The present invention provides spray head improvements for use in an ultrasonic spray assembly. This invention represents an improvement over prior art spray devices, in which the coating pattern width, coating deposition uniformity, flow rate range at which a stable spray pattern can be produced, and drop size distribution are greatly improved.
There is an increasing need in industry to apply coatings to substrates in very thin, uniform layers at high production rates, such as the application of phosphorus based dopants to solar cell wafers. For example a typical coating deposition requirement is 0.00015 ml of liquid coating per square centimeter, which translates to a wet film thickness of 1.5 μm.
Current techniques for the application of thin coatings include spin coaters, fog coaters, spray nozzles and ultrasonic spray heads.
Spin coating involves spinning the substrate at a high speed and applying the coating to the rotating substrate. The coating forms a thin film on the surface as it is spun off the substrate due to the centrifugal forces from the high-speed rotation. The coating thickness is inversely proportional to the rotation speed of the substrate and the length of time that it is rotated. Spin coating techniques produce a very thin and uniform coating. However, the process is inherently slow because the substrates need to be processed one at a time. Additionally, over 90% of the coating liquid is wasted during the spin coating process. Therefore the spin coating method is not suited to high volume production due to the time required to achieve the thin coating and the waste of coating liquid.
Fog coating systems consist of stationary atomizers that produce a very fine mist similar to humidification. The substrates are exposed to the fine mist as they pass beneath the atomizers. The coating thickness is proportional to the density of the fog and inversely proportional to the conveyor speed. Fog coating systems are highly susceptible to the surrounding ambient conditions; changes in temperature and humidity as well as spurious air currents will influence the deposition of the mist onto the substrates thus making process control difficult.
An array of stationary spray nozzles mounted over a moving conveyor is another method of applying coatings to substrates. The coating is applied to the substrates as they pass beneath the spray nozzles. The coating thickness is proportional for the coating flow rate and inversely proportional to the conveyor speed. Spray nozzles produce a conical spray pattern and hence a parabolic coating distribution on the substrate depositing more coating at the center of the pattern and less at the edges, thus producing a non-uniform coating deposition on the substrates. Additionally, spray nozzles have a minimum flow rate at which they can produce a stable spray pattern, which limits the ability of the nozzles to apply a thin coating. Thus, stationary spray nozzles are not suitable for the application of thin, uniform coatings.
The use of a traversing ultrasonic spray head to achieve thin, uniform coating layers has been successful-within certain limits. This technique involves using an ultrasonic spray head that traverses and sprays the coating over moving substrates as they pass below on a conveyor. The coating thickness is proportional to the liquid flow rate and inversely proportional to the traversing speed of the spray head. The motion of the traversing head is synchronized with the conveyor speed to achieve a uniform coating deposition on the substrates. However, the ultrasonic spray heads have a minimum flow rate at which they can produce a stable, uniform spray pattern. This limits the efficacy of this technique to achieve the increasing requirements for ultra-thin coating layers.
In summary, although spin coating provides excellent coating results it is not suitable for high volume production; the results obtained with the fog coating techniques are subject to changes in the surrounding ambient conditions; and stationary spray nozzles do not produce a uniform coating deposition or a thin coating layer.
The present invention provides an ultrasonic spray coating assembly that represents an improvement over the ultrasonic spray systems described in U.S. Pat. Nos. 5,409,163, 5,540,384, 5,582,348, 5,622,752, 7,934,665 and 7,975,938, the disclosures of which are hereby incorporated herein by reference. The ultrasonic spray coating system of the present invention can be used in the methods taught in these patents, and can also be used as described herein.
The present invention is directed to an improved feed blade and an ultrasonic spray coating system utilizing the improved feed blade, wherein (1) the surface of the feed blade of the ultrasonic spray head has been modified to add a series shallow channels to redirect the ultrasonic surface wave system that exists on the surface; (2) the internal passageway of the liquid applicator has been modified to add a series of channels to uniformly feed the liquid from the liquid applicator to the spray-forming tip; (3) a positive displacement pump is utilized to deliver the liquid to the spray head at a precise flow rate independent of the associated resistances of the liquid delivery system components; and (4) the output orifice of the primary gas director is extended to impinge the directed gas stream at a position closer to the spray-forming tip.
One embodiment of the invention is thus directed to an ultrasonic spray coating system comprising:
In certain embodiments of the invention, the surface feed blade comprises a series of shallow channels to redirect and concentrate the surface wave component that exists on this surface, such that the surface wave has three directional components in the x, y and z planes. In certain embodiments, the inside orifice of the liquid supply applicator comprises a series of liquid guide channels to form a liquid flow guide. In certain embodiments, the output orifice of the primary gas director is extended to bring the output orifice closer to the impingement surface of the spray forming head.
In certain embodiments, the surface wave with three (3) directional components redirects the liquid flow over the surface of the feed blade to form a film with a more uniform thickness. In certain embodiments wherein the surface wave with three (3) directional components pumps the more uniform liquid film to the atomizing surface of the spray forming tip producing a spray containing drops with a smaller median drop size. In certain embodiments wherein the surface wave with three (3) directional components pumps the more uniform liquid film to the atomizing surface of the spray forming tip producing a spray containing drops with a more uniform drop size distribution.
In certain embodiments, the ultrasonic spray coating system further comprises a positive displacement pump to deliver liquid to the spray forming tip at a precise flow rate independent of the associated resistance to flow created by the liquid guide channels inside the liquid supply applicator. In certain embodiments, the extended output orifice of the primary gas director enables the ultrasonically produced spray to be expanded to a greater expanded width by more than a factor of two (2).
In certain embodiments, the combination of the modified feed blade surface and the modified liquid supply applicator orifice enables a uniform spray to be produced by the spray forming tip at a substantially lower flow rate. In certain embodiments, the modified liquid supply applicator orifice and the extended primary gas director output orifice enables a thinner, uniform coating to be applied to a substrate.
Another embodiment of the present invention is an ultrasonic spray coating assembly comprising an ultrasonic converter with spray head with an improved spray forming tip, an improved liquid applicator in close proximity to the spray forming tip, support brackets, an improved gas entrainment mechanism a positive displacement liquid delivery mechanism and an ultrasonic power generator.
Another embodiment of this invention preferably comprises an ultrasonic spray coating assembly with an improved spray forming tip, an improved liquid applicator and an improved gas entrainment system. In the preferred embodiment, the system is capable of spraying liquids onto substrates in a wide, uniform rectilinear pattern at a width proportional to the distance between the spray forming tip and the substrate.
Preferably, the present invention achieves the following benefits over the systems of prior art:
Advantageously, one or more of the following improvements are provided over the prior art ultrasonic spray coating system by embodiments of the present invention:
It should be appreciated by those persons having ordinary skill in the art(s) to which the present invention relates that any of the features described herein in respect of any particular aspect and/or embodiment of the present invention can be combined with one or more of any of the other features of any other aspects and/or embodiments of the present invention described herein, with modifications as appropriate to ensure compatibility of the combinations. Such combinations are considered to be part of the present invention contemplated by this disclosure.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention as claimed. Other embodiments will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein.
As illustrated in the Figures accompanying this specification, the ultrasonic spray coating system comprises of an ultrasonic spray head assembly and an ultrasonic power generator. As shown in
The ultrasonic power generator drives the ultrasonic spray head. A voltage generator drives the spray head at the proper operating frequency. The circuitry is designed to include the spray head in the frequency control path and to adjust power according to system demand. The operating frequency (fo) generated is between the resonant frequency (fr) and the anti-resonant frequency (fa) of the spray head, such that a proper ultrasonic wave system is established in the spray forming tip. The principle of operation of the ultrasonic generator and the resulting wave system in the spray forming tip is described in the above referenced prior art patents. The ultrasonic generator is designed to generate and maintain the required operating frequency during changing environments such as ambient temperature. Additionally, the amplitude of the ultrasonic output from the generator is adjustable to accommodate the flow rate requirements of various situations.
The power generator features a unique full bridge power output circuit configuration with a frequency driven pulse mode driver. The high frequency alternating voltage generator utilizes MOSFET power transistors in a bridge type, transformer-coupled configuration (not shown) to provide power to the ultrasonic converter. The DC supply voltage to the bridge circuit is varied to control the level of voltage delivered to the ultrasonic converter.
As described above, one embodiment of the present invention comprises an improved ultrasonic spray coating system having a converter mechanism for converting high frequency electrical energy into high frequency mechanical energy to thereby produce vibrations. The converter mechanism is designed to have one resonant frequency. A spray forming head is coupled to the converter mechanism and is resonant at the same resonant frequency. The spray forming head has a spray forming tip and concentrates the vibrations of the converter at the spray forming tip. The spray forming tip has a feed blade and an atomizing surface. The spray forming tip concentrates a surface wave on the feed blade and a compression wave on the atomizing surface from the vibrations of the converter. A high frequency alternating mechanism is electrically connected to the converter mechanism to produce a controllable level of electrical energy at the proper operating frequency of the spray forming head/converter mechanism such that the spray forming tip is vibrated ultrasonically with a surface wave concentrated on the feed blade and a displacement wave concentrated on the atomizing surface.
A liquid supplier is provided having a liquid applicator in close proximity with the feed blade of the spray forming tip and spaced therefrom. The liquid applicator includes an output surface having an orifice therein. The output surface is in close proximity with the feed blade of the spray forming tip and spaced therefrom. The output surface of the liquid applicator and feed blade of the spray forming tip are at substantially right angles to each other such that the liquid supplied from the liquid applicator forms a bead or meniscus between the output orifice of the liquid applicator and the feed blade of the spray forming tip. The meniscus is formed and sustained by the flow of liquid from the output orifice of the liquid applicator and the ultrasonic surface wave that exists on the feed blade of the spray forming tip. The ultrasonic surface wave enables the liquid to wet-out and adhere to the feed blade of the spray forming tip. The surface tension of the liquid allows the meniscus to form and constant flow of liquid sustains the meniscus. The longitudinal displacement wave, i.e., the wave that displaces the atomizing surface, pumps the liquid from the feed blade to the atomizing surface. A film of liquid then forms on the atomizing surface and is transformed into small drops and propelled from the atomizing surface in the form of a rectilinear spray. Finally, a controllable gas entrainment mechanism is associated with the spray forming head for affecting and controlling the velocity and pattern of the resultant spray.
Improvements to the feed blade of the spray forming tip, the liquid applicator, the primary gas director and the liquid delivery mechanism of the ultrasonic spray coating system are presented herein.
Referring to
The practical resonant frequencies range from 20 kHz to 120 kHz for atomizing liquids (20 kHz≥fsh≤120 kHz). The spray head is constructed of metal, either 6Al-4V titanium or 7075-T6 aluminum; titanium is preferred because of its strength and corrosion resistance properties.
The input end is comprised of a coupling surface and a coupling screw (not shown). The input end of the spray head is connected to an ultrasonic converter. The input must be flat and smooth for optimal mechanical coupling to the converter. The ultrasonic converter has a resonant frequency (fc) that is matched to the resonant frequency of the spray head (fsh) or fc=fsh.
The spray head body connects the input end to the output end and is formed to concentrate ultrasonic vibrations on the output end. To achieve ultrasonic amplification through the body, the input end must be larger than the output end. The profile of the body can be stepped, linear, exponential or Catenoid. The Catenoid shape is preferred because it provides the largest amplification of the sound wave through the body to the output end, which in turn, provides maximum atomizing capability. Preferable ratios of output end dimension D2 to input end diameter (D1) are:
Referring to the detail in
The purpose of the feed blade is to direct all of the liquid flow from the liquid applicator toward and onto the atomizing surface. The wave system that exists on the feed blade and the atomizing surface of the spray-forming tip is described in detail in the prior art patents referenced above. The wave system, as shown in
To produce a uniform spray pattern from the spray-forming tip, it is essential that (1) the liquid is delivered uniformly to the feed blade across its width by the liquid applicator and (2) that the liquid is delivered uniformly from the feed blade to the atomizing surface across its width. These two conditions ensure that a liquid film (see,
The liquid film shown in
Once the liquid is broken up into small drops, the drops are propelled them from the tip in the form of a spray. The size of the drops produced by compression wave is directly proportional to the thickness of the liquid film that is delivered to the atomizing surface from the feed blade. The drop size variation is also directly proportional to the liquid film thickness variation delivered to the atomizing surface. Also, the contiguity of the stream of drops being propelled from the atomizing surface is directly related to the contiguity of the liquid film that is delivered to aforementioned atomizing surface.
The size of the drops, the drop size distribution, and the contiguity of the spray pattern and the shape of the spray pattern define the quality of the spray pattern. Therefore, the quality of the spray pattern is directly related to the uniformity of the liquid film that is delivered to the atomizing surface by the pumping action of the feed blade from the meniscus of liquid that is formed between the liquid applicator and the feed blade. Additionally, the coating deposition on the substrate is directly related to the quality of the spray pattern. A uniform spray pattern will produce a uniform coating deposition on the substrate to be coated.
This pumping action of the feed blade wave system is effective in causing the liquid to form a uniform film on the surface of the feed blade and delivering the uniform liquid film from the liquid applicator to the atomizing surface of the spray-forming tip, within certain operating parameters, such as the flow rate and surface tension for a particular liquid. When the liquid flow rate and liquid surface tension are within certain limits, a very uniform, sheet-like, spray is produced by the spray-forming tip, as can be seen in
As illustrated in
When the liquid flow rate is within the nominal operating range, a uniform meniscus is formed between the liquid applicator and the spray-forming tip across the width of the tip in the x-direction. As the flow rate is decreased below the lower operating limit, the spray pattern deteriorates into individual segments that move at random across the width of the spray-forming tip. The formation of the individual segments and their random movement is due to the lack of resistance to liquid flow in the x-direction by the surface wave. The uniform meniscus is broken by the surface tension of the liquid and individual streams are formed between the liquid applicator and the spray-forming tip. The surface wave on the feed blade pumps the individual segments to the atomizing surface, which results in a non-uniform or segmented spray being propelled from the spray-forming tip and thus a non-uniform coating deposition on the substrate.
Individual segments form as the liquid flow rate decreases below the minimum limit for a liquid with a given surface tension. The higher the liquid's surface tension, the higher the minimum flow rate required to achieve a uniform spray pattern. For example, when spraying a higher surface tension liquid, like plain water, the lowest flow rate at which a uniform, rectilinear pattern can be produced is approximately 15 ml per minute. When spraying a lower surface tension liquid like ethanol, the lowest flow rate at which a uniform, rectilinear pattern can be produced is approximately 10 ml per minute. Once the liquid flow rate is reduced below these lower limits, the individual segments are formed as the surface tension of the liquid breaks the meniscus.
An additional problem is that the individual liquid streams feeding the atomizing surface produce a film of varying thickness across the width of the atomizing surface. A thicker liquid film on the atomizing surface produces larger drops and a thinner film produces smaller drops. A spray pattern that consists of segments of larger drops and segments of smaller drops also produces a non-uniform coating distribution on the substrate to be coated. Ideally a film of uniform thickness across the entire width of the atomizing surface is desired to produce a drop size distribution with less variation within the spray pattern.
Referring to the detail in
This channel system provides a guided wave action to focus and concentrate the pumping force in the z-direction and also to aid in overcoming the surface tension of the liquid, which reduces the tendency for side-to-side (x-direction) liquid flow across the width of the feed blade and the formation of individual liquid streams. The result is the formation of a more uniform film of liquid across the surface of the feed blade and consequently a more uniform flow of liquid from the feed blade onto the atomizing surface of the spray-forming tip. A more uniform flow of liquid to the atomizing surface results in a uniform film of liquid on the atomizing surface, which produces a more uniform spray pattern, smaller drops and less variation in the drop sizes produced.
The size of drops produced with ultrasonic energy is inversely proportional to the ultrasonic frequency and directly related to the thickness of the film formed on the atomizing surface of the spray-forming head just prior to atomization. A thinner film will produce smaller drops and a thicker film will produce larger drops. A film of uniform thickness of liquid being fed to the atomizing surface will produce a more uniform drop size distribution. While a film of varying thickness across the atomizing surface will produce a drop size distribution with much more variation in drop size.
In order to compliment the ultrasonic wave-guide on the feed blade of the spray-forming tip, a liquid flow guide is added to the inside of the liquid applicator.
The modified bottom piece of the liquid applicator contains the liquid flow guide is also shown in
It should be noted that the liquid flow guide passageways within the liquid applicator and the wave guide feature on the feed blade of the spray forming tip do not necessarily match. In other words, the flow guide channels within the liquid applicator do not need to have the same number of channels as the wave-guides on the feed blade, nor do the channels need to line up with one another.
With these improvements the lower flow rate limit for producing a uniform sheet-like spray pattern with plain water is reduced from approximately 15 ml per minute to less than 10 ml per minute. Similar flow rate reductions are achieved with other liquids. Additionally, since the liquid film on the atomizing surface is thinner and more uniform, the median drop size is smaller and the drop size variation is considerably reduced. This enables a thinner, more uniform coating to be applied to a substrate.
As illustrated in
The gas directors are used to expand and shape the spray generated by the spray-forming tip of the spray head. As illustrated in
The increased spray pattern width coupled with the lower limit to produce a uniform spray pattern further improves the ability to apply a thin, uniform coating to a substrate. These improvements enable a given coating to be applied over three times thinner than prior art.
As used herein, the singular forms “a”, “an” and “the” include plural unless the context clearly dictates otherwise. Moreover, when an amount, concentration, or other value or parameter is given as either a range, preferred range, or a list of upper preferable values and lower preferable values, this is to be understood as specifically disclosing all ranges formed from any pair of any upper range limit or preferred value and any lower range limit or preferred value, regardless of whether ranges are separately disclosed. Where a range of numerical values is recited herein, unless otherwise stated, the range is intended to include the endpoints thereof, and all integers and fractions within the range. It is not intended that the scope of the invention be limited to the specific values recited when defining a range.
It should be understood that the foregoing description is only illustrative of the present invention. Various alternatives and modifications can be devised by those skilled in the art without departing from the invention. Accordingly, the present invention is intended to embrace all such alternatives, modifications and variances that fall within the scope of the appended claims.
This application is a continuation of commonly owned U.S. application Ser. No. 13/441,958, filed on Apr. 9, 2012, the disclosure of which is hereby incorporated herein by reference.
Number | Date | Country | |
---|---|---|---|
Parent | 13441958 | Apr 2012 | US |
Child | 18659306 | US |