The present invention relates to an actuator capable of operating in three dimensions, having more than two actuating arms and being driven by a piezo or other smart material device, and which may be adapted for use as an actuator, an energy capture device, or a sensor. In certain embodiments, the smart material actuator can also operate as the driver for an audio speaker.
Smart material actuators are known in the art. However, such actuators have one or two actuating arms. Known actuators have limited applications as the actuator-driven arms are intended to move in a single plane and are not well adapted to applications such as grapplers that require compression on multiple planes or in applications where motion in a plane orthogonal to that of the arms is desired. The present invention overcomes such limitations by providing an actuator with more than two arms in which the arms move in independent planes but are operated by a common smart material device. The result is an actuator apparatus that is not only adaptable for use in applications for which one-arm or two-arm smart material actuators were not suitable and which also can be more efficient than one- or two-arm actuators in terms of work output.
A further objective of the present invention is to provide an actuator apparatus capable of operation at high frequencies. Known smart material actuators tend to fail when operated at very high frequencies of repeated activation and deactivation. One reason for such failures is that the actuating arms tend to overextend during high speed operation and especially when operating at resonant frequencies. Certain embodiments of the actuator of the present invention, however, are designed to overcome such limitations both by reducing the weight of the actuating arms and by providing dampeners adapted to prevent such overextensions without hindering high speed operation. The result is a multi-arm actuator capable of operation at very high frequencies, including, without limitation, embodiments capable of operating at frequencies that allow the actuator to serve as a driver of an efficient audio speaker.
A still further objective of the present invention is to provide a smart material actuator capable of being operated with actuating arms at a variety of angles. Allowing use of actuating arms of varying angles allows for great flexibility as arm angles can be selected to meet physical constraints imposed by differing applications. At the same time, it is disclosed that certain ranges of arm angles result in more efficient operation than others in terms of actuator work output. Accordingly, by providing an actuator apparatus capable of use with multiple arm angles, it becomes possible to optimize efficiency by adjusting arm angles.
In addition, the present invention is adapted such that common components can be utilized to assemble actuators of several configurations. This allows for flexibility and efficiency in manufacturing, as common components may be manufactured in bulk and then assembled in wide range of configurations adapted to different applications.
The present invention provides an actuator driven by a smart material device and having more than two actuating arms. The actuator apparatus comprises a smart material device, a compensator, a movable supporting member, at least three mechanical webs, and at least three actuating arms. The compensator has a first mounting surface, and the mechanical webs have a first compliant member attached to the compensator and a second compliant member attached to said movable supporting member. The movable supporting member has a second mounting surface opposed and substantially parallel to the first mounting surface, and a smart material or piezo device is affixed therebetween. Each actuating arm has a first actuating arm end attached to one mechanical web and an opposed second actuating arm end. The mechanical webs are spaced around the movable supporting member.
The piezo or other smart material device will change shape upon application of a suitable electric potential, thereby providing the motive force for the actuator. More specifically, upon application of a suitable electrical potential, the smart material device will expand, and will do so substantially without angular movement of the smart material device. The expansion urges the movable supporting member away from the first mounting surface and causes said compliant members to flex. The flexing of the compliant members, in turn, urge the actuating arms to move such that motion of the second actuating arm end is across a distance greater than the expansion of said smart material device as a result of the mechanical amplification of the assembly.
Embodiments of the present invention may be adapted to operate as an energy capture device in which movement of the actuating arms compresses the smart material device, thereby generating electrical current. Other embodiments may be adapted to be used as a sensor in which the signal generated by the arm movement senses the motion of the arms. In still further embodiments, the second actuating arm ends may be attached to the outside perimeter of a speaker cone, with the compensator attached to the center. In this form, the actuator may operate as a speaker driver.
Other objectives and features of the present invention will become apparent from the attached drawings, which illustrate certain preferred embodiments of the apparatus of this invention, wherein
While the following describes preferred embodiments of this invention with reference to the included figures, it is to be understood that this description is to be considered only as illustrative of the principles of the invention and is not to be limitative thereof, as numerous other variations, all within the scope of the invention, will readily occur to others in light of the disclosure in this detailed description.
Herein, it will also be understood that various embodiments of the present invention may be utilized as an actuator (in which motion is generated by the application of an electrical potential), as an energy capture device (in which motion is converted to electrical energy), or as a sensor (in which changes in the positions of the actuating arms or compensator are converted into electrical signals indicating the degree of such change). Accordingly, herein, the term “actuator” refers to the smart material apparatus of the present invention without limiting such apparatus to a particular use as an actuating, energy capture, or sensing device.
It will also be noted that in the illustrated embodiments, different embodiments comprise the same or similar components. Where the same component is suitable for use in different embodiments, the same reference number is used. For example, and without limitation, actuating arm 150 is illustrated as a common component that may be used in embodiments including 100, 100′, 200 and 500. Accordingly, the same number is used to indicate the common part used in the illustration of each assembly. Where components in different embodiments are similar variations of the same component, but are not common parts, a similar number is used, but with a differing initial first, or in the case of four-digit numbers, first and second digits, but common second and third digits. For example, and without limitation, mechanical webs 140, 240, and 340 each are examples of mechanical webs with similar structures adapted for use in different embodiments of the apparatus of the present invention, but need not be interchangeable parts. Finally, it will be noted that letters are used herein to designate axes defined by two points through which the axis runs. Designations such as α, and β, are used to indicate angles between such axes in order to describe preferred angles appropriate for use in various embodiments described herein.
Herein, the following terms shall have the following meanings:
The term “adapted” shall mean sized, shaped, configured, dimensioned, oriented and arranged as appropriate.
The term “smart material device” shall mean: a device comprising a piezoelectric material that expands when an electric potential is applied, or generates an electric charge when mechanical force is applied. Smart material devices include, without limitation, devices formed of alternating layers of ceramic piezoelectric material fired together (a so-called co-fired multilayer ceramic piezoelectric stack such as those available from suppliers including NEC) or a device formed of one or more layers of material cut from single crystal piezoelectric materials. In the foregoing, the term “piezoelectric material” also includes so-called “smart materials,” sometimes created by doping known piezoelectric materials to change their electrical or mechanical properties.
The term “mechanical web” shall mean a structure comprising two compliant members and being adapted to translate motion to an actuating arm.
The term “activation” when used in conjunction with “actuator” or “smart material device” means application of an electrical potential and current suitable to cause the smart material device to expand in an amount sufficient to flex the compliant members of at least one mechanical web.
The term “ring” means a closed shape with a continuous perimeter, and is not limited to only circular, ovoid, or other particular shapes.
The definitions and meanings of other terms herein shall be apparent from the following description, the figures, and the context in which the terms are used.
Compensator 120 has a first mounting surface 121 adapted to receive one end of smart material device 160. The first mounting surface 121 may be integral to compensator 120, for example in the form of an indentation (not illustrated), or may be in the form of a separate pad situated between compensator 120 and smart material device 160. In the embodiments illustrated, smart material device 160 is assumed to comprise conductors at either end (not illustrated). When such smart material devices 160 are utilized, first mounting surface 121 and compensator 120 may be formed of conductive materials such as aluminum, steel, stainless steel or Invar, thereby allowing compensator 120 to act as a convenient connection point for an electrical ground for smart material device 160.
Smart material device 160 may be a stack of piezo-electric, or other smart material, or may be a single piezoelectric crystal. A key feature of smart material device 160 is that it will change shape, and in particular will expand to increased length, upon application of a suitable electric potential. While the size and particular smart material used may vary according to application, smart material devices from manufacturers including NEC-Tokin (including without limitation part numbers AE0707D43H33, and AE0505D44), EPCOS (including without limitation part numbers LN04/8534, LN04/8671, LN04/8672) Ceramtec, and Kyocera are suitable for embodiments of actuators of the present invention.
Smart material device 160 is situated between first mounting surface 121 and movable supporting member 130, which comprises second mounting surface 131. Movable supporting member 130 may be formed from a variety of materials including, without limitation stainless steel, steel, aluminum, ceramics or carbon fiber. Where a conductive material is used, it is desirable to include electrode 161 and first insulator 162 between smart material device 160 and movable supporting member 130. Electrode 161 may conveniently pass through movable supporting member 130, with second insulator 163 providing further insulation where electrode 161 passes through movable supporting member 130. Because smart material device 160 expands and contracts according to the application of an electric potential, it is desirable that first insulator 162 be formed of a rigid material, which may conveniently be a ceramic material, varieties of which are known to those of skill in the art. In this way, the expansion and contraction of smart material device 160 will be more fully imparted to movable supporting member 130 with less loss due to the compression and expansion of first insulator 162. Because movable supporting member 130 may move upon expansion and contraction of smart material device 160, it is also desirable that, where a tight tolerance is used between electrode 161 and movable supporting member 130, second insulator 163 comprises a low-friction material such as Teflon that will reduce friction and heat as movable supporting member 130 moves, while still providing electrical insulation.
It will be understood by those of skill in the art, that the foregoing describes only one possible arrangement of positive and negative electrodes and that many other arrangements, are possible depending on the location of the terminals on smart material device 160, and include, without limitation, insulating compensator 120 such that it may serve as a ground while movable supporting member 130 serves as a positive terminal without the benefit of electrode 161 or insulators 162, 163, or simply providing wired connections (not illustrated) between side terminals (not illustrated) on smart material device 160, running through compensator 120 or movable supporting member 130 to terminals.
As noted above, movable supporting member 130 comprises a second mounting surface 131. Second mounting surface 131 is opposed and substantially parallel to first mounting surface 121. This is desirable as it allows smart material device 160 to be compressed between first mounting surface 121 and second mounting surface 131, without generating significant angular forces on smart material device 160. Preventing angular movement of smart material device 160 has been found helpful in increasing the operational life of smart material device 160. Additionally, pre-compressing, or “preloading” smart material device 160 has been found helpful in increasing the efficiency of smart material device 160 and, in turn, actuator apparatus 100. As illustrated in
An alternate means of preloading smart material device 160 is illustrated in
Where no preload device is used, each such means, however, preferably has the characteristic that tightening said means increases the level of preload applied to smart material device 160, thereby allowing preload to be adjusted by tightening and loosening compensator 120′. All such means, however, should be adapted such that ring 143 remains joined to compensator 120′ upon activation of smart material device 160.
In embodiments in which matching threads 123′ and 133 are utilized, compensator 120′ may conveniently be in the form of a canister and ring 143 may conveniently be circular. However, it will be understood that other shapes may be utilized for compensator 120′ and ring 143, including, without limitation, rectangular, ovoid or multi-sided shapes, depending on the attachment means selected. Where threads 123′ and 133 are utilized, however, compensator 120′ is attached to ring 143 with a turning or screwing motion. As it is desirable that smart material device 160 align properly and not twist, it is desirable in such embodiments to include at least one, and preferably two thrust pads 125′ and 126′ adapted to allow compensator 120′ to turn and compress smart material device 160 without twisting it. By forming thrust pads 125′ and 126′ from materials with low coefficients of friction, one may turn against the other without requiring smart material device 160 to twist at the same time. Additionally, in such embodiments, second mounting surface 131 may comprise means to prevent smart material device 160 from twisting upon assembly. One such means to prevent twisting comprises indentations 134 in second mounting surface 131 adapted to receive pins 135 incorporated into potting material 122. As potting material 122 preferably tightly encapsulates smart material device 160, preventing rotation of potting material 122 can, in turn, act to prevent rotation of smart material device 160. Other means to prevent rotation of smart material device 160 may also be used including, without limitation, adhesives (not illustrated), forming an indentation (not illustrated) on second mounting surface 131 adapted to receive square or rectangular embodiments of smart material device 160, forming protrusions (not illustrated) in second mounting surface 131 adapted to be received by indentations (not illustrated) in potting material 122, and forming surfaces (not illustrated) on second mounting surface 131 adapted to engage one or more surfaces on smart material device 160 and, thereby, resist rotation. Other appropriate means of preventing rotation will be apparent to those of skill in the art in light of this description.
Preferably thrust pads 125′ and 126′ will be conductive, thereby allowing compensator 120′ to be electrically connected to smart material device 160. Otherwise, other means (not illustrated) of forming an electrical connection with smart material device 160 may be used including, without limitation electrodes (not illustrated) similar to electrode 161 adapted to extend through thrust pads 125′ and 126′, or providing a wired connection (not illustrated) to a side terminal (not illustrated) on smart material device 160.
In this manner, smart material device 160, compensator 120′, threads 123′ and 133, first thrust pad 125′ and said second thrust pad 126′, and second mounting surface 131 may be adapted such that when said first compensator attachment means (in this case threads 123′) and said second compensator attachment means (in this case threads 133) are fully engaged, smart material device 160 is compressed between first mounting surface (in this case first thrust pad 125′) and said second mounting surface 131, thereby applying a predetermined preload on smart material device 160. For embodiments in which twisting of compensator 120′ is not needed during assembly, thrust pads 125′ and 126′ are not required and the same preload effect may be achieved without them.
In certain environments, it is desirable that smart material device 160 be protected from environmental contaminants. This may preferably be accomplished by including potting material 122 contained in compensator 120, 120′ which is preferably substantially in the form of a canister. The potting material 122, several examples of which are known to those of skill in the art, will preferably substantially fill the space between compensator 120, 120′ and smart material device 160. In this way, compensator 120, 120′, ring 143, and potting material 122 may be adapted such that, substantially upon full engagement of threads 123 or 123′ and 133 (or other connection means as appropriate), smart material device 160 is substantially sealed and substantially protected from external humidity, moisture and contamination. O-ring 134 may be utilized to improve the seal if desired. As is discussed further below, it will be noted that ring 143 is connected to movable supporting member 130 by compliant members 141, 142, thus leaving a gap between movable supporting member 130 and ring 143. For improved protection, it is preferred that potting material 122 be adapted to cover such gap.
As shown in
It is through the flexing of compliant members 141, 142 that energy is transferred to and from smart material device 160. In particular, application of an electrical potential will cause smart material device 160 to expand substantially without angular movement. Preventing angular movement of smart material device 160 is desirable as it tends to increase the operational life of smart material device 160. The expansion thereby urges movable supporting member 130 away from first mounting surface 121 and causes compliant members 141 and 142 to flex. Flexing occurs because compliant members 141 are attached to ring 143 which is held in place to compensator 120, 120′ as smart material device 160 expands and movable supporting member 130 moves. The flexing of compliant members 141, 142 moves actuating arms 150, and, in particular causes second actuating arm end 152 to move across a distance greater than the expansion smart material device 160. In this way, mechanical webs 140, movable supporting member 130, ring 143 and actuating arms 150 act as a mechanical amplifier, translating a relatively modest expansion of smart material device 160 into a greater degree of motion at second actuating arm ends 152.
In most applications, it is preferred that actuating arms 150 are each of substantially the same length and that the spacing of mechanical webs 140 around movable supporting member 130 is substantially even such that the distance between each two adjacent mechanical webs 140 is substantially identical. In this way, actuating arms 150 are spaced evenly and radially about smart material device 160 in a substantially cylindrical configuration, and mechanical webs 140 are adapted such that substantially upon flexing of compliant members 141, 142, second actuating arm ends 152 move toward smart material device 160. It will be understood that the term cylindrical configuration is intended herein to include both cylindrical configurations in which actuating arms 150 are in line with smart material device 160 and conical configurations in which actuating arms are at an angle with respect to smart material device 160, as is discussed further below. By adapting actuating arms 150 to be of a consistent length, and substantially evenly spacing mechanical webs 140 around movable supporting member 130, the operational life of smart material device 160 may be improved as each actuating arm 150 and mechanical web 140 will typically move evenly, thereby reducing the likelihood of twisting or deflecting smart material device 160, which may become more likely if one actuating arm 150 is subjected to substantially different levels of stress than are other actuating arms 150.
Actuating arms 150 are preferably attached to mechanical webs 140 at first actuating arm end 151. Any variety of attachment means will be readily apparent to those of skill in the art in light of this description, including, without limitation, press-fitting, welding, use of adhesives or epoxies, or forming actuating arms 150 integral to mechanical webs 140. One convenient means of removably attaching actuating arms 150 to mechanical webs 140 is illustrated in the figures and comprises the use of mechanical fasteners 153 passing through actuating arms 150 and into threaded receptacles 144 in mechanical webs 140. An advantage of actuating arms being removably attached is that it allows for use of actuating arms 150 in different lengths and of different materials than mechanical webs 140, thereby making it easier to adapt a given actuator assembly 100, 100′ to different uses. While a variety of materials may be utilized for actuating arms 150, carbon fiber, stainless steel, steel, aluminum, ceramic and rigid plastics are may all be suitable choices depending on the application. Carbon fiber has been found to be particularly suitable where a high-strength, light-weight actuating arm 150 is needed. Light-weight actuating arms 150 are particularly desirable when high speed actuators are needed as lowering the weight of the actuating arm tends to increase the resonant frequency of actuator assembly 100. Where actuator assembly 100 is used as an actuator that converts electrical energy into mechanical motion, second actuating arm ends 152 may be attached to the external structure (for example and without limitation a valve stem, pump, compressor or switch) to be actuated. Such attachment may be made by any of a wide variety of attachment means apparent to those of skill in the art including, without limitation mechanical fasteners (not illustrated in
The embodiments illustrated in
The angles of the actuating arms may also be varied in different embodiments.
As illustrated, angle α may conveniently be determined by adaptation of the attachment between actuating arm 350 and mechanical web 340. In this way, different configurations of removably attachable actuating arms 150 may be used to achieve different angles α. Alternatively different embodiments of mechanical webs (not illustrated), each adapted to for different angles α may be used, thereby enabling straight actuating arms 150 to be used. Several such arrangements will be apparent to those of skill in the art in light of this description, including incorporating an angled surface onto mechanical web 140. By way of example,
It is disclosed herein, however, that the efficiency of smart material device 160 and, in turn actuator assemblies 100, 100′, 200, 300, 400, 500, 600, may be affected by angle α and the lengths of actuating arms 350. Tables 1 and 2 illustrate sample relationships for actuator when two different arm lengths are utilized. In each, second actuating arm end 352 is affixed to a supporting structure. In the case of longer actuating arms 352, a significant increase in total work is seen when angle α is approximately 87°. In the case where actuating arms 352 are shorter, however, maximum work occurs when angle α is approximately 83°. As indicated the difference in total work output can fall off significantly when less than optimal angles α are utilized. Accordingly, where maximum efficiency is needed, the optimal angle α may be calculated for given actuator assembly embodiments having set actuating arm lengths and mechanical web configurations.
It is further disclosed that, where second actuating arm ends 152, 352, 452 are free to move, and compensator 120, 120′ is affixed to a supporting structure, optimal angle α may be different than when second actuating arm ends 152, 352, 452 are affixed to a supporting structure and compensator 120, 120′ is free to move. In particular, in embodiments in which said second actuating arm ends 152, 352, 452 are adapted to attach to a supporting structure, preferred ranges of angle α are either at least forty five and at most eighty-nine degrees, or at least ninety one and at most one hundred thirty-five degrees. Alternatively, in embodiments in which said second actuating arm ends 152, 352, 452 are free to move and compensator 120, 120′ further comprises a means to attach to a supporting structure, preferred ranges of angle α are either at most fifty degrees, or between at least one hundred thirty degrees and at most one hundred eighty degrees. As is noted above, second actuating arms 152, 352, 452 may be adapted to affix to a supporting structure with a variety of mechanical fasteners (not illustrated) known in the art. Similarly, means to attach compensator 120, 120′ to a supporting structure may include mechanical fasteners including without limitation fasteners 883, 983 illustrated in
As has already been noted, actuators according to the present invention may be adapted for high-speed operation in which the frequency of repeated activation and deactivation is high. Referring to
It will be understood that the illustrated assembly 670 is but one embodiment of a dampener suitable for use with actuators of the present invention. Other dampener assemblies (not illustrated) may also be used, each preferably including at least one and preferably two pliable stops, each adapted to restrict excess arm movement in one direction. Alternate embodiments of suitable dampeners will be apparent to those of skill in the art in light of this description and the present invention should not be construed to be limited to the illustrated embodiments.
An alternate preferred embodiment of dampener assembly, adapted for use with actuator embodiments in which angle α is greater than ninety degrees, is illustrated in
As has been noted, many variations dampeners may be used, and the present invention is not intended to be limited to the preferred embodiments illustrated and described herein. It will further be understood that dampening yoke 780 need not be a dedicated yoke and, instead may be part of a case (not illustrated) encapsulating at least a portion of actuator assembly 700, or may be an external structure (not illustrated) convenient to actuator 700. Similarly, as with pliable stops 671 and 672, pliable stops 771 and 772 need not be simple O rings as illustrated, but may be any pliable structure adapted to resist over extension of actuating arms 650, preferably without hard stops that could induce ringing during operation.
As has been discussed, actuators of the present invention may be adapted to use in a wide variety of applications including, without limitation, grapplers; valves, pumps or switch actuators; energy capture devices; and sensors. One such application is an audio speaker, as illustrated in
Referring again to
To complete the driver, cup 883 may be affixed to speaker cone extension 882. Speaker cone extension 882 is preferably a light weight plastic or fiber tube affixed to speaker cone 880 substantially at its center, and extending back. Cup 883 may be adapted to fit tightly about speaker cone extension 882 and, if desired, affixed with adhesive (not illustrated). In this way, compensator 120 may be attached to speaker cone 880.
In such an embodiment, when an electric signal is applied to smart material device 160, it will expand as previously described, and contract back to its prior position when such signal dissipates. Such expansion will cause mechanical webs 840 to flex as previously described. However, given that actuating arms 850 are held by outer speaker ring 881, compensator 120 will move instead of actuating arms 850. In this way, actuator assembly 800 may serve as a highly efficient driver for speaker cone 880.
Another use of the actuator of the present invention is as an energy capture device, a preferred embodiment of which is illustrated on
Another suitable use for the actuator apparatus of the present invention is as a sensor. While the range of possible sensing uses is virtually unlimited, one exemplary sensing embodiment is illustrated in
Finally, it is disclosed herein that any of the embodiments of the actuator of the present invention may be further optimized to account for expansion and contraction resulting from temperature changes. In many cases, unloaded smart material device 160 will have a low, or even negative, coefficient of thermal expansion. As has been discussed, it is desirable in certain applications for smart material device 160 to be subject to a predetermined amount of compression, or preload. Applying preload will tend to raise the coefficient of thermal expansion of smart material device 160. Accordingly, smart material device 160 may be said to have a first coefficient of thermal expansion in its preloaded state.
Compensators 120, 120′, 620 and rings 143, 343 will also each expand and contract according temperature changes according to their own coefficients of thermal expansion. Where the combined coefficient of thermal expansion of the assembled compensator/ring pair differs from the first coefficient of thermal expansion of smart material device 160, temperature changes can cause the location of actuating arms 150, 350, 450, 650, 850, 950, 1050 to change, both for their activated states and when at rest. Where the combined coefficient of thermal expansion of the assembled compensator/ring pair is balanced with the first coefficient of thermal expansion of smart material device 160, however, are balanced, actuating arms 150350, 450, 650, 850, 950, 1050 will tend to remain in their intended positions as temperatures vary.
To address this concern in applicable embodiments of actuator assemblies 100, 100′, 200, 300, 400, 500, 600, 700, 800, 900, 1000, compensator 120, 120′, 620 and ring 143, 343 may be formed from materials having different coefficients of thermal expansion. One such material suitable for ring 143, 343 is 17-4 stainless steel, while a material having a different coefficient of thermal expansion suitable for compensators 120, 120′, 620 would be Invar. Where compensator 120, 120′, 620 and ring 143, 343 are selected from materials with different coefficients of thermal expansion, they may be sized (for example by increasing the length of ring 143, 343 and decreasing length of compensator 120, 120′, 620), such that, when joined, the combined coefficient of thermal expansion of the compensator/ring assembly is substantially equal to the first coefficient of thermal expansion of smart material device 160 at its determined preload. In this way, as temperatures change, the expansion or contraction of the compensator/ring assembly will substantially match the expansion or contraction of smart material device 160 attributable to thermal conditions. As a result, a substantially consistent arm position will be maintained and operating efficiency can be enhanced.
Other variations and embodiments of the present invention will be apparent to those of ordinary skill in the art in light of this specification, all of which are within the scope of the present invention as claimed.
This application claims priority to provisional application 61/305,345 which is incorporated herein by reference.
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/US2011/025292 | 2/17/2011 | WO | 00 | 8/10/2012 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2011/103324 | 8/25/2011 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
1922196 | Butler | Aug 1933 | A |
4435666 | Fukui et al. | Mar 1984 | A |
4442372 | Roberts | Apr 1984 | A |
4518887 | Yano et al. | May 1985 | A |
4547086 | Matsumoto et al. | Oct 1985 | A |
4570095 | Uchikawa | Feb 1986 | A |
4633120 | Sato et al. | Dec 1986 | A |
4783610 | Asano | Nov 1988 | A |
4870827 | McFarlin et al. | Oct 1989 | A |
4977916 | Ohmi et al. | Dec 1990 | A |
5096388 | Weinberg | Mar 1992 | A |
5751091 | Takahashi et al. | May 1998 | A |
5828157 | Miki et al. | Oct 1998 | A |
5946969 | Munekata et al. | Sep 1999 | A |
6213739 | Phallen et al. | Apr 2001 | B1 |
6359370 | Chang | Mar 2002 | B1 |
6435840 | Sharma et al. | Aug 2002 | B1 |
6513213 | Muramatsu et al. | Feb 2003 | B1 |
6520479 | Sato | Feb 2003 | B1 |
6548938 | Moler et al. | Apr 2003 | B2 |
6717332 | Moler et al. | Apr 2004 | B2 |
6737788 | Moler et al. | May 2004 | B2 |
6759790 | Bugel et al. | Jul 2004 | B1 |
6784599 | Stoecklein et al. | Aug 2004 | B1 |
6789087 | Sako | Sep 2004 | B1 |
6834419 | Lopatin et al. | Dec 2004 | B2 |
6836056 | Oudshoorn et al. | Dec 2004 | B2 |
6870305 | Moler | Mar 2005 | B2 |
6924586 | Moler | Aug 2005 | B2 |
6975061 | Moler | Dec 2005 | B2 |
6979933 | Oudshoorn et al. | Dec 2005 | B2 |
7036769 | Wood | May 2006 | B2 |
7040349 | Moler et al. | May 2006 | B2 |
7064472 | Pelrine et al. | Jun 2006 | B2 |
7104768 | Richter et al. | Sep 2006 | B2 |
7126259 | Moler et al. | Oct 2006 | B2 |
7132781 | Moler et al. | Nov 2006 | B2 |
7163385 | Gharib et al. | Jan 2007 | B2 |
7190102 | VanderSluis | Mar 2007 | B2 |
7217108 | Herwig et al. | May 2007 | B2 |
7258533 | Tanner et al. | Aug 2007 | B2 |
7261352 | Maslov et al. | Aug 2007 | B2 |
7368856 | Moler et al. | May 2008 | B2 |
7429815 | Gibson et al. | Sep 2008 | B2 |
7453187 | Richards et al. | Nov 2008 | B2 |
7462976 | Semmere et al. | Dec 2008 | B2 |
7524298 | Gharib et al. | Apr 2009 | B2 |
7560856 | Chen et al. | Jul 2009 | B2 |
7564171 | Moler et al. | Jul 2009 | B2 |
7667375 | Berkcan et al. | Feb 2010 | B2 |
7687977 | Xu | Mar 2010 | B2 |
7915790 | Heim et al. | Mar 2011 | B2 |
7939992 | Ehrlich | May 2011 | B2 |
20020109436 | Peng et al. | Aug 2002 | A1 |
20030006676 | Smith et al. | Jan 2003 | A1 |
20030127948 | Moler et al. | Jul 2003 | A1 |
20040035106 | Moler et al. | Feb 2004 | A1 |
20040263025 | Moler et al. | Dec 2004 | A1 |
20050116583 | Nishio et al. | Jun 2005 | A1 |
20050146248 | Moler et al. | Jul 2005 | A1 |
20050146698 | Hols et al. | Jul 2005 | A1 |
20050231077 | Moler et al. | Oct 2005 | A1 |
20060017349 | Moler et al. | Jan 2006 | A1 |
20060159568 | Lutz | Jul 2006 | A1 |
20070025868 | Swayze et al. | Feb 2007 | A1 |
20070247024 | Semmere et al. | Oct 2007 | A1 |
20080038128 | Haar | Feb 2008 | A1 |
20080061031 | Hashiguchi et al. | Mar 2008 | A1 |
20080170953 | Lund | Jul 2008 | A1 |
20080193307 | Elata et al. | Aug 2008 | A1 |
20080265712 | Ulm et al. | Oct 2008 | A1 |
20080315719 | Gibson et al. | Dec 2008 | A1 |
20080315722 | Clingman et al. | Dec 2008 | A1 |
20090047144 | Leece et al. | Feb 2009 | A1 |
20090152990 | Brown et al. | Jun 2009 | A1 |
20100111733 | Ramunas et al. | May 2010 | A1 |
20100207411 | Sun et al. | Aug 2010 | A1 |
20110046748 | Martin | Feb 2011 | A1 |
20110309721 | Moler | Dec 2011 | A1 |
20120001518 | Moler | Jan 2012 | A1 |
20120038245 | Moler et al. | Feb 2012 | A1 |
20120230848 | McQuary et al. | Sep 2012 | A1 |
20130234561 | Moler | Sep 2013 | A1 |
Number | Date | Country |
---|---|---|
2003251261 | Nov 1991 | JP |
2004130681 | May 1992 | JP |
04164581 | Jun 1992 | JP |
07129244 | May 1995 | JP |
07301354 | Nov 1995 | JP |
09018064 | Jan 1997 | JP |
09100930 | Apr 1997 | JP |
2009183241 | Jul 1997 | JP |
11146663 | May 1999 | JP |
2002322129 | Nov 2000 | JP |
2002058260 | Feb 2002 | JP |
2002118303 | Apr 2002 | JP |
2002263979 | Sep 2002 | JP |
2003199366 | Jul 2003 | JP |
2004048955 | Feb 2004 | JP |
2004197754 | Jul 2004 | JP |
2005149679 | Jun 2005 | JP |
2005302711 | Oct 2005 | JP |
2006138913 | Jun 2006 | JP |
2007006616 | Jan 2007 | JP |
2008029111 | Feb 2008 | JP |
2008099399 | Apr 2008 | JP |
2009048506 | Mar 2009 | JP |
2009093907 | Jul 2009 | WO |
2011006028 | Jan 2011 | WO |
2011006164 | Jan 2011 | WO |
2011029081 | Mar 2011 | WO |
2011103324 | Aug 2011 | WO |
2011103328 | Aug 2011 | WO |
2012079012 | Sep 2012 | WO |
2012118548 | Sep 2012 | WO |
Number | Date | Country | |
---|---|---|---|
20120308055 A1 | Dec 2012 | US |
Number | Date | Country | |
---|---|---|---|
61305345 | Feb 2010 | US |