Soft X-Ray Source For Microlithography

Information

  • NSF Award
  • 8113840
Owner
  • Award Id
    8113840
  • Award Effective Date
    10/1/1981 - 43 years ago
  • Award Expiration Date
    3/31/1982 - 42 years ago
  • Award Amount
    $ 29,986.00
  • Award Instrument
    Standard Grant

Soft X-Ray Source For Microlithography

  • Program Officer
    name not available
  • Min Amd Letter Date
    9/23/1981 - 43 years ago
  • Max Amd Letter Date
    9/23/1981 - 43 years ago
  • ARRA Amount

Institutions

  • Name
    STI Optronics, Inc.
  • City
    Bellevue
  • State
    WA
  • Country
    United States
  • Address
    2755 Northup Way
  • Postal Code
    980041495
  • Phone Number
    4258270460

Investigators

  • First Name
    Edward
  • Last Name
    Crawford
  • Start Date
    10/1/1981 12:00:00 AM

FOA Information

  • Name
    Engineering-Electrical
  • Code
    55