Patent Application
20230228292
The present invention relates to sliding components that rotate relative to each other and are used for, for example, a shaft sealing device shaft-sealing a rotary shaft of a rotating machine in an automotive seal field, a general industrial machinery seal field, or another seal field or a bearing of a machine in an automotive bearing field, a general industrial machinery bearing field, or another bearing field.
As a shaft sealing device that prevents a leakage of a sealing target fluid, for example, a mechanical seal includes a pair of annular sliding components rotating relative to each other so that sliding surfaces slide on each other. In such a mechanical seal, there has been a recent demand to reduce the energy lost caused by sliding for environmental measures and the like.
For example, in a mechanical seal shown in Patent Citation 1, a pair of annular sliding components is rotatable relative to each other, a sealing target fluid exists in an outer space, and a low-pressure fluid exists in an inner space. One sliding component is provided with a fluid introduction groove which communicates with the outer space having the sealing target fluid existing therein and has a closed inner radial end and an inclined groove which communicates with the inner space having the low-pressure fluid existing therein, extends in an arc shape while being inclined in a circumferential direction from an inner radial end toward the outer radial side, and has an outer radial end closed on a downstream side of a relative rotation direction. Accordingly, when the relative rotation of the pair of sliding components starts, the sealing target fluid existing in the outer space is introduced into the fluid introduction groove to lubricate the sliding surfaces of the pair of sliding components. When the pair of sliding components rotates at a high speed, the low-pressure fluid existing in the inner space is introduced into the inclined groove and a positive pressure is generated at the outer radial end and in the vicinity thereof to slightly separate the sliding surfaces of the pair of sliding components from each other. Accordingly, low friction is realized. Further, since the sealing target fluid flowing between the sliding surfaces from the outer space and directed toward the inner radial side of the sliding surface is sucked by the inclined groove during a high-speed rotation, it is possible to prevent the sealing target fluid from leaking to the low-pressure inner space from between the pair of sliding components.
However, in the sliding component described in Patent Citation 1, since the inclined groove is disposed on the leakage side of one sliding component and extends from the inner radial end toward the outer radial side to introduce the leakage side fluid in the normal rotation state, it is possible to reduce the friction and suppress the leakage. On the other hand, since the sealing target fluid flows out between the sliding surfaces from the fluid introduction groove in the reverse rotation state, it is possible to obtain the excellent lubricity. However, there is a problem that the sealing target fluid leaks into the inner space from between the pair of sliding components.
The present invention has been made in view of such problems and an object thereof is to provide a sliding component capable of suppressing a wear between sliding surfaces and suppressing a leakage of a sealing target fluid in any one of a normal rotation and a reverse rotation (hereinafter, referred to as both rotations).
In order to solve the above-described problems, a sliding component of the present invention is a sliding component formed in an annular shape and disposed at a relatively rotating position of a rotating machine, sliding relative to a different component, wherein the sliding component includes a sliding surface provided with a plurality of fluid introduction grooves communicating with a space on a sealing target fluid side and introducing a sealing target fluid therein and a plurality of inclined grooves extending from a leakage side toward the sealing target fluid side and configured to generate a dynamic pressure, and wherein the sliding surface of the sliding component is further provided with at least a concave portion disposed between adjacent two of the fluid introduction grooves in a circumferential direction. According to the aforesaid feature of the present invention, since the sealing target fluid flowing out between the sliding surfaces from the fluid introduction groove is captured by the concave portion on the downstream side in the relative rotation direction of the fluid introduction groove in the reverse rotation state, it is possible to reduce the leakage of the sealing target fluid to the leakage side space. Therefore, it is possible to suppress the wear by separating the sliding surfaces from each other during both rotations and to further suppress the sealing target fluid from leaking to the leakage side space from between the pair of sliding components.
It may be preferable that the concave portion is a reverse inclined groove which is provided on the sealing target fluid side of the inclined groove, extends in a reverse direction with respect to the inclined groove, and is configured to generate a dynamic pressure. According to this preferable configuration, since the sealing target fluid flowing out between the sliding surfaces from the fluid introduction groove is captured by the reverse inclined groove on the downstream side in the relative rotation direction of the fluid introduction groove and the sealing target fluid captured in the reverse inclined groove moves in a following manner due to shearing with the sliding surface of the other sliding component and is returned between the sliding surfaces from the end portion on the sealing target fluid side of the reverse inclined groove toward the sealing target fluid side in the reverse rotation state, it is possible to further reduce the leakage of the sealing target fluid to the leakage side space.
It may be preferable that the concave portion is provided only between the adjacent two of the fluid introduction grooves in the circumferential direction. According to this preferable configuration, the concave portion does not exist at a radially overlapping position with the inclined groove disposed on the leakage side of the fluid introduction groove and the extension length of the inclined groove disposed on the leakage side of the fluid introduction groove can be increased. Therefore, since it is easy to generate a high positive pressure by the leakage side fluid in the inclined groove in the normal rotation state, it is possible to improve the dynamic pressure effect.
It may be preferable that each of the fluid introduction grooves includes a Rayleigh step. According to this preferable configuration, since it is possible to generate the dynamic pressure by the Rayleigh step so that the sliding surfaces are slightly separated from each other and the sealing target fluid can be introduced between the sliding surfaces, it is possible to improve the lubricity between the sliding surfaces.
It may be preferable that each of the fluid introduction grooves includes a Rayleigh step extending toward both circumferential sides. According to this preferable configuration, since it is possible to generate the dynamic pressure by the Rayleigh step during both rotations so that the sliding surfaces are slightly separated from each other and the sealing target fluid can be introduced between the sliding surfaces, it is possible to improve the lubricity between the sliding surfaces.
It may be preferable that the reverse inclined groove has an extension length shorter than extension lengths that of the inclined grooves. According to this preferable configuration, it is possible to generate a positive pressure in the reverse inclined groove at an early time in the reverse rotation state.
It may be preferable that the inclined groove and the reverse inclined groove are formed by one continuous groove. According to this preferable configuration, since the sealing target fluid tending to move toward the leakage side through the inclined groove can be returned toward the sealing target fluid side by the reverse inclined groove in the reverse rotation state, it is possible to reduce the leakage of the sealing target fluid to the leakage side space.
It may be preferable that the sliding surface is further provided with an annular land portion which is continuous in the circumferential direction between the inclined grooves and the reverse inclined groove and which has a predetermined radial width or more. According to this preferable configuration, since the sealing target fluid is captured in the reverse inclined groove on the sealing target fluid side of the annular land portion in the reverse rotation state, it is possible to suppress the sealing target fluid from entering the inclined groove. Further, since the inclined groove and the reverse inclined groove are separated from each other by the annular land portion and the inclined groove and the reverse inclined groove do not interfere with each other in the generation of the dynamic pressure during both rotations, it is easy to exhibit the dynamic pressure effect.
In addition, in the sliding surface of the sliding component according to the present invention, the inclined groove may be formed such that the extension direction of the inclined groove includes both a radial component and a circumferential component. Similarly, the reverse inclined groove may be formed such that the extension direction of the reverse inclined groove includes both a radial component and a circumferential component and the direction of the circumferential direction extending from the upstream toward the downstream during the relative rotation may be opposite to that of the inclined groove.
In addition, the sealing target fluid may be a gas or a liquid or may be a mist in which a liquid and a gas are mixed.
Modes for carrying out a sliding component according to the present invention will be described below on the basis of the embodiments.
A sliding component according to a first embodiment of the present invention will be described with reference to
A mechanical seal for automobiles shown in
The mechanical seal mainly includes a rotating seal ring 20 which is the other annular sliding component provided in a rotary shaft 1 through a sleeve 2 to be rotatable together with the rotary shaft 1 and an annular stationary seal ring 10 which is a sliding component provided in a seal cover 5 fixed to a housing 4 of an attachment target device not to be rotatable and to be movable in the axial direction and when an elastic member 7 urges the stationary seal ring 10 in the axial direction, a sliding surface 11 of the stationary seal ring 10 and a sliding surface 21 of the rotating seal ring 20 slide closely with each other. Additionally, the sliding surface 21 of the rotating seal ring 20 is formed as a flat surface and this flat surface is not provided with a concave portion such as a groove.
The stationary seal ring 10 and the rotating seal ring 20 are typically formed of SiC (hard material) or a combination of SiC (hard material) and carbon (soft material). However, the present invention is not limited thereto and any sliding material can be applied insofar as it is used as a sliding material for a mechanical seal. It should be noted that the SiC includes a sintered body using boron, aluminum, carbon, or the like as a sintering aid and a material made of two or more types of phases having different components and compositions, examples of which include SiC in which graphite particles are dispersed, reaction-sintered SiC made of SiC and Si, SiC—TiC, and SiC—TiN. As the carbon, resin-molded carbon, sintered carbon, and the like can be used, including carbon in which carbon and graphite are mixed. In addition to the above sliding materials, a metal material, a resin material, a surface modification material (coating material), a composite material, and the like can also be applied.
As shown in
Hereinafter, in the embodiments, the counterclockwise rotation direction of the rotating seal ring 20 indicated by the solid arrow will be described as the normal rotation direction and the clockwise rotation direction of the rotating seal ring 20 indicated by the dotted arrow will be described as the reverse rotation direction.
Further, a portion other than the dynamic pressure generation groove 13, the inclined groove 13′, and a fluid introduction groove 16 of the sliding surface 11 is formed as a land 12 forming a flat surface. Specifically, the land 12 includes a land portion 12a formed between the adjacent dynamic pressure generation grooves 13, the adjacent inclined grooves 13′, and the dynamic pressure generation groove 13 and the inclined groove 13′ in the circumferential direction, a land portion 12b formed between the adjacent fluid introduction grooves 16 in the circumferential direction, and a land portion 12c formed between the inclined groove 13′ and the fluid introduction groove 16 separated from each other in the radial direction and these land portions are arranged on the same plane and constitute the flat surface of the land 12.
As shown in
Further, extending in the reverse direction with respect to the inclined groove 14 means that the reverse inclined groove 15 obliquely extends while having a component in the reverse rotation direction from the inner radial side toward the outer radial side with respect to the inclined groove 14 obliquely extending while having a component in the normal rotation direction from the inner radial side toward the outer radial side.
Specifically, the dynamic pressure generation groove 13 extends in an arc shape while being inclined in the normal rotation direction of the rotating seal ring 20 from an inner radial end 13A toward the outer radial side by allowing the inner radial end 13A, that is, the inner radial end of the inclined groove 14 to communicate with the inner space S1 and the reverse inclined groove 15 is continuously formed on the outer radial end portion of the inclined groove 14 to extend in the reverse direction with respect to the inclined groove 14. The reverse inclined groove 15 extends in a linear shape while being inclined in the reverse rotation direction of the rotating seal ring 20 from the inner radial end portion toward the outer radial side and is closed so that the outer radial end portion, that is, the outer radial end 13B of the dynamic pressure generation groove 13 does not communicate with the outer space S2. In addition, the reverse inclined groove 15 is not limited to the one obliquely extending in a linear shape and may be one extending in an arc shape.
As shown in
The reverse inclined groove 15 includes a bottom surface 15a which is flat in the extension direction and is parallel to the flat surface of the land 12, a wall portion 15b which extends perpendicularly from the end edge on the side of the outer radial end 13B in the bottom surface 15a toward the sliding surface 11, and side wall portions 15c and 15d which extend perpendicularly from both side edges of the bottom surface 15a toward the sliding surface 11.
Further, the dynamic pressure generation groove 13 is provided with an acute angle portion 13C which is formed by the side wall portion 14d of the inclined groove 14 and the side wall portion 15d of the reverse inclined groove 15, an acute angle portion 13D which is formed by the wall portion 15b and the side wall portion 15c of the reverse inclined groove 15, and an obtuse angle portion 13E which is formed by the wall portion 15b and the side wall portion 15d of the reverse inclined groove 15 and the acute angle portion 13D is located on the outer radial side of the acute angle portion 13C and the downstream side in the reverse rotation direction of the rotating seal ring 20. Further, the angle of the acute angle portion 13D is smaller than that of the acute angle portion 13C. In addition, the acute angle portion 13C is formed at substantially the same radial position as an inner radial peripheral wall portion 17a of a liquid guide groove portion 17 of the fluid introduction groove 16 to be described later and the acute angle portion 13D is formed at substantially the same radial position as an outer radial peripheral wall portion 18a of a Rayleigh step 18 of the fluid introduction groove 16 to be described later.
Further, the extension length of the reverse inclined groove 15 in its inclined direction is shorter than the extension length of the inclined groove 14 in its inclined direction. That is, the length of each of the side wall portions 15c and 15d of the reverse inclined groove 15 is shorter than the length of each of the side wall portions 14c and 14d of the continuous inclined groove 14.
Further, the depth of the reverse inclined groove 15 is the same as the depth of the inclined groove 14. That is, the bottom surface 15a of the reverse inclined groove 15 is disposed on the same plane as the bottom surface 14a of the continuous inclined groove 14 and forms a flat surface. In addition, the bottom surface 14a of the inclined groove 14 and the bottom surface 15a of the reverse inclined groove 15 are not limited to the one forming the flat surface and may have an inclination or unevenness.
As shown in
Specifically, the inclined groove 13′ extends in an arc shape while being inclined in the normal rotation direction of the rotating seal ring 20 from an inner radial end 13A′ toward the outer radial side by allowing the inner radial end 13A′ to communicate with the inner space S1 and an outer radial end 13B′ is closed not to communicate with the fluid introduction groove 16.
As shown in
Further, the inclined groove 13′ is provided with an acute angle portion 13C′ which is formed by the wall portion 13b′ and the side wall portion 13d′ and an obtuse angle portion 13D′ which is formed by the wall portion 13b′ and the side wall portion 13c′.
As shown in
Next, the operation during the relative rotation of the stationary seal ring 10 and the rotating seal ring 20 will be described with reference to
First, the sealing target fluid F flows into the fluid introduction groove 16 in the stop state in which the rotating seal ring 20 does not rotate. In addition, since the elastic member 7 urges the stationary seal ring 10 toward the rotating seal ring 20, the sliding surfaces 11 and 21 are in the contact state and the sealing target fluid F between the sliding surfaces 11 and 21 substantially does not leak to the inner space S1.
As shown in
The pressure of the sealing target fluid F having moved toward the end portion 18A of the Rayleigh step 18 is increased at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof. That is, a positive pressure is generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof.
Since the depth of the Rayleigh step 18 is shallow, a positive pressure is generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof even when the movement amount of the sealing target fluid F is small when the rotation speed of the rotating seal ring 20 is low.
Further, the sliding surfaces 11 and 21 are slightly separated from each other by a force caused by the positive pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof. Accordingly, the sealing target fluid F in the fluid introduction groove 16 indicated by the arrow H2 mainly flows between the sliding surfaces 11 and 21. In this way, since the sealing target fluid F is interposed between the sliding surfaces 11 and 21, lubricity is improved even at a low-speed rotation and the wear between the sliding surfaces 11 and 21 can be suppressed.
Additionally, since the levitation distance between the sliding surfaces 11 and 21 is small, the amount of the sealing target fluid F leaking into the inner space S1 is small. Further, since the liquid guide groove portion 17 is provided, a large amount of the sealing target fluid F can be held and poor lubrication between the sliding surfaces 11 and 21 can be prevented at the low-speed rotation.
On the other hand, in the dynamic pressure generation groove 13 and the inclined groove 13′, when the relative rotation speed of the rotating seal ring 20 and the stationary seal ring 10 is low, the atmosphere A is not sufficiently dense in the dynamic pressure generation groove 13 and the inclined groove 13′, a high positive pressure is not generated, and a force caused by the positive pressure generated by the dynamic pressure generation groove 13 and the inclined groove 13′ is relatively smaller than a force caused by the positive pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof. Thus, when the rotating seal ring 20 rotates at a low speed, a force caused by the positive pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof mainly serves to separate the sliding surfaces 11 and 21 from each other.
When the relative rotation speed of the rotating seal ring 20 increases, as shown in
The pressure of the atmosphere A having moved toward the outer radial end portion of the inclined groove 14 is increased at the acute angle portion 13C and in the vicinity thereof. That is, a positive pressure is generated at the acute angle portion 13C and in the vicinity thereof. Further, the pressure of the atmosphere A having moved toward the outer radial end 13B′ of the inclined groove 13′ is increased at the acute angle portion 13C′ and in the vicinity thereof. That is, a positive pressure is generated at the acute angle portion 13C′ and in the vicinity thereof.
In this way, a force caused by the positive pressure generated at the acute angle portions 13C and 13C′ and in the vicinity thereof is added to a force caused by the positive pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof and the sliding surfaces 11 and 21 are further separated from each other compared to a low-speed state. Accordingly, the atmosphere A in the dynamic pressure generation groove 13 and the inclined groove 13′ indicated by the arrows L2 and L2′ mainly flows between the sliding surfaces 11 and 21.
Since the atmosphere A in the dynamic pressure generation groove 13 and the inclined groove 13′ indicated by the arrows L2 and L2′ acts to push back the sealing target fluid F in the vicinity of the acute angle portion 13C of the dynamic pressure generation groove 13 and the acute angle portion 13C′ of the inclined groove 13′ toward the outer space S2, the amount of the sealing target fluid F leaking into the dynamic pressure generation groove 13 and the inclined groove 13′ or the inner space S1 is small.
Further, since the atmosphere A in the inclined groove 13′ indicated by the arrow L2′ pushes back the sealing target fluid F in the vicinity of the acute angle portion 13C′ of the inclined groove 13′ toward the outer space S2 to enter the Rayleigh step 18 of the fluid introduction groove 16 as indicated by the arrow H3, it is possible to suppress the sealing target fluid F from leaking to the inner space S1.
Since the sliding component of this embodiment is designed so that the positive pressure generation ability of the entire inclined grooves 14 and 13′ at the high-speed rotation in the normal rotation direction is sufficiently larger than the positive pressure generation ability of the entire reverse inclined groove 15 and the positive pressure generation ability of the entire Rayleigh step 18, only the atmosphere A finally exists between the sliding surfaces 11 and 21, that is, a gas lubrication is performed.
Next, the reverse rotation state of the rotating seal ring 20 will be described with reference to
Further, at this time, the sealing target fluid F existing at the land portion 12b between the adjacent fluid introduction grooves 16 or the land portion 12c between the dynamic pressure generation groove 13 and the fluid introduction groove 16 separated from each other in the radial direction is sucked into the fluid introduction groove 16 as indicated by the arrow H2′ due to the negative pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof and this tendency becomes remarkable in the vicinity of the end portion 18A.
In this way, when the rotating seal ring 20 rotates counterclockwise in the reverse rotation direction relative to the stationary seal ring 10, a large amount of the sealing target fluid F sucked into the fluid introduction groove 16 is held in the liquid guide groove portion 17 and poor lubrication between the sliding surfaces 11 and 21 can be prevented.
On the other hand, in the dynamic pressure generation groove 13, as shown in
The pressure of the sealing target fluid F having moved toward the acute angle portion 13D is increased at the acute angle portion 13D and in the vicinity thereof. That is, a positive pressure is generated at the acute angle portion 13D and in the vicinity thereof.
Further, the sliding surfaces 11 and 21 are slightly separated from each other due to a force caused by the positive pressure generated at the acute angle portion 13D and in the vicinity thereof. Accordingly, the sealing target fluid F in the fluid introduction groove 16 indicated by the arrow H4′ mainly flows between the sliding surfaces 11 and 21.
Since the sealing target fluid F flowing out of the acute angle portion 13D as indicated by the arrow H4′ acts to push back the sealing target fluid F in the vicinity of the acute angle portion 13D of the dynamic pressure generation groove 13 toward the outer space S2, the amount of the sealing target fluid F leaking into the dynamic pressure generation groove 13 or the inner space S1 is small.
Further, at this time, the sealing target fluid F existing in the vicinity of the acute angle portion 13C is sucked into the reverse inclined groove 15 as indicated by the arrow H5′ due to the negative pressure generated at the acute angle portion 13C and in the vicinity thereof. The sealing target fluid F sucked into the reverse inclined groove 15 is returned between the sliding surfaces 11 and 21 from the acute angle portion 13D.
Further, the sealing target fluid F introduced into the fluid introduction groove 16 and flowing out between the sliding surfaces 11 and 21 from the vicinity of the liquid guide groove portion 17 is captured by being sucked into the reverse inclined groove 15 of the dynamic pressure generation groove 13 located on the downstream side in the relative rotation direction of the liquid guide groove portion 17 of the fluid introduction groove 16. At this time, since a negative pressure is generated at the acute angle portion 13C and in the vicinity thereof, the sealing target fluid F having flowed out between the sliding surfaces 11 and 21 is easily sucked into the reverse inclined groove 15 of the dynamic pressure generation groove 13.
Further, the sealing target fluid F having returned between the sliding surfaces 11 and 21 from the acute angle portion 13D of the dynamic pressure generation groove 13 located on the upstream side in the relative rotation direction of the Rayleigh step 18 of the fluid introduction groove 16 toward the outer radial side is sucked into the fluid introduction groove 16 as indicated by the arrow H2′ due to the negative pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof as described above.
In this way, since the sealing target fluid F is passed between the fluid introduction groove 16 and the plurality of reverse inclined grooves 15 and is retained on the outer radial side in such a manner that the reverse inclined grooves 15 of the plurality of dynamic pressure generation grooves 13 are arranged between the adjacent fluid introduction grooves 16 in the circumferential direction in the reverse rotation state, the amount of the sealing target fluid F leaking into the dynamic pressure generation groove 13 or the inner space S1 is small.
In addition, in the inclined groove 14, since the inner radial end 13A is opened to the inner space S1, the negative pressure generated in the inclined groove 14 during the reverse rotation of the rotating seal ring 20 decreases. Further, since the inclined groove 14 and the reverse inclined groove 15 are continuous grooves, the sealing target fluid F having entered the dynamic pressure generation groove 13 is returned between the sliding surfaces 11 and 21 from the acute angle portion 13D toward the outer radial side due to the flow of the sealing target fluid F in the reverse inclined groove 15 during the reverse rotation of the rotating seal ring 20. Accordingly, the amount of the sealing target fluid F leaking to the inner space S1 through the inclined groove 14 can be reduced.
As described above, when the rotating seal ring 20 starts to rotate relative to the stationary seal ring 10, the sliding surfaces 11 and 21 are lubricated by the sealing target fluid F flowing out between the sliding surfaces 11 and 21 from the fluid introduction groove 16. When the rotating seal ring rotates at a high speed, the sliding surfaces 11 and 21 are separated from each other by the positive pressure generated by the atmosphere A in the dynamic pressure generation groove 13 and the inclined groove 13′. Accordingly, it is possible to suppress the wear between the sliding surfaces 11 and 21 from the start of the relative rotation to the high-speed rotation.
Further, when the rotating seal ring 20 rotates in the normal rotation direction, the sealing target fluid F having flowed between the sliding surfaces 11 and 21 from the outer space S2 is sucked and pushed back toward the outer space S2 due to the positive pressure mainly generated in the inclined groove 13′ and the inclined groove 14 of the dynamic pressure generation groove 13. Accordingly, it is possible to suppress the sealing target fluid F from leaking to the inner space S1 from between the sliding surfaces 11 and 21. On the other hand, when the rotating seal ring 20 rotates in the reverse rotation direction, the sealing target fluid F having entered the reverse inclined groove 15 on the outer radial side of the inclined groove 14 in the dynamic pressure generation groove 13 moves in a following manner due to shearing with the sliding surface 21 of the rotating seal ring 20 and is returned between the sliding surfaces 11 and 21 from the end portion on the side of the sealing target fluid F of the reverse inclined groove 15, that is, the acute angle portion 13D toward the outer radial side. Accordingly, it is possible to reduce the leakage of the sealing target fluid F to the inner space S1. In this way, since the dynamic pressure generation groove 13 includes the inclined groove 14 and the reverse inclined groove 15 having different rotation directions for generating the main dynamic pressure, it is possible to suppress the wear by separating the sliding surfaces 11 and 21 from each other during both rotations and to suppress the sealing target fluid F from leaking to the inner space S1 from between the sliding surfaces 11 and 21.
Further, in the reverse rotation state, the sealing target fluid F introduced into the fluid introduction groove 16 and flowing out between the sliding surfaces 11 and 21 from the vicinity of the liquid guide groove portion 17 is captured by being sucked into the reverse inclined groove 15 of the dynamic pressure generation groove 13 due to the negative pressure generated at the acute angle portion 13C of the dynamic pressure generation groove 13 located on the downstream side in the relative rotation direction of the liquid guide groove portion 17 of the fluid introduction groove 16 and in the vicinity thereof and the sealing target fluid F captured in the reverse inclined groove 15 moves in a following manner due to shearing with the sliding surface 21 of the rotating seal ring 20 and is returned between the sliding surfaces 11 and 21 from the acute angle portion 13D of the reverse inclined groove 15 toward the outer radial side. Accordingly, it is possible to further reduce the leakage of the sealing target fluid F to the inner space S1.
Further, since the dynamic pressure generation groove 13 is formed in an L shape by the inclined groove 14 and the reverse inclined groove 15, it is possible to generate a positive pressure by allowing the acute angle portion 13C to accumulate the sealing target fluid F sucked from the acute angle portion 13D to the reverse inclined groove 15 along with the atmosphere A sucked from the inner radial end 13A to the inclined groove 14 in the normal rotation state. Further, since the sealing target fluid F can be pushed back toward the outer space S2 by the dynamic pressure generated in the reverse inclined groove 15 in the reverse rotation state, it is possible to suppress the sealing target fluid F from entering the inclined groove 14 and to suppress the sealing target fluid F from leaking to the inner space S1 through the inclined groove 14.
Further, the extension length of the reverse inclined groove 15 is shorter than that of the inclined groove 14. Accordingly, it is possible to generate a positive pressure by the reverse inclined groove 15 at an early time in the reverse rotation state.
Further, the reverse inclined groove 15 is a groove including the acute angle portion 13D of which the outer radial end portion is tapered. Accordingly, since it is easy to generate a positive pressure by concentrating the sealing target fluid F in the reverse inclined groove 15 on the acute angle portion 13D in the reverse rotation state, it is possible to increase the dynamic pressure effect.
Further, the reverse inclined groove 15 is provided only at the dynamic pressure generation groove 13 formed between the adjacent fluid introduction grooves 16. Accordingly, the reverse inclined groove 15 does not exist at the position radially overlapping with the inclined groove 13′ disposed on the inner radial side of the fluid introduction groove 16 and the extension length of the inclined groove 13′ disposed on the inner radial side of the fluid introduction groove 16 can be increased. Therefore, since it is easy to generate a high positive pressure in the inclined groove 13′ by the atmosphere A in the normal rotation state, it is possible to increase the dynamic pressure effect.
Further, the inclined grooves 14 and 13′ communicate with the inner space S1. Accordingly, since it is easy to introduce the atmosphere A of the inner space S1 from the inner radial ends 13A and 13A′ to the inclined grooves 14 and 13′ and to generate a positive pressure in the inclined grooves 14 and 13′ by the atmosphere A in the normal rotation state, it is possible to increase the dynamic pressure effect.
Further, the fluid introduction groove 16 includes the Rayleigh step 18. Accordingly, since it is possible to generate the dynamic pressure by the Rayleigh step 18 in the normal rotation state so that the sliding surfaces 11 and 21 are slightly separated from each other and the sealing target fluid F can be introduced between the sliding surfaces 11 and 21, it is possible to improve the lubricity between the sliding surfaces 11 and 21. Further, since the liquid guide groove portion 17 of the fluid introduction groove 16 communicates with the outer space S2, it is easy to introduce the sealing target fluid F into the liquid guide groove portion 17 and to generate the positive pressure by the Rayleigh step 18 at an early time.
Further, since the Rayleigh step 18 can suck the sealing target fluid F in the periphery of the end portion 18A by the negative pressure in the reverse rotation state and introduce the sealing target fluid into the liquid guide groove portion 17, it is possible to suppress the sealing target fluid F from leaking to the inner space S1.
In addition, as a modified example of the stationary seal ring 10, as in a stationary seal ring 110 corresponding to the sliding component shown in
In addition, the arrangement configuration of the dynamic pressure generation groove or the fluid introduction groove of this modified example can be also applied to the sliding surfaces of the sliding components of the following embodiments. That is, the arrangement configuration can be applied to an outside type mechanical seal by replacing the radial arrangement of the dynamic pressure generation grooves or the fluid introduction grooves of the following embodiments.
Next, a sliding component according to a second embodiment of the present invention will be described with reference to
As shown in
In addition, the extension length of the reverse inclined groove 215′ is shorter than the extension length of the inclined groove 214′. Further, the extension lengths of the inclined groove 214′ and the reverse inclined groove 215′ are respectively shorter than the extension lengths of an inclined groove 214 and a reverse inclined groove 215 constituting the dynamic pressure generation groove 213.
Accordingly, in the normal rotation state, similarly to the dynamic pressure generation groove 213, the sealing target fluid F sucked into the dynamic pressure generation groove 213′ in the periphery of the reverse inclined groove 215′ and the inclined groove 214′ also on the inner radial side of the fluid introduction groove 16 is returned between the sliding surfaces 211 and 21 from an acute angle portion 213C′ toward the outer radial side and is pushed back toward the outer space S2. Further, in the reverse rotation state, the sealing target fluid F flowing out of an acute angle portion 213D′ pushes back the sealing target fluid F in the vicinity of the acute angle portion 213D′ toward the outer space S2 to enter the Rayleigh step 18 of the fluid introduction groove 16. Therefore, it is possible to suppress the wear by separating the sliding surfaces 211 and 21 from each other during both rotations and to further suppress the sealing target fluid F from leaking to the inner space S1 from between the sliding surfaces 211 and 21.
Next, a sliding component according to a third embodiment of the present invention will be described with reference to
As shown in
Specifically, the inclined groove 314 extends in an arc shape while being inclined in the normal rotation direction of the rotating seal ring 20 from an inner radial end 314A toward the outer radial side by allowing the inner radial end 314A to communicate with the inner space S1 and a linear outer radial end 314B of the inclined groove 314 is closed not to communicate with the reverse inclined groove 315.
The reverse inclined groove 315 has a substantially parallelogram shape and extends in a linear shape while being inclined in the reverse rotation direction of the rotating seal ring 20 from an inner radial end 315A toward the outer radial side and an outer radial end 315B is closed not to communicate with the outer space S2.
Further, the annular land portion 312d which is continuous in the circumferential direction and has a predetermined radial width or more is formed between the inclined groove 314 and the reverse inclined groove 315. In addition, the annular land portion 312d is also disposed on the same plane as the other land portion and forms the flat surface of the land 312.
Further, the inclined groove 314 is provided with an acute angle portion 314C which is formed by a wall portion 314b and a side wall portion 314d at the outer radial end 314B and an obtuse angle portion 314D which is formed by the wall portion 314b and a side wall portion 314c.
Further, the reverse inclined groove 315 is provided with an acute angle portion 315C which is formed by a wall portion 315b and a side wall portion 315d at the inner radial end 315A and an acute angle portion 315D which is formed by a wall portion 315e and a side wall portion 315c at the linear outer radial end 315B and the acute angle portion 315D is located on the outer radial side in relation to the acute angle portion 315C and the downstream side in the reverse rotation direction of the rotating seal ring 20.
Further, the extension length of the reverse inclined groove 315 is shorter than the extension length of the inclined groove 314. Further, the depth of the reverse inclined groove 315 is the same as the depth of the inclined groove 314. In addition, the reverse inclined groove 315 may be formed to have a depth different from that of the inclined groove 314.
Further, the outer radial end 314B and the inner radial end 315A are arranged at the radially overlapping position to be substantially parallel with substantially the same length. It is preferable that the inner radial end 315A is disposed at the radially overlapping position while having a length equal to or larger than the outer radial end 314B from the viewpoint of preventing the leakage.
Next, the operation during the relative rotation of the stationary seal ring 310 and the rotating seal ring 20 will be described with reference to
In the dynamic pressure generation groove 313, when the relative rotation speed of the rotating seal ring 20 and the stationary seal ring 310 in the normal rotation direction is low, the atmosphere A is not sufficiently dense in the inclined groove 314 and a high positive pressure is not generated. Further, since the extension length of the reverse inclined groove 315 is short, a high positive pressure is not generated even when the sealing target fluid F enters the reverse inclined groove 315.
When the relative rotation speed of the rotating seal ring 20 increases, as shown in
The pressure of the atmosphere A having moved toward the outer radial end 314B of the inclined groove 314 is increased at the acute angle portion 314C and in the vicinity thereof. That is, a positive pressure is generated at the acute angle portion 314C and in the vicinity thereof.
Further, since the atmosphere A in the inclined groove 314 indicated by the arrow L2 acts to push back the sealing target fluid F in the vicinity of the acute angle portion 314C toward the outer space S2, the amount of the sealing target fluid F leaking into the inclined groove 314 or the inner space S1 is small.
On the other hand, in the reverse inclined groove 315, the sealing target fluid F having entered the reverse inclined groove 315 moves in a following manner in the normal rotation direction of the rotating seal ring 20 due to shearing with the sliding surface 21 and the sealing target fluid F in the vicinity of the acute angle portion 315D is drawn into the reverse inclined groove 315. That is, in the reverse inclined groove 315, the sealing target fluid F moves from the acute angle portion 315D toward the acute angle portion 315C of the reverse inclined groove 315 as indicated by the arrow H5 and the pressure at the acute angle portion 315C and in the vicinity thereof is increased. That is, a positive pressure is generated at the acute angle portion 315C and in the vicinity thereof.
Further, the sealing target fluid F in the reverse inclined groove 315 indicated by the arrow H6 is pushed back toward the outer space S2 by the atmosphere A in the inclined groove 314 indicated by the arrow L2 together with the sealing target fluid F in the vicinity of the acute angle portion 315C.
Next, the reverse rotation state of the rotating seal ring 20 will be described with reference to
Since the sealing target fluid F in the reverse inclined groove 315 indicated by the arrow H4′ acts to push back the sealing target fluid F in the vicinity of the acute angle portion 315D of the reverse inclined groove 315 toward the outer space S2, the amount of the sealing target fluid F leaking into the inclined groove 314 or the inner space S1 is small.
Further, at this time, the sealing target fluid F existing in the periphery of the acute angle portion 315C is sucked into the reverse inclined groove 315 as indicated by the arrow H5′ due to the negative pressure generated at the acute angle portion 315C and in the vicinity thereof. The sealing target fluid F sucked into the reverse inclined groove 315 is returned between the sliding surfaces 311 and 21 from the acute angle portion 315D toward the outer radial side.
Further, the sealing target fluid F introduced into the fluid introduction groove 16 and flowing out between the sliding surfaces 311 and 21 from the vicinity of the liquid guide groove portion 17 is captured by being sucked into the reverse inclined groove 315 of the dynamic pressure generation groove 313 located on the downstream side in the relative rotation direction of the liquid guide groove portion 17 of the fluid introduction groove 16. At this time, since a negative pressure is generated at the acute angle portion 315C and in the vicinity thereof, the sealing target fluid F having flowed out between the sliding surfaces 311 and 21 is easily sucked into the reverse inclined groove 315 of the dynamic pressure generation groove 313.
Further, the sealing target fluid F having returned between the sliding surfaces 311 and 21 toward the outer radial side from the acute angle portion 315D of the reverse inclined groove 315 of the dynamic pressure generation groove 313 located on the upstream side in the relative rotation direction of the Rayleigh step 18 of the fluid introduction groove 16 is sucked into the fluid introduction groove 16 as indicated by the arrow H2′ due to the negative pressure generated at the end portion 18A of the Rayleigh step 18 and in the vicinity thereof as described above.
In this way, since the sealing target fluid F is passed between the fluid introduction groove 16 and the plurality of reverse inclined grooves 315 and is retained on the outer radial side in such a manner that the reverse inclined grooves 315 of the plurality of dynamic pressure generation grooves 313 are arranged between the adjacent fluid introduction grooves 16 in the circumferential direction in the reverse rotation state, the amount of the sealing target fluid F leaking into the dynamic pressure generation groove 313 or the inner space S1 is small.
As described above, when the rotating seal ring 20 rotates in the normal rotation direction, the sealing target fluid F having flowed between the sliding surfaces 311 and 21 from the outer space S2 is sucked and pushed back toward the outer space S2 due to the positive pressure generated in each of the reverse inclined groove 315 and the inclined groove 314 of the dynamic pressure generation groove 313. Accordingly, it is possible to suppress the sealing target fluid F from leaking to the inner space S1 from between the sliding surfaces 311 and 21. On the other hand, when the rotating seal ring 20 rotates in the reverse rotation direction, the sealing target fluid F having entered the reverse inclined groove 315 on the outer radial side of the inclined groove 314 moves in a following manner due to shearing with the sliding surface 21 of the rotating seal ring 20 and is returned between the sliding surfaces 311 and 21 from the end portion on the side of the sealing target fluid F of the reverse inclined groove 315, that is, the acute angle portion 315D toward the outer radial side. Accordingly, it is possible to reduce the leakage of the sealing target fluid F to the inner space S1. In this way, since the dynamic pressure generation groove 313 includes the inclined groove 314 and the reverse inclined groove 315 having different rotation directions for generating the main dynamic pressure, it is possible to suppress the wear by separating the sliding surfaces 311 and 21 during both rotations and to suppress the sealing target fluid F from leaking to the inner space S1 from between the sliding surfaces 311 and 21.
Further, in the reverse rotation state, the sealing target fluid F introduced into the fluid introduction groove 16 and flowing out between the sliding surfaces 311 and 21 from the vicinity of the liquid guide groove portion 17 is captured by being sucked into the reverse inclined groove 315 of the dynamic pressure generation groove 313 located on the downstream side in the relative rotation direction of the liquid guide groove portion 17 of the fluid introduction groove 16. At this time, since a negative pressure is generated at the acute angle portion 315C and in the vicinity thereof, the sealing target fluid F having flowed out between the sliding surfaces 311 and 21 is easily sucked into the reverse inclined groove 315 of the dynamic pressure generation groove 313. Further, since the sealing target fluid F captured in the reverse inclined groove 315 moves in a following manner due to shearing with the sliding surface 21 of the rotating seal ring 20 and is returned between the sliding surfaces 311 and 21 from the acute angle portion 315D of the reverse inclined groove 315 toward the outer radial side, it is possible to further reduce the leakage of the sealing target fluid F to the inner space S1.
Further, since the annular land portion 312d which is continuous in the circumferential direction and has a predetermined radial width or more is formed between the inclined groove 314 and the reverse inclined groove 315 and the inclined groove 314 and the reverse inclined groove 315 are separated from each other by the annular land portion 312d, the sealing target fluid F is captured by being sucked into the reverse inclined groove 315 from the acute angle portion 315C on the outer radial side of the annular land portion 312d in the reverse rotation state of the rotating seal ring 20. Accordingly, it is possible to suppress the sealing target fluid F from entering the inclined groove 314 over the annular land portion 312d and to further reduce the sealing target fluid F leaking to the inner space S1 through the inclined groove 314.
Further, since the inclined groove 314 and the reverse inclined groove 315 are separated from each other by the annular land portion 312d, the inclined groove 314 and the reverse inclined groove 315 do not interfere with each other in the generation of the dynamic pressure during both rotations. Accordingly, it is easy to exhibit the dynamic pressure effect.
Further, the radial center of the annular land portion 312d separating the inclined groove 314 and the reverse inclined groove 315 from each other is disposed closer to the sealing target fluid F than the radial center of the sliding surface 311. Accordingly, since the long extension length of the inclined groove 314 can be ensured and the inclined groove 314 serves as a main dynamic pressure generation source compared to the reverse inclined groove 315 in the normal rotation state, it is possible to further suppress the sealing target fluid F from leaking to the inner space S1.
In addition, the inclined groove 313′ is not limited to the same configuration as that of the inclined groove 13′ of the first embodiment and may have, for example, the same configuration as the dynamic pressure generation groove 213′ of the second embodiment. Similarly to the dynamic pressure generation groove 313, the inclined groove and the reverse inclined groove may be separated from each other in the radial direction. Further, the modified configuration of the dynamic pressure generation groove can be also applied to the sliding surfaces of the sliding components of the following embodiments.
Next, a sliding component according to a fourth embodiment of the present invention will be described with reference to
As shown in
The concave portion 415 has a substantially square shape and is disposed at the substantially circumferential center of an outer radial end 414B of the inclined groove 414 in a land portion 412b between the adjacent fluid introduction grooves 16 in the circumferential direction. In the concave portion 415, corner portions facing each other in the radial direction, that is, diagonal lines are arranged on the radial line of the stationary seal ring 410.
Accordingly, since the sealing target fluid F flowing out between the sliding surfaces 411 and 21 from the fluid introduction groove 16 is captured by the concave portion 415 on the downstream side in the relative rotation direction of the fluid introduction groove 16 in the reverse rotation state, it is possible to reduce the leakage of the sealing target fluid F to the inner space S1.
In addition, similarly to the reverse inclined groove 315 of the third embodiment, the concave portion 415 is not limited to a substantially square shape unless there is directionality in the circumferential direction extending from upstream to downstream during relative rotation. For example, the concave portion may be freely formed in other shapes such as a circular shape or a triangular shape.
Next, a sliding component according to a fifth embodiment of the present invention will be described with reference to
As shown in
Accordingly, in the normal rotation state of the rotating seal ring 20, the sealing target fluid F in the fluid introduction groove 516 moves in a following manner in the normal rotation direction of the rotating seal ring 20 due to shearing with the sliding surface 21 to move from the liquid guide groove portion 517 toward the Rayleigh step 518 and the sealing target fluid F of the outer space S2 is drawn into the liquid guide groove portion 517. Further, even in the reverse rotation state, the sealing target fluid F in the fluid introduction groove 516 moves in a following manner in the reverse rotation direction of the rotating seal ring 20 due to shearing with the sliding surface 21 to move from the liquid guide groove portion 517 toward the Rayleigh step 518′ and the sealing target fluid F of the outer space S2 is drawn into the liquid guide groove portion 517.
In this way, since the fluid introduction groove 516 generate the dynamic pressure by the Rayleigh steps 518 and 518′ during both rotations so that the sliding surfaces 511 and 21 are slightly separated from each other and the sealing target fluid F can be supplied between the sliding surfaces 511 and 21, it is possible to improve the lubricity between the sliding surfaces 511 and 21.
Next, a sliding component according to a sixth embodiment of the present invention will be described with reference to
As shown in
Accordingly, since the fluid introduction groove 616 slightly separates the sliding surfaces 611 and 21 from each other during both rotations so that the sealing target fluid F is introduced between the sliding surfaces 611 and 21, it is possible to further suppress the wear between the sliding surfaces 611 and 21 and to suppress the leakage of the sealing target fluid F by the inclined groove 614 and the reverse inclined groove 615 separated in the radial direction in the dynamic pressure generation groove 613.
Next, a sliding component according to a seventh embodiment of the present invention will be described with reference to
As shown in
Specifically, in the fluid introduction groove 716, a side wall portion 716a on the downstream side in the normal rotation direction of the rotating seal ring 20 extends in a linear shape while being inclined toward the reverse rotation direction from the outer radial side toward the inner radial side and a side wall portion 716d on the upstream side in the normal rotation direction of the rotating seal ring 20 extends in a linear shape along a radial line from the outer radial side toward the inner radial side. Further, in the fluid introduction groove 716, an acute angle portion 716A which is formed by a side wall portion 716b and a wall portion 716c at the inner radial end is disposed to be circumferentially adjacent to an acute angle portion 713C of the dynamic pressure generation groove 713 on the downstream side in the normal rotation direction.
Accordingly, since the side wall portion 716a of the fluid introduction groove 716 is inclined along the circumferential direction, the sealing target fluid F is likely to be introduced into the fluid introduction groove 716 when the relative rotation of the stationary seal ring 710 and the rotating seal ring 20 starts in the normal rotation state of the rotating seal ring 20.
Further, since the acute angle portion 716A of the fluid introduction groove 716 is disposed to be circumferentially adjacent to the acute angle portion 713C of the dynamic pressure generation groove 713, the sealing target fluid F intensively leaking to the acute angle portion 716A of the fluid introduction groove 716 in the reverse rotation state of the rotating seal ring 20 can be sucked and collected by the negative pressure generated at the acute angle portion 713C of the dynamic pressure generation groove 713 and in the vicinity thereof. Accordingly, it is possible to further suppress the sealing target fluid F from leaking to the inner space S1.
Next, a sliding component according to an eighth embodiment of the present invention will be described with reference to
As shown in
Specifically, the fluid introduction groove 816 extends in a linear shape while being inclined toward the reverse rotation direction from the outer radial side toward the inner radial side of a side wall portion 816a on the downstream side in the normal rotation direction of the rotating seal ring 20 and a side wall portion 816b on the upstream side in the normal rotation direction thereof. Further, in the fluid introduction groove 816, an acute angle portion 816A which is formed by a side wall portion 816b and a wall portion 816c at the inner radial end is disposed to be circumferentially adjacent to an acute angle portion 813C of the dynamic pressure generation groove 813 on the downstream side in the normal rotation direction.
Accordingly, since each of the side wall portions 816a and 816b of the fluid introduction groove 816 is inclined along the circumferential direction, the sealing target fluid F is more likely to be introduced into the fluid introduction groove 816 when the relative rotation of the stationary seal ring 810 and the rotating seal ring 20 starts in the normal rotation state of the rotating seal ring 20.
Further, in the fluid introduction groove 816, since the acute angle portion 816A has an angle smaller than that of the seventh embodiment and is adjacent to the acute angle portion 813C of the dynamic pressure generation groove 813 in the circumferential direction, the sealing target fluid F is likely to concentrate on the acute angle portion 816A and the sealing target fluid F intensively leaking to the acute angle portion 816A of the fluid introduction groove 816 can be sucked and collected by the negative pressure generated at the acute angle portion 813C of the dynamic pressure generation groove 813 and in the vicinity thereof in the reverse rotation state of the rotating seal ring 20. Accordingly, it is possible to further suppress the sealing target fluid F from leaking to the inner space S1.
Next, a sliding component according to a ninth embodiment of the present invention will be described with reference to
As shown in
Accordingly, since the fluid introduction groove 916 includes the Rayleigh step 918, it is possible to improve the lubricity between the sliding surfaces 911 and 21 in such a manner that the Rayleigh step 918 generates the dynamic pressure in the normal rotation state so that the sliding surfaces 911 and 21 are slightly separated from each other and the sealing target fluid F is supplied between the sliding surfaces 911 and 21.
Next, a sliding component according to a tenth embodiment of the present invention will be described with reference to
As shown in
Accordingly, since the dynamic pressure is generated by the Rayleigh steps 1018 and 1018′ during both rotations so that the sliding surfaces 1011 and 21 are slightly separated from each other and the sealing target fluid F is supplied between the sliding surfaces 1011 and 21, it is possible to improve the lubricity between the sliding surfaces 1011 and 21.
Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration is not limited to these embodiments and is included in the present invention even if there are changes or additions within the scope of the present invention.
For example, in the above-described embodiments, as the sliding component, the mechanical seal for automobiles has been described as an example, but other mechanical seals for general industrial machines may be used. Further, the present invention is not limited to the mechanical seal and may be a sliding component other than the mechanical seal such as a slide bearing.
Further, in the above-described embodiments, an example in which the dynamic pressure generation groove and the fluid introduction groove are provided in the stationary seal ring has been described, but the dynamic pressure generation groove and the fluid introduction groove may be provided in the rotating seal ring.
Further, the sealing target fluid side has been described as the high-pressure side and the leakage side has been described as the low-pressure side. However, the sealing target fluid side may be the low-pressure side, the leakage side may be the high pressure side, and the sealing target fluid side and the leakage side may have substantially the same pressure.
Further, it has been described that the inclined groove in the dynamic pressure generation groove communicates with the inner space S1, but the present invention is not limited thereto. If the dynamic pressure can be generated, the inclined groove may not communicate with the inner space.
Further, the dynamic pressure generation groove is not limited to the one in which the reverse inclined groove is continuously formed at the outer radial end portion of the inclined groove and the reverse inclined groove may be formed by branching from substantially the center portion of the inclined groove in the extension direction.
Further, in the dynamic pressure generation groove, the plurality of reverse inclined grooves may be arranged for one inclined groove.
Further, the inclined groove is not limited to the one extending in the circular shape while being inclined in the circumferential direction and the shape may be simplified by the linear shape.
Further, it has been described that the dynamic pressure generation groove and the fluid introduction groove have substantially the same depth, but the fluid introduction groove may be deeper than the dynamic pressure generation groove.
Further, in this embodiment, the sealing target fluid F has been described as the high-pressure liquid, but the present invention is not limited thereto. For example, the sealing target fluid may be a gas or a low-pressure liquid or may be a mist in which a liquid and a gas are mixed.
Further, in this embodiment, the leakage side fluid has been described as the atmosphere A corresponding to the low-pressure gas, but the present invention is not limited thereto. For example, the leakage side fluid may be a liquid or a high-pressure gas or may be a mist in which a liquid and a gas are mixed.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-095900 | Jun 2020 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2021/020703 | 5/31/2021 | WO |
