Claims
- 1. A shutter for use in a deposition apparatus having a chamber, the shutter including a shutter blade, a support for supporting the shutter blade during movement between an operative position and an inoperative position characterised in that the shutter blade is secured to the support magnetically.
- 2. A shutter as claimed in claim 1 wherein the shutter blade is non-magnetic and is secured by a ferro-magnetic boss and the support carries one or more magnets.
- 3. A shutter as claimed in claim 2 wherein a part of the blade is sandwiched between the boss and the support.
- 4. A shutter as claimed in claim 2 wherein the boss includes a peripheral portion which shadow 5 any interface between the boss and the shutter blade to prevent deposited material adhering to the boss and the shutter blade together.
- 5. A shutter as claimed in claim 4 wherein the peripheral portion is a flange which extends above and is spaced from the shutter blade.
Priority Claims (1)
Number |
Date |
Country |
Kind |
0210660.7 |
May 2002 |
GB |
|
CROSS-REFERENCE TO RELATED APPLICATION
[0001] A claim to priority is made to British Patent Application No. 0210660.7 filed May 9, 2002, the contents of this application being incorporated herein by in their entireties.