Number | Name | Date | Kind |
---|---|---|---|
4457114 | Hennenfent et al. | Jul 1984 | |
4477968 | Kracke et al. | Oct 1984 | |
4536992 | Hennenfent et al. | Aug 1985 | |
4559743 | Kracke et al. | Dec 1985 | |
4675986 | Yen | Jun 1987 | |
4689877 | Church | Sep 1987 | |
4912883 | Chang et al. | Apr 1990 | |
5023991 | Smith | Jun 1991 | |
5361547 | Church et al. | Nov 1994 | |
5463805 | Mowry et al. | Nov 1995 | |
5494473 | Dupuis et al. | Feb 1996 | |
5597340 | Church et al. | Jan 1997 |
Entry |
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G.P. Carver, L.W. Linholm, and T.J, Russell, "Use of Microelectronic Test Structures to Characterize IC Materials, Processes, and Processing Equipment*" Solid State Technology, Sep. 1990, pp. 85-92. |