentially distributed in a radial direction of the diaphragm body.
Optionally, the plurality of rim structures is identical in shape and arranged concentrically.
According to another aspect of the present disclosure, there is further provided a sensor comprising the above-mentioned sensitive diaphragm.
Optionally, the sensor is a pressure sensor, a microphone or a speaker,
According to the sensitive diaphragm of the present disclosure, the annular rim structure is separated by the non-closed region. When the sensitive diaphragm is subjected to a relatively strong impact, the non-closed region resists a deformation of the diaphragm body as compared to the rim structure due to the fact that the non-closed region is integral and continuous with the diaphragm body, thereby reducing the amplitude of the sensitive diaphragm and a risk of failure in the sensitive diaphragm.
Further features of the present disclosure and advantages thereof will become apparent from the following detailed description of exemplary embodiments according to the present disclosure with reference to the attached drawings.
The accompanying drawings, which are incorporated in and constitute a part of the description, illustrate embodiments of the present disclosure and, together with the description thereof, serve to explain the principles of the present disclosure.
Various exemplary embodiments of the present disclosure will now he explained in detail with reference to the drawings. It should be noted that the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present disclosure unless it is specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the disclosure, its application, or uses.
Techniques, methods and apparatus as known by one of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.
In all of the examples illustrated and discussed herein, any specific values should be interpreted to be illustrative only and non-limiting. Thus, other examples of the exemplary embodiments could have different values.
Notice that similar reference numerals and letters refer to similar items in the following figures, and thus once an item is defined in one figure, it is possible that it need not be further discussed for following figures.
The present disclosure provides a sensitive diaphragm which can be applied to devices comprising, but not limited to, a microphone, a speaker, a sensor such as a pressure sensor, and the like. The sensitive diaphragm, as an important component for these sensors, can sense interested information so as to output a corresponding electrical signal. Sensing principles and sensor structures belong to the common general knowledge of those skilled in the art and will not be specifically explained herein.
For the sake of clarity, the sensitive diaphragm according to the present disclosure will be explained in detail by taking an MEMS microphone as an example.
The MEMS microphone disclosed in the present disclosure comprises a substrate 1, a backplate 6 and a vibration diaphragm 3 which are located on the substrate 1. The backplate 6 and the vibration diaphragm 3 constitute a plate capacitor structure with a gap formed therebetween. The backplate 6 may be located above or below the vibration diaphragm 3.
The sensitive diaphragm 3 comprises a diaphragm body, and a rim structure 4 is provided at an edge region of the diaphragm body. A part of the diaphragm body located outside the rim structure 4 is used for connecting the substrate 1. A part of the diaphragm body located inside the rim structure 4 mainly functions to cooperate with the backplate 6 to output the varying electrical signal. The rim structure 4 can not only reduce stress in the diaphragm, but also increase the amplitude of the sensitive diaphragm 3, so as to improve the detection sensitivity of the plate capacitor.
A cross section of the rim structure 4 may be serrated.
According to the sensitive diaphragm of the present disclosure, the rim structure 4 is annular and non-closed. The rim structure 4 has a shape matched with that of the sensitive diaphragm 3. For example, when the sensitive diaphragm is circular, the rim structure 4 is annular. When the sensitive diaphragm is square or elliptical, the rim structure 4 has a shape corresponding thereto, which will not be specifically explained herein.
Referring to
The annular rim structure 4 is interrupted by the non-closed region 41. When the sensitive diaphragm is subjected to a relatively large impact, since the non-closed region 41 is integral and continuous with the diaphragm body, the non-closed region 41 will resist a deformation of the diaphragm body as compared to the rim structure 4, thereby reducing the amplitude of the sensitive diaphragm 3 and a risk of failure in the sensitive diaphragm 3.
In a specific embodiment of the present disclosure, the non-closed region 41 comprises one non-closed region, with reference to
In another specific embodiment of the present disclosure, the non-closed region 41 comprises at least two non-closed regions, and the annular rim structure 4 is separated into at least two sections 40 by the at least two non-closed regions 41, with reference to
Referring to
For example, in a specific embodiment of the present disclosure, the sensitive diaphragm 3 may have a problem of polarization in some application environments, By selecting the lengths of part of the non-closed regions 44 to be unequal, and the lengths of part of the sections to be unequal, the problem of polarization can be inhibited and the smooth operation of the sensitive diaphragm is ensured.
Optionally, at least two of the sections of the rim structure 4 have different cross sections, and the cross sections of the sections are selected from one of an upper convex serrated shape, a lower convex serrated shape or a V shape, For example, referring to
A plurality of, at least four, non-closed regions 41 and sections 40 are preferably provided. Referring to
In
A plurality of rim structures 4 according to the present disclosure may be provided, and the plurality of rim structures 4 is sequentially distributed in the radial direction of the diaphragm body. By the plurality of rim structures, the in-diaphragm stress is adjusted, and the amplitude of the diaphragm body is increased. Preferably, the cross sections of two adjacent rim structures may be different. For example, when two rim structures are provided, the cross section of one of the rim structures may be selected to be V-shaped, and the cross section of the other rim structure may be selected to be serrated. When the vibration diaphragm is subjected to an external force, the plurality of rim structures with different cross sections can be mutually restricted to ensure the stability performance of the sensitive diaphragm.
The number of the rim structures 4 is preferably set to be plural, for example, two, four, six or more. Referring to
The cross sections of the four rim structures may be the same or different. In a specific embodiment of the present disclosure, the first rim structure 4a and the second rim structure 4b adjacent to each other have different cross sections. The second rim structure 4b and the third rim structure 4c adjacent to each other have different cross sections. The third rim structure 4c and the fourth rim structure 4d adjacent to each other have different cross sections
Alternatively, the two rim structures separated by one of the rim structures have the same cross section. That is, the first rim structure 4a and the third rim structure 4c which are separated by the second rim structure 4b have the same cross section. The second rim structure 4b and the fourth rim structure 4d which are separated by the third rim structure 4c have the same cross section. The rim structures of the same cross section are separated by the rim structures of different cross sections, such that the rim structures are mutually restricted.
In an optional embodiment of the present disclosure, the non-closed regions of different rim structures correspond with each other. Referring to
In an optional embodiment of the present disclosure, the non-closed regions of different rim structures are staggered from one another. Referring to
Preferably, the non-closed regions of the rim structures have the same cross section corresponding with each other. For example, when the first rim structure 4a and the third rim structure 4c have the same cross section, and the second rim structure 4b and the fourth rim structure 4d have the same cross sections, the non-closed regions of the first rim structure 4a and the third rim structure 4c correspond with each other, and the non-closed regions of the second rim structure 4b and the fourth rim structure 4d correspond with each other. The non-closed regions of the first rim structure 4a and the third rim structure 4c and the non-closed regions of the second rim structure 4b and the fourth rim structure 4d are staggered from each other by a certain angle.
According to the sensitive diaphragm of the present disclosure, the number, length and position of the non-closed regions and the sections, the cross section area of the sections, the number of the rim structures and the like can be adjusted separately or comprehensively as needed, so as to meet the requirements of respective tools on the sensitive diaphragm, which are not listed here one by one.
Although some specific embodiments of the present disclosure have been demonstrated in detail with examples, it should be understood by a person skilled in the art that the above examples are only intended to be illustrative but not to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments could be modified without departing from the scope and spirit of the present disclosure. The scope of the present disclosure is defined by the appended claims
| Number | Date | Country | Kind |
|---|---|---|---|
| 201810689186.4 | Jun 2018 | CN | national |
This application is a National Stage of International Application No. PCT/CN2018/104435, filed on Sep. 6, 2018, which claims priority to Chinese Patent Application No. 201810689186.4, filed on Jun. 28, 2018, both of which are hereby incorporated by reference in their entireties.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2018/104435 | 9/6/2018 | WO | 00 |
