Patent Application
20220258246
The present invention relates to a shaping device, and more particularly, to a shaping device configured to irradiate a layered shaping material with an energy beam and form a shaped object.
A technology of directly generating a 3-dimensional (3D) shape from computer-aided design (CAD) data is referred to as rapid prototyping (or may be referred to as 3D printing, additive manufacturing, or direct digital production), and mainly contributes to manufacturing of a trial product for the purpose of shape confirmation at an extremely short lead time. Shaping devices configured to form a 3-dimensional shaped object through rapid prototyping by a 3D printer or the like can be roughly classified according to a material that is handled into devices configured to handle a resin and devices configured to handle a metal. 3-dimensional shaped objects formed of a metal fabricated through rapid prototyping are used mostly as actual parts, unlike the case of a resin. That is, the objects function as parts of an actual mechanical structure (whether it is a mass-produced product or a trial product), not as prototype parts for shape confirmation. In a conventional 3D printer using a metal, powder bed fusion (PBF) is well known.
In PBF, a metal powder is thinly laminated on a bed on which a workpiece is mounted and scanned with a high energy laser beam using a galvanometer mirror or the like, and the portion hit by the laser beam is melted and solidified. When drawing for one layer is completed, the bed drops by a thickness for one layer, the metal powder is spread over again, and the same procedure is repeated. In this way, the shaping is repeated layer by layer to obtain a desired 3-dimensional shape.
A 3D printer for a metal configured to perform PBF using a charged particle beam, for example, an electron beam (hereinafter, also referred to as an electron beam 3D printer using a metal) nstead of the laser beam is also known (for example, see Patent Literature 1). The electron beam 3D printer for a metal can fabricate high density and high strength metal parts at a high speed in comparison with the 3D printer for a metal using the laser beam.
However, in the electron beam 3D printer for a metal in the related art including the device disclosed in Patent Literature 1, in consideration of practicability, there is room for improvement related to shaping precision, a shaping speed (productivity), and the like.
A first aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; a reference mark to which the energy beam is radiated; and a movement device configured to move the reference mark with respect to the beam irradiation device.
In the specification, “on the support surface” includes not only the case in which something is in contact with the support surface, but also the case in which it is above and separated from the support surface. For example, when the layers of the plurality of shaping materials are formed on the support surface, the layers include not only a first layer but also second and subsequent layers.
A second aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; a beam monitor configured to detect the energy beam; and a movement device configured to move the beam monitor with respect to the beam irradiation device.
A third aspect of the present invention provides a shaping device configured to shape a shaped object on a first support surface and a second support surface, the shaping device comprising: a beam irradiation device configured to irradiate a shaping material on the first support surface and a shaping material on the second support surface with an energy beam; a first support member configured to support a first support surface member which includes the first support surface; a second support member configured to support a second support surface member which includes the second support surface; and a movement device configured to move a rotation portion, which includes the first and second support members, around a rotation axis.
A fourth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; and a support member configured to support a support surface member which includes the support surface; wherein the support surface is tiltable with respect to irradiation direction of the energy beam.
A fifth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; a movement device configured to move the support member with respect to the beam irradiation device; and a controller configured to control the movement device based on a movement speed of the support member.
A sixth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; a movement device configured to move the support member with respect to the beam irradiation device; and a controller configured to control the movement device based on an amount of the shaping material supplied onto the support surface.
A seventh aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; and a movement device configured to move the support member with respect to the beam irradiation device; wherein the movement device moves the support member at a constant speed when the shaping material on the support surface passes an irradiation position of the energy beam from the beam irradiation device.
A eighth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a plurality of beam irradiation units configured to irradiate the shaping material on the support surface with an energy beam from each of the plurality of beam irradiation device; a support member configured to support a support surface member which includes the support surface; and a blocking plate which is disposed between the plurality of beam irradiation units and the support member and onto which a plurality of openings, through which the energy beam from the plurality of beam irradiation units pass, are formed.
A ninth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; and a movement device configured to move the support member with respect to the beam irradiation device, wherein, in a duration in which the support member is moved by the movement device, the beam irradiation device deflects the energy beam.
A tenth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; and a support member configured to support a support surface member which includes the support surface; wherein the material supply device includes a hopper part configured to supply the shaping material from a supply port and a material supply part configured to supply the shaping material to the hopper part.
An eleventh aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; a movement device configured to move the support member with respect to the beam irradiation device; and a controller configured to control the material supply device based on a positional relationship between a material supply position by the material supply device and the support surface.
A twelfth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a plurality of material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; and a movement device configured to move the support member with respect to the beam irradiation device; wherein the plurality of material supply device are provided at different positions on a route where the support member is moved.
A thirteenth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; and a movement device configured to move the support member with respect to the beam irradiation device; wherein the material supply device is movable in a direction parallel to a plane in which the support member is moved.
A fourteenth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a plurality of heating device configured to heat the shaping material on the support surface, a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member which includes the support surface; and a movement device configured to move the support member with respect to the beam irradiation device; wherein the plurality of heating device are provided at different positions at above a route where the support member is moved.
A fifteenth aspect of the present invention provides a shaping device configured to shape a shaped object on a support surface, the shaping device comprising: a material supply device configured to supply a shaping material onto the support surface; a beam irradiation device configured to irradiate the shaping material on the support surface with an energy beam; a support member configured to support a support surface member, which includes the support surface, on one surface of the support member; a first moving device that has a movable member and that is configured to move the support member with respect to the beam irradiation device by moving the movable member; and a second moving device configured to move the support member, wherein movement of the support member by the second moving device includes a component parallel to the support surface.
Hereinafter, a first embodiment of the present invention will be described with reference to
The shaping device 100 is a 3D printer for a metal of a powder bed fusion (PBF) type. In the PBF, a metal powder serving as a shaping material is spread in layers on a table (also referred to as a shaping table) or a plate mounted on the shaping table to form a powder bed, only a necessary portion of the powder bed is selectively irradiated with a high energy beam, and the portion hit by the beam is melted and solidified. When irradiation (drawing) of beams for one layer is finished, the shaping table drops by a thickness for one layer, the metal powder is spread over again, and the same procedure is repeated. In this way, the shaping is repeated layer by layer, and a desired 3-dimensional shape is obtained. In the shaping device 100 according to the embodiment, as will be described below, an electron beam that is a type of a charged particle beam is used as a high energy beam. Further, a light beam, for example, a laser beam, may be used as a high energy beam selectively radiated to the powder bed.
The shaping device 100 includes a housing 100A installed on a floor surface F in a factory, and a shaping device main body section 10 accommodated in the housing 100A. In
As shown in
The table device 12 includes a table base 24 mounted on a rotating table 22 that constitutes a part of the moving system 14, and a driving mechanism 31 (not shown in
The table base 24 has a base section 24a formed in a predetermined shape, for example, a rectangular plate shape having a concave portion formed in an upper surface provided on the lowermost end, a back plate section 24b standing upward (perpendicular to an XY plane) from one end portion of the base section 24a (an end portion on a back side (a +Y side) in
The above-mentioned guide groove 25 is formed in a central portion in the X-axis direction of a −Y side surface of the back plate section 24b. Further, the guide groove may be referred to as a guide portion. The guide portion is not limited to a groove, and may be a convex portion or a rod-shaped member.
As shown in
While the shaping plate MP constituted by a plate-shaped member is mounted on the table 26, the shaping plate MP is detachably attached to the table 26. That is, the shaping plate MP is not a component of the shaping device 100. Hereinafter, both of the table 26 and the shaping plate MP mounted on the table 26 are collectively referred to as a table section 32 for convenience of explanation.
The shaping plate MP is constituted of a square plate-shaped member, four corners of which are chamfered. The shaping plate MP is detachably fixed onto the table 26 via, for example, an electrostatic chuck (or a mechanical chuck), which is not shown. In the embodiment, as described below, a series of processes are performed on the shaping plate MP to construct a shaped object. That is, an upper surface of the shaping plate MP is a support surface SS. The shaping plate MP is supported by the table 26 in a state in which the support surface SS is parallel to the XY plane (the horizontal plane).
The driving mechanism 31 may be configured to include, for example, an L-shaped support member configured to support the table 26, and a linear motor or other uniaxial actuators configured to drive the support member along the guide groove 25 (the guide portion) in the upward/downward direction.
The moving system 14 moves the table device 12 along a predetermined circulation route (in the embodiment, a circular route about a first axis (an axis AR1) parallel to the Z axis shown in
As shown in
A predetermined clearance (void, gap) is set between the upper plate of the stand 33 and each of the driving gear 21 and the driven gear 29. The driving gear 21 and the driven gear 29 have a disk shape with the same diameter, and have gear portions having the same shape and the same size that are meshed with outer circumferential portions thereof. When the driving gear 21 is driven by the motor 28 to rotate clockwise (in a first rotation direction) about the axis AR1 via the driving shaft 28a integrally with the rotating table 22, for example, when seen in a plan view (in the +Z direction), the table device 12 including the table 26 moves in the first rotation direction. According to another expression, the central axis (second axis) AR2 of the shaft member 27 moves around the first axis. Here, the driven gear 29 (the table device 12) is driven to rotate counterclockwise (in a second rotation direction) about the axis (central axis) AR2 of the shaft member 27 in conjunction with the rotation of the driving gear 21 when seen in a plan view.
In this case, a speed ratio (a rotation speed ratio) between the driving gear 21 and the driven gear 29 is set to 1:1 because the gear portions of both gears have the same shape and the same size. Accordingly, a rotation angular speed of the table device 12 in the first rotation direction is equal to a rotation angular speed of the table device 12 in the second rotation direction. For this reason, in the embodiment, while the table device 12 moves on a circumference about the axis AR1 according to rotation of the rotating table 22, the table device 12 rotates in an direction opposite to the rotating table 22 about the axis AR2 of the shaft member in conjunction with rotation of the rotating table 22, and as a result, the table device 12 is normally directed in the same direction. For this reason, in the embodiment, as described above, the table device 12 is oriented in a direction in which the back plate section 24b is parallel to the XZ plane. Accordingly, a posture of the support surface SS is constant.
Further, while the driving gear 21 and the driven gear 29 are exposed at the upper portion of the stand 33 in the example of the embodiment, the gear mechanism including the driving gear 21 and the driven gear 29 may be disposed below the upper plate of the stand 33, and the rotating table 22 may be exposed at the upper portion of the stand 33 together with a part of the driving shaft 28a and a part of the shaft member 27. Alternatively, the rotating table 22 may be disposed below the upper plate of the stand 33 together with the gear mechanism. In this case, only the upper end portion of the shaft member 27 is exposed at the upper portion of the stand 33.
In the embodiment, a position measurement system 42 (see
As shown in
The electron beam optical system 30b is constituted by, as an example, an electrostatic lens, an electromagnetic lens, a correction coil, a deflection lens, and the like disposed below the source 30a in the above-mentioned lens barrel. The electrostatic lens, the electromagnetic lens, the correction coil and the deflection lens are disposed on a beam route of the electron beam EB from the source 30a. The electrostatic lens and the electromagnetic lens are disposed in the vicinity of the source 30a in the lens barrel and the vicinity of the lower end portion (an outlet port (emitting port) for an electron beam). An extraction electrode configured to accelerate electrons emitted from the photoelectric conversion element is disposed above the electrostatic lens in the lens barrel. Further, the electromagnetic lens and the deflection lens may be disposed outside the lens barrel.
Here, the electrostatic lens functions as a condenser lens configured to focus electron beams, and the electromagnetic lens functions as a reduction production lens, which also functions as an objective lens. A correction coil configured to axially align the electrostatic lens and the electromagnetic lens is disposed between the electrostatic lens and the electromagnetic lens.
The deflection lens is disposed in the vicinity of the emitting port that is in the lens barrel below the electromagnetic lens, and irradiation position control of the electron beam EB, i.e., deflection control of the electron beam EB, is performed at a high speed.
A reduction magnification of the electron beam optical system 30b is set to, for example, 1/30 by design. The reduction magnification may be another magnification such as 1/18, 1/12, or the like.
As shown in
Further, a configuration supporting the three beam irradiation units 301 to 303 is not limited to the above-mentioned configuration, and for example, the support plate 38a may be suspended and supported from the ceiling portion of the housing 100A via a plurality of, for example, three, suspension support mechanisms constituted by wires including vibration proof member on one ends (upper ends). In this case, in the vibrations such as floor vibrations transmitted to the housing 100A from the outside, since most vibration components in the Z axis direction parallel to an optical axis AXi of the electron beam optical system 30b of the beam irradiation unit 30i are absorbed by the vibration proof member, high anti-vibration performance in the Z axis direction is obtained. In addition, a natural frequency of the suspension support mechanism is set to be lower in a direction perpendicular to the Z axis than in the Z axis direction. Since the three suspension support mechanisms may vibrate like pendulums in the direction perpendicular to the Z axis, lengths of the three suspension support mechanisms (lengths of wires) are set to be sufficiently long such that anti-vibration performance in the direction perpendicular to the Z axis (the ability to prevent vibrations such as floor vibrations or the like transmitted to the housing 100A from the outside from being transmitted to the support plate 38a (the beam irradiation units 30)) is sufficiently increased. In this structure, the weight of the mechanical section can be reduced while high anti-vibration performance is obtained.
Further, a blocking plate (not shown) configured to protect the electron beam optical system 30b from smoke generated from a powdery shaping material (here, a metal powder) BM (i.e., a gas generated by radiating electron beams) via a predetermined clearance (void, gap), for example, several μm to tens of mm, may be disposed below the beam irradiation units 301 to 303. In this case, three openings are formed in the blocking plate to individually face outlet ports (emitting ports) of lens barrels of the three beam irradiation units 301 to 303. The electron beam optical system 30b can be kept clean by exchanging the blocking plate periodically. Further, the blocking plate may have a function of cooling an object disposed in the vicinity thereof (or minimizing a temperature change).
For example, as shown in
In the shaping device 100 according to the embodiment, since the beam irradiation unit 16 has the three beam irradiation units 301 to 303, the optical system of the shaping device 100 is a multi-column electron beam optical system.
Here, the reason for employing the multi-column electron beam optical system will be described with reference to
Here, in the shaping device 100 according to the embodiment, as shown in
Accordingly, it is possible to improve the following inconveniences a. and b. caused by a PBF type shaping device that employs an electron beam optical system of a single column in the related art.
a. In the PBF type shaping device in the related art, since a single column electron beam optical system is conventionally employed, for example, there is a need to set the amplitude of the electron beam EB to D or more when the region with the predetermined width of the length D (D is, for example, 300 mm) in the X-axis direction is an irradiation target region of the electron beam EB, and thus there is a need to set a distance H shown in
b. In addition, an error occurs at irradiation coordinates (an irradiation position) of the electron beam affected by the magnetic field disturbance having a magnitude according to the working distance while the electron beam EB reaches the shaping surface FP from the outlet port of the lens barrel. In addition, a control error at the beam irradiation position by the deflection lens is enlarged according to the working distance H.
Further, while the electron beam EB is deflected with predetermined amplitude in the X-axis direction in the above description, the deflection lens 30d of the electron beam optical system 30b according to the embodiment can deflect the electron beam with the same predetermined amplitude in the Y-axis direction as well. Accordingly, shaping work can be performed while the electron beam is deflected in the X-axis direction and the Y-axis direction in construction work of the shaped object (hereinafter referred to as shaping work).
Further, the number of the beam irradiation units 30 is not limited to three, but can be determined on the basis of the size of the shaped object to be constructed, the maximum deflection angle of the beam in the X-axis direction mainly by the beam irradiation unit, and the like. For example, the number of the beam irradiation units 30 may be 1, 2, or 4 or more.
In the embodiment, for example, as shown in
In addition, as shown in
Further, a reflection electron detector 54 (see
Each of the reflection electron detectors 52 detects a reflection component generated from the reference marks FMi irradiated with the electron beam EB from the beam irradiation units 30i (i=1 to 3) (a component of an electron beam (energy beam) via a reference mark), here, reflection electrons, when information for calibration of the beam irradiation position is acquired, which will be described below, and transmits the detection signal corresponding to the detected reflection electrons to the controller 20 via a signal processor 56 (see
Further, in order to prevent contamination of the reflection electron detectors 52 due to outgas, when the reflection electron detector 54 is conventionally stored in the housing 100A at a predetermined storage position and the reference mark is detected, for example, when information for calibration at a radiating position of the beam is acquired, which will be described below, the unit may be taken out from the storage position by a conveyance system (not shown) below the controller 20 and moved to a position near the beam irradiation unit 16.
In the shaping device main body section 10 according to the embodiment, as shown in
The shaping material supply unit 41 supplies the powdery shaping material (here, a metal powder) BM (see
The powder feeder 46 is constituted by a frame-shaped member with a predetermined width and a large length in the X-axis direction, and the length is equal to or somewhat longer than the length of the frame-shaped section 24c of the table base 24 in the X-axis direction.
The preheating unit 50 has substantially the same length as and about a half width of the powder feeder 46 when seen in a plan view, and is disposed adjacent to the −Y side of the powder feeder 46 (with a predetermined void). As the preheating unit 50, in the embodiment, for example, an ultraviolet lamp (UV lamp) is used. A mercury lamp configured to emit ultraviolet light of 254 to 313 nm, a center wavelength of which is 365 nm, a metal halide lamp configured to emit ultraviolet light with a wide wavelength of 200 nm to 450 nm, and the like are known as UV lamps, and either of the mercury lamp and the metal halide lamp may be used as the preheating unit 50.
As shown in
Here, a positional relation between components of the shaping device main body section 10 when seen in a plan view will be described. As shown in
Since the shaping material supply unit 41 is configured to temporarily store the powdery shaping material BM (see
The powder hopper 41 may include a first powder hopper having a first supply port and configured to supply a shaping material from the first supply port, and a second powder hopper having a second supply port at a position different from that of the first supply port and configured to supply a shaping material from the second supply port. In this case, the same type of metal powder or different types of metal powders may be stored inside each of the first powder hopper and the second powder hopper.
A lid section of the powder hopper 41 is configured to be open and closed by an actuator 43 (see
Further, a load-lock chamber (not shown) is provided in the housing 100A on the −Y side, a wall of the housing 100A on the −Y side functions as a wall of a boundary with the load-lock chamber, and a door of the load-lock chamber on a vacuum side is provided on the wall. As the door on the vacuum side, a gate valve configured to open and close an opening formed in the wall of the boundary is used. Hereinafter, the door (gate valve) on the vacuum side is referred to as a gate valve 62A (see
A conveyance robot constituted by, for example, an articulated robot configured to convey the shaping plate MP on which a shaped object (a lump of the shaping material BM), shaping work of which is finished, is placed (a horizontal-articulated robot (SCARA robot) as an example) is provided in the load-lock chamber, and the conveyance robot is configured to cause an arm (robot arm) to enter the housing 100A in a state in which the gate valve 62A is open, receive the shaping plate MP on the table 26 together with the shaped object (a lump of the shaping material BM), and convey them into the load-lock chamber.
An atmosphere-side door is also provided in the load-lock chamber separately from the door on the vacuum side. As the atmosphere-side door, a gate valve configured to open and close an opening formed in the atmosphere-side wall is used. Hereinafter, the atmosphere-side door is referred to as a gate valve 62B (see
The gate valve 62A and the gate valve 62B are controlled by the controller 20 (see
In the embodiment, vacuum suction of the internal space of the vacuum chamber (housing) 100A and vacuum suction in the load-lock chamber are performed by separate vacuum pumps.
Here, while the description is mixed, a moving operation of the table device 12 along the circulation route in the shaping device 100 according to the embodiment will be described with reference to
Further, in the plan views of
In the reference state, it assumed that the table device 12 is at the position shown in
In the state shown in
Here, while counterclockwise rotation of 45 degrees shown by the arrow Rθz in
From the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees further shown by the arrow CW from the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees further shown by the arrow CW from the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees further shown by the arrow CW from the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees shown by the arrow CW from the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees further shown by the arrow CW from the state shown in
In the state shown in
When the rotating table 22 (and the driving gear 21) is driven by the motor 28 to rotate clockwise 45 degrees further shown by the arrow CW from the state shown in
In the reference state shown in
In the above-mentioned description, while rotation positions of the rotating table 22 at an angular interval of 45 degrees are taken in order to facilitate the overall understanding with respect to the moving operation of the table device 12 along the circulation route in the shaping device 100, the driving gear 21 and the rotating table 22 continuously and repeatedly rotate clockwise within a range of 0 to 360 degrees shown by the arrow CW in actuality, and in conjunction with this, the driven gear and the table device 12 rotate counterclockwise shown by the arrow CCW. Accordingly, movement of the table device 12 is continuously performed.
As is clear from the description so far, in the embodiment, a support member configured to support the shaping plate MP serving as a support surface member is constituted by the table 26, the driving mechanism 31 and the table base 24. That is, in the embodiment, the support member includes all components of the table device 12 except the shaping plate MP.
In the embodiment, there is the first moving device including the motor 28 and the rotating table 22 that is a movable member fixed to the driving shaft 28a of the motor 28 and on which the table device 12 is mounted, and configured to move the table device 12 along the above-mentioned circular circulation route. When the rotating table 22 (the movable member) is moved by the first moving device, the table device 12 (including the above-mentioned support member) is moved with respect to the beam irradiation unit 16 as the beam irradiation device.
In addition, in the embodiment, there is the second moving device including the shaft member 27 or the like rotatably supported by the driving gear 21, the driven gear 29 and the rotating table 22 and connected to the table device 12 and configured to move the table device 12. The table device 12 is moved in conjunction with the change of the position in the horizontal plane of the table device 12 moved by the first moving device such that an orientation in a water surface of the table device 12 is maintained by the second moving device.
As is clear from the above-mentioned description, the moving system 14 includes the first moving device and the second moving device.
Here, formation of the layer of the shaping material performed by the shaping device main body section 10 according to the embodiment will be described.
When the table device 12 reaches the position shown in
After that, the moving system 14 continues to drive the table device 12 without the above-mentioned acceleration, and the table device 12 moves in the −Y direction substantially in the Y-axis direction to the position shown by
Further, in actuality, since the table device 12 moves along a circular route with a radius somewhat smaller than that of the rotating table 22, instead of moving straight directly under the powder feeder 46 in the +Y direction, the table device 12 moves along the circular route in the +Y direction, but here, for the purpose of simplification of description, it assumed that the table device 12 moves directly under the powder feeder 46 in the −Y direction substantially along the Y-axis direction.
In the embodiment, as described above, the powder applying system 18 is configured to include the powder hopper 41 (including the actuator 43 configured to open and close the lid section of the supply port) and the powder feeder 46, and the shaping material supply system is constituted by the powder applying system 18 and the material supply device 48.
In the shaping device 100 according to the embodiment, a flow of processing is as follows.
First, the motor 28 of the moving system 14 is driven by the controller 20, the rotating table 22 and the driving gear 21 are driven to rotate clockwise, and when a predetermined time elapses after starting of the driving, a rotation speed of the rotating table 22 reaches a predetermined target rotation speed (Vt). After that, the driving of the motor 28 is controlled by the controller 20 such that the rotating table 22 continues to rotate clockwise at the target rotation speed Vt. In conjunction with the constant speed rotation (normal rotation) of the rotating table 22 at the target rotation speed Vt in the clockwise direction, as described above, the table device 12 rotates counterclockwise at a constant speed (normal rotation) with a rotation speed ratio of 1:1 about the axis AR2. Accordingly, in the table device 12, the orientation in the XY plane is always maintained at a constant orientation.
The table device 12 moves along a circular circulation route with a radius vector (AR1-AR2) as a radius at a constant speed according to the constant speed rotation of the rotating table 22 at the target rotation speed Vt, and during the movement, the orientation of the table device 12 in the XY plane is normally maintained at a constant orientation. Movement of the table device 12 along the circulation route at the constant speed while maintaining the orientation in the XY plane is continued until irradiation of the electron beam with respect to the powder bed of the final layer on the table section 32 is finished after the rotating table 22 reaches the target rotation speed Vt. Hereinafter, this is the premise of the following description.
When the table device 12 moves along the circulation route and reaches the position shown in
After starting of the forming work of the powder bed of the first layer, when the table device 12 moves from the position shown in
Further, since the controller 20 can calculate the coordinate position on the XY coordinate system of the reference point (the axis AR2) of the table device 12 at each rotation position of the rotating table 22 on the basis of the measurement information of the position measurement system 42, on the basis of to the calculation result, a configuration capable of adjusting the position of the table 26 in the X-axis direction on the table base 24 may be employed.
In addition, it is somewhat delayed from forming starting of the powder bed, the powder bed (the shaping material BM) of the formed first layer starts to pass directly under the preheating unit 50, and preheating of the powder bed by the preheating unit 50 is started. In the powder bed, energy of ultraviolet light radiated from the preheating unit 50 is converted into heat to increase a temperature of the shaping material BM (metal powder), which becomes a preheated shaping material (preheated powder), and a part of the top surface is melted. The preheating is finished when the table device 12 reaches the position shown in
After that, shortly before the table device 12 reaches the position shown in
After that, shortly after the table device 12 reaches the position shown in
Selective radiation of the electron beam EB is performed by the controller according to 2-dimensional shape data obtained by slicing the shaped object on design that is previously prepared (a shaped object represented by 3-dimensional CAD data) at ΔZ interval (ΔZ corresponds to a thickness of each layer of the shaping material BM (powder bed)). Here, as the 2-dimensional shape data, for example, 3-dimensional CAD data are converted into, for example, stereo lithography (STL) data, and further, data of each layer obtained from the 3-dimensional STL data and sliced in the Z axis direction are used.
The shaping material BM (metal powder) of the region corresponding to the 2-dimensional shape data is melted by selective irradiation of the electron beam EB. Here, in the controller 20, selectively melting of the shaping material BM (powder bed) of the first layer on the table 26 (the shaping plate MP) is started by controlling the deflection lens 30d of the beam irradiation units 30i and deflecting the electron beam EB within a range of an amplitude d in the X-axis direction and the Y-axis direction, selective melting of the shaping material BM of the first layer on the table section 32 is continued by performing irradiation control of the electron beam EB while the table device 12 moves from the position of irradiation starting of the electron beam to the position immediately before the position shown in
After termination of the irradiation process of the electron beam for melting of the shaping material of the first layer, the table section 32 is lowered by the controller 20 via the driving mechanism 31 by ΔZ while formation of the powder bed of the second layer is started. Here, in the shaping material of the first layer, the melted shaping material is solidified.
After that, when the table device 12 reaches the position shown in
In the powder bed after the second layer, by the preheating of the above-mentioned shaping material, the internal stress of the solidified portion of the previous layer among the shaping material is released and distortion is less likely to occur.
After termination of the preheating, acquisition of information for calibration of beam irradiation positions of the beam irradiation units 301, 302 and 303 according to movement of the table device 12 along the circulation route and selective irradiation of the electron beams by the beam irradiation units 301, 302 and 303 according to data of each layer obtained from 2-dimensional STL data with respect to the powder bed of the second layer on the table section 32 are performed like in the case of the above-mentioned first layer, and thus, an irradiation process (processing with respect to the powder bed of the second layer) of the electron beam for melting of the shaping material of the second layer is finished. Even in the second layer, the melted shaping material BM is solidified when the predetermined time according to the material elapses.
After termination of the irradiation process of the electron beam for melting of the shaping material of the second layer, by repeating lowering of the table 26 by ΔZ, formation of the next layer (a new uppermost layer) of the shaping material BM, preheating of the shaping material BM of the uppermost layer, acquisition of the information for calibration of the beam irradiation position of the beam irradiation units 301, 302 and 303, irradiation of the electron beams to the shaping material BM of the preheated uppermost layer, lowering of the table 26 by ΔZ, formation of a new uppermost layer of the shaping material BM, preheating of the shaping material BM of the uppermost layer, acquisition of information for calibration of the beam irradiation positions, and irradiation of the electron beam to the shaping material BM of the preheated uppermost layer the same as mentioned above, a shaped object is constructed on a support surface by overlapping layers of the melted and solidified shaping material BM (metal powder) each other. Accordingly, a series of operations for shaping through PBF of the shaping device 100 are finished.
After the series of operations for shaping are finished, since the driving mechanism 31 is driven by the controller 20 and the table 26 is provide to carry out the constructed shaped object, they are moved downward to a downward moving limit position or the vicinity thereof. At the same time, the reflection electron detector 54 may be stored in the housing 100A at a predetermined storage position.
In the shaping device 100, when the above-mentioned shaped object is constructed, prior to the irradiation process of the electron beams for melting of the shaping material BM of each layer, after the termination of the preheating for that layer, the above mentioned acquisition of the information for calibration of the beam irradiation positions is executed, and the beam irradiation positions are compensated by controlling the deflection of the electron beams on the basis of the information (calibration information) obtained from the detection results of the three reflection electron detectors 52. Accordingly, accurate management of the beam irradiation positions (position coordinates) becomes possible. However, acquisition of the calibration information at the beam irradiation positions does not necessarily have to be performed for each layer, acquisition of the calibration information at the beam irradiation positions may be performed prior to irradiation of the beam with respect to the powder bed of the next layer whenever the irradiation process of the electron beam with respect to the continuous layers of the predetermined number of two or more is finished, and it is possible to manage the beam irradiation positions (position coordinates) with high accuracy by obtaining drifts of the beam irradiation positions on the basis of the calibration information and by correcting such drifts.
After the series of operations for shaping by the above-mentioned PBF are finished, the gate valve 62A of the load-lock chamber on the vacuum side is opened by the controller 20, and a lump of the shaping material BM including the shaped object constructed on the table section 32 is carried out. The carry-out is performed as an example as follows.
That is, the above-mentioned conveyance robot disposed in the load-lock chamber invades the arm into the housing 100A, and moves a fork-shaped hand portion provided at a tip to below the shaping plate MP on which a lump of the shaping material BM including the constructed shaped object is placed. Here, suction of the shaping plate MP by the table 26 is released. Next, both end portions of the shaping plate MP in the X-axis direction are supported by the hand portion from below, and the shaping plate MP is lifted together with the lump of the shaping material BM and separated from the table 26 to be conveyed into the load-lock chamber.
Further, when the gate valve 62A on the vacuum side is opened, vacuum suction of the inside of the load-lock chamber is completed to provide a vacuum environment substantially equal to that of the inside of the housing (vacuum chamber) 100A.
After that, a separate shaping plate is conveyed onto the table 26 by a conveyance robot, an arm of the robot is returned into the load-lock chamber, and then, the gate valve 62A of the load-lock chamber on the vacuum side is closed.
Further, a separating work of the lump of the shaping material BM and the shaping plate MP may be performed in the load-lock chamber, and the separated shaping plate MP may be conveyed onto the table 26 again.
After that, in the housing 110A, a shaping work for constructing the next shaped object is started. Meanwhile, in the load-lock chamber, an extra shaping material, which is not solidified, in the lump of the shaping material BM is dropped by blast or compressed air in parallel with the shaping work in the housing 110A. During a work for removing the extra shaping material, natural cooling of the shaping material is performed.
After that, the gate valve 62B of the load-lock chamber on the atmosphere-side is opened, and then, the shaped object is taken out to the outside. After that, the gate valve 62B is closed.
In the shaping device 100 according to the embodiment, the beam irradiation unit 30i is configured to include the electron source 30a and the electron beam optical system 30b configured to radiate electrons generated in the source 30a to a target (a layer of a shaping material) as electron beams, and the shaping device 100 includes the plurality of, for example, three (i=1 to 3) beam irradiation units 30i. Accordingly, in the shaping device 100, in the irradiation of electron beams to the powder bed (the layer of the shaping material BM), for example, as shown in
In
In this case, for example, in the boundary region AB, for example, as shown in
In the embodiment, drawing of the entire surface of the target is performed by parallelly performing deflection of the electron beam EB and movement of the table device 12 in the +Y direction substantially along the Y-axis direction.
In the shaping device 100 according to the embodiment, on the basis of the above-mentioned shaping sequence, irradiation (including deflection) of the electron beam by the beam irradiation units 30i is controlled based on the positional information of the table device 12 in the XY plane measured in the position measurement system 42 by the controller 20 during the shaping work.
As described above, according to the shaping device 100 of the first embodiment, the moving system 14 moves the table device 12 in the horizontal plane along the circular circulation route around the axis AR1 using the radius vector (AR1-AR2) as a radius while maintaining the orientation of the table device 12 in the horizontal plane at the constant orientation. Then, while the table device 12 makes a round along the circulation route, a series of processes for shaping such as formation of the powder bed (the layer of the shaping material BM) on the table 26 (the table section 32), preheating with respect to the formed powder bed, acquisition of the information for calibration of the irradiation position of the electron beam, selective irradiation of the electron beam, and the like, are performed. Moreover, since these processes can be performed in the middle of movement (normal movement) at the constant speed without applying the acceleration to the table device 12, shaping processing with high accuracy and high throughput is possible.
In addition, according to the shaping device 100, since the beam irradiation unit 16 includes the three beam irradiation units 30i disposed in the X-axis direction crossing the circulation route, in comparison with the case in which the beam irradiation unit 30 is one, productivity can be greatly improved. In addition, in comparison with the case in which the beam irradiation unit 30 is one, a working distance between the beam irradiation units 30 can be reduced, reduction in size of these devices becomes possible, influence of a magnetic field disturbance is reduced, and thus, a control error of irradiation coordinates (irradiation position) of the electron beam can be reduced. In particular, when a configuration in which a target can be irradiated with a plurality of beams is employed as the beam irradiation units 30i, a finer beam spot can be formed.
In this way, according to the shaping device 100 of the first embodiment, it is possible to realize both of improvement of productivity and improvement of shaping precision simultaneously.
Further, in the embodiment, as a result of that the orientation of the table device 12 in the XY plane is maintained at the constant orientation during rotation of the rotating table 22 (during movement in the first rotation direction) while provided that the upper surface (support surface) SS of the shaping plate MP supported on the table 26 is parallel to the horizontal plane, a posture of the support surface SS is made constant. However, the posture of the support surface SS may be constantly maintained through adjustment such that the support surface SS of the shaping plate MP supported on the table 26 is parallel to the XY plane during rotation of the rotating table 22 using a mechanism capable of adjustment of a position in a θx direction and a θy direction as well as a position in the Z direction of the table 26 as the driving mechanism 31.
In addition, in the case in which a driving mechanism capable of adjustment of a position with 3 degrees of freedom in the above-mentioned Z, θλ and θy directions is used, when the table device 12 (including the above-mentioned support member) is moved by the above-mentioned first moving device, the table 26 may be moved by the driving mechanism to maintain an angular relation of an axis in the X direction along the support surface SS with respect to an axis crossing the optical axis AXi of the beam irradiation units 301 to 303 of the beam irradiation unit 16 (for example, an axis along the upper surface of the frame-shaped section 24c passing through the optical axes AXi of the beam irradiation units 301 to 303).
Further, in the embodiment, as a result of employing the system having the configuration in which a driving gear and a driven gear meshed with each other are rotated in opposite directions as the moving system 14, the case in which the table device 12 is moved along the circular circulation route has been exemplified as a moving system. However, the route is not limited to the circular circulation route, and a moving system configured to move the table device 12 along a circulation route other than a circular shape such as an elliptical shape, an oblong shape, or the like, may be employed. That is, the moving system may move the table device in the horizontal plane along the predetermined circulation route while maintaining the orientation of the table device in the horizontal plane at the constant orientation. In addition, the moving system may not move the table device at the constant speed in the entire segment of the circulation route, and for example, it may be only possible to move the table device at the constant speed only in a moving segment of the table device, in which the electron beam is radiated to the powder bed, or in addition, a moving segment of the table device when the powder bed is formed on the table. The moving system may maintain the orientation of the table device in the horizontal plane at the constant orientation, for example, only in the segment in which the table device is moved at the constant speed, not the entire segment of the circulation route. In addition, the moving system may move the table device along the predetermined circulation route using a mechanism other than a gear mechanism, for example, a belt mechanism or the like.
In addition, in the embodiment, the case in which the electron beam is deflected in the X-axis direction and the Y-axis direction simultaneously the table 26 on which the shaping material is laid is moved substantially in the Y-axis direction, and the electron beam EB is radiated to the shaping material to perform shaping of the shaped object has been exemplified. However, the table 26 may be movable in a 2-axis direction in the horizontal plane, for example, in the X-axis direction and the Y-axis direction perpendicular to each other. For example, in a case in which a moving route of the table device 12 is an arc-shaped route or the like when the electron beam is selectively radiated to the powder bed on the table 26, the table 26 may be movable on the table base 24 in the X-axis direction according to the position of the table device 12 in the Y-axis direction.
Next, a second embodiment will be described with reference to
While the shaping device main body section 10A is distinguished from the shaping device main body section 10 according to the above-mentioned first embodiment in that a plurality of, for example, two (a pair of) table devices are provided on the above-mentioned rotating table 22 and the moving system 14A configured to move the two table devices along the predetermined circulation routes is provided instead of the moving system 14, the configuration of the other portions are the same as in the shaping device main body section 10. Hereinafter, the shaping device main body section 10A will be described focusing on differences from the shaping device main body section 10. Hereinafter, the two table devices are referred to as table devices 12A and 12B for identification purposes, respectively, as shown in
The table devices 12A and 12B each is configured similarly to the above-mentioned table device 12 as shown in
The shaping plate MP1 is placed on the table 26 of the table device 12A as a first support surface member, and the shaping plate MP2 is placed on the table 26 of the table device 12B as a second support surface member. In the second embodiment, the upper surface of the shaping plate MP1 becomes the first support surface on which the shaped object (first shaped object) is formed, and the upper surface of the shaping plate MP2 becomes the second support surface on which the shaped object (second shaped object) is formed.
Like the above-mentioned first embodiment, the rotating table 22 is integrally attached to the upper end of the driving shaft 28a of the motor 28 to be coaxial with the driving shaft 28a (see
The table device 12A has a lower end on which the driven gear 29 is provided, and a lower surface to which an upper end of the shaft member 27 supported on the rotating table 22 via a bearing section (not shown) is connected. For this reason, as shown by a plan view in
In addition, the table device 12B has a lower end on which a separate driven gear 29A having the same shape as that of the driven gear 29 is provided, and a bottom surface to which an upper end of a separate shaft member having the same shape as that of the shaft member 27 supported on the rotating table 22 via the bearing section is connected. The separate shaft member has a central axis AR3 shown in
That is, in the second embodiment, the table device 12A and the table device 12B are simultaneously rotated counterclockwise at the same rotation speed as that of the rotating table 22 in conjunction with the clockwise rotation of the rotating table 22 shown by the arrow CW. As a result, like the above-mentioned table device 12, each of the table devices 12A and 12B moves along the circular circulation route, and always faces the same direction in the XY plane, i.e., the direction shown in
As shown in
Each of the table devices 12A and 12B is moved at the constant speed by the constant speed rotation of the rotating table 22 at the target rotation speed Vt like the above-mentioned table device 12, and is moved along the circular circulation route while maintaining the orientation at an orientation shown in
As is clear from the description so far, in the second embodiment, the first support member that supports the shaping plate MP1 as a first support surface member is constituted by the table device 12A (the shaping plate MP1 is not included), and the second support member that supports the shaping plate MP2 as a second support surface member is constituted by the table device 12B (the shaping plate MP2 is not included).
In the second embodiment, the first moving device configured to move each of the two table devices 12A and 12B along the similar circular circulation route as in the above-mentioned first embodiment is provided while including the rotating table 22 which is fixed to the motor 28 and the driving shaft 28a of the motor 28 and on which the two table devices 12A and 12B are mounted. By moving the rotating table 22 (movable member) with the first moving device, the table device 12A (including the above-mentioned first support member) and the table device 12B (including the above-mentioned second support member) are moved with respect to the beam irradiation unit 16 as the beam irradiation device.
In addition, in the second embodiment, the second moving device configured to move the two table devices 12A and 12B is provided while including the two shaft members and the like that are rotatably supported by the driving gear 21, the driven gears 29 and 29A and the rotating table 22 and that are connected to (the table bases 24 of) the table devices 12A and 12B. The two table devices 12A and 12B are moved in conjunction with the position changes in the horizontal plane of the two table devices 12A and 12B moved by the first moving device such that the orientation in the horizontal plane of each of the two table devices 12A and 12B is maintained by the second moving device.
As is clear from the description, the moving system 14A includes the first moving device and the second moving device.
In the shaping device main body section 10A according to the second embodiment, the position measurement system 42 (see
Even in the shaping device according to the second embodiment, the similar load-lock chamber as in the first embodiment is provided in the vicinity of the −Y side in the vacuum chamber, and in a step in which the shaping processing for constructing the shaped object is finished on both of the two table devices 12A and 12B, the similar processing as in the above-mentioned first embodiment is performed in the load-lock chamber. Further, in the second embodiment, two conveyance robots may be provided in the load-lock chamber, or only one conveyance robot may be provided in the load-lock chamber.
As described above, since the shaping device according to the second embodiment includes the entire configuration of the shaping device 100 according to the first embodiment, the same effects as in the above-mentioned first embodiment can be obtained. In addition, in the shaping device according to the second embodiment, since disposition of the beam irradiation units 301 to 303 of the beam irradiation unit 16, the powder feeder 46, the powder hopper 41 and the preheating unit 50 with respect to the rotation center (the axis AR1) of the rotating table 22 is set to a positional relation as shown in
Here, while it is desirable that the process of forming the powder bed on the other table is performed at least partially in parallel with the irradiation process of the electron beam on the side of the table, the preheating process on the side of the other table may not be performed in parallel with the irradiation process of the electron beam on the side of the one table. The preheating process on the side of the other table may be performed until irradiation of the electron beam to the formed powder bed is started after formation of the powder bed on the other table is finished.
In the shaping device main body section 10A according to the second embodiment, during one rotation of the rotating table 22, acquisition of calibration information of the beam irradiation position of the beam irradiation units 30i using the reference marks FMi 1 to 3), irradiation of the electron beam to a powder bed of an nth layer (n is a natural number), and formation and preheating of a powder bed of a (n+1)th layer are performed in sequence at the side of the one table device (for example, the table device 12A), and in parallel with these, formation and preheating of the powder bed of the nth layer, acquisition of calibration information of the beam irradiation position of the beam irradiation units 30i using, the reference marks FMi (i=1 to 3), and irradiation of the electron beam to the powder bed of the nth layer are performed in sequence on the side of the other table device (here, the table device 12B). That is, while the table device 12A makes a round along the circular circulation route, a series of processing processes required for shaping on the side of the table device 12A is performed once, the other the table device 12B makes a round along the circulation route in parallel with this, and a series of processing processes required for shaping on the side of the table device 12B is performed once. Accordingly, in comparison with the above-mentioned first embodiment, it is possible to achieve substantially twice the processing capability. Moreover, double throughput can be realized by increasing the number of table devices by one in the same configuration as that of the shaping device main body section 10 according to the above-mentioned first embodiment without providing two of the each parts of the shaping device main body section.
That is, in the second embodiment, while the rotating table 22 rotates once, a relative positional relation between the beam irradiation unit 16 and the first support surface and a relative positional relation between the beam irradiation unit 16 and the second support surface are changed by the moving system 14A. Specifically, the table device 12A and the table device 12B are moved like the above-mentioned table device 12 in the plane parallel to the XY plane according to the rotation of the rotating table 22. Accordingly, in the beam irradiation unit 16 and each of the shaping plate MP1 and MP2, positions of which are fixed, a positional relation is changed in the XY plane crossing the irradiation direction of the electron beam EB. In this case, a positional relation of the beam irradiation unit 16 and each of the shaping plate MP1 and MP2 is changed at least in the Y-axis direction, and the first, second and third emitting ports of the beam irradiation unit 16 are disposed in the X-axis direction crossing the Y-axis direction.
In the shaping device main body section 10A, since the tables 26 provided in the table devices 12A and 12B are vertically moved independently from each other, eventually, the first support surface and the second support surface move independently in the irradiation direction of the electron beam EB.
In addition, the shaping material BM is supplied onto the first support surface of the shaping plate MP1 and the second support surface of the shaping plate MP2 by the powder applying system 18. The powder hopper 41 supplies the shaping material from the supply port that can face the first support surface or the second support surface. While the powder applying system 18 includes the powder feeder 46, in the embodiment, the shaping material BM supplied from the supply port of the powder hopper 41 is leveled at the height of the upper surface of the frame-shaped section of the table devices 12A and 12B by the powder feeder 46, and the powder bed (the layer of the shaping material) is formed on the first support surface or the second support surface.
In the shaping device according to the second embodiment, the irradiation region of the energy beam is formed on the shaping material on the first support surface in the duration (first duration) in which irradiation of the electron beam to the powder bed of the nth layer (n is a natural number) on the first support surface is performed, and the irradiation of the electron beam to the powder bed of the nth layer on the second support surface is performed (the irradiation region of the energy beam is formed on the shaping material on the second support surface) in the second duration different from the first duration. The shaping material is supplied to the first support surface by the powder applying system 18 in a third duration, and the shaping material is supplied to the second support surface in a fourth duration different from the third duration. Here, the first duration and the fourth duration at least partially overlap each other, and the second duration and the third duration at least partially overlap each other. Accordingly, the entire throughput as the shaping device is improved.
In addition, in the shaping device according to the second embodiment, a center of gravity in the XY plane of the portion in which the table devices 12A and 12B are combined matches with the rotating axis AR1. For this reason, it is possible to minimize falling of the rotating axis AR1 of the moving system 14A.
Further, while the case in which each of the two table devices 12A and 12B moves along the circular circulation route has been exemplified in the second embodiment, it is not limited thereto and a plurality of table devices may move along the circulation route other than the circular shape, for example, an elliptical circulation route, an oblong (oval) circulation route including a straight route partially, or the like. The point is that the plurality of table devices move along the same circulation route, and during movement of the table devices along the circulation route, the above-mentioned series of processes may be performed to construct the shaped object. For example, when the oblong circulation route is employed, the moving system configured to move the table devices 12A and 12B along the circulation route may be configured using, for example, a belt driving mechanism or the like.
In addition, during movement of the plurality of table devices along the same circulation route, an irradiation process of an electron beam to a powder bed on a table of one table device and a process of forming a powder bed on a table of the other table device may be performed in at least partially parallel with each other.
In addition, at least two sets of the powder applying systems 18 (powder hoppers, powder feeders) and the preheating units may be disposed on the circulation route such that the processes of the same process are parallelly performed using different table devices at different positions on the same circulation route, for example, the circular circulation route. Alternatively, the series of processes for constructing the shaped object may be configured to be parallelly performed on different tables. For example, each of the powder applying system 18, the preheating unit, the electron beam irradiation unit, and the like, may be provided in plural, and these may be disposed at different positions on the same circulation route. For example, like the second embodiment, when the same driving system as in the first moving device having the rotating table is employed in a part of the moving system configured to move the plurality of table device along the circular circulation route, if the radius of the rotating table becomes larger than a certain level, it is possible to secure a space in which each of the powder hopper, the preheating unit, the electron beam irradiation unit, and the like, are provided in plural in the circular circulation route through which the table device moves. For example, the sets of the powder hoppers, the preheating units, the electron beam irradiation units, and the like, may be disposed in the same circulation route by the same number as that of the table device.
Further, in the first and second embodiments, while each of the reference marks FMi and the beam monitors 42i are provided by three to individually correspond to the beam irradiation units 301, 302 and 303, respectively, at least one of the reference mark and the beam monitor may be provided by only one.
In addition, while the case in which the powder hopper 41 is disposed above the moving route of the table device 12, and the powder applying system configured to supply the shaping material on the table section 32 from above, specifically, on the support surface SS of the shaping plate MP supported by the table 26 is employed as the material supply device has been described in the first and second embodiments, it is not limited thereto and a system configured to supply a shaping material onto the support surface SS from below may be employed as the material supply device. For example, as disclosed in US Patent Publication No. 2013/0168902, a system including a tank-shaped supply section in which a powder material (shaping material) used in shaping is accommodated, a shaping section adjacent to the supply section and forming the similar tank shape that constitutes a shaping region, and a transporting member (corresponding to the rake member) may be employed as the material supply device. The system (for the purpose of convenience, referred to as a shaping material supplying system) is shown in
For example, in the shaping device including the table device moving along the circulation route, when the shaping material supplying system is employed as the material supply device, the shaping material is supplied from the supply port that can face the beam irradiation device (the beam irradiation unit 16). For example, when the table device 12 of the first embodiment includes the shaping section, the tank-shaped supply section in which the shaping material used in shaping is accommodated is disposed adjacent to the table device 12, and moved along the circulation route together with the table device 12. In this case, while an upper opening of the tank-shaped supply section corresponding to a supply port for a shaping material, the supply port can face the beam irradiation device (the beam irradiation unit 16) during movement of the tank-shaped supply section along the moving route.
Further, while the position of the powder hopper 41 of the powder applying system 18 is fixed in the first and second embodiments, for example, a configuration that can move in the XY plane facing the support surface SS, the first support surface and the second support surface may be employed, and a configuration in which a member provided with a supply port is movable may be employed. Similarly, while the position of the beam irradiation unit 16 is also fixed, for example, a configuration that is movable in the XY plane facing the support surface SS, the first support surface and the second support surface may be employed.
In addition, in the second embodiment, instead of the table devices 12A and 12B and the powder hopper 41, it is conceivable to use the system having the pluralities of the supply sections 80 and the shaping sections 90 described above. As the system in this case, for example, as shown in
While the case in which the first moving device that constitutes the moving system has the movable member (the rotating table 22) and the second moving device moves the table section 32 (including the support member) in conjunction with the movement of the movable member has been described in the first and second embodiments, it is not limited thereto and the first moving device and the second moving device may share the same movable member like a third embodiment, which will be described below. That is, the second moving device may indirectly move the support member.
The shaping device main body section 10B is distinguished from the shaping device main body section 10 according to the above-mentioned first embodiment in that a table device 112 is provided instead of the above-mentioned table device 12, a moving system 114 is provided instead of the moving system 14, and a powder applying system 18 and the like are disposed on the +Y side of the beam irradiation unit 16 (on the back side in
The table device 112 has a bottomed tubular frame member 124, a table 126 that is vertically movable along an inner wall surface of the frame member 124, and a driving mechanism 125 configured to drive the table 126 in the upward/downward direction. While the bottomed tubular member having, for example, substantially a square shape when seen in a plan view is used as the frame member 124, it is not limited thereto and the shape when seen in a plan view may be a circular shape, a polygonal shape, or the like, as long as the frame member has a bottomed tubular shape, an upper surface of which is open. Like the above-mentioned frame-shaped section 24c, the reference marks FMi and the beam monitors 44i (i=1 to 3) are provided on an upper surface of a sidewall of the frame member 124 on the −Y side (a front side in
The table 126 is constituted by a plate member with a predetermined thickness. The shaping plate MP is mounted on the upper surface of the table 126 in a state in which the upper surface is parallel to the horizontal plane. The shaping plate MP is detachably attached to the upper surface of the table 126, and in the third embodiment, the upper surface of the shaping plate MP becomes the support surface SS on which the shaping material is supplied. The driving mechanism 125 has a Z axis 125a, a lower end of which is fixed to a center of an inner bottom surface of the frame member 124, extending in the upward/downward direction (Z axis direction), and a Z driving section 125b that is vertically movable along the Z axis 125a. A part of the Z driving section 125b is integrally attached to the table 126. For this reason, when the Z driving section 125b is vertically moved along the Z axis 125a, the table 126 is vertically moved along the inner circumferential surface of the frame member 124. The table 126 is vertically movable between a first position shown in
Further, the driving mechanism 125 may be configured to move the table 126 in a θx direction (a rotation direction about the X axis) and a θy direction (a rotation direction about the Y axis) in addition to the Z axis direction via the Z driving section 125b.
The moving system 114 includes the frame member 124 that functions as a movable member, a fine motion stage 130 having an upper surface on which the frame member 124 is placed, a rough motion stage 132 configured to support the fine motion stage 130 on a base BS, a fine motion actuator 134 configured to finely move the fine motion stage 130 on the rough motion stage 132 in the X-axis direction, the Y-axis direction and the θz direction, and a rough motion actuator 136 configured to drive the rough motion stage 132 on the base BS in an XY 2-dimensional direction. The base BS is disposed on a bottom wall of the vacuum chamber 100A in a state in which the upper surface is parallel to the XY plane. The fine motion actuator 134 enables accurate positioning of a driving object in comparison with the rough motion actuator 136. The rough motion actuator 136 has an output larger than that of the fine motion actuator 134. For example, a voice coil motor or the like is used as the fine motion actuator 134, and for example, a linear motor or the like having a relatively large output is used as the rough motion actuator 136. When electric motors are used as the rough motion actuator 136 and the fine motion actuator 134, it is desirable to apply a magnetic shield to a motor to prevent a leakage of a magnetic force to the outside from the motor as possible.
In the shaping device main body section 10B, the powder hopper (shaping material supply unit) 41, the powder feeder 46 (rake member) and the preheating unit 50 are disposed on the +Y side of the beam irradiation unit 16 (a back side in
The powder hopper 41 is disposed above the powder feeder 46 on the +Y side. The preheating unit 50 is disposed adjacent to the powder feeder 46 on the −Y side (a front side in
As shown in
The configuration of the other portion of the shaping device main body section 10B is the same as that of the above-mentioned shaping device main body section 10.
In the shaping device 200 according to the third embodiment, the shaping work is performed in basically the same procedure as the shaping device 100, except the moving operation of the table device 112 upon formation and preheating of the powder bed and irradiation of the electron beam EB to the powder bed.
When the powder bed is formed, the table device 112 disposed at the predetermined position (material supply starting standby position) on the +Y side with respect to a disposed position of the powder hopper 41 is driven by the rough motion actuator 136 and moved below the powder hopper 41 linearly in the Y-axis direction from the material supply starting standby position to the −Y side. During movement of the table device 112, the shaping material is supplied onto the shaping plate MP from the powder hopper 41, and a top surface thereof is uniformly leveled by the powder feeder 46. Accordingly, the powder bed of the nth layer is formed on the upper surface (support surface) SS of the shaping plate MP, and preheating of the formed powder bed is performed according to further movement of the table device 112 in the −Y direction.
After the preheating of the powder bed, when the table device 112 further moves in the −Y direction, the electron beam EB is radiated to the reference marks FMi on the frame member 124 from the beam irradiation units 30k, and after acquisition of information for calibration of the beam irradiation positions of the beam irradiation units 30i via the reflection electron detector 54 and the signal processor 56, irradiation of the electron beam EB to the powder bed of the nth layer is performed. The irradiation of the electron beam EB is performed on the basis of the 3D data of the shaped object of the shaping object, and at this time, position control in the XY plane of the fine motion stage 130 according to necessity is performed in addition to the deflection control of the electron beam such that the beam irradiation position is adjusted on the basis of the acquired information for calibration of the beam irradiation position. Here, the moving direction (fine motion direction) of the fine motion stage 130 may be the same direction (−Y direction) as the moving direction of the rough motion stage 132 upon irradiation of the electron beam EB, may be an opposite direction (reverse direction, +Y direction), or may be a crossing direction (+X direction or −X direction).
In the shaping device 200, in the series of operations from formation of the powder bed of the nth layer to irradiation of the electron beam EB to the powder bed of the nth layer, the table device 112 is linearly moved from the +Y direction to the −Y direction as described above, and after termination of the irradiation of the electron beam EB to the powder bed of the nth layer, the table device 112 is driven by the rough motion actuator 136, moves to the +Y side from the position (irradiation ending position) in the Y-axis direction and returns to the material supply starting standby position. During movement of the table device 112 to the +Y side, the table 126 is driven downward by the driving mechanism 125 by the predetermined distance. For this reason, after the table device 112 reaches the material supply starting standby position, the series of operations from formation of the powder bed of the next layer (the (n+1)th layer) to irradiation of the electron beam EB to the powder bed of the (n+1)th layer can be directly performed.
According to the shaping device 200 of the above-mentioned third embodiment, by linearly driving the rough motion stage 132 in the −Y direction, formation of the powder bed, preheating of the formed powder bed and irradiation of the electron beam EB to the powder bed can be sequentially performed using the table device 112 mounted on the rough motion stage 132 via the fine motion stage 130.
Further, while the case in which the moving direction of the table 126 by the rough motion stage 132 via the frame member 124 is a linear direction has been exemplified in the third embodiment, it is not limited thereto and the direction may be a curve direction, for example, a direction along an arc-shaped route (a rotation direction).
In addition, while the case in which the table device 112 includes the frame member 124 constituted by a bottomed tubular shape member having a square shape when seen in a plan view has been described in the third embodiment, instead of the frame member 124, a U-shaped member when seen in a plan view, a sidewall of the frame member 124 on the −Y side is removed, may be used. The above-mentioned reference marks FMi may be disposed on the upper end surface of the sidewall section of the member on the +Y side. However, in this case, since the reference marks FMi reaches below the beam irradiation units 30i after irradiation of the electron beam to the powder bed of the nth layer, adjustment of the beam irradiation position may be performed before irradiation of the electron beam to the powder bed of the next layer on the basis of the detection result of the reference mark (the detection result of the beam irradiation position).
Further, in the third embodiment, two sets of the powder applying systems 18 and the preheating units 50 may be provided. In this case, the two sets are preferably disposed on one side and the other side in the Y-axis direction with the irradiation region of the electron beam EB from the beam irradiation unit 16 sandwiched therebetween. In the one set disposed in the irradiation region of the electron beam EB on the +Y side, the powder applying system 18 and the preheating unit 50 are disposed at the same disposition (positional relation) as in the third embodiment, and in the other set disposed in the irradiation region of the electron beam EB on the −Y side, the powder applying system 18 and the preheating unit 50 are disposed at disposition symmetrical to the one set.
As a result, in the series of operations from formation of the powder bed of the nth layer to irradiation of the electron beam EB to the powder bed of the nth layer, the table device 112 is linearly moved from the +Y direction to the −Y direction as described above, after irradiation of the electron beam EB to the powder bed of the nth layer, the table device 112 is moved from the −Y side to the +Y side in the Y-axis direction as described above after the table 126 is moved directly downward by the predetermined distance at the position (irradiation ending position), and then, during the movement, the series of operations can be performed from formation of the powder bed of the next layer (the (n+1)th layer) to irradiation of the electron beam EB to the powder bed of the (n+1)th layer. That is, the reciprocal operation of the table device 112 enables processing of the two layers in succession, the reciprocal operation of the table device 112 can be continuously performed, and thus, a significant improvement in throughput can be expected.
First, in the first to third embodiments (hereinafter, referred to each embodiment), while the three beam irradiation units 301 to 303 of the beam irradiation unit 16 are disposed in the moving direction of the shaping plate MP as the support surface member, i.e., a direction crossing the direction in which positional relations (relative positions) between the beam irradiation units 301 to 303 and the shaping plate MP are changed, it is not limited thereto and the plurality of beam irradiation units may be disposed 2-dimensionally in a direction crossing the direction in which the positional relation (relative position) between the beam irradiation unit and the shaping plate is changed and in a direction along the direction in which the positional relation is changed. In particular, when amplitude of the beam of the one beam irradiation unit 30 covers the entire working region, the plurality of beam irradiation units may be disposed in the direction in which the positional relation (relative position) between the beam irradiation unit and the shaping plate is changed.
In addition, in each of the embodiments, a vibration proof device configured to reduce vibrations transmitted to the shaping device from the floor surface F may be provided between the shaping device 100 and the floor surface F. In addition, an inclination adjustment mechanism configured to match the rotating axis AR1 (and/or the rotating axis AR2) of the table device 12 with the gravity direction may be provided between the shaping device 100 and the floor surface F. In addition, the vibration proof device or the inclination adjustment mechanism may be provided on a leg portion of the stand 33.
Further, while the preheating unit 50 is disposed adjacent to downstream from the rake member in each of the embodiments, the preheating unit 50 may be disposed upstream from the rake member. Here, the preheating unit 50 may be disposed between the material supply position and the rake member by the powder feeder 46.
In addition, while the shaping material is supplied onto the table section 32 (onto the support surface SS of the shaping plate MP supported on the table 26) from the powder hopper 41 disposed above the moving route of the table device 12 in the first and second embodiments, in this case, as the shaping progresses, there may be an influence due to the weight of the supplied shaping material. Further, in the first and second embodiment, since the table device 12 that is rotationally driven is configured to move at a constant speed around the axis AR1, while the influence can be reduced in comparison with the case in which the table device 12 accelerates or decelerates, the influence may be further reduced using a technique of monitoring a rotation speed of a rotating table and feeding the monitored result back to the control of the motor 28, a technique of controlling a torque of the motor 28 according to the number of layers of the shaping material, a technique of controlling the torque of the motor 28 according to a supply amount of the shaping material, or the like. In addition, while it is conceivable that the position of the table device 12 or the moving system 14 in the Z direction is changed due to the weight of the shaping material supplied onto the table section 32, positions of the reference marks FM1, FM2 and FM3 in the Z direction may be monitored and the irradiation units 301 to 303 may be controlled according to the monitored result.
In addition, in each of the embodiments, while there is a concern that a load applied to the driving mechanism 31 configured to vertically move the table section 32 (the table 26) may be changed as the shaping progresses, a compression spring or a piston configured to cancel a weight thereof may be incorporated below the table section 32 (the table 26).
In addition, while the case in which the support member includes the table base 24, the frame member 124, or the like, in addition to the table configured to directly support the shaping plate MP, has been described in each of the embodiments, the support member configured to support the shaping plate MP as the support surface member may include a member configured to directly support at least the shaping plate MP.
Further, while the case in which the electron beam is used as the energy beam radiated to the shaping material has been described in each of the embodiments, it is not limited to the electron beam, and in addition, a charged particle beam may be used. Alternatively, an energy beam such as a laser beam or the like, in addition to the charged particle beam, may also be used. When the laser beam is used, preheating may not always be necessary depending on the shaping material.
In addition, while the case in which the metal powder is used as the shaping material has been described in each of the embodiments, it is not limited thereto and, of course, a powder other than a metal may be used and a shaping material other than a powder material may be used as long as the shaping work can be performed by irradiation of an energy beam.
While the case in which the first axis AR1 and the second axis AR2 are parallel to the Z axis has been described in the first and second embodiments, at least one of the first axis AR1 and the second axis AR2 may be inclined with respect to the Z axis. In this case, a driving mechanism configured to adjust an inclination angle of the support surface SS with respect to the horizontal plane may be used as the driving mechanism 31.
In addition, in each of the embodiments, while shapes of a member, an opening, a hole, or the like, may be described as a circular shape, a rectangular shape, or the like, needless to say, it is not limited to these shapes.
Further, the plurality of components of each of the embodiments may be appropriately combined. Accordingly, some of the plurality of components may not be used.
| Number | Date | Country | Kind |
|---|---|---|---|
| PCT/JP2019/026056 | Jul 2019 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2020/025702 | 6/30/2020 | WO |
