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Entry |
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N. Jiwari et al., 8257a Journal of Vacuum Science & Technology A 12(4), “Helicon Wave Plasma Reactor Employing a Single-loop Antenna”, Jul./Aug. 1994, pp. 1322-1327. |
U.S. application No. 29/109,892. |
U.S. application No. 29/109,893. |
U.S. application No. 08/113,577, 5423063. |
U.S. application No. 29/090,631. |
U.S. application No. 29/090,618. |
Applied Materials, Inc., Exhibit A, dated more than one year prior to Aug. 24, 1999, the filing date of the present application. (Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.). |