Shield and cover for target of sputter coating apparatus

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Information

Patent Grant
D401251

References
Source

Patent Number
D401,251
Date Filed
Tuesday, January 27, 1998
27 years ago
Date Issued
Tuesday, November 17, 1998
26 years ago

Inventors
Original Assignees
- Semiconductor Equipment Technology, Inc.
Examiners
- Davis; Antoine Duval
Agents
- Gray Cary Ware & Freidenrich

US Classifications
- D15 - Machines not elsewhere specified
Field of Search
- US
- D15 138
- 204 29802-29811
International Classifications
- 1509
- Term of Grant
  14Years

Information

Abstract

Description

Claims

The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.

US Referenced Citations (1)

Number	Name	Date	Kind
5690795	Rosenstein et al.	Nov 1997