Shield and cover for target of sputter coating apparatus

Information

  • Patent Grant
  • D403002
  • Patent Number
    D403,002
  • Date Filed
    Tuesday, January 27, 1998
    26 years ago
  • Date Issued
    Tuesday, December 22, 1998
    25 years ago
Abstract
Description
Claims
  • The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.
US Referenced Citations (1)
Number Name Date Kind
5690795 Rosenstein et al. Nov 1997