Claims
- 1. The method of forming on a substrate an improved thin film of an alloy of silicon, aluminum and iron, said film being useful in the formation of a magnetic head, and being comprised of first and second regions which comprise different concentrations of iron, said method utilizing therefor three different voltaic potential levels, said third voltaic potential level being in value between said first and second voltaic potential levels, comprising the steps of
- (a) sputtering from a target of said alloy while applying duringa first time duration said first voltaic potential level to said target and said second voltaic potential level to said substrate, and
- (b) while maintaining substantially said first voltaic potential level on said target, removing said second voltaic potential level from said substrate and, instead applying said third voltaic potential level to said substrate during a second time duration, thereby to cause re-sputtering from said thin film to leave that part of said thin film which is subject to re-sputtering comparatively rich in iron.
- 2. The method of claim 1 further including the step of introducing nitrogen into the chamber within which, and while, said sputtering is done, thereby to cause the thin film formed thereby to become amorphous.
- 3. The method of claim 1 further including the step of gradually changing the levels of said voltaic potentials.
- 4. The method of claim 1 further including the steps of (a), introducing nitrogen into the chamber within which, and while, said sputtering is done, and (b) gradually changing the levels of said voltaic potentials.
Parent Case Info
This is a division of application Ser. No. 600,857,filed Apr. 16, 1984, now U.S.Pat. No. 4,631,613.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
3451912 |
D'heurle et al. |
Jun 1969 |
|
4036723 |
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|
4336118 |
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|
4410407 |
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|
4468437 |
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Non-Patent Literature Citations (2)
Entry |
H. Shibaya et al., "Preparation . . . Head Core", IEEE Transactions on Magnetics, vol. Mag-13, No. 4, 7/77, pp. 1029-1035. |
Maissel et al., "Handbook . . . Technology", McGraw Hill Book Co., 1970, pp. 4-22 to 4-24. |
Divisions (1)
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Number |
Date |
Country |
Parent |
600857 |
Apr 1984 |
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