Claims
- 1. A rectangular spalling-resistant refractory setter for use in a heating furnace, comprising an Si--SiC sintered material containing, as a main phase, 2-25% by weight of Si and 75-98% by weight of SiC, and an Al impurity in a controlled amount of 0.1 to 0.2 part by weight per 100 parts by weight of said main phase, said material having a bending strength of 1,000 kgf/cm.sup.2 or higher at 1,000.degree.-1,300.degree. C. and having at least one slit extending from each of at least one pair of the two pairs of parallel sides of the setter toward the opposite side, the length of each slit being 15-35% of the length of each setter side which is parallel to the slit.
- 2. A spalling-resistant setter according to claim 1, wherein at least one impurity selected from the group consisting of Fe, Ti, Ca, Mg, Cr and Ni is contained in an amount of 0.05-1 part by weight per 100 parts by weight of the main phase.
- 3. A spalling-resistant setter according to claim 1, wherein the slit(s) extending from one setter side and the slit(s) extending from the opposite side are in a point symmetry.
- 4. A spalling-resistant setter, comprising a Si--SiC sintered material in the form of a setter, wherein the Si--SiC sintered material contains, as a main phase, 3-30% by weight of Si and 70-97% by weight of SiC, has a controlled porosity of 0.8% or lower, and contains at least one impurity selected from the group consisting of Ca, Al and Fe in a controlled amount of 0.8 part by weight or less per 100 parts by weight of said main phase.
- 5. A creep-resistant Si--SiC setter comprising, as a main phase, 2-25% by weight of Si and 75-98% by weight of SiC, and an Al impurity in a controlled amount of 0.01 to 0.2 part by weight per 100 parts by weight of said main phase.
- 6. A creep-resistant setter according to claim 5, further containing at least one impurity selected from the group consisting of Fe, Ti, Ca, Mg, Cr and Ni in an amount of 0.05-1 part by weight per 100 parts by weight of the main phase.
- 7. An oxidation-resistant Si--SiC setter comprising an Si--SiC sintered material containing, as a main phase, 3-30% by weight of Si and 70-97% by weight of SiC, having a controlled porosity of 0.8% or lower, and containing at least one impurity selected from the group consisting of Ca, Al and Fe in a controlled amount of 0.8 part by weight or less per 100 parts by weight of the main phase.
- 8. A process for producing a Si--SiC setter using a C powder, a SiC powder and metallic Si, which process is characterized by:
- mixing 1-12% by weight of a C powder and 88-99% by weight of a SiC powder,
- adding a binder to the above-obtained mixture in an amount of 0.1-15 parts by weight per 100 parts by weight of the mixture to obtain a molding material,
- molding the molding material to obtain a molded material in the form of a setter, and
- firing the molded material in a metallic Si atmosphere of 1,450.degree.-2,500.degree. C. and a reduced pressure to add metallic Si to the molded material in an amount of at least 1.05 times the theoretical amount capable of giving a sintered material having a porosity of 0.8% or lower, to obtain a Si--SiC sintered material having a porosity of 0.8% or lower, wherein a total amount of at least one impurity selected from the group consisting of Ca, Al and Fe contained in the C powder, the SiC powder and the metallic SiC is 0.8 part by weight or less per 100 parts by weight of a main phase of Si and SiC of the sintered material.
Priority Claims (3)
Number |
Date |
Country |
Kind |
4-147435 |
Jun 1992 |
JPX |
|
4-167526 |
Jun 1992 |
JPX |
|
4-238457 |
Sep 1992 |
JPX |
|
Parent Case Info
This application is a continuation of application Ser. No. 08/193,108 filed Feb. 8, 1994, now abandoned, which is a 371 of JPCT/JP93/00759 filed Jun. 7, 1993.
US Referenced Citations (13)
Foreign Referenced Citations (3)
Number |
Date |
Country |
50-35094 |
Oct 1975 |
JPX |
61-143686 |
Jul 1986 |
JPX |
1 394 106 |
May 1975 |
GBX |
Non-Patent Literature Citations (4)
Entry |
Patent Abstracts of Japan, JP 4-225787A, vol. 16, No. 578, Dec. 17. 1992, "Shelf Plate Made of Refractory". |
Derwent Abstract No. 93-365016/46, Mar. 25, 1992. |
Derwent Abstract No. 88-024342/04, May 31, 1986. |
Derwent Abstract No. 86-209704/32, Dec. 18, 1984. |
Continuations (1)
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Number |
Date |
Country |
Parent |
193108 |
Feb 1994 |
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