Claims
- 1. A silicon single crystal pulling-up apparatus comprising:
- a silica glass crucible for accommodating a melted silicon material;
- a cylindrical member made of a carbon composite material which is composed of a carbon fiber with a diameter not more than about 3 mm wound in a shape of cylinder in one layer, impregnated with a resin and carbonized, said member being in contact with and covering the outer side surface of a cylindrical portion of said crucible, the wall thickness of said cylindrical member being not more than about 3 mm;
- a rotational shaft for rotating said crucible; and
- a crucible support fixed to an upper end of said rotational shaft for supporting said crucible.
- 2. A silicon single crystal pulling-up apparatus according to claim 1, in which said diameter of said carbon fiber is not more than about 2 mm, and said wall thickness of said cylindrical member is not more than about 2 mm.
- 3. A silicon single crystal pulling-up apparatus according to claim 1, in which said cylindrical member is located above said crucible support and is located under the upper end of said crucible.
- 4. A silicon single crystal pulling-up apparatus according to any one of claims 1 to 3, in which said crucible support is made from carbon, sintered silicon nitride or sintered silicon carbide coated with a silicon nitride film.
Priority Claims (1)
Number |
Date |
Country |
Kind |
61-315576 |
Dec 1986 |
JPX |
|
CROSS REFERENCE TO RELATED APPLICATION
The present application is a continuation in part of an application Ser. No. 132,512 filed on Dec. 14, 1987, now abandoned.
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
4198382 |
Matsui |
Apr 1980 |
|
4225569 |
Matsui et al. |
Sep 1980 |
|
4668481 |
Watanabe et al. |
May 1987 |
|
4686091 |
Washizuka et al. |
Aug 1987 |
|
Foreign Referenced Citations (11)
Number |
Date |
Country |
1769860 |
Nov 1971 |
DEX |
1519794 |
Feb 1973 |
DEX |
3026049 |
Feb 1981 |
DEX |
3441707A1 |
May 1986 |
DEX |
0172292 |
Oct 1983 |
JPX |
58-181797 |
Oct 1983 |
JPX |
60-131892 |
Jul 1985 |
JPX |
63-166787 |
Jul 1988 |
JPX |
63-166790 |
Jul 1988 |
JPX |
63-166795 |
Jul 1988 |
JPX |
2188854 |
Apr 1986 |
GBX |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
132512 |
Dec 1987 |
|