Patent Grant
8098120
This invention relates to a micro-electromechanical (MEMS) device comprising a first electrode (e1) and a second electrode (e3) that is part of a movable element and movable towards and from the first electrode (e1) between a first and a second position by elastic deformation of a deformable section of the movable element, and that is separated from the first electrode (e1) by a gap in its first position.
The invention further relates to integrated circuits incorporating such MEMS devices, and to methods of offering communication services over such devices.
The term ‘MEMS’ (Micro-electromechanical system or structure or switch) can encompass various devices. A common arrangement of a MEM device comprises a freestanding beam with a first electrode located opposite a second electrode. The first and the second electrode are mutually separated by an air gap. The first electrode can be moved towards or away from the second electrode by application of an actuation voltage to provide an electrostatic force. In principle other forces could be used such as an inductive force.
Some common applications are:
Two common constructions are as follows:
The beam is generally provided with holes, that are present as a consequence of the etching of the sacrificial layer between the beam and the substrate to create the air gap. These holes also help to reduce air damping by allowing air to flow in and out of the cavity between beam and substrate, while opening or closing the beam. However there are manufacturing techniques in which the beam is assembled to the substrate, so no holes are needed for the etching, for example as described in GB-A-2,353,410.
A device of the kind mentioned in the opening paragraph is known from US 2002/0149071. The MEMS device of this document comprises two separate actuation electrodes on a substrate in between of which an interrupted signal line is present. The movable element is here one metal layer that is electrostatically actuated by the actuation electrodes and includes a switch electrode, so as to connect the two portions of the signal line. The switch electrode is located as a bridge between the two actuation electrodes. These electrodes are connected through flexible elements to a support on a substrate. In fact, this MEMS device operates as a relay.
One of the main failure mechanisms of MEMS switches is stiction, in which the beam or membrane does not release from the counterelectrode when the actuation voltage is removed. It is known to address stiction using coatings or surface roughness such as dimpling, on the contact surfaces.
The known device has large actuation electrodes and these are sensitive to stiction. Such sticking mainly occurs if there is moisture or foreign matter between the moveable actuating stage and the actuation electrodes on the substrate. Sticking may occur in use or during a manufacturing process. Conventionally, a protrusion is prepared or a non-stick stick thin film is formed at the bottom surface of the actuating stage in order to prevent such sticking. In order to limit the stiction, the known device further includes protrusions on the flexible elements or on the substrate opposite the flexible elements. The protrusions may increase the contact resistance when the device is closed. The protrusions will also provide a counterforce against stiction.
However, for RF applications in particular, the switching speed of a switch is of primary importance. And although the known device provides a counterforce against stiction, this counterforce is not very large. The flexibility of the flexible elements inhibits this, certainly in view of the large surface area of the actuation electrodes relative to the effect of the protrusions.
Moreover, for industrial application a good lifetime of the devices is a sine qua non. Therein, the known device is relatively weak. As known in the field, MEMS elements with electrostatic actuation show the Pull-in effect, e.g. above a certain pull-in voltage VPI the movable element will fall down at once on the substrate. The protrusion on the flexible elements is under such circumstances a feature that is very prone to damage, and thus an undesired feature.
It is therefore an object of the invention to provide devices of the kind mentioned in the opening paragraph that have a high speed and are industrially viable. According to a first aspect, the invention provides such a micro-electromechanical device wherein the movable element comprises an independently movable section that is coupled to a main section of the movable element by a resilient coupling, such that the resilient coupling exerts a force on the movable element in a direction away from the first electrode, when the second electrode is in its second position.
The use of an independently movable section that is resiliently coupled to the main section results therein that this section will generally move together with the main section. It will not fall different from any other part of the movable section and hence not be an inherent weak point. Moreover, its independent coupling to the main section allows to set the spring constant of the resilient coupling in accordance with the needs of the design. Therewith, the counterforce against stiction can be enlarged without compromise to the electrical communication or to the suspension of the movable element. It is understood, in the context of this application, that the independently movable section is herein movable as part of the movable element and also separately, as far as this is allowed by the boundary conditions set up by the resilient coupling.
It is an advantage of the device of the invention that the speed of switching can be varied, and also enhanced. This is particularly relevant for RF applications. Much of the switch opening delay is concerned with the initial stage of opening, since the electrostatic attraction is greatest when the electrodes are closest. The independently moveable section can be provided with a different spring force and can contribute to a different rate of opening for example. An advantage of the claimed structure is a non-linear spring response. Compared to the known device, the use of an independently movable section has advantages such as enabling optimization of each spring arrangement independently. Also, reliability and accuracy over a long lifetime can be enhanced if there is no need for an arrangement that is subject to wear and high levels of stress.
It is furthermore observed that the independently movable section could be moved both by application of a force in the movable element, and by a force between the independently movable section and the substrate. Examples of such forces include electric interaction by means of application of a voltage difference, magnetic interaction, piezoelectric forces so as to create a local contraction in the independently movable section, and the mechanical forces of the resilient coupling only. Furthermore, the surface of the independently movable section facing the substrate may be chosen or be chemically modified so as to have an inherent attraction or repulsion to the material of the substrate surface.
A MEMS device that appears at first sight related is known from U.S. Pat. No. 6,418,006. This MEMS device has also has a tunable, first electrode, and separately an actuation electrode. The gap between the tunable electrode and the movable element is smaller than that between the actuation electrode and the movable element. The area of the movable element the large gap portion and the small gap portion is herein shaped to be effectively very rigid. Thereto, the small gap portion is formed in a tray-like shape. However, this known device is in effect very different. The movable element cannot come in contact to the actuation electrode and the small gap portion is by no means independently movable with respect to the main portion of the movable element. As a result, the counterforce against stiction that is provided in the invention, cannot be obtained in this known device.
In a preferred embodiment, the resilient coupling has a larger spring constant than the deformable section. In this manner, the coupling can provide an effective counterforce, that may be suitably larger than the stiction force. The effective barrier of stiction may be expressed as the release voltage Vrel, as is explained in more detail in the Figure description. In principle, the opposite is conceivable, that the spring constant of the rest of the electrode is higher, if desired. Preferably, the area of the independently movable section is also smaller than the rest of the electrode, which contributes to the greater spring constant of the resilient coupling.
As an additional advantageous feature of the present invention, the flexible elements are arranged to resist a pull in of the electrodes, and a spring constant of the resilient coupling and a position of the independently movable section are arranged to provide additional resistance to the pull in. This can enable a release voltage to be higher, and thus provide a reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This can also contribute to a faster switch opening speed.
Preferably, the independently movable section has a smaller surface area than the second electrode. This allows to provide a concentrated force to the section, and hence it can be effectively withdrawn from the substrate. Moreover, designing the independently movable section small allows the provision of more than one of such independently movable and resiliently coupled sections. This will further decrease the release voltage VREL, and increase the switching speed. Also, it allows that the stiction force is balanced relatively uniformly over a larger surface area.
As another additional feature, the resilient coupling is arranged on at least two sides of independently movable section of the electrode. This can provide a more stable and reliable structure with less susceptibility to vibration and manufacturing variations for example. In fact, the independently movable section is herein designed within the main section. An advantage hereof, particularly in combination with the embodiment that the movable element is as a whole substantially embodied as a metal layer, that the holes needed for the definition of the independently movable section can be used as etching holes during manufacturing.
As another additional feature, the independently movable section is surrounded by the rest of the respective electrode, at least on three sides. It appears advantageous to provide several independently movable sections at the side faces of the electrode. The shape of the electrode is then actually such that it may prevent the formation of large Eddy currents at the side face of the electrode. Such Eddy currents are generally problematic side effects that turn up at high frequencies. Alternatively, the independently movable section may be provided in the center of the main section. This reduces the stability of the movable element the least and short springs allow for large spring constants k2.
In a preferred embodiment, the independently movable section protrudes towards the substrate. Herewith, the section will be in contact to the substrate before the main section of the movable element. An additional return force may be provided when the independently movable section contacts the substrate. The protrusion of this movable section is suitably embedded as a separate, intermediate layer that is connected to the movable section. This intermediate layer may extend laterally outside the movable section overlying it, or at least outside the portion hereof directly in contact with the intermediate layer. The use of an intermediate layer for the protrusion allows the optimization of the mechanical properties, either by the choice of the material of the intermediate layer or by its lateral extension or pattern. Such a lateral extension has generally a reduced thickness in comparison to the movable section and is thus more elastic. An additional advantage of such a protrusion is a larger design freedom. It is not excluded that the main section is provided with such a protrusion as well, on at least on part of the area that functions as the second electrode.
Specifically, the independently movable section has a rest position in which it has a smaller spacing to the substrate than the spacing between the first and the second electrodes. The reduced spacing implies that even if the independently movable section is not moved independently, but only as part of the movable element, it will nevertheless contact the substrate earlier. It will be understood that an electrode may arranged on the substrate opposite the independently movable section. In that event, the reduced spacing has also an advantage of an electrical nature, in that in fact two microelectromechanical elements are created within one device with different actuation voltages and characteristics.
Therefore, in a first further embodiment, the independently movable section comprises a third electrode and a fourth electrode is arranged on the substrate facing the third electrode so as to form a second pair of electrodes, while the second electrode is arranged as part of the main section of the movable element. Preferably, the second pair of electrodes has another spacing in the rest position than the—first—pair of electrodes. This embodiment allows several designs, in one of which the second pair of electrodes forms a galvanic switch, and the first pair forms an actuator, and optionally also an RF capacitor. Alternatively, both pairs of electrodes may form variable capacitors, and these could be placed either in series or in parallel. Even when using only a limited number of positions of the movable element, such combinations allow the tuning of the resulting capacitance into a plurality of values.
Suitably, the movable element is substantially a single metal beam, in which case the second and third electrode will be mutually connected and present at the same voltage. The resilient coupling is herein embedded as a number of bridges. Alternatives to this best mode exist, which include first of all the use of a movable element on the basis of an electrically insulating beam with electrodes and interconnects on the surface thereof. A specific modification is the use of a piezoelectric material as the beam or as part of the beam. Another alternative is the use of electrically insulating means for the resilient coupling and optionally also for the independently movable section. In case that the independently movable section includes a third electrode, contacts thereto may be established using wirebonding. Particularly suitable in connection herewith, is the use of a separate intermediate layer, which allows the definition of the electrodes and other functional patterns, and thus vertically separating the functionality and the mechanical construction.
In a further embodiment, the deformable section of the movable element is separate from the main section. More particularly, the main section is coupled to a support on the substrate by the deformable section. This separate deformable section is advantageous in that it makes the device insensitive to differences in thermal expansion coefficient between substrate and metal. Including the independently movable section inside this suspension (k1) retains the advantages of this suspension.
Specifically, the device is provided with one or more flexible elements coupled to provide a force on the movable element dependent on the movement and being present between the movable element and one or more protrusions on the substrate. The use of such flexible elements is known per se, but particularly the combination of flexible elements and the resilient coupling has turned out to be an interesting construction, as the mechanical forces of the flexible elements and the resilient coupling may strengthen each other, but also balance each other. Such the flexible supports are arranged on at least two sides of the electrode on the movable element. This can provide a more stable and reliable structure with less susceptibility to vibration and manufacturing variations for example. It can also be used to obtain higher spring constants and makes the device less sensitive to high temperatures during manufacturing or operation.
The MEMS device of the invention is most suitably, but certainly not exclusively a galvanic or capacitive switch with a limited number of states, and in which the first electrode at the same time acts as an actuation electrode. The gap between the first and the second electrode in the first position may be varied.
The device of the invention may also comprise more than one microelectromechanical element having a movable element and an electrode arranged on the substrate. These elements may have the same design, but that is not necessary. In one embodiment, the designs differ with respect to the size of the electrodes, so as to provide different ranges. In another embodiments, the designs differ in view of the different functions of the elements; one element constitutes then for instance a variable capacitor in an impedance matching circuit, while another element constitutes a band switch.
If one device comprises more than one MEMS element, the gap size need not to be the same, but may be varied. Also, the MEMS device of the invention may be of the bistable type, in which the second electrode can be switched between a first electrode on the substrate and a third electrode in a separate element on the substrate. Also in this embodiment, the independently movable section will most suitably provide a counterforce against stiction on the substrate, although it is not excluded that it is designed to provide a counterforce against stiction on the separate element. The contact between the second and the third electrode appears, however, less sensitive to stiction.
The device of the invention suitably comprises further elements, such as thin-film capacitors, resistors, inductors, diodes and the like. These elements will be interconnected according to any design as is suitable and desired for the application. It is observed that thin-film capacitors and inductors can be integrated in the device easily, if the movable element is defined in a metal layer and particularly if an intermediate metal layer is present. The thin-film capacitor is then defined between electrodes in the electrically conducting layer on the substrate and the intermediate layer. In that case, the dielectric layer will be removed only in selected areas on the substrate, which is technologically achievable. The inductor will be defined in the metal layer of the movable element, that has sufficient thickness to arrive at a sufficient Q-factor.
The device of the invention may also be provided with a circuit of transistors. In this case, the device is an integrated circuit, and the microelectromechanical element is defined as part of the interconnect structure or even on top of the passivation layer. The integration of such element in the interconnect structure is for instance known from U.S. Pat. No. 6,777,284. This embodiment appears particularly suitable, if the microelectromechanical element is used as a resonator or a variable capacitor.
According to a second aspect, the invention provides a micro-electromechanical device having a substrate, a movable element, a driving means to move the movable element towards the substrate, which movable element has an independently movable section resiliently coupled to the rest of the moveable element. Preferably the independently movable section protrudes towards the substrate to provide an additional return force when the independently movable section contacts the substrate. In a further preferred embodiment, one or more flexible elements are present to provide a return force on the movable element dependent on the movement.
This can enable the return force separating the movable element to be increased over part of the range of movement. This can give an additional degree of freedom in designing the devices to suit particular applications. For example the part of the range can be arranged to be where there is a risk of stiction, or where there is most delay in opening, where the electrostatic force is greatest for example. Compared to the non linear spring arrangement mentioned above using a stopper, the use of an independently movable section has advantages such as enabling optimization of each spring arrangement independently. Also, reliability and accuracy over a long lifetime can be enhanced if there is no need for a stopper which can be subject to wear and high levels of stress. Also, it can enable easier construction if there are fewer contact or anchor points on the substrate.
Further features of this aspect are those as discussed with reference to the first aspect. The major difference between both aspects is the presence of the driving means. Electrostatic driving means are preferred, as microelectromechanical devices with such actuation principle can be manufactured in a robust and thus readily industrializable manner. Piezoelectric actuaion means have the advantage of lower driving voltages.
A third aspect provides a micro-electromechanical device having a substrate, a movable element, a driving means to move the movable element towards the substrate, wherein the substrate has a movable section resiliently coupled to the substrate, and protruding towards the movable section to provide an additional return force when the movable section contacts the movable element.
The movable section may also be attached to the substrate, and not to the movable element. The resilient coupling is embodied herein by for instance an elastic layer or a piezoelectric layer between the substrate and the movable section. Alternatively, the movable section could have a cantilever construction.
As an additional feature, the resilient coupling has a higher spring constant than that of the flexible element.
As another additional feature, the flexible supports are arranged on at least two sides of the movable element. This can provide a more stable and reliable structure with less susceptibility to vibration and manufacturing variations for example.
As another additional feature, the resilient coupling is arranged on at least two sides of independently movable section. This can provide a more stable and reliable structure with less susceptibility to vibration and manufacturing variations for example.
Another aspect of the invention includes the use of the device for switching. As a result of the use of the device of the invention, the switching speed is considerably enhanced.
Another aspect of the invention include modules having such devices and at least one semiconductor device. Microelectromechanical elements and devices such as those of the invention are by definition large in comparison to individual transistors. It is thus suitable to provide combinations as a system-in-a-package concept. Various concepts for modules exist and are known per se. An interesting improvement is the provision of the further semiconductor device into a cavity within the device of the invention. Such a cavity is made in the substrate in particular. This substrate is a semiconductor substrate by preference, although a glass or alumina, polymer, multilayer or other substrate is certainly not excluded. In particular, the substrate is removed at least partially, such that the back side of the semiconductor device is directly connected to a heatsink. Suitably, the semiconductor device is thinned from this back side, so as to reduce the thermal resistance through the substrate of the device. Such a module is described in the application WO-IB2004/050863, that is included herein by reference. The semiconductor device used in this module is first of all a driver for the device of the invention. Additional or alternative semiconductor devices are for instance a power amplifier and a transceiver, or in case of use as a resonator a detection circuit for the device of the invention. In case of a power amplifier module, the device of the invention is suitably used (as part of) an impedance matching circuit with variable capacitance and/or a switch between different frequency bands and between the transmit and receive mode within the module.
Further aspects of the invention include mobile handsets having such devices and methods of offering a communications service over such handsets. This is a recognition that an ultimate purpose of the improved device can be to enable improved communication services which can be charged for. The value of the services can be much greater than the sales value of the devices, which in some cases can be provided free of charge, so all the value comes from the services.
Any of the additional features can be combined with each other and with any aspect of the invention. Other advantages will be apparent to those skilled in the art, especially compared to other prior art. Numerous variations and modifications can be made without departing from the scope of the claims of the present invention. Therefore, it should be clearly understood that the form of the present invention is illustrative only and is not intended to limit the scope of the present invention. How the present invention may be put into effect will now be described by way of example with reference to the appended schematic drawings.
The features of the invention will be better understood by reference to the accompanying drawings, which illustrate preferred embodiments of the invention. In the drawings:
The present invention will be described with respect to particular embodiments and with reference to certain drawings but the invention is not limited thereto but only by the claims. The drawings described are only schematic and are non-limiting. In the drawings, the size of some of the elements may be exaggerated and not drawn on scale for illustrative purposes. Where an indefinite or definite article is used when referring to a singular noun e.g. “a” or “an”, “the”, this includes a plural of that noun unless something else is specifically stated.
Furthermore, the terms first, second, third and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other sequences than described or illustrated herein.
Moreover, the terms top, bottom, over, under and the like in the description and the claims are used for descriptive purposes and not necessarily for describing relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the embodiments of the invention described herein are capable of operation in other orientations than described or illustrated herein.
It is to be noticed that the term “comprising”, used in the claims, should not be interpreted as being restricted to the means listed thereafter; it does not exclude other elements or steps. Thus, the scope of the expression “a device comprising means A and B” should not be limited to devices consisting only of components A and B. It means that with respect to the present invention, the only relevant components of the device are A and B.
One of the causes for stiction is charging of the dielectric layer, which causes a shift in the effective voltage of ΔV=ρszd/∈d, where ρs is the surface charge in the dielectric, zd is the thickness of the dielectric and ∈d is the dielectric constant of the dielectric. If the charging voltage is larger than the release voltage of the switch (i.e. ΔV>Vrel), stiction occurs. Therefore increasing Vrel increases the reliability of the switch. However for a conventional switch (VPI/Vrel)2=4/27 (Cdown/Cup)2. Therefore an increase in Vrel leads to an (usually unwanted) increase of VPI. The arrangement of
A first embodiment of the invention, illustrated in
Effect on VPI:
In the illustrated embodiment the spring constant of spring k2 is much larger than that of spring k1. Because the effective spring constant of electrode e3 is thus a bit smaller than that of electrode e1, the pull-in voltage will be slightly smaller, however this effect is only marginal and can be neglected if k2 is much larger than k1. Indeed this can be useful for some applications.
Effect on Vrel:
When the electrodes are forced close together by applying a higher voltage to them (for applications to switches, this corresponds to a closed state of the switch), the electrostatic force on the top electrodes e2 and e3 is proportional to their area. As the area A2 of electrode e2 is smaller than that of a conventional switch (A2+A3), the electrostatic force is also smaller. Compared to a conventional switch with the same spring constant, the electrode e2 of the proposed switch has therefore a higher release voltage. A notable measure of effectiveness is to compare the ratio Vpi2/Vrel2 to k2/k1. For a case where A2=A3, this is a straight line for a conventional single spring device and a curve beneath the straight line for the two spring device. For k2/k1=8 the relative release voltage is increased by about 40% compared to a conventional switch, making the switch more reliable.
Other Consequences:
The double spring structure design will also increase the opening speed of the MEMS device, because stiction effects are reduced and more force is available for accelerating the switch. This is particularly important for switch devices. This mechanism will only be significant in the initial part of the opening motion. As explained above, the double spring structure can increase the reliability of an electrostatic MEMS switch. The design can decrease the ratio VPI/Vrel by a factor of about 1.4, which enables the notable increase in the reliability of the MEMS device.
A plan view of a design of such a device corresponding to the arrangement of
This third electrode e3 is assumed to have a beneficial effect on the lifetime of the device 100. The lifetime of MEMS device is primarily dependent on charging effects, and not on metal fatigue or similar materials properties. The release voltage should be as high as possible in order to avoid said charging effects, which is the intended purpose of the third electrode. second and 3rd conductive layers form e2, e3, k1 and k2, respectively.
Fsfd=b0v/z3 (1)
Where v is the speed and z is the distance between the electrodes. One way to reduce the effect of air damping is to provide holes in the membranes to reduce the constant b0.
In addition to a conventional MEMS switch, which comprises 2 electrodes e1 and e2, separated by a gap g1 and suspended by a spring k1, the switch comprises a movable element which has an electrode e2 and an independently movable section termed a ‘stamp’. This stamp is connected to the top (or bottom) electrode by a resilient coupling in the form of a spring k2 and is separated from the substrate by a gap g2. The stamp protrudes into the gap so that the gap g2 is smaller than the gap between the electrodes. The contact area A beneath the stamp is not used as an electrode, so the device area is increased slightly.
Effect on VPI:
The equations that conventionally govern pull-in and release are: VPI2=8k1g13/(27A ∈0) and Vrel2=2g1k1A ∈0/Cdown. First the difference between the pull-in and release voltage of the proposed switch and that of a conventional switch will be discussed. If g2 is larger than g1/3, the pull-in voltage VPI of the top membrane will not be affected, so at VPI the switch will close until the stamp touches the substrate. At that point the gap between the electrodes is g1−g2 and the effective spring constant of the switch will be k1+k2. From the pull-in equation it can be seen that the pull-in voltage of a structure with stamp will be the same as that without stamp as long as:
k1g13>(k1+k2)(g1−g2k2/(k1+k2))3.
Effect on Vrel:
The stamp increases V rel2 by a factor:
Thus it is seen that the stamp structure can increase the reliability of the MEMS structure. If for example, g2=0.6 g1 and k2=9 k1, the release voltage would increase by 90% as a result of the stamp, while leaving the pull-in voltage unaffected.
Effect on Speed:
Although the stamp will slow the switch a bit down during its closing motion, this effect will not be very large, as the force of the stamp is only significant when the switch is almost closed whereas the electrostatic force is very large in this region and can easily compensate the spring force. It can be shown that the speed of the switch during closing is largest when the electrodes are close together.
When opening, the opening force of the stamp will be very helpful in the first stages of the switch motion, as the air damping force is largest in this region (see equation (1)). That some extra force in the initial opening stages of the switch motion could reduce the switching time a lot, is confirmed by showing that a typical switch spends about 80% of the opening time to travel only the first 20% of the gap. If again g2=0.6 g1 and k2=9k1 it is seen that the spring force in the closed state is increased by a factor of 4.6, which will surely increase the speed of the switch considerably, the switching time might be reduced by a factor of 2-3.
As described, a new MEMS design with a stamp structure incorporated can increase the speed and reliability of an electrostatic MEMS switch. The new design is expected to increase the speed by a factor of more than 2 and can decrease the ratio VPI/Vrel by a factor of about 2 thus increasing the reliability of the MEMS device.
A schematic view of a device with a stamp S supported on both sides is shown in
It is understood that the advantage of the device results specifically from its position in the second, closed position. Usually, both the independently movable section 70 and the main section of the movable element (e.g. the second electrode e2) are attached to the substrate. The resilient coupling k2 between both sections is then under compressive stress and provide a counterforce. This is, in this example, due thereto that the movable element has a protrusion towards the substrate at the independently movable section. When both sections are attached to the substrate, the independently movable section is pushed upwards relatively to the main section. It is the resilient coupling that carries the resulting stress, and therewith provides a counterforce against stiction.
The MEM devices described above in any of the embodiments can be incorporated into integrated circuits, into mobile devices such as wireless phone handsets, or wireless mobile computing devices for example. Although described with regard to elements movable perpendicular to a substrate, in principle the movement can be parallel or have a component parallel. As described above, a MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of VPI to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
Thus, in summary the invention provides a MEM device has a movable element 30, a pair of electrodes e1, e2 to move the movable element, one electrode having an independently movable section e3, resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
| Number | Date | Country | Kind |
|---|---|---|---|
| 04105335 | Oct 2004 | EP | regional |
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/IB2005/053475 | 10/24/2005 | WO | 00 | 11/12/2007 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2006/046192 | 5/4/2006 | WO | A |
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