The present invention relates to a sound measurement technology using light.
As one of sound measurement methods using light, there is a method of using a change in refractive index of a medium due to sound called an acousto-optic effect. According to the acousto-optic effect, an optical phase modulation amount φs by sound in the air is expressed by the following equation.
Here, k is a wave number of light, n0 is an air refractive index in a steady state, p0 is atmospheric pressure in the steady state, γ is a specific heat ratio of air, and p is a sound pressure. Further, an integral of Equation (1) is a linear integral along a propagation path of light.
That is, it is possible to measure sound in a non-contact manner by observing the optical phase modulation amount φs by sound given by Equation (1).
Many sound measurement methods using the acousto-optic effect use an optical interferometer. As the optical interferometer, any optical interferometer such as a Michelson type, a Mach-Zehnder type, and a Fizeau type can be used.
Hereinafter, an operation of the sound measurement apparatus in
[Math. 2]
i=ηI=η[I
DC
+I
A cos(ϕs+ϕ0)] (2)
Here, η is quantum efficiency of the photodetector, I is an amount of interference light, IDC is a DC component (average light intensity) of the amount of interference light, IA is an amplitude of an interference fringe, and φ0 is optical phase modulation amount by an element other than sound.
As can be seen from Equation (2), a current i of the output signal varies depending on the phase modulation amount φs of the light by sound. Non-contact sound measurement is realized by using this (see NPL 1).
A current i of an output signal of the sound measurement apparatus in
Therefore, an object of the present invention is to provide an optical phase modulation amount measurement technology using sound without being affected by noise included in an average light intensity.
An aspect of the present invention is a sound measurement method for measuring an optical phase modulation amount Ys by sound by a sound measurement apparatus including an interference light generator including an interferometer and a sound measurement unit configured to modulate a phase of light using sound, two photodetectors (hereinafter referred to as a first photodetector and a second photodetector), and a differential signal generator, the sound measurement method including: an interference light generation step of obtaining, by the interference light generator, from light emitted from a light source, light (hereinafter referred to as first light) including light subjected to light phase modulation by the sound measurement unit and light (hereinafter referred to as second light) including light subjected to light phase modulation by the sound measurement unit, the second light differing from the first light; a first light detection step of obtaining, by the first photodetector, an electrical signal (hereinafter referred to as a first electrical signal) from the first light; a second light detection step of obtaining, by the second photodetector, an electrical signal (hereinafter referred to as a second electrical signal) from the second light; and a differential signal generation step of obtaining, by the differential signal generator, a differential signal from the first electrical signal and the second electrical signal, the differential signal being a difference between the first electrical signal and the second electrical signal, wherein a phase of the light subjected to the light phase modulation included in the first light and a phase of the light subjected to the light phase modulation included in the second light are in an inverted relationship, and the optical phase modulation amount φs is measured as a current Δi of the differential signal expressed by an equation Δβi=βIA cos (φs+φ0) (where β is a predetermined constant, IA is an amplitude of an interference fringe, and φ0 is an optical phase modulation amount by an element other than sound).
An aspect of the present invention is a sound measurement method for measuring an optical phase modulation amount φs by sound by a sound measurement apparatus including a beam splitter, an interference light generator including an interferometer and a sound measurement unit configured to modulate a phase of light using sound, two photodetectors (hereinafter referred to as a first photodetector and a second photodetector), and a differential signal generator, the sound measurement method including: a light branching step of obtaining, by the beam splitter, two light beams (hereinafter referred to as first light and second light) from light emitted from a light source; an interference light generation step of obtaining, by the interference light generator, light including light subjected to light phase modulation by the sound measurement unit (hereinafter referred to as third light) from the first light; a first light detection step of obtaining, by the first photodetector, an electrical signal (hereinafter referred to as a first electrical signal) from the third light; a second light detection step of obtaining, by the second photodetector, an electrical signal (hereinafter referred to as a second electrical signal) from the second light; and a differential signal generation step of obtaining, by the differential signal generator, a differential signal from the first electrical signal and the second electrical signal, the differential signal being a difference between the first electrical signal and the second electrical signal, wherein the optical phase modulation amount φs is measured as a current Δi of the differential signal expressed by an equation Δi=βIA cos (φs+φ0) (where β is a predetermined constant, IAis an amplitude of an interference fringe, and φ0 is an optical phase modulation amount by an element other than sound).
An aspect of the present invention is a sound measurement method for measuring an optical phase modulation amount φs by sound by a sound measurement apparatus including an interference light generator including an interferometer and a sound measurement unit configured to modulate a phase of light using sound, two photodetectors (hereinafter referred to as a first photodetector and a second photodetector), a differential signal generator, and an optical phase modulation amount adjuster, the sound measurement method including: an interference light generation step of obtaining, by the interference light generator, from light emitted from a light source, light (hereinafter referred to as first light) including light subjected to light phase modulation by the sound measurement unit and light (hereinafter referred to as second light) including light subjected to light phase modulation by the sound measurement unit, the second light differing from the first light; a first light detection step of obtaining, by the first photodetector, an electrical signal (hereinafter referred to as a first electrical signal) from the first light; a second light detection step of obtaining, by the second photodetector, an electrical signal (hereinafter referred to as a second electrical signal) from the second light; a differential signal generation step of obtaining, by the differential signal generator, a differential signal from the first electrical signal and the second electrical signal, the differential signal being a difference between the first electrical signal and the second electrical signal; and an optical phase modulation amount adjustment step of adjusting, by the optical phase modulation amount adjuster, an optical phase modulation amount φ0 by an element other than sound by fixing the interferometer so that a phase of an interference fringe is in mid-fringe by using the differential signal as an error signal, wherein a phase of the light subjected to the light phase modulation included in the first light and a phase of the light subjected to the light phase modulation included in the second light are in an inverted relationship, and the optical phase modulation amount φs by sound is measured as a current Δi of the differential signal expressed by an equation Δi=βIA sin (φs) (where β is a predetermined constant, and IA is an amplitude of an interference fringe).
According to the present invention, it is possible to measure an optical phase modulation amount by sound without being affected by noise included in an average light intensity.
Hereinafter, embodiments of the present invention will be described in detail. Constituent units having the same function are denoted with the same reference signs, and repeated descriptions thereof are omitted.
A notation method in the present specification will be described prior to description of the embodiments.
{circumflex over ( )} (caret) indicates a superscript. For example, xy{circumflex over ( )}z indicates that yz is a superscript with respect to x and xy{circumflex over ( )}z indicates that yz is a subscript with respect to x. Further, _ (underscore) indicates a subscript. For example, xy_z indicates that yz is a superscript with respect to x and xy_z indicates that yz is a subscript with respect to x.
Diacritics “{circumflex over ( )}” and “˜” as in {circumflex over ( )}x and ˜x for a certain character x should be written directly above “x,” but the diacritics are written as {circumflex over ( )}X and ˜x due to restrictions on description notation in the specification.
In an embodiment of the present invention, interference light is differentially detected in sound measurement by light using an acousto-optic effect. This makes it possible to cancel the average light intensity, and remove noise included in the average light intensity. Therefore, it is possible to greatly improve an SN ratio by removing light intensity noise of the light source that is the main noise in a sound measurement apparatus of the related art. Further, it is possible to greatly reduce requirements for intensity stability of the light source when the same degree of SN ratio is to be realized, and to reduce a cost.
Hereinafter, several examples of a configuration of the sound measurement apparatus according to an embodiment of the present invention will be described.
A laser can be used as the light source. Further, as the interferometer, any interferometer such as a Mach-Zehnder type or a Fizeau type can be used instead of the Michelson interferometer.
Hereinafter, an operation of the sound measurement apparatus in
Here, as illustrated in
When I1 is an intensity (light amount) of light EIN1 and I2 is an intensity (light amount) of light EIN2, currents i1 and i2 of electrical signals output from the two photodetectors PD1 and PD2 can be expressed by the following equations, respectively.
[Math. 5]
i
1
=ηI
1
=η[I
DC
+I
A cos(ϕs+φ0)] (5)
[Math. 6]
i
2
=ηI
2
=η[I
DC
−I
A cos(ϕs+ϕ0)] (6)
Therefore, the current Δi of the differential signal, which is an output signal of the differential detection unit, is expressed by the following equation.
[Math. 7]
Δi=η(I1−I2)=2ηIA cos(ϕs+ϕ0) (7)
As can be seen from Equation (7), the current Δi of the differential signal does not include a term including the average light intensity IDC. Therefore, it is possible to measure a low-noise sound without being affected by noise caused by, for example, variation of intensity of a light source included in the average light intensity, that is, an optical phase modulation amount φs by sound.
As illustrated in
Currents i1 and i2 of electrical signals output from the two photodetectors PD1 and PD2 can be expressed by the following equations, respectively.
[Math. 8]
i
1
=ηI
1
=η[I
DC
+I
A cos(ϕs+ϕ0)] (8)
[Math. 9]
i
2
=ηI
2=2ηIDC (9)
Here, the average light intensity detected by the photodetector PD2 becomes two times IDC (that is, 2IDC). By optically or electrically adjusting the intensity and then inputting the adjusted intensity to the differential detection unit, the current Δi of the differential signal, which is the output signal of the differential detection unit, is expressed by the following equation.
In
As can be seen from Equation (10), the current Δi of the differential signal does not include a term including the average light intensity IDC in configuration example 2. Therefore, it is possible to measure the optical phase modulation amount cps by sound without being affected by noise included in the average light intensity.
Hereinafter, an operation of the sound measurement apparatus in
As illustrated in
Hereinafter, an operation of the optical phase modulation amount adjuster will be described. First, a mid-fringe lock that is a principle of the operation will be described.
Here, two optical phase modulation amounts φs and φ0 included in the light amount of the interference light I=IDC+IA cos (φs+φ0) is considered. A variation amount and frequency of the optical phase modulation amount φs by sound depends on sound that is a measurement target. On the other hand, the optical phase modulation amount φ0 by an element other than sound includes a stationary term determined by disposition of an optical system, and a gradual variation caused by air variation, ground vibration, or the like. As can be seen from
The phase of the interference fringe is in the mid-fringe, the optical phase modulation amount φ0 can be expressed as φ0=Π/2+NΠ (where N is an integer). Therefore, for example, when mid-fringe lock is performed so that φ0=−Π/2, the amount of interference light is I=IDC+IA sin(φs). In this case, the current Δi of the differential signal, which is the output signal of the differential detection unit, is expressed by the following equation.
[Math. 11]
Δi=2ηIA sin(ϕs) (11)
Here, because φs<<1 holds for general sound, the current Δi of the differential signal can be approximated by the following equation.
[Math. 12]
Δi=2ηIAϕs (12)
Therefore, when mid-fringe lock is achieved in a frequency band lower than that of sound that is a measurement target, the current Δi of the differential signal and the optical phase modulation amount φs by sound are in a proportional relationship, and the differential signal itself becomes a low-noise sound signal.
In general, when mid-fringe lock is performed so that φ0=Π/2+NΠ, a sign of the current Δi may be inverted depending on a value of N, but in this case, a sign of the differential signal may be simply inverted.
Hereinafter, an operation of the optical phase modulation amount adjuster for achieving mid-fringe lock will be described (see
As described above, it is possible to realize mid-fringe lock by performing feedback control using the differential signal as an error signal. It becomes possible to measure the sound at a maximum sensitivity point near the mid-fringe by setting the control band lower than the frequency of the sound that is a measurement target. Further, when an amplitude of the sound that is a measurement target is small, the optical phase modulation amount φs and the current Δi of the differential signal are in a proportional relationship, and the differential signal can be extracted as a low-noise sound signal without post-processing.
The sound measurement apparatus 100 receives light emitted from a light source as an input, and measures an optical phase modulation amount φs by sound.
Hereinafter, the sound measurement apparatus 100 will be described with reference to
An operation of the sound measurement apparatus 100 will be described with reference to
In S110, the interference light generator 110 receives light emitted from a light source 910 as an input, obtains, from the light emitted from the light source, light (hereinafter referred to as first light) including light subjected to light phase modulation by the sound measurement unit 114 and light (hereinafter referred to as second light) including light subjected to light phase modulation by the sound measurement unit 114, which differs from the first light, and outputs the light. A phase of the light subjected to optical phase modulation included in the first light and a phase of the light subjected to optical phase modulation included in the second light have an inverted relationship.
In S120-1, the first photodetector 120-1 receives the first light output in S110 as an input, obtains an electrical signal (hereinafter referred to as a first electrical signal) from the first light, and outputs the electrical signal.
In S120-2, the second photodetector 120-2 receives the second light output in S110 as an input, obtains an electrical signal (hereinafter referred to as a second electrical signal) from the second light, and outputs the electrical signal.
The sound measurement apparatus 100 may include a first light amount adjuster (not illustrated) that adjusts an amount of the first light and a second light amount adjuster (not illustrated) that adjusts an amount of the second light so that amplitudes of the first electrical signal and the second electrical signal are the same.
In S130, the differential signal generator 130 receives the first electrical signal output in S120-1 and the second electrical signal output in S120-2 as inputs, obtains a differential signal as a difference between the first electrical signal and the second electrical signal, and outputs the differential signal.
The optical phase modulation amount Ys by sound is measured as the current Δi of the differential signal expressed by an equation Δi=βIA cos (φs+φ0) (where β is a predetermined constant, IA is an amplitude of the interference fringe, and φ0 is an optical phase modulation amount by an element other than sound).
Hereinafter, a configuration example of the interference light generator 110 will be described.
As illustrated in
When the light propagating through the first optical path in the interference light generator 110 is light that passes through the beam splitter 1111 and the sound measurement unit 114 in this order, is reflected by the first mirror 1112-1, and passes through the sound measurement unit 114 and the beam splitter 1111 in this order, and the light propagating through the second optical path in the interference light generator 110 is light that passes through the beam splitter 1111, is reflected by the second mirror 1112-2, and passes through the beam splitter 1111, the first light and the second light is light that is obtained by branching the light propagating through the first optical path in the interference light generator 110 and the light propagating through the second optical path in the interference light generator 110 in the beam splitter 1111.
As illustrated in
When the light propagating through the first optical path in the interference light generator 110 is light that passes through the first ½ wavelength plate 1122-1, the first polarization beam splitter 1121-1, the first ¼ wavelength plate 1123-1, and the sound measurement unit 114 in this order, is reflected by the first mirror 1124-1, and passes through the sound measurement unit 114, the first ¼ wavelength plate 1123-1, the first polarization beam splitter 1121-1, the second ½ wavelength plate 1122-2, and the second polarization beam splitter 1121-2 in this order, and the light propagating through the second optical path in the interference light generator 110 is light that passes through the first ½ wavelength plate 1122-1, the first polarization beam splitter 1121-1, and the second ¼ wavelength plate 1123-2 in this order, is reflected by the second mirror 1124-2, and passes through the second ¼ wavelength plate 1123-2, the first polarization beam splitter 1121-1, the second ½ wavelength plate 1122-2, and the second polarization beam splitter 1121-2 in this order, the first light and the second light are light that is obtained by branching the light propagating through the first optical path in the interference light generator 110 and the light propagating through the second optical path in the interference light generator 110 in the second polarization beam splitter 1121-2.
Although a positional relationship between the first ¼ wavelength plate 1123-1 and the sound measurement unit 114 is a positional relationship in which the first ¼ wavelength plate 1123-1 is to the left and the sound measurement unit 114 is to the right in
As illustrated in
When the light propagating through the first optical path in the interference light generator 110 is light that passes through the first ½ wavelength plate 1133-1, the polarization beam splitter 1131, the first ¼ wavelength plate 1134-1, and the sound measurement unit 114 in this order, is reflected by the first mirror 1135-1, and passes through the sound measurement unit 114, the first ¼ wavelength plate 1134-1, the polarization beam splitter 1131, the second ½ wavelength plate 1133-2, and the Wollaston prism 1132 in this order, and the light propagating through the second optical path in the interference light generator 110 is light that passes through the first ½ wavelength plate 1133-1, the polarization beam splitter 1131, and the second ¼ wavelength plate 1134-2 in this order, is reflected by the second mirror 1135-2, and passes through the second ¼ wavelength plate 1134-2, the polarization beam splitter 1131, the second ½ wavelength plate 1133-2, and the Wollaston prism 1132 in this order, the first light and the second light are light obtained by branching the light propagating in the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110 in the Wollaston prism 1132.
Although a positional relationship between the first ¼ wavelength plate 1134-1 and the sound measurement unit 114 is a positional relationship in which the first ¼ wavelength plate 1134-1 is to the left and the sound measurement unit 114 is to the right in
According to the embodiment of the present invention, it is possible to measure the optical phase modulation amount by sound without being affected by noise included in an average light intensity.
The sound measurement apparatus 200 receives light emitted from the light source as an input and measures an optical phase modulation amount φs by sound.
Hereinafter, the sound measurement apparatus 200 will be described with reference to
An operation of the sound measurement apparatus 200 will be described with reference to
In S210, the beam splitter 210 receives the light emitted from the light source 910 as an input, and branches the light emitted from the light source to thereby obtain and output two light beams (hereinafter referred to as first light and second light).
In S110, the interference light generator 110 receives the first light output in S210 as an input, obtains light including light subjected to light phase modulation by the sound measurement unit 114 (hereinafter referred to as third light) from the first light, and outputs the light.
In S120-1, the first photodetector 120-1 receives the third light output in S110 as an input, obtains an electrical signal (hereinafter referred to as a first electrical signal) from the third light, and outputs the electrical signal.
In S120-2, the second photodetector 120-2 receives the second light output in S210 as an input, obtains an electrical signal (hereinafter referred to as a second electrical signal) from the second light, and outputs the electrical signal.
The sound measurement apparatus 200 includes any one of a light amount adjuster (not illustrated) that adjusts an amount of the second light, and a current adjuster (not illustrated) that adjusts a current of the second electrical signal so that amplitudes of the first electrical signal and the second electrical signal are the same.
In S130, the differential signal generator 130 receives the first electrical signal output in S120-1 and the second electrical signal output in S120-2 as inputs, obtains a differential signal as a difference between the first electrical signal and the second electrical signal, and outputs the differential signal.
The optical phase modulation amount φs by sound is measured as the current Δi of the differential signal expressed by an equation Δi=βIA cos (φs+φ0) (where β is a predetermined constant, IA is an amplitude of the interference fringe, and φ0 is an optical phase modulation amount by an element other than sound).
A configuration of the interference light generator 110 may be the same as that in (Configuration example 1) of the interference light generator 110 described in the first embodiment. Therefore, the third light is light that is obtained by branching light propagating through the first optical path in the interference light generator 110 and the light propagating through the second optical path in the interference light generator 110 in the beam splitter 1111.
According to the embodiment of the present invention, it is possible to measure the optical phase modulation amount by sound without being affected by noise included in an average light intensity.
The sound measurement apparatus 300 receives light emitted from the light source as an input, and measures the optical phase modulation amount φs by sound.
Hereinafter, the sound measurement apparatus 300 will be described with reference to
An operation of the sound measurement apparatus 300 will be described with reference to
In S110, the interference light generator 110 receives light emitted from a light source 910 as an input, obtains, from the light emitted from the light source, light (hereinafter referred to as first light) including light subjected to light phase modulation by the sound measurement unit 114 and light (hereinafter referred to as second light) including light subjected to light phase modulation by the sound measurement unit 114, which differs from the first light, and outputs the light. A phase of the light subjected to optical phase modulation included in the first light and a phase of the light subjected to optical phase modulation included in the second light have an inverted relationship.
In S120-1, the first photodetector 120-1 receives the first light output in S110 as an input, obtains an electrical signal (hereinafter referred to as a first electrical signal) from the first light, and outputs the electrical signal.
In S120-2, the second photodetector 120-2 receives the second light output in S110 as an input, obtains an electrical signal (hereinafter referred to as a second electrical signal) from the second light, and outputs the electrical signal.
The sound measurement apparatus 300 may include a first light amount adjuster (not illustrated) that adjusts an amount of the first light and a second light amount adjuster (not illustrated) that adjusts an amount of the second light so that amplitudes of the first electrical signal and the second electrical signal are the same.
In S130, the differential signal generator 130 receives the first electrical signal output in S120-1 and the second electrical signal output in S120-2 as inputs, obtains a differential signal as a difference between the first electrical signal and the second electrical signal, and outputs the differential signal.
In S340, the optical phase modulation amount adjuster 340 receives the differential signal output in S130 as an input and fixes the interferometer 111 so that the phase of the interference fringe is in mid-fringe using the differential signal as an error signal, to adjust the optical phase modulation amount φ0 by an element other than sound.
The optical phase modulation amount φs by sound is measured as a current Δi of the differential signal expressed by an equation Δi=βIA sin (φs) (where B is a predetermined constant, and IA is an amplitude of an interference fringe). When φs<<1 is established, the optical phase modulation amount φs by sound is measured as the current Δi of the differential signal expressed by an equation Δi=βIAφs (where β is a predetermined constant and IA is an amplitude of the interference fringe).
A configuration of the interference light generator 110 may be the same as (Configuration example 1) of the interference light generator 110 described in the first embodiment. In this case, the optical phase modulation amount adjuster 340 uses the differential signal to generate a control signal for control so that a value of the variation amount of the optical phase modulation amount φ0 by an element other than sound of zero is realized (that is, the optical phase modulation amount φ0 by an element other than sound becomes a certain constant) in a frequency band lower than a frequency of the sound that is a measurement target, and uses the control signal to control a phase difference between the light propagating through the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110, thereby adjusting the optical phase modulation amount φ0 by an element other than sound and fixing the interferometer 111 so that the phase of the interference fringe is in the mid-fringe.
Here, the optical phase modulation amount adjuster 340 may drive a piezo element attached to the first mirror 1112-1 using a control signal to expand and contract the first optical path in the interference light generator 110, so that the phase difference between the light propagating through the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110 is controlled, and the optical phase modulation amount adjuster 340 may drive a piezo element attached to the second mirror 1112-2 using a control signal to expand and contract the second optical path in the interference light generator 110, so that the phase difference between the light propagating through the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110 is controlled. Further, the optical phase modulation amount adjuster 340 may drive an optical phase modulator inserted between the beam splitter 1111 and the first mirror 1112-1 of the first optical path in the interference light generator 110 using a control signal and control the phase of the light propagating in the first optical path in the interference light generator 110, so that the phase difference between the light propagating through the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110 is controlled, and the optical phase modulation amount adjuster 340 may drive an optical phase modulator inserted between the beam splitter 1111 and the second mirror 1112-2 of the second optical path in the interference light generator 110 using a control signal and control the phase of the light propagating in the second optical path in the interference light generator 110, so that the phase difference between the light propagating through the first optical path in the interference light generator 110 and the light propagating in the second optical path in the interference light generator 110 is controlled.
According to the embodiment of the present invention, it is possible to measure the optical phase modulation amount by sound without being affected by noise included in an average light intensity.
The interference light generator 110 included in the sound measurement apparatus 100/200/300 may include a multi-path mirror, as in (Configuration example 5) described in <Technical background>.
Therefore, the interference light generator 110 further includes a multi-path mirror, and the light propagating through the first optical path in the interference light generator 110 becomes light of which the optical phase modulation amount Ds by sound has been increased due to reflection in the multi-path mirror.
According to the embodiment of the present invention, it is possible to measure the optical phase modulation amount by sound without being affected by noise included in an average light intensity.
The above description of the embodiment of the present invention is presented for the purpose of illustration and description. The description is not intended to be comprehensive and to limit the present invention to disclosed strict forms. Modifications or variations can be made from the teachings described above. The embodiments have been selected and represented to provide the best illustration of the principle of the present invention and to allow those skilled in the art to use the present invention in various embodiments and in various added modifications suitable for thoroughly considered practical uses. All of such modifications or variations are within the scope of the present invention defined by the appended claims interpreted with a fairly, legally, and equitably given range.
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/JP2020/028872 | 7/28/2020 | WO |