The present invention relates to a spray nozzle for deploying photoresistance or the like across a glass substrate or other workload, and a spraying device having such spray nozzle and method for conducting the spraying.
Currently, during the manufacturing of the flat panel display, the glass substrate of large dimension is coated with a photoresistance by a nozzle with linear opening. The photoresistance is sprayed from the linear opening of the nozzle, forming an even and homogeneous layer of photoresistance across a surface of the glass substrate.
As shown in
On the other hand, in the manufacturing field of the flat display panel, the cost of the glass substrate is about 60% of the CF glass substrate which is formed with black array, RGB pixels. If the glass substrate is only cut into a single dimension, then the leftover blank of the glass substrate cannot be cut into a useable dimension. In recent year, the glass substrate is cut in a way of so-called multi-model glass, i.e. once the glass substrate is cut with a larger dimension, then the leftover blank is cut into a small dimension so as to increase the utilization rate, such as shown in
In order to resolve the technical problem encountered by the prior art, the present invention provides a spray nozzle, configured with left and right halves, at least one of the left and right halves being defined with a mating surface in which a recess defining width of a linear opening of the nozzle is defined, each end of the nozzle being mounted with fenders jointly define the linear opening of the nozzle along with the recess, wherein the mating surface in which the recess is defined further includes with a N number of partitions dividing the recess into a N+1 number of individual ejectors, wherein N is a positive integer.
In addition, wherein the mating surface of one of the left and right halves in which the recess is defined with N number of mounting slots each receives a corresponding partition, each of the partitions includes a mating surface closely in contact with a mating surface of the other half of the left and right halves, bottom of each of the partitions is flushed to bottom of one of the left and right halves in which the recess is defined.
In addition, wherein the N number of partitions are integrally formed with one of the left and right halves in which the recess is defined.
It is another object of the present invention to provide a spraying apparatus, including a working table for carrying and supporting a workload; a spray nozzle for spraying working liquid over the workload; a shuttle carrying the spray nozzle to move horizontally; a pump assembly delivering working liquid to the spray nozzle; a controlling system commanding the movement of the shuttle and adjusting administering rate of the working liquid to the spray shuttle; wherein the spray nozzle is configured with left and right halves, at least one of the left and right halves being defined with a mating surface in which a recess defining width of a linear opening of the nozzle is defined, each end of the nozzle being mounted with fenders jointly define the linear opening of the nozzle along with the recess, wherein the mating surface in which the recess is defined further includes with a N number of partitions dividing the recess into a N+1 number of individual ejectors, wherein N is a positive integer.
It is still another object of the present invention to provide a method to spray a working fluid across a workload by the spraying apparatus recited above, and includes the steps of 1) disposing the workload onto the working table; 2) adjusting the partition in aligning with a border of working zone of the workload to be sprayed; 3) determining pump rate of the pump assembly; and 4) commanding the movement of the shuttle to travel horizontally so as to spray a layer of film over the workload.
In addition, wherein the mating surface of one of the left and right halves in which the recess is defined with N number of mounting slots each receives a corresponding partition, each of the partitions includes a mating surface closely in contact with a mating surface of the other half of the left and right halves, bottom of each of the partitions is flushed to bottom of one of the left and right halves in which the recess is defined.
In addition, wherein the N number of partitions are integrally formed with one of the left and right halves in which the recess is defined.
In addition, wherein the pump assembly includes a N+1 unit pump each interconnected to a corresponding individual ejecting nozzle so as to deliver the working liquid thereto.
In addition, wherein the pump assembly includes one unit pump interconnected to all the individual ejecting nozzle so as to deliver the working liquid thereto.
In addition, wherein the spraying apparatus further includes N+1 number of flow meters, each of the flow meters being used to measuring flow volume of the working liquid to the corresponding individual ejecting nozzle; N+1 valves, each of the valves being used to adjust the flow volume to the corresponding individual ejecting nozzle; and a flow volume adjusting module adjusting the corresponding valve to control the flow of the working to the individual ejecting nozzle based on a feedback from the flow volume measured by the flow meter.
The present invention is to divide a single mouth of a spray nozzle of larger dimension into a plurality of individual ejectors with smaller dimension. During the acceleration or reduction of the spray nozzle, each individual ejector will deliver a homogeneous and even quantity of working liquid at central and end portions. On the other hand, when different working surfaces are required to spray with different thickness of working liquid, the flow rate entering to different individual ejectors can be set differently in aligning with the requirements. Accordingly, the administering rate of each individual ejector can be set accordingly and thereby delivering different thickness of working liquid over different working surfaces. In addition, if different working liquids are requested to deliver on different working surfaces, then each of the individual ejectors can be supplied with different working liquid so as to conduct the spraying of different working liquid over different working surface.
In the description given to the preferred embodiment in view of the accompanied drawings, like elements will be given with similar numeral references. Detailed description will be given to the embodiment in light of the accompanied drawings. In the accompanied drawings, for a better and clear description, certain portions and layers have been enlarged and widened so for a better description. In the description given below, in order to avoid any confusion resulted from the unnecessary description to any configurational structure or function of prior arts, those description in view of the prior art configuration and function has been omitted.
Referring to
In addition, when the left and right halves 410 and 420 are mated, both the reservoir 430 and the month 460 have open ends, and as a result, a left and right fenders 470, 480 will be attached to close the opened ends. In the current invention, the fenders 470 and 480 are made from water-repellent material, or the fenders 470 and 480 can be coated with a layer of water repellent material facing inward. On the other hand, the fenders 470 and 480 can be attached to the ends surfaces of the left and right halves 410, 420 with screws or bonding agent.
On the mating surface 441 of the left half 410, a mounting slot 411 is defined, and in which a partition 490 is installed by ways of screws or bonding agent. A mating surface 491 of the partition 490 is closely in contact with the mating surface 423 of the right half 420, and a bottom 492 of the partition 490 is flushed with a bottom of the left half 410 such that the spray nozzle 400 is divided into two individual ejectors. By this arrangement, the spray nozzle 400 can be divided into two individual ejectors with smaller transversal coverage. Accordingly, when the spray nozzle 400 is accelerated or reduced with its speed, both the individual ejectors will give an even and homogeneous spray because the spray delivered from each ejector will have same flow rate at center and ends. On the other hand, when different workloads are requested to have different thickness of layer coated thereon, each individual ejector can be controlled to administer only intended flow rate of the liquid to achieve the goals of deploying different thickness of layers over the different workloads. Details will be given in following paragraph. On alternatively, when different workloads are requested to have coated with different material, then different working agent or liquid can be delivered separately to the ejectors, and accordingly, those different working agent or liquid can be properly sprayed out of the mouth of the different individual ejectors.
It should be noted that in the present invention, the partition 490/mounting slot 411 can be readily adjusted along the mating surface 411 of the left half 410 so as to meet the dimension requirement of the individual ejector, i.e. smaller or larger. Alternatively, with the design of the mold, the partition 490 can be integrally formed with the left half 410 so as to simplify the overall configuration. On the other hand, the quantity of the mounting slots 411 on the mating surface 441 of the left half 410 should not be limited to what disclosed in the drawing. The quantity of the mounting slot 411 can be readily increased or decreased so as to create different type of formation of the individual ejectors on the spray nozzle 400. In addition, in the present invention, the mating surface 423 of the right half 420 can be designed to be identical to the mating surface 441 of the left half 410 so as to modulate the design of the left and right halves 410, 420. As a result, the manufacturing cost will be reduced. On the other hand, the mating surface 423 can be defined with mounting slots which can be offset from the mounting slots 411 of the mating surface 411 of the left half 410.
A spraying apparatus incorporated with the spray nozzle illustrated in
As shown in
In the current invention, the quantity of the pumps can equal to the quantity of the individual ejectors divided from the spray nozzle 400, i.e. each individual ejector is incorporated with a corresponding pump; while alternatively, all the individual ejectors of the spray nozzle 400 can commonly share a common pump. Detailed description will be given herebelow.
As shown in
The pumping rate of the pump to the individual ejector can be defined with the following formula (1)
P=H×L×V (1)
In which, P is the pumping rate of the pump, H is the intended thickness formed by the individual ejector over the intended working zone; L is the width of the mouth of the individual ejector, and V is the travel speed of the spray nozzle along the X-direction. Normally, the spray nozzle travels at 100 mm/second to 300 mm/second.
Of course, as described above, a single pump can be used to deliver working fluid to both the individual ejectors 401, 402 and will be described herebelow.
As shown in
It should be readily understood that when there are a lot of individual ejectors, the quantity of the valves and flow meters are equal to the quantity of the individual ejectors.
The pumping rate of the pump 600 is defined with the formula (2).
P=(H1×L1+H2×L2)×V (2)
In which, P is the pumping rate of the pump 600, H1 is the intended thickness formed by the individual ejector 401 over the intended working zone; H2 is the intended thickness formed by the individual ejector 402 over the intended working zone; L1 is the width of the mouth of the individual ejector 401, L2 is the width of the mouth of the individual ejector 402; and V is the travel speed of the spray nozzle along the X-direction.
The spraying apparatus made in accordance with the present invention can be applied to the glass substrate, the semiconductor chip or other workload on which surface treatments with photoresistance or suitable working liquid are needed.
Embodiments of the present invention have been described, but not intending to impose any unduly constraint to the appended claims. Any modification of equivalent structure or equivalent process made according to the disclosure and drawings of the present invention, or any application thereof, directly or indirectly, to other related fields of technique, is considered encompassed in the scope of protection defined by the clams of the present invention.
Number | Date | Country | Kind |
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2013 1 0209718 | May 2013 | CN | national |
Filing Document | Filing Date | Country | Kind |
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PCT/CN2013/078197 | 6/27/2013 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2014/190578 | 12/4/2014 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
5976256 | Kawano | Nov 1999 | A |
6344088 | Kamikihara | Feb 2002 | B1 |
6423144 | Watanabe | Jul 2002 | B1 |
6537376 | Yasui | Mar 2003 | B1 |
20020110640 | Tateyama | Aug 2002 | A1 |
Number | Date | Country |
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1611304 | May 2005 | CN |
Number | Date | Country | |
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20140356543 A1 | Dec 2014 | US |