Claims
- 1. A Soller slit device for collimating high energy radiation comprising:
a plurality of substantially parallel blades constructed from a material having a density less than 6 g/cm3 and operative to transmit high energy radiation parallel to the blades and to absorb divergent radiation.
- 2. The Soller slit device of claim 1, wherein said material has a density less than 5 g/cm3.
- 3. The Soller slit device of claim 2, wherein the blades are made from glass.
- 4. The Soller slit device of claim 2, wherein the blades are made of mica.
- 5. The Soller slit device of claim 1 wherein said device transmits at least 60% of incident high-energy radiation.
- 6. The Soller slit device of claim 5, wherein the transmission efficiency is in the range of 60-80%.
- 7. The Soller slit device of claim 1, wherein the length of each blade in the direction of transmission is greater than 5 cm.
- 8. The Soller slit device of claim 7, wherein the blade length is at least 12 cm.
- 9. The Soller slit device of claim 8, wherein the blade length is in the range of 12-15 cm.
- 10. The Soller slit device of claim 1, wherein the thickness of each blade is no greater than 70 μm.
- 11. The Soller slit device of claim 10, wherein the thickness of each blade is approximately 50 μm.
- 12. The Soller slit device of claim 1, wherein the surface of each of the blades is non-reflective to high energy radiation.
- 13. The Soller slit device of claim 12, wherein the surface of each of the blades is non-reflective to X-rays.
- 14. The Soller slit device of claim 12, wherein the blades each have a non-reflective coating.
- 15. The Soller slit device of claim 12, wherein the surface of each of the blades is etched to prevent reflection.
- 16. A system for performing high energy radiation diffractometry, comprising:
a high energy radiation source; a high energy radiation collimating device; and a device for collecting high energy radiation after the high energy radiation impinges on a sample to be examined; wherein the high energy collimating device has a divergence angle of less than 0.1° and a transmission efficiency of at least 60%.
- 17. The diffractometry system of claim 16, wherein the high energy radiation comprises X-ray radiation.
- 18. The diffractometry system of claim 16, wherein the high energy radiation comprises extreme ultraviolet (EUV) radiation.
- 19. The diffractometry system of claim 16, wherein the high energy radiation collimating device comprises a Soller slit device.
- 20. The diffractometry system of claim 19, wherein the Soller slit device has blades made from a material having a density no greater than 6 g/cm3.
- 21. The diffractometry system of claim 20, wherein said material comprises glass.
- 22. The diffractometry system of claim 20, wherein said material comprises mica.
Parent Case Info
[0001] This disclosure claims priority under 35 U.S.C. § 119(e) to U.S. Provisional Application No. 60/398,584 entitled Soller Slit Using Low Density Materials, filed on Jul. 26, 2002, the entire content of which is hereby incorporated by reference.
Provisional Applications (1)
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Number |
Date |
Country |
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60398584 |
Jul 2002 |
US |