| Number | Name | Date | Kind |
|---|---|---|---|
| 118252 | Lewis | Aug 1871 | |
| 565698 | Sparks | Aug 1896 | |
| 4154011 | Rakestraw et al. | May 1979 | |
| 4478437 | Skinner | Oct 1984 | |
| 4948458 | Ogle | Aug 1990 | |
| 4990229 | Campbell et al. | Feb 1991 | |
| 4999096 | Nihei et al. | Mar 1991 | |
| 5001816 | Oetiker | Mar 1991 | |
| 5146137 | Gesche et al. | Sep 1992 | |
| 5150503 | Müller | Sep 1992 | |
| 5178739 | Barnes et al. | Jan 1993 | |
| 5231334 | Paranjpe | Jul 1993 | |
| 5280154 | Cuomo et al. | Jan 1994 | |
| 5304279 | Coultas et al. | Apr 1994 | |
| 5346578 | Benzing et al. | Sep 1994 | |
| 5397962 | Moslehi | Mar 1995 | |
| 5401350 | Patrick et al. | Mar 1995 | |
| 5404079 | Ohkuni et al. | Apr 1995 | |
| 5418431 | Williamson et al. | May 1995 | |
| 5429070 | Campbell et al. | Jul 1995 | |
| 5430355 | Paranjpe | Jul 1995 | |
| 5637961 | Ishii et al. | Jun 1997 | |
| 5669975 | Ashtiani | Sep 1997 | |
| 5681393 | Takagi | Oct 1997 | |
| 5707498 | Ngan | Jan 1998 | |
| 5721021 | Tobe et al. | Feb 1998 | |
| 5770098 | Araki et al. | Jun 1998 | |
| 5783492 | Higuchi et al. | Jul 1998 |
| Number | Date | Country |
|---|---|---|
| 0653776 | May 1995 | EP |
| 0727923 | Feb 1996 | EP |
| 0836219 | Jun 1997 | EP |
| 0807954 | Aug 1997 | EP |
| 0813227 | Sep 1997 | EP |
| 0836218 | Apr 1998 | EP |
| 0840351 | May 1998 | EP |
| Entry |
|---|
| N. Jiwari et al., 8257a Journal of Vacuum Science & Technology A 12(4), “Helicon Wave Plasma Reactor Employing a Single-loop Antenna”, Jul./Aug. 1994, pp. 1322-1327. |
| U.S. application No. 29/109,892. |
| U.S. application No. 29/109,893. |
| U.S. application No. 08/113,577, 5423063. |
| U.S. application No. 29/090,631. |
| U.S. application No. 29/090,618. |
| Applied Materials, Inc., Exhibit A, dated more than one year prior to Aug. 24, 1999, the filing date of the present application. (Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.). |