Claims
- 1. A planar, silicon barrier, Josephson junction which comprises:
- a single-crystal silicon wafer;
- said silicon wafer including a barrier;
- said barrier being formed by oppositely disposed channels in the upper surface of said wafer on each side of said barrier; and
- a superconducting film laid on the bottom surface of each of said channels in contact with said barrier.
- 2. A planar, silicon barrier, Josephson junction as claimed in claim 1 wherein: the thickness dimension between the channels forming said barrier is less than about 0.2.mu..
- 3. A planar, silicon barrier, Josephson junction as claimed in claim 2 wherein:
- said single-crystal silicon wafer has an upper surface parallel with the (110) plane of said silicon wafer.
- 4. A planar, silicon barrier, Josephson junction as claimed in claim 3 wherein:
- said channels include vertical walls and wherein:
- the vertical walls of said channels are aligned along the directions in which (111) crystal planes intersect at right angles with said (110) crystal plane.
- 5. A planar, silicon barrier, Josephson junction as claimed in claim 4 further comprising:
- a layer of silicon nitride disposed upon said upper surface of said silicon wafer wherein said silicon nitride layer extends beyond the vertical walls of said channels.
- 6. A planar, silicon barrier, Josephson junction device as claimed in claim 5 wherein:
- said superconducting film is niobium.
Parent Case Info
This is a division of application Ser. No. 010,859, filed Feb. 9, 1979, and now U.S. Pat. No. 4,253,230.
US Referenced Citations (2)
Number |
Name |
Date |
Kind |
4065742 |
Kendall et al. |
Dec 1977 |
|
4253230 |
Davis |
Mar 1981 |
|
Non-Patent Literature Citations (3)
Entry |
A. T. Stoller, "The Etching of Deep Vertical-Walled Patterns in Silicon", A Review, Jun., 1970, pp. 271-275. |
A. Bohg, "Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon", Journal of the Electrochemical Society, vol. 118, (1971) pp. 401-402. |
C. L. Huang and T. Van Diezer, "Josephson Tunneling Through Locally Thinned Silicon Wafers", Applied Physics Letters, vol. 25, No. 12, (1974) pp. 753-756. |
Divisions (1)
|
Number |
Date |
Country |
Parent |
10859 |
Feb 1979 |
|