Shingle magnetic writer having a low sidewall angle pole

Information

  • Patent Grant
  • 9508372
  • Patent Number
    9,508,372
  • Date Filed
    Wednesday, June 3, 2015
    9 years ago
  • Date Issued
    Tuesday, November 29, 2016
    7 years ago
Abstract
A method and system provide a shingle magnetic write transducer. The transducer has an air-bearing surface (ABS) and includes a main pole and at least one coil. The coil(s) are configured to energize the main pole. The main pole includes a leading surface, a trailing surface, and a plurality of sides between the leading surface and the trailing surface. At least one of the plurality of sides form a sidewall angle with a down track direction. The sidewall angle is less than thirteen degrees and is at least zero degrees. In some aspects, the sidewall angle is less than a maximum skew angle for the data storage system.
Description
BACKGROUND


FIG. 1 is an air-bearing surface (ABS) view of a conventional magnetic recording transducer 10 for shingle magnetic recording. In shingle magnetic recording blocks of data are written such that the tracks in a block overlap in one direction. Thus, the bits in one track for the block are written, then the bits for the next track, and so on. Each track in the block except the first track written overlaps a previously written adjoining track along the radial direction. Similarly, each track except the last track is overlapped by a next adjacent track in the block. Thus, the tracks are aligned in a manner analogous to shingles on a roof.


The conventional shingle magnetic recording transducer 10 has an underlayer 12 that may include a leading shield, side gap 14, side shields 16, top gap 17, a top (or trailing) shield 18 and a main pole 20. The main pole 20 resides on an underlayer/leading shield 12. The side shields 16 are separated from the main pole 20 by a side gap 14. The gap 14 between the side shields 16 and the main pole 20 may have a substantially constant thickness.


The main pole 20 includes sidewalls that form a nonzero angle, γ, with the down track direction at the ABS. The sidewall angle, γ, is set based on the skew angle the down track direction of the transducer 10 makes with the media (not shown in FIG. 1). At skew, the down track direction makes an angle with the media down track direction depending upon where in the disk recording is being performed. At a zero skew angle, the down track direction of the head matches the media down track direction. Generally, the skew angle is symmetric around this zero skew angle and reaches a maximum skew angle, βmax. Stated differently, the skew angle generally ranges from −βmax to βmax. For shingle magnetic recording, the sidewall angle is set to be equal to the maximum skew angle (γ=βmax). Typically, this means that the sidewall angle is at least thirteen degrees.


Although the conventional magnetic recording head 10 functions, the conventional magnetic recording head 10 is desired to be used at higher areal densities. Accordingly, what is needed is a system and method for improving the performance of a magnetic recording head at higher areal densities and, therefore, lower track widths.





BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS


FIG. 1 depicts view of a conventional shingle magnetic recording head.



FIGS. 2A and 2B depict a side view and an ABS view of an exemplary embodiment of a shingle magnetic recording disk drive.



FIGS. 3A-3C are views of an exemplary embodiment of a portion of the disk drive at various skew angles.



FIG. 4 is an ABS view of another exemplary embodiment of a portion of a shingle magnetic recording transducer.



FIG. 5 depicts a flow chart of an exemplary embodiment of a method for providing a shingle magnetic recording transducer.



FIG. 6 depicts a flow chart of another exemplary embodiment of a method for providing a shingle magnetic recording transducer.



FIGS. 7-10A and 10B depict various views of an exemplary embodiment of a single magnetic recording transducer during fabrication.





DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS


FIGS. 2A and 2B depict a side view and an air-bearing surface (ABS) view of an exemplary embodiment of a shingle magnetic recording write apparatus, or disk drive, 100. For clarity, FIGS. 2A-2B are not to scale. The disk drive 100 includes a slider 104 having a shingle magnetic write transducer 110. For simplicity not all portions of the disk drive 100 and transducer 110 are shown. In addition, although the disk drive 100 and transducer 110 are depicted in the context of particular components other and/or different components may be used. For example, circuitry used to drive and control various portions of the disk drive is not shown. For simplicity, only single components are shown. However, multiples of each components and/or their sub-components, might be used. The disk drive may be a perpendicular magnetic recording (PMR) disk drive. However, in other embodiments, the disk drive may be configured for other types of magnetic recording included but not limited to heat assisted magnetic recording (HAMR).


The disk drive 100 includes a media 102 and a slider 104 on which the transducer 110 has been fabricated. Although not shown, the slider 104 and thus the transducer 110 are generally attached to a suspension. In general, the slider 104 includes the write transducer 110 and a read transducer (not shown). However, for clarity, only the write transducer 110 is shown.


The transducer 110 includes a main pole 120, shield(s) 130, a side gap 140 (which also resides below the main pole 120 in the embodiment shown), write gap 142 and coil(s) 112. The shield(s) 130 include an optional leading shield 132, optional side shields 134 and an optional trailing shield 136 (collectively termed shields 130). The coil(s) 112 are used to energize the main pole 120. One turn is depicted in FIG. 2A. Another number of turns may, however, be used. Note that only a portion of the coil(s) 112 may be shown in FIG. 2A. If, for example, the coil(s) 112 is a spiral, or pancake, coil, then additional portions of the coil(s) 112 may be located further from the ABS. Further, additional coils and/or additional layers of coils may also be used.


The main pole 120 has a top (trailing surface) wider than the bottom (leading surface). The main pole 114 thus includes sidewalls having sidewall angles that are greater than or equal to zero. The main pole 120 is depicted as having a trapezoidal shape. In other embodiments, the main pole 120 may have a triangular shape. Thus, the bottom may be an edge instead of a surface. In some embodiments, the main pole 120 may have leading (bottom) bevel and/or a trailing (top) bevel. Thus, the main pole 120 may be shorter in the down track direction at the ABS than at location(s) recessed from the ABS. In some embodiments, the leading bevel may be a real leading bevel. Such a leading bevel is formed by configuring the top surface of the leading shield 132 (or other part of the underlayer) and thus the gap 140 to slope at a nonzero angle from a direction perpendicular to the ABS. The real leading bevel of the main pole 120, when present, generally follows the contours of this surface. Note that a real leading bevel is in contrast to a “natural” leading bevel that may be formed because the trench in which the main pole 120 is formed is narrower near the ABS and thus fills more rapidly with the material for the gap 140 than portions of the trench further form the ABS.


The gap layer 140 may include one or more sublayers as well as a seed layer. Further, although depicted as a single gap 140 below and along the sides of the main pole 120 is shown, the gap 140 may include separate side gaps (between the mail pole 120 and side shields 134) and bottom gap (between the main pole 120 and leading shield 132). In addition, the write gap 142 and side gap 140 may be a single structure. However, in such embodiments, the write gap 142 generally does not extend further in the cross track direction than the side gap 140. Although depicted as symmetric, the gap 140 may be asymmetric. For example, the gap 142 between a side of the main pole 120 and one side shield 134 may be wider than the gap 142 between the opposite side of the main pole 120 and the other side shield 134.


As discussed above, the main pole 120 has a top wider than the bottom. Thus, the sidewalls of the main pole 120 form a sidewall angle, a, with the down track direction. The sidewalls may be symmetric, forming the same sidewall angle with the down track direction. In other cases, the sidewall angles differ. In some embodiments, the sidewall angle is at least zero degrees and less than thirteen degrees. In some embodiments, the sidewall angle is less than ten degrees. In some embodiments, the sidewall angle is at least three degrees and not greater than eight degrees. For example, the sidewall angle is at least five degrees and not greater than seven degrees. In some cases, the sidewall angle is nominally six degrees.


In shingle magnetic recording, the down track direction of the main pole 120 and transducer 110 may be at a skew angle, β, from the media down track direction. During recording for at least part of media 102. The skew angle varies up to a maximum skew angle, βmax. In some embodiments, the skew angle is symmetric around a zero skew angle (media down track direction parallel to the down track direction of the head). For example, FIGS. 3A-3C depict views of an exemplary embodiment of a portion of the disk drive 100 at various skew angles. In FIG. 3A, the disk drive is shown when the transducer 110 is oriented at a zero skew angle (β=0). Thus, the down track direction for the transducer is aligned with the down track direction of the media. Tracks 104 are also shown. The position of the main pole 120 while recording bits for each track 120 is also shown. FIG. 3B depicts the disk drive 100 when the transducer is oriented at an intermediate skew angle. In FIG. 3C, the transducer 110 is oriented at the largest skew angle, (β=βmax). This may occur at the inside diameter or outside diameter of the disk 102. In general, if the situation shown in FIG. 3C is at the outside diameter, then at the inside diameter, β=−βmax. Thus, the skew angle may vary between −βmax and βmax. In other embodiments, the skew angle may not be symmetric around a zero skew angle.


The sidewall angle of the main pole 120 may also be set based on the skew angle. More specifically, the sidewall angle of the main pole 120 may be less than the maximum skew angle (α<βmax). For example, if the maximum skew angle is thirteen degrees, then the sidewall angle is less than thirteen degrees. The sidewall angle may be in the ranges described above, including nominally six degrees. For different maximum skew angles, the sidewall angle may differ.


Performance of the transducer 110 and disk drive 100 may be improved by shaping of the main pole 120. Use of a smaller sidewall angle may allow for a higher write field without adversely affecting track width. For example, the smaller sidewall angles may allow for more magnetic material to be contained in the tip of the main pole 120 without requiring a wider track width. The top (trailing) surface off the main pole 120 may have the same width in the cross track direction but provide a higher write field. The profile of the magnetic field for the main pole may also be improved. For example, the field may be stronger at the track edge, which is advantageous for shingled magnetic recording performance. These features may be enhanced by using a leading bevel for the main pole. Shingled magnetic recording may thus be extended to smaller track widths. For example, shingled magnetic recording may be performed at track widths of sixty nanometers or less. Consequently, performance of the shingled magnetic writer 100 may be improved.



FIG. 4 is an ABS view of another exemplary embodiment of a portion of a disk drive 100′ used in shingled magnetic recording. For clarity, FIG. 4 is not to scale. The disk drive 100′ and transducer 110′ are analogous to the disk drive 100 and transducer 110, respectively. Consequently, analogous components have similar labels. The shingled magnetic recording transducer 110′ includes an optional leading shield 132, optional side shields 134′, optional trailing shield 136, gap 140′, write gap 142 and main pole 120′ that are analogous to the optional leading shield 132, optional side shields 134, optional trailing shield 136, gap 140, write gap 142 and main pole 120, respectively.


As can be seen in FIG. 4, the main pole 120′ is asymmetric. Consequently, the gap 140′ and side shields 134′ are also asymmetric. The sidewall angle is α on one side of the main pole 120′ and α′ on the other side of the main pole 120′. In some embodiments, both the sidewall angles α and α′ may still desired to be less than the maximum skew angle. In addition, both the sidewall angles α and α′ may still be in the ranges described above. Thus, α and α′ may be less than thirteen degrees and at least zero degrees. In some embodiments, the sidewall angles are each less than ten degrees. In some embodiments, the sidewall angles are at least three degrees and not greater than eight degrees. For example, the sidewall angles may each be at least five degrees and not greater than seven degrees. In alternate embodiments, only one sidewall angle may be less than the maximum skew angle and/or in the ranges described above.


The shingled magnetic writer 110′ may share the benefits of the shingled magnetic writer 110. Use of a smaller sidewall angle may allow for a higher write field without adversely affecting track width. The profile of the field for the main pole may also be improved. These benefits may be enhanced by using a leading bevel for the main pole 120′. Consequently, performance of the shingled magnetic writer 100′ may be improved.



FIG. 5 depicts an exemplary embodiment of a method 200 for providing a shingled magnetic recording transducer or analogous data storage device. For simplicity, some steps may be omitted, interleaved, performed in another order and/or combined. The method 200 may be used to fabricate multiple magnetic recording heads at substantially the same time. The method 200 is described in the context of the shingled magnetic transducer 110. The method 200 may be used to fabricate other shingled magnetic recording transducer including but not limited to the transducer 110′. The method 200 is also described in the context of particular layers. A particular layer may include multiple materials and/or multiple sub-layers. The method 200 also may start after formation of other portions of the magnetic recording transducer.


The main pole 120 having the desired sidewall angle(s) is formed, via step 202. In some embodiments, step 202 includes forming a trench in one or more nonmagnetic layers. For example, one or more reactive ion etches (RIEs) may form the trench. The trench has a shape and location that corresponds to the pole. In other embodiments the trench may be provided in the side shields. Magnetic material(s) for the pole are deposited. The transducer may then be planarized. A trailing edge bevel may optionally be formed on the trailing surface (top) of the main pole. A leading edge bevel may be formed naturally or be a real leading edge bevel.


The side gap 140 is provided, via step 204. Step 204 may include depositing a Ru layer, for example via chemical vapor deposition, sputtering or another method. Additional layer(s) may also be provided. In some embodiments, step 204 is performed before step 202. Thus, the main pole 120 is provided on the side gap 140 in such embodiments.


The side shields 134 may optionally be provided, via step 206. The coil(s) 112 for the main pole are provided, via step 208. Step 208 may be interleaved with other steps of the method 200. For example, portions of the coil(s) 112 may be formed before the main pole 114 and side shields 134. The coil(s) formed may be helical coil(s) or spiral coils.


Using the method 200, a shingled magnetic transducer 110 having improved performance may be fabricated. Thus, the benefits of the transducer 110 and/or 110′ may be achieved.



FIG. 6 depicts an exemplary embodiment of a method 220 for providing a shingled magnetic recording transducer having reduced sidewall angles. For simplicity, some steps may be omitted, interleaved, performed in another order and/or combined. FIGS. 7-10A and 10B depict an exemplary embodiment of a shingled magnetic write transducer 300 formed using the method 220. For clarity, FIGS. 7-10A and 10B are not to scale. The method 220 may be used to fabricate multiple magnetic recording heads at substantially the same time. The method 220 may also be used to fabricate other magnetic recording transducers. The method 220 is also described in the context of particular layers. A particular layer may include multiple materials and/or multiple sub-layers. The method 220 also may start after formation of other portions of the magnetic recording transducer. For example, the method 220 may start after a read transducer has been fabricated.


A leading shield or other underlayer having a beveled surface is optionally provided, via step 222. A beveled surface extends from the ABS at an angle that is less than ninety degrees.


A side gap is provided, via step 224. Step 224 may include depositing an intermediate layer on the leading shield/underlayer, forming a trench in the desired location of the pole and having the desired profile for the main pole, then depositing the side gap material(s) in at least trench. In some embodiments, the side gap include multiple sublayers. FIG. 7 depicts a side view of the shingled magnetic recording transducer 300 after step 224 is performed. Thus, an underlayer/leading shield 302 is shown. The leading shield may not extend as far back from the ABS in the stripe height direction. Thus, the dashed line indicates the back edge of an embodiment of the leading shield. As can be seen in FIG. 7, the underlayer/leading shield 302 has a beveled surface 303. The beveled surface 303 is at a nonzero, acute angle with respect to both the ABS and the yoke direction. In the embodiment shown, the gap 304 has also been deposited and is conformal to the underlayer. In another embodiment, the gap may be nonconformal.


The main pole is provided, via step 226. Step 226 includes depositing a high moment magnetic material, for example via plating. The magnetic material(s) for the pole may also planarization performed in step 226. Leading and/or trailing bevels in the main pole may also be provided as part of step 226. FIGS. 8A and 8B depict side and ABS views of the shingled magnetic write transducer 300 after the magnetic material is plated and a planarization performed. Thus, the pole 310 is formed. The pole 310 has sidewall angles α and is symmetric. In other embodiments, the pole 310 may have different sidewall angles. The pole 310 also has a real leading bevel 312 corresponding to the sloped surface 303 of the underlayer/leading shield 302. Also shown is intermediate layer 305 in which the trench for the main pole was formed. FIGS. 9A and 9B depict side and ABS views, respectively, of the transducer 300 after step 226 is performed and in which a trailing bevel is used. As can be seen in FIG. 9A, the main pole 310 has a leading bevel 312 corresponding to the bevel in the underlayer/leading shield 302. The main pole 310 also has a trailing bevel 314. Thus, the height of the main pole 310 at the ABS has been reduced.


The side shields are provided, via step 228. Step 228 may include removing portions of the intermediate layer 305, depositing seed layer(s) and plating the soft magnetic and/or other material(s) for the side shields. Step 228 may be performed before steps 224 and 226 in some embodiments. In other embodiments, step 228 may be performed after steps 224 and 226. Alternatively, portions of the steps 224, 226 and 228 may be interleaved.


A top, or write gap layer may also be provided, via step 230. The trailing shield may optionally be formed, via step 232. Step 232 may include depositing a high moment, soft material. As seed layer might also be deposited in step 232. The coils are provided, via step 234. Portions of step 234 may be interleaved with portions of other steps in the method 220. FIGS. 10A and 10B depict side and ABS views of the transducer 300 after step 234 is performed. Thus, the write gap 330 and trailing shield 340 are shown.


Using the method 220, a shingle magnetic transducer having improved performance may be fabricated. Because of the shape of the main pole 310, the field magnitude and shape may be improved. Thus, a transducer having improved performance for shingled writing may be fabricated.

Claims
  • 1. A data storage device comprising: a medium having a down track direction;a slider including a shingle magnetic recording transducer having an air-bearing surface (ABS), a main pole and at least one coil configured to energize the main pole, the main pole having a leading surface, a trailing surface, and a plurality of sides between the leading surface and the trailing surface, at least one of the plurality of sides forming a sidewall angle with a down track direction, the sidewall angle being less than thirteen degrees and greater than zero degrees, the main pole being oriented at a plurality of skew angles with respect to the media track direction, the plurality of skew angles including a maximum skew angle, the sidewall angle being less than the maximum skew angle.
  • 2. The data storage device of claim 1 wherein the sidewall angle is at least three degrees and not greater than eight degrees.
  • 3. The data storage device of claim 2 wherein the sidewall angle is at least five degrees and not greater than seven degrees.
  • 4. The data storage device of claim 1 wherein the at least one sidewall includes a first sidewall, the plurality of sidewalls including a second sidewall, the second sidewall forming an additional sidewall angle with the down track direction, the additional sidewall angle being different from the sidewall angle.
  • 5. The data storage device of claim 1 wherein a portion of the leading surface includes a leading bevel at a leading bevel angle from the ABS, the leading bevel angle being less than ninety degrees.
  • 6. The data storage device of claim 1 wherein the slider is oriented with respect to the media such that the main pole is not more than a maximum skew angle from the down track direction.
  • 7. The data storage device of claim 1 wherein the plurality of sidewalls are substantially straight such that the at least one of the plurality of sidewalls forms only the sidewall angle with the down track direction.
  • 8. A method for providing a shingle magnetic recording transducer having air-bearing surface (ABS) and oriented to write to a media having a media track direction, the method comprising: providing a main pole having a leading surface, a trailing surface, and a plurality of sides between the leading surface and the trailing surface, at least one of the plurality of sides forming a sidewall angle with a down track direction, the sidewall angle being less than thirteen degrees and greater than zero degrees, a portion of the main pole residing at the ABS, the main pole being oriented at a plurality of skew angles with respect to the media track direction, the plurality of skew angles including a maximum skew angle, the sidewall angle being less than the maximum skew angle; andproviding at least one coil for energizing the main pole.
  • 9. The method of claim 8 wherein the step of providing the main pole further includes configuring the sidewall angle to be at least three degrees and not greater than eight degrees.
  • 10. The method of claim 9 wherein the sidewall angle is at least five degrees and not greater than seven degrees.
  • 11. The method of claim 8 wherein the main pole is provided on at least one underlayer, the method further including: providing a top surface of the underlayer having an underlayer angle with the ABS, the main pole being formed on the top surface such that a portion of the leading surface includes a leading bevel at a leading bevel angle from the ABS, the leading bevel angle being less than ninety degrees.
  • 12. The method of claim 8 wherein the plurality of sidewalls are substantially straight such that the at least one of the plurality of sidewalls forms only the sidewall angle with the down track direction.
US Referenced Citations (620)
Number Name Date Kind
6016290 Chen et al. Jan 2000 A
6018441 Wu et al. Jan 2000 A
6025978 Hoshi et al. Feb 2000 A
6025988 Yan Feb 2000 A
6032353 Hiner et al. Mar 2000 A
6033532 Minami Mar 2000 A
6034851 Zarouri et al. Mar 2000 A
6043959 Crue et al. Mar 2000 A
6046885 Aimonetti et al. Apr 2000 A
6049650 Jerman et al. Apr 2000 A
6055138 Shi Apr 2000 A
6058094 Davis et al. May 2000 A
6073338 Liu et al. Jun 2000 A
6078479 Nepela et al. Jun 2000 A
6081499 Berger et al. Jun 2000 A
6094803 Carlson et al. Aug 2000 A
6099362 Viches et al. Aug 2000 A
6103073 Thayamballi Aug 2000 A
6108166 Lederman Aug 2000 A
6118629 Huai et al. Sep 2000 A
6118638 Knapp et al. Sep 2000 A
6125018 Takagishi et al. Sep 2000 A
6130779 Carlson et al. Oct 2000 A
6134089 Barr et al. Oct 2000 A
6136166 Shen et al. Oct 2000 A
6137661 Shi et al. Oct 2000 A
6137662 Huai et al. Oct 2000 A
6160684 Heist et al. Dec 2000 A
6163426 Nepela et al. Dec 2000 A
6166891 Lederman et al. Dec 2000 A
6173486 Hsiao et al. Jan 2001 B1
6175476 Huai et al. Jan 2001 B1
6178066 Barr Jan 2001 B1
6178070 Hong et al. Jan 2001 B1
6178150 Davis Jan 2001 B1
6181485 He Jan 2001 B1
6181525 Carlson Jan 2001 B1
6185051 Chen et al. Feb 2001 B1
6185077 Tong et al. Feb 2001 B1
6185081 Simion et al. Feb 2001 B1
6188549 Wiitala Feb 2001 B1
6190764 Shi et al. Feb 2001 B1
6193584 Rudy et al. Feb 2001 B1
6195229 Shen et al. Feb 2001 B1
6198608 Hong et al. Mar 2001 B1
6198609 Barr et al. Mar 2001 B1
6201673 Rottmayer et al. Mar 2001 B1
6204998 Katz Mar 2001 B1
6204999 Crue et al. Mar 2001 B1
6212153 Chen et al. Apr 2001 B1
6215625 Carlson Apr 2001 B1
6219205 Yuan et al. Apr 2001 B1
6221218 Shi et al. Apr 2001 B1
6222707 Huai et al. Apr 2001 B1
6229782 Wang et al. May 2001 B1
6230959 Heist et al. May 2001 B1
6233116 Chen et al. May 2001 B1
6233125 Knapp et al. May 2001 B1
6237215 Hunsaker et al. May 2001 B1
6252743 Bozorgi Jun 2001 B1
6255721 Roberts Jul 2001 B1
6258468 Mahvan et al. Jul 2001 B1
6266216 Hikami et al. Jul 2001 B1
6271604 Frank, Jr. et al. Aug 2001 B1
6275354 Huai et al. Aug 2001 B1
6277505 Shi et al. Aug 2001 B1
6282056 Feng et al. Aug 2001 B1
6296955 Hossain et al. Oct 2001 B1
6297955 Frank, Jr. et al. Oct 2001 B1
6304414 Crue, Jr. et al. Oct 2001 B1
6307715 Berding et al. Oct 2001 B1
6310746 Hawwa et al. Oct 2001 B1
6310750 Hawwa et al. Oct 2001 B1
6317290 Wang et al. Nov 2001 B1
6317297 Tong et al. Nov 2001 B1
6322911 Fukagawa et al. Nov 2001 B1
6330136 Wang et al. Dec 2001 B1
6330137 Knapp et al. Dec 2001 B1
6333830 Rose et al. Dec 2001 B2
6340533 Ueno et al. Jan 2002 B1
6349014 Crue, Jr. et al. Feb 2002 B1
6351355 Min et al. Feb 2002 B1
6353318 Sin et al. Mar 2002 B1
6353511 Shi et al. Mar 2002 B1
6356412 Levi et al. Mar 2002 B1
6359779 Frank, Jr. et al. Mar 2002 B1
6369983 Hong Apr 2002 B1
6376964 Young et al. Apr 2002 B1
6377535 Chen et al. Apr 2002 B1
6381095 Sin et al. Apr 2002 B1
6381105 Huai et al. Apr 2002 B1
6389499 Frank, Jr. et al. May 2002 B1
6392850 Tong et al. May 2002 B1
6396660 Jensen et al. May 2002 B1
6399179 Hanrahan et al. Jun 2002 B1
6400526 Crue, Jr. et al. Jun 2002 B2
6404600 Hawwa et al. Jun 2002 B1
6404601 Rottmayer et al. Jun 2002 B1
6404706 Stovall et al. Jun 2002 B1
6410170 Chen et al. Jun 2002 B1
6411522 Frank, Jr. et al. Jun 2002 B1
6417998 Crue, Jr. et al. Jul 2002 B1
6417999 Knapp et al. Jul 2002 B1
6418000 Gibbons et al. Jul 2002 B1
6418048 Sin et al. Jul 2002 B1
6421211 Hawwa et al. Jul 2002 B1
6421212 Gibbons et al. Jul 2002 B1
6424505 Lam et al. Jul 2002 B1
6424507 Lederman et al. Jul 2002 B1
6430009 Komaki et al. Aug 2002 B1
6430806 Chen et al. Aug 2002 B1
6433965 Gopinathan et al. Aug 2002 B1
6433968 Shi et al. Aug 2002 B1
6433970 Knapp et al. Aug 2002 B1
6437945 Hawwa et al. Aug 2002 B1
6445536 Rudy et al. Sep 2002 B1
6445542 Levi et al. Sep 2002 B1
6445553 Barr et al. Sep 2002 B2
6445554 Dong et al. Sep 2002 B1
6447935 Zhang et al. Sep 2002 B1
6448765 Chen et al. Sep 2002 B1
6451514 Iitsuka Sep 2002 B1
6452742 Crue et al. Sep 2002 B1
6452765 Mahvan et al. Sep 2002 B1
6456465 Louis et al. Sep 2002 B1
6459552 Liu et al. Oct 2002 B1
6462920 Karimi Oct 2002 B1
6466401 Hong et al. Oct 2002 B1
6466402 Crue, Jr. et al. Oct 2002 B1
6466404 Crue, Jr. et al. Oct 2002 B1
6468436 Shi et al. Oct 2002 B1
6469877 Knapp et al. Oct 2002 B1
6477019 Matono et al. Nov 2002 B2
6479096 Shi et al. Nov 2002 B1
6483662 Thomas et al. Nov 2002 B1
6487040 Hsiao et al. Nov 2002 B1
6487056 Gibbons et al. Nov 2002 B1
6490125 Barr Dec 2002 B1
6496330 Crue, Jr. et al. Dec 2002 B1
6496334 Pang et al. Dec 2002 B1
6504676 Hiner et al. Jan 2003 B1
6512657 Heist et al. Jan 2003 B2
6512659 Hawwa et al. Jan 2003 B1
6512661 Louis Jan 2003 B1
6512690 Qi et al. Jan 2003 B1
6515573 Dong et al. Feb 2003 B1
6515791 Hawwa et al. Feb 2003 B1
6532823 Knapp et al. Mar 2003 B1
6535363 Hosomi et al. Mar 2003 B1
6552874 Chen et al. Apr 2003 B1
6552928 Qi et al. Apr 2003 B1
6577470 Rumpler Jun 2003 B1
6583961 Levi et al. Jun 2003 B2
6583968 Scura et al. Jun 2003 B1
6597548 Yamanaka et al. Jul 2003 B1
6611398 Rumpler et al. Aug 2003 B1
6618223 Chen et al. Sep 2003 B1
6629357 Akoh Oct 2003 B1
6633464 Lai et al. Oct 2003 B2
6636394 Fukagawa et al. Oct 2003 B1
6639291 Sin et al. Oct 2003 B1
6650503 Chen et al. Nov 2003 B1
6650506 Risse Nov 2003 B1
6654195 Frank, Jr. et al. Nov 2003 B1
6657816 Barr et al. Dec 2003 B1
6661621 Iitsuka Dec 2003 B1
6661625 Sin et al. Dec 2003 B1
6674610 Thomas et al. Jan 2004 B1
6680863 Shi et al. Jan 2004 B1
6683763 Hiner et al. Jan 2004 B1
6687098 Huai Feb 2004 B1
6687178 Qi et al. Feb 2004 B1
6687977 Knapp et al. Feb 2004 B2
6691226 Frank, Jr. et al. Feb 2004 B1
6697294 Qi et al. Feb 2004 B1
6700738 Sin et al. Mar 2004 B1
6700759 Knapp et al. Mar 2004 B1
6704158 Hawwa et al. Mar 2004 B2
6707083 Hiner et al. Mar 2004 B1
6713801 Sin et al. Mar 2004 B1
6721138 Chen et al. Apr 2004 B1
6721149 Shi et al. Apr 2004 B1
6721203 Qi et al. Apr 2004 B1
6724569 Chen et al. Apr 2004 B1
6724572 Stoev et al. Apr 2004 B1
6729015 Matono et al. May 2004 B2
6735850 Gibbons et al. May 2004 B1
6737281 Dang et al. May 2004 B1
6744608 Chen et al. Jun 2004 B1
6747301 Hiner et al. Jun 2004 B1
6751055 Alfoqaha et al. Jun 2004 B1
6754049 Seagle et al. Jun 2004 B1
6756071 Shi et al. Jun 2004 B1
6757140 Hawwa Jun 2004 B1
6760196 Niu et al. Jul 2004 B1
6762910 Knapp et al. Jul 2004 B1
6765756 Hong et al. Jul 2004 B1
6775902 Huai et al. Aug 2004 B1
6778358 Jiang et al. Aug 2004 B1
6781927 Heanuc et al. Aug 2004 B1
6785955 Chen et al. Sep 2004 B1
6791793 Chen et al. Sep 2004 B1
6791807 Hikami et al. Sep 2004 B1
6798616 Seagle et al. Sep 2004 B1
6798625 Ueno et al. Sep 2004 B1
6801408 Chen et al. Oct 2004 B1
6801411 Lederman et al. Oct 2004 B1
6803615 Sin et al. Oct 2004 B1
6806035 Atireklapvarodom et al. Oct 2004 B1
6807030 Hawwa et al. Oct 2004 B1
6807332 Hawwa Oct 2004 B1
6809899 Chen et al. Oct 2004 B1
6816345 Knapp et al. Nov 2004 B1
6828897 Nepela Dec 2004 B1
6829160 Qi et al. Dec 2004 B1
6829819 Crue, Jr. et al. Dec 2004 B1
6833979 Knapp et al. Dec 2004 B1
6834010 Qi et al. Dec 2004 B1
6859343 Alfoqaha et al. Feb 2005 B1
6859997 Tong et al. Mar 2005 B1
6861937 Feng et al. Mar 2005 B1
6870712 Chen et al. Mar 2005 B2
6873494 Chen et al. Mar 2005 B2
6873547 Shi et al. Mar 2005 B1
6879464 Sun et al. Apr 2005 B2
6888184 Shi et al. May 2005 B1
6888704 Diao et al. May 2005 B1
6891702 Tang May 2005 B1
6894871 Alfoqaha et al. May 2005 B2
6894877 Crue, Jr. et al. May 2005 B1
6906894 Chen et al. Jun 2005 B2
6909578 Missell et al. Jun 2005 B1
6912106 Chen et al. Jun 2005 B1
6934113 Chen Aug 2005 B1
6934129 Zhang et al. Aug 2005 B1
6940688 Jiang et al. Sep 2005 B2
6942824 Li Sep 2005 B1
6943993 Chang et al. Sep 2005 B2
6944938 Crue, Jr. et al. Sep 2005 B1
6947258 Li Sep 2005 B1
6950266 McCaslin et al. Sep 2005 B1
6954332 Hong et al. Oct 2005 B1
6958885 Chen et al. Oct 2005 B1
6961221 Niu et al. Nov 2005 B1
6969989 Mei Nov 2005 B1
6975486 Chen et al. Dec 2005 B2
6987643 Seagle Jan 2006 B1
6989962 Dong et al. Jan 2006 B1
6989972 Stoev et al. Jan 2006 B1
7006327 Krounbi et al. Feb 2006 B2
7007372 Chen et al. Mar 2006 B1
7012832 Sin et al. Mar 2006 B1
7023658 Knapp et al. Apr 2006 B1
7026063 Ueno et al. Apr 2006 B2
7027268 Zhu et al. Apr 2006 B1
7027274 Sin et al. Apr 2006 B1
7035046 Young et al. Apr 2006 B1
7041985 Wang et al. May 2006 B1
7046490 Ueno et al. May 2006 B1
7054113 Seagle et al. May 2006 B1
7057857 Niu et al. Jun 2006 B1
7059868 Yan Jun 2006 B1
7092195 Liu et al. Aug 2006 B1
7110289 Sin et al. Sep 2006 B1
7111382 Knapp et al. Sep 2006 B1
7113366 Wang et al. Sep 2006 B1
7114241 Kubota et al. Oct 2006 B2
7116517 He et al. Oct 2006 B1
7124654 Davies et al. Oct 2006 B1
7126788 Liu et al. Oct 2006 B1
7126790 Liu et al. Oct 2006 B1
7131346 Buttar et al. Nov 2006 B1
7133253 Seagle et al. Nov 2006 B1
7134185 Knapp et al. Nov 2006 B1
7154715 Yamanaka et al. Dec 2006 B2
7170725 Zhou et al. Jan 2007 B1
7177117 Jiang et al. Feb 2007 B1
7193815 Stoev et al. Mar 2007 B1
7196880 Anderson et al. Mar 2007 B1
7199974 Alfoqaha Apr 2007 B1
7199975 Pan Apr 2007 B1
7211339 Seagle et May 2007 B1
7212384 Stoev et al. May 2007 B1
7238292 He et al. Jul 2007 B1
7239478 Sin et al. Jul 2007 B1
7248431 Liu et al. Jul 2007 B1
7248433 Stoev et al. Jul 2007 B1
7248449 Seagle Jul 2007 B1
7280325 Pan Oct 2007 B1
7283327 Liu et al. Oct 2007 B1
7284316 Huai et al. Oct 2007 B1
7286329 Chen et al. Oct 2007 B1
7289303 Sin et al. Oct 2007 B1
7292409 Stoev et al. Nov 2007 B1
7296339 Yang et al. Nov 2007 B1
7307814 Seagle et al. Dec 2007 B1
7307818 Park et al. Dec 2007 B1
7310204 Stoev et al. Dec 2007 B1
7318947 Park et al. Jan 2008 B1
7333295 Medina et al. Feb 2008 B1
7337530 Stoev et al. Mar 2008 B1
7342752 Zhang et al. Mar 2008 B1
7349170 Rudman et al. Mar 2008 B1
7349179 He et al. Mar 2008 B1
7354664 Jiang et al. Apr 2008 B1
7363697 Dunn et al. Apr 2008 B1
7371152 Newman May 2008 B1
7372665 Stoev et al. May 2008 B1
7375926 Stoev et al. May 2008 B1
7379269 Krounbi et al. May 2008 B1
7386933 Krounbi et al. Jun 2008 B1
7389577 Shang et al. Jun 2008 B1
7417832 Erickson et al. Aug 2008 B1
7419891 Chen et al. Sep 2008 B1
7428124 Song et al. Sep 2008 B1
7430098 Song et al. Sep 2008 B1
7436620 Kang et al. Oct 2008 B1
7436638 Pan Oct 2008 B1
7440220 Kang et al. Oct 2008 B1
7443632 Stoev et al. Oct 2008 B1
7444740 Chung et al. Nov 2008 B1
7493688 Wang et al. Feb 2009 B1
7508627 Zhang et al. Mar 2009 B1
7522377 Jiang et al. Apr 2009 B1
7522379 Krounbi et al. Apr 2009 B1
7522382 Pan Apr 2009 B1
7542246 Song et al. Jun 2009 B1
7551406 Thomas et al. Jun 2009 B1
7552523 He et al. Jun 2009 B1
7554767 Hu et al. Jun 2009 B1
7583466 Kermiche et al. Sep 2009 B2
7595967 Moon et al. Sep 2009 B1
7639457 Chen et al. Dec 2009 B1
7660080 Liu et al. Feb 2010 B1
7672080 Tang et al. Mar 2010 B1
7672086 Jiang Mar 2010 B1
7684160 Erickson et al. Mar 2010 B1
7688546 Bai et al. Mar 2010 B1
7691434 Zhang et al. Apr 2010 B1
7695761 Shen et al. Apr 2010 B1
7719795 Hu et al. May 2010 B2
7726009 Liu et al. Jun 2010 B1
7729086 Song et al. Jun 2010 B1
7729087 Stoev et al. Jun 2010 B1
7736823 Wang et al. Jun 2010 B1
7785666 Sun et al. Aug 2010 B1
7796356 Fowler et al. Sep 2010 B1
7800858 Bajikar et al. Sep 2010 B1
7819979 Chen et al. Oct 2010 B1
7829264 Wang et al. Nov 2010 B1
7846643 Sun et al. Dec 2010 B1
7855854 Hu et al. Dec 2010 B2
7869160 Pan et al. Jan 2011 B1
7872824 Macchioni et al. Jan 2011 B1
7872833 Hu et al. Jan 2011 B2
7910267 Zeng et al. Mar 2011 B1
7911735 Sin et al. Mar 2011 B1
7911737 Jiang et al. Mar 2011 B1
7916426 Hu et al. Mar 2011 B2
7918013 Dunn et al. Apr 2011 B1
7968219 Jiang et al. Jun 2011 B1
7982989 Shi et al. Jul 2011 B1
8008912 Shang Aug 2011 B1
8012804 Wang et al. Sep 2011 B1
8015692 Zhang et al. Sep 2011 B1
8018677 Chung et al. Sep 2011 B1
8018678 Zhang et al. Sep 2011 B1
8024748 Moravec et al. Sep 2011 B1
8072705 Wang et al. Dec 2011 B1
8074345 Anguelouch et al. Dec 2011 B1
8077418 Hu et al. Dec 2011 B1
8077434 Shen et al. Dec 2011 B1
8077435 Liu et al. Dec 2011 B1
8077557 Hu et al. Dec 2011 B1
8079135 Shen et al. Dec 2011 B1
8081403 Chen et al. Dec 2011 B1
8091210 Sasaki et al. Jan 2012 B1
8097846 Anguelouch et al. Jan 2012 B1
8104166 Zhang et al. Jan 2012 B1
8116043 Leng et al. Feb 2012 B2
8116171 Lee Feb 2012 B1
8125856 Li et al. Feb 2012 B1
8134794 Wang Mar 2012 B1
8136224 Sun et al. Mar 2012 B1
8136225 Zhang et al. Mar 2012 B1
8136805 Lee Mar 2012 B1
8141235 Zhang Mar 2012 B1
8146236 Luo et al. Apr 2012 B1
8149536 Yang et al. Apr 2012 B1
8151441 Rudy et al. Apr 2012 B1
8163185 Sun et al. Apr 2012 B1
8164760 Willis Apr 2012 B2
8164855 Gibbons et al. Apr 2012 B1
8164864 Kaiser et al. Apr 2012 B2
8165709 Rudy Apr 2012 B1
8166631 Tran et al. May 2012 B1
8166632 Zhang et al. May 2012 B1
8169473 Yu et al. May 2012 B1
8171618 Wang et al. May 2012 B1
8179636 Bai et al. May 2012 B1
8191237 Luo et al. Jun 2012 B1
8194365 Leng et al. Jun 2012 B1
8194366 Li et al. Jun 2012 B1
8196285 Zhang et al. Jun 2012 B1
8200054 Li et al. Jun 2012 B1
8203800 Li et al. Jun 2012 B2
8208350 Hu et al. Jun 2012 B1
8220140 Wang et al. Jul 2012 B1
8222599 Chien Jul 2012 B1
8225488 Zhang et al. Jul 2012 B1
8227023 Liu et al. Jul 2012 B1
8228633 Tran et al. Jul 2012 B1
8231796 Li et al. Jul 2012 B1
8233248 Li et al. Jul 2012 B1
8248896 Yuan et al. Aug 2012 B1
8254060 Shi et al. Aug 2012 B1
8257597 Guan et al. Sep 2012 B1
8259410 Bai et al. Sep 2012 B1
8259539 Hu et al. Sep 2012 B1
8262918 Li et al. Sep 2012 B1
8262919 Luo et al. Sep 2012 B1
8264797 Emley Sep 2012 B2
8264798 Guan et al. Sep 2012 B1
8270126 Roy et al. Sep 2012 B1
8276258 Tran et al. Oct 2012 B1
8277669 Chen et al. Oct 2012 B1
8279719 Hu et al. Oct 2012 B1
8284517 Sun et al. Oct 2012 B1
8288204 Wang et al. Oct 2012 B1
8289821 Huber Oct 2012 B1
8291743 Shi et al. Oct 2012 B1
8307539 Rudy et al. Nov 2012 B1
8307540 Tran et al. Nov 2012 B1
8308921 Hiner et al. Nov 2012 B1
8310785 Zhang et al. Nov 2012 B1
8310901 Batra et al. Nov 2012 B1
8315019 Mao et al. Nov 2012 B1
8316527 Hong et al. Nov 2012 B2
8320076 Shen et al. Nov 2012 B1
8320077 Tang et al. Nov 2012 B1
8320219 Wolf et al. Nov 2012 B1
8320220 Yuan et al. Nov 2012 B1
8320722 Yuan et al. Nov 2012 B1
8322022 Yi et al. Dec 2012 B1
8322023 Zeng et al. Dec 2012 B1
8325569 Shi et al. Dec 2012 B1
8333008 Sin et al. Dec 2012 B1
8334093 Zhang et al. Dec 2012 B2
8336194 Yuan et al. Dec 2012 B2
8339738 Tran et al. Dec 2012 B1
8341826 Jiang et al. Jan 2013 B1
8343319 Li et al. Jan 2013 B1
8343364 Gao et al. Jan 2013 B1
8349195 Si et al. Jan 2013 B1
8351307 Wolf et al. Jan 2013 B1
8357244 Zhao et al. Jan 2013 B1
8373945 Luo et al. Feb 2013 B1
8375564 Luo et al. Feb 2013 B1
8375565 Hu et al. Feb 2013 B2
8381391 Park et al. Feb 2013 B2
8385157 Champion et al. Feb 2013 B1
8385158 Hu et al. Feb 2013 B1
8394280 Wan et al. Mar 2013 B1
8400731 Li et al. Mar 2013 B1
8404128 Zhang et al. Mar 2013 B1
8404129 Luo et al. Mar 2013 B1
8405930 Li et al. Mar 2013 B1
8409453 Jiang et al. Apr 2013 B1
8413317 Wan et al. Apr 2013 B1
8416540 Li et al. Apr 2013 B1
8419953 Su et al. Apr 2013 B1
8419954 Chen et al. Apr 2013 B1
8422176 Leng et al. Apr 2013 B1
8422342 Lee Apr 2013 B1
8422841 Shi et al. Apr 2013 B1
8424192 Yang et al. Apr 2013 B1
8441756 Sun et al. May 2013 B1
8443510 Shi et al. May 2013 B1
8444866 Guan et al. May 2013 B1
8449948 Medina et al. May 2013 B2
8451556 Wang et al. May 2013 B1
8451563 Zhang et al. May 2013 B1
8454846 Zhou et al. Jun 2013 B1
8455119 Jiang et al. Jun 2013 B1
8456961 Wang et al. Jun 2013 B1
8456963 Hu et al. Jun 2013 B1
8456964 Yuan et al. Jun 2013 B1
8456966 Shi et al. Jun 2013 B1
8456967 Mallary Jun 2013 B1
8458892 Si et al. Jun 2013 B2
8462592 Wolf et al. Jun 2013 B1
8468682 Zhang Jun 2013 B1
8472139 Urakami et al. Jun 2013 B2
8472288 Wolf et al. Jun 2013 B1
8480911 Osugi et al. Jul 2013 B1
8486285 Zhou et al. Jul 2013 B2
8486286 Gao et al. Jul 2013 B1
8488272 Tran et al. Jul 2013 B1
8491801 Tanner et al. Jul 2013 B1
8491802 Gao et al. Jul 2013 B1
8493693 Zheng et al. Jul 2013 B1
8493695 Kaiser et al. Jul 2013 B1
8495813 Hu et al. Jul 2013 B1
8498084 Leng et al. Jul 2013 B1
8506828 Osugi et al. Aug 2013 B1
8514517 Batra et al. Aug 2013 B1
8518279 Wang et al. Aug 2013 B1
8518832 Yang et al. Aug 2013 B1
8520336 Liu et al. Aug 2013 B1
8520337 Liu et al. Aug 2013 B1
8524068 Medina et al. Sep 2013 B2
8526275 Yuan et al. Sep 2013 B1
8531801 Xiao et al. Sep 2013 B1
8532450 Wang et al. Sep 2013 B1
8533937 Wang et al. Sep 2013 B1
8537494 Pan et al. Sep 2013 B1
8537495 Luo et al. Sep 2013 B1
8537502 Park et al. Sep 2013 B1
8545999 Leng et al. Oct 2013 B1
8547659 Bai et al. Oct 2013 B1
8547667 Roy et al. Oct 2013 B1
8547730 Shen et al. Oct 2013 B1
8555486 Medina et al. Oct 2013 B1
8559141 Pakala et al. Oct 2013 B1
8563146 Zhang et al. Oct 2013 B1
8565049 Tanner et al. Oct 2013 B1
8576517 Tran et al. Nov 2013 B1
8578594 Jiang et al. Nov 2013 B2
8582238 Liu et al. Nov 2013 B1
8582241 Yu et al. Nov 2013 B1
8582253 Zheng et al. Nov 2013 B1
8588039 Shi et al. Nov 2013 B1
8593914 Wang et al. Nov 2013 B2
8597528 Roy et al. Dec 2013 B1
8599520 Liu et al. Dec 2013 B1
8599657 Lee Dec 2013 B1
8603593 Roy et al. Dec 2013 B1
8607438 Gao et al. Dec 2013 B1
8607439 Wang et al. Dec 2013 B1
8611035 Bajikar et al. Dec 2013 B1
8611054 Shang et al. Dec 2013 B1
8611055 Pakala et al. Dec 2013 B1
8614864 Hong et al. Dec 2013 B1
8619512 Yuan et al. Dec 2013 B1
8625233 Ji et al. Jan 2014 B1
8625941 Shi et al. Jan 2014 B1
8628672 Si et al. Jan 2014 B1
8630068 Mauri et al. Jan 2014 B1
8634280 Wang et al. Jan 2014 B1
8638529 Leng et al. Jan 2014 B1
8643980 Fowler et al. Feb 2014 B1
8649123 Zhang et al. Feb 2014 B1
8665561 Knutson et al. Mar 2014 B1
8670211 Sun et al. Mar 2014 B1
8670213 Zeng et al. Mar 2014 B1
8670214 Knutson et al. Mar 2014 B1
8670294 Shi et al. Mar 2014 B1
8670295 Hu et al. Mar 2014 B1
8675318 Ho et al. Mar 2014 B1
8675455 Krichevsky et al. Mar 2014 B1
8681594 Shi et al. Mar 2014 B1
8689430 Chen et al. Apr 2014 B1
8693141 Elliott et al. Apr 2014 B1
8703397 Zeng et al. Apr 2014 B1
8705205 Li et al. Apr 2014 B1
8711518 Zeng et al. Apr 2014 B1
8711528 Xiao et al. Apr 2014 B1
8717709 Shi et al. May 2014 B1
8720044 Tran et al. May 2014 B1
8721902 Wang et al. May 2014 B1
8724259 Liu et al. May 2014 B1
8749790 Tanner et al. Jun 2014 B1
8749920 Knutson et al. Jun 2014 B1
8753903 Tanner et al. Jun 2014 B1
8760807 Zhang et al. Jun 2014 B1
8760818 Diao et al. Jun 2014 B1
8760819 Liu et al. Jun 2014 B1
8760822 Li et al. Jun 2014 B1
8760823 Chen et al. Jun 2014 B1
8763235 Wang et al. Jul 2014 B1
8767344 Ishibashi et al. Jul 2014 B2
8780498 Jiang et al. Jul 2014 B1
8780505 Xiao Jul 2014 B1
8786983 Liu et al. Jul 2014 B1
8790524 Luo et al. Jul 2014 B1
8790527 Luo et al. Jul 2014 B1
8792208 Liu et al. Jul 2014 B1
8792312 Wang et al. Jul 2014 B1
8793866 Zhang et al. Aug 2014 B1
8797680 Luo et al. Aug 2014 B1
8797684 Tran et al. Aug 2014 B1
8797686 Bai et al. Aug 2014 B1
8797692 Guo et al. Aug 2014 B1
8813324 Emley et al. Aug 2014 B2
8988825 Zhang et al. Mar 2015 B1
20010017751 Miyazaki Aug 2001 A1
20070230044 Han Oct 2007 A1
20080316644 Lee et al. Dec 2008 A1
20100097720 Ihara Apr 2010 A1
20100290157 Zhang et al. Nov 2010 A1
20110051293 Bai et al. Mar 2011 A1
20110086240 Xiang et al. Apr 2011 A1
20120111826 Chen et al. May 2012 A1
20120162808 Masuda et al. Jun 2012 A1
20120162811 Ishibashi et al. Jun 2012 A1
20120216378 Emley et al. Aug 2012 A1
20120237878 Zeng et al. Sep 2012 A1
20120298621 Gao Nov 2012 A1
20120314324 Guan Dec 2012 A1
20130057981 Urakami et al. Mar 2013 A1
20130216702 Kaiser et al. Aug 2013 A1
20130216863 Li et al. Aug 2013 A1
20130257421 Shang et al. Oct 2013 A1
20130279039 Shiroishi Oct 2013 A1
20140153134 Han Jun 2014 A1
20140154529 Yang et al. Jun 2014 A1
20140175050 Zhang et al. Jun 2014 A1
20140177091 Urakami et al. Jun 2014 A1
20150002959 Basu Jan 2015 A1
20150103445 Xue Apr 2015 A1