Number | Name | Date | Kind |
---|---|---|---|
5226321 | Varnham et al. | Jul 1993 | |
5427975 | Sparks et al. | Jun 1995 | |
5450751 | Putty et al. | Sep 1995 | |
5465620 | Sanderson et al. | Nov 1995 | |
5546644 | Kakizaki et al. | Aug 1996 | |
5547093 | Sparks | Aug 1996 | |
5616864 | Johnson et al. | Apr 1997 |
Entry |
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Core et al., Fabrication Technology for an Integrated Surface-Micromachined Sensor, Solid State Technology (1993) pp. 39-44. |
Funk et al., Surface-Micromachining of Resonant Silicon Structures, Transducers '95-Eurosensors IX, 8th Int'l Conf. (Jun. 1995) pp. 50-52. |
Offenberg et al., Novel Process for Monolithic Integrated Accelerometer, Transducers '95-Eurosensors IX, 8th Int'l Conf. (Jun. 1995) pp. 589-592. |