Number | Date | Country | Kind |
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9-348284 | Dec 1997 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5243482 | Yamaguchi et al. | Sep 1993 | A |
5299080 | Mizuno et al. | Mar 1994 | A |
Entry |
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David A. Horsely, et al.; “Angular Micropositioner For Disk Drives”; MEMS 97, The Tenth Annual International Workshops on Micro Electro Mechanical Systems; IEEE Catalog No. 97CH36021; Jan. 26-30, 1997; pp. 454-459. |
Toshiki Hirano, et al., “Invar Mems Milliactuator for Hard Disk Drive Application”, MEMS 97, The Tenth Annual International Workshops on Micro Electro Mechanical Systems; IEEE Catalog No. 97CH36021; Jan. 26-30, 1997; pp. 378-382. |