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Soft X-Ray Source For Microlithography
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Information
NSF Award
8113840
Owner
STI Optronics, Inc.
Award Id
8113840
Award Effective Date
10/1/1981 - 43 years ago
Award Expiration Date
3/31/1982 - 42 years ago
Award Amount
$ 29,986.00
Award Instrument
Standard Grant
Information
Content
Organizations
Impact
Timeline
Soft X-Ray Source For Microlithography
Program Officer
name not available
Min Amd Letter Date
9/23/1981 - 43 years ago
Max Amd Letter Date
9/23/1981 - 43 years ago
ARRA Amount
Institutions
Name
STI Optronics, Inc.
City
Bellevue
State
WA
Country
United States
Address
2755 Northup Way
Postal Code
980041495
Phone Number
4258270460
Investigators
First Name
Edward
Last Name
Crawford
Start Date
10/1/1981 12:00:00 AM
FOA Information
Name
Engineering-Electrical
Code
55