Kern & Rosler, Advances in Deposition Process for Passivation Films, J. of Vac. Sci & Techno. vol. 14, No. 5, pp. 1082-1099, 1977. |
Milek, Silicon Nitride for Microelectronic Applications, Handbook of Electronic Materials, vol. 3, IFI/Plenum, NY, NY, pp. 10-13 (1971); SERI/TR-31-042. |
SERI Materials Branch Semiannual Report, Jan. 1, 1978-Jun. 30, 1978, Solar Energy Research Institute, Golden, Colorado, (1978). |
SERI/RR-31-145, Solar Glass Mirror Program A Planning Report on Near-Term Mirror Development Activities, Solar Energy Research Institute, Golden, Colorado (1979), Vossen and Kern, Thin Film Processes, Academic Press NY, NY (1978). |