This document relates to optical resonators, including optical resonators that support optical whispering gallery modes, and devices based on optical resonators.
Optical resonators may be used to spatially confine resonant optical energy in a limited cavity with a low optical loss. The resonance of an optical resonator can provide various useful functions such as optical frequency references, optical filtering, optical modulation, optical amplification, optical delay, and others. Light can be coupled into or out of optical resonators via various coupling mechanisms according to the configurations of the resonators. For example, Fabry-Perot optical resonators with two reflectors at two terminals may use partial optical transmission of at least one reflector to receive or export light.
Optical whispering gallery mode (WGM) resonators confine light in a whispering gallery mode that is totally reflected within a closed circular optical path. Unlike Fabry-Perot resonators, light in WGM resonators cannot exit the resonators by optical transmission. Light in a WGM resonator “leaks” out of the exterior surface of the closed circular optical path of a WGM resonator via the evanescence field of the WGM mode. An optical coupler can be used to couple light into or out of the WGM resonator via this evanescent field
Optical resonators can be used to generate resonator resonances in frequency as frequency references for a wide range of applications. For example, the resonance of an optical resonator can be used as a reference to which a frequency of laser can be locked to achieve a stabilized laser operation.
One technical challenge associated with using optical resonators as frequency references is stabilization of a resonance of an optical resonator against drifts and fluctuations of the resonance caused by various factors because the resonator is subject to internal changes and external perturbations. For compact optical resonators, including optical whispering gallery mode resonators with a dimension on the order of millimeters or less (e.g., 10˜102 microns), it is difficult to stabilize the optical resonators and their resonances.
This document describes Techniques and devices that stabilize optical resonators.
The techniques and designs for stabilization of optical resonators in this document can be used for stabilizing various optical resonators including WGM resonators. The specific implementations of the techniques and designs described below make specific reference to WGM resonators as examples to illustrate various aspects of the techniques and designs.
Studies and experiments conducted on the thermal properties and stability of WGM resonators suggest that the stability of a passively stabilized millimeter-sized WGM resonator made of a certain class of crystalline materials is primarily dictated by thermorefractive fluctuations. See, Savchenkov et al., “Whispering-gallery-mode resonators as frequency references. I. Fundamental limitations,” Journal of Optical Society of America (JOSA) B, Vol. 24, Issue 6, pp. 1324-1335 (2007), which is incorporated by reference as part of this document. For example, the frequency stability limit of a cylindrical WGM resonator having 100 μm in thickness and several millimeters in diameter is of the order of one part in 10−12 at an integration time of 1 second. Thermorefractive fluctuations increase inversely proportional to the mode volume, and the predicted stability is limited because of small volumes of the WGMs.
Proper selection of the resonator host material is important for the stabilization of the WGM frequency. Photorefractive fluctuations can be suppressed in some materials, such as magnesium fluoride, if a proper operation temperature is selected. Thermal expansion fluctuations become dominant in the frequency stability limit in those resonators. Specific inhomogeneous thermal expansion properties of some crystals can be used to design methods of active stabilization of fluctuations of the resonator frequency resulting from the residual thermal expansion fluctuations. The achieved frequency stability may be better than the stability dictated by the fundamental thermodynamic limit.
Suppression of the external temperature fluctuations improves the frequency stability of WGM resonators. Some WGM resonators exhibit large thermorefractive coefficients and thermal expansion coefficients and many such resonators are made of transparent optical materials. Because the light entering a WGM resonator is always confined within the dielectric material, and not in vacuum, a small change in temperature tends to cause a large frequency shift of the WGM modes. In some high-Q WGM resonators, this phenomenon may lead to thermal bistability.
Table 1 lists properties of several transparent materials that can be used to construct WGM resonators. Such properties can be used to determine the proper external temperature stabilization for achieving thermodynamically limited frequency stability of resonators made out of those materials.
aThe data are taken from manufacturer specifications if the reference is not provided. We should note that the values vary significantly depending on the published study and/or the specifications. The variation: reaches tens of percents.
The following expressions can be used to estimate the frequency stability of a WGM resonator:
where ΔωTR, ΔωTE1, and ΔωTE2 are the frequency deviations due to thermorefractive, thermal expansion, and thermoelastic fluctuations, respectively; kB is the Boltzmann's constant; T is the absolute temperature; p is the density of the resonator host material; C is the specific heat capacity; n is the refractive index; αl=(1/l)(∂l/∂T) is the thermorefractive coefficient; αl=(1/l)(∂l/∂T) is the linear thermal expansion coefficient; K is the thermal conductivity coefficient; βT=−[(1/V)(∂V/∂p)]T is the compressibility of the resonator host material; and Vm and Vr are the volumes of the mode and the resonator, respectively. Eqs. (1)-(3) represent the square of the deviation of a mode frequency from the center of frequency distributions resulting from the corresponding thermodynamic processes. To study the deviations given by Eqs. (1)-(3) experimentally, the frequency of a WGM can be measured instantaneously to create the statistical distribution of the measurement results, and to find the square deviation of the frequency characterizing the distribution.
To estimate the required quality of the compensation of the external temperature fluctuations that would allow reaching the thermodynamic limit, the following condition is assume: ΔT=<(Δω)2>1/2/[ω(αn+αl)]. The idea is that the influence of the external temperature fluctuations can be relaxed if thermorefractive effect compensates thermal expansion. For anisotropic materials, the following are considered: (i) WGM resonators with symmetry axis coinciding with the crystalline axis, (ii) WGMs polarized along the crystalline axis (TE modes), (iii) selection of the linear thermal expansion coefficient α1 and thermorefractive coefficient αn. Overall, such an estimate is usually valid if temperature gradients due to external temperature variations are small within the resonator. The results are shown in Table 2 below.
(ΔωTR)21/2/ω
(ΔωTE1)21/2/ω
(ΔωTE2)21/2/ω
aΔT: determines the effective value of external temperature instability (quality of compensation of external technical temperature fluctuations) required to observe the limits.
Table 2 suggests that external temperature stabilization of the whole system for the listed examples should be at least on the level of 0.1 μK at an integration time of 1 s to achieve the frequency stability given by the thermodynamic limit. The stabilization should be even better for materials with a low thermorefractive constant, such as magnesium fluoride.
One primary source of the fundamental long-term instability in frequency with an integration time equal to or greater than 1 s is the thermorefractive fluctuations for WGM resonators made of calcium fluoride, sapphire, quartz and similar materials. The spectral density of the thermorefractive frequency noise could be estimated by
This equation is valid for a thin cylindrical resonator of thickness L and radius R (R>>L), αn is the thermorefractive coefficient of the material, Vm is the volume of the WGM mode, v=2πRn/λ is the mode order, n is the refractive index of the material, D=κ/(ρC) is the temperature diffusion coefficient, κ is the thermal conductivity coefficient, and C is the specific heat capacity. The Allan variance of the WGM frequency can be estimated by the following integration:
where Sδω/ω(Ω) is a double-sided spectral density.
Consider an example of a calcium fluoride resonator of radius R=0.3 cm and thickness L=0.01 cm driven with λ=1.55 μm light, where v≅2πRn/λ≈2.7×104 and R/v2/3≅1.1×10−1. The thermal diffusivity for calcium fluoride is equal to D=3.6×10−2, hence characteristic frequencies for the process are D/R2=0.4 s−1, Dv4/3/R2=3.2×105 s−1, and D/L2=360 s−1. For αn=0.8×10−5K−1, and Vm=2πRL×R/v2/3≅6×10−6 cm3, the following can be computed: kBαn2T2/ρCVm≅4×10−24. The evaluated Allan variance for the resonator is shown in
Referring to the change of the slope of the dependence shown in
One advantage of crystalline WGM resonators in comparison with other solid-state resonators is that the WGM resonators can be made out of various materials with various thermorefractive constants. This choice of different resonator materials allow for selecting a particular material with properties that meet the requirements of a specific application.
The unique properties of magnesium fluoride, for example, can be used to improve a resonator's performance.
Therefore, the thermorefractive noise of a WGM resonator does not limit the stability of WGM resonators made out of certain materials with moderate temperature stabilization in absence of a sophisticated compensation mechanism. Noise from other sources can be suppressed to improve the stability of the WGM resonator.
Different from the thermorefractive effect, thermal expansion of the WGM resonator can also cause fluctuations of the WGM frequency. The fluctuations caused by thermal expansion tend to be much smaller than the fluctuations caused by the thermorefractive effect. When the thermorefractive fluctuations are reduced to the level of fluctuations caused by the thermal expansion by either properly setting the operating temperature as shown in
Thermodynamic temperature fluctuations of a WGM resonator can modify the resonator radius and thickness and such changes in dimension can generate noise in the WGM frequency. Assuming the basic contribution comes from the lowest-order eigenfunction of the thermal diffusion, the noise can be estimated by the following equation:
This equation suggests that the frequency dependence of the spectral density is determined by the slowest thermal diffusion time associated with the thermal diffusion along the radius of the resonator. Eq. (5) can be used to compute the Allan variance of the frequency of the WGM resulting from the fundamental thermal expansion fluctuations of a z-cut magnesium fluoride resonator of radius R=0.3 cm and thickness L=0.01 cm.
In practical applications, the WGM resonator can be placed on a metal plate possessing a high thermal conductivity. Under this configuration, the thermal response time shortens and the time constant of R2/π2D can be replaced with L2/π2D. This condition can reduce the value of the low-frequency spectral density significantly. For example, the thermal diffusivity of aluminum is D=0.97 cm2/s at 300 K. Copper has a larger thermal diffusivity D=1.15 cm2/s at 300 K. Placing the resonator on a polished copper plate or squeezing the resonator between two copper plates would result in more than an order of magnitude reduction of phase noise at the zero frequency. Consequently, the corresponding Allan variance can be reduced below one part per 10−14 at an integration time of 1 s. Placing a WGM resonator onto a copper plate can reduce the quality factor of the mechanical modes of the WGM resonator and this reduction can enhance the influence of thermoelastic fluctuations on the frequency stability.
One technique to increase the WGM resonator volume without significantly changing the characteristic time constant of the process is to optimize the geometric shape of the WGM resonator. For example, the WGM resonator may be constructed to have a nearly spherical shape or the shape of a cylinder with equal radius and height to increase the resonator volume. The light should travel in a small protrusion formed on the WGM resonator that produces little influence on the thermal and mechanical modes of the resonator. For instance, a nearly spherical single mode magnesium fluoride WGM resonator of radius at R=0.3 cm can be constructed to have an Allan variance less than one part per 10−14 at 1 s integration time. This improvement does not increase the thermoelastic fluctuations.
The thermoelastic effect also causes fluctuations in the WGM frequency. Referring to Table 2, other related values in Table 2 are comparable. However, the thermoelastic part ΔωTE2 comes from the mechanical oscillations of the resonator. Those oscillations have high frequencies and do not significantly modify the Allan variance of the WGM frequency for integration times at or longer than 1 s.
Turning now to techniques for stabilizing optical resonators such as WGM resonators, the following sections provide several examples for passively stabilizing a resonator without any active control, or actively stabilizing a resonator based on a feedback control loop. In some implementations, stabilization of the WGM frequency may involve directly controlling the thermal response of the WGM resonator to reduce unwanted averaged frequency drifts or fluctuations. In other implementations, stabilization of the WGM frequency may not involve directly controlling the thermal response of the WGM resonator. Various aspects of the resonator stabilization are described in Savchenkov et al. “Whispering-gallery-mode resonators as frequency references. II. Stabilization,” JOSA B, Vol. 24, Issue 12, pp. 2988-2997 (2007), which is incorporated by reference as part of the disclosure of this document.
Examples of passive stabilization of optical resonators are illustrated in
The sandwiched resonator is made much thinner than the frame and spacer. Under this configuration, thermal expansion of the resonator tends not to result in any significant stress of the spacer and the frame, so the stress forces in the system are determined by those parts only. The frame has a much larger cross section than the spacer to generate a much stronger force than the spacer during the entire range of thermally induced expansion or contraction. Thus, the expansion of the spacer is primarily determined by the expansion of the frame. The force applied to the sandwiched resonator is A2E2(α2−α1)ΔT, where A2 is the cross section of the spacer and the resonator, E2 is the stress modulus of the spacer, α1 is the thermal expansion coefficient of the frame, and α2 is the thermal expansion coefficient of the spacer.
The resonator has a thermally induced frequency tenability dω/dT=(αn+α1)ω and stress induced tenability dω/dF. The frequency drift of the free resonator is determined by dω/dF. Under the applied stress by the spacer and the frame in
Hence, the thermal frequency drift is compensated if Δω/ΔT=0. The values of dω/dT and dω/dF can be inferred from experimental measurements and depend on the host material and the shape of the resonator. The cross-section area of the spacer and the resonator can be selected based on the specific needs of the device. The spacer can have, e.g., a wedge-like shape as shown in
The above passive stabilization is based on the linear expansion of different parts of the resonator holding device. It can be technically difficult to select parameter A2 to precisely compensate the thermal WGM frequency drift. For example, inevitable errors of the mechanical manufacturing of the compensator elements can lead to incomplete compensation of the frequency drift of the WDM resonance. For another example, the thermally induced frequency drifts or fluctuations in the resonator may exhibit nonlinear dependence with the change in temperature. Therefore, it may be desirable to provide a nonlinear element whose dimension changes nonlinearly with the temperature to supplement the linear compensation provided by the frame and the spacer.
In
Active stabilization uses a sensing mechanism to monitor the frequency shift of the WGM resonance of the resonator and applies a control in response to the monitored shift to counter act the shift. Active stabilization is dynamic and adaptive and thus can be more effective than the passive stabilization.
The control over the optical resonator can be implemented in various configurations. In one example, the control can exert a pressure on the optical resonator to cause a mechanical strain in the optical resonator that causes a change in the resonator resonance frequency. In another example, the control over the optical resonator can apply a control voltage to the optical resonator to cause a change in the resonator resonance frequency. In this regard, the optical resonator may exhibit an electro-optic effect under the control voltage to change the resonator resonance frequency.
A resonator controller is provided to be in communication with the sensor to receive the measured temperature change and applies a control signal to the second optical resonator based on the measured temperature to adjust and tune a resonator resonance frequency of the second optical resonator. This controller may include a microprocessor. This adjustment causes, via optical coupling between the first optical resonator and the second optical resonator, a change in the resonator resonance frequency of the first optical resonator to negate a change in the resonator resonance caused by the change in the measured temperature. Therefore, in this example, the first resonator (WGM resonator) is not directly controlled by the feedback control. Rather, the second optical resonator is controlled and the optical coupling between the two resonators allows the first resonator to be controlled by the second resonator.
Optionally, a direct control mechanism can be provided to the first resonator to apply a direct control over the first optical resonator to control and tune the resonator resonance frequency of the first optical resonator. In response to a change in the measured temperature, the direct control mechanism adjusts the direct control over the first optical resonator to cause a change in the resonator resonance frequency that, in combination with optical coupling between the first optical resonator and the second optical resonator, negates a change in the resonator resonance caused by the change in the measured temperature. Such direct control over the first resonator may be the controls shown in
These methods can be configured to provide one or more distinctive features. In the scheme with temperature compensated resonator the temperature of the resonator oscillates freely. The frequency stability is obtained using a temperature independent phenomena. In the scheme of oven-controlled resonator the temperature of the whole system is stabilized. In the scheme involving microprocessor stabilization the frequency of the WGMs is tuned using an additional resonator, and the WGM resonator is not disturbed. A combination of the two or more of the techniques may be used to provide better frequency stability as compared with the results achieved with each particular method.
The above active control approach can be implemented based on various optical modes in a WGM resonator. It is possible to reach high-frequency stability of WGMs properly selecting the operating conditions along with the host material as well as the morphology of the resonators. Two or more WGMs in a WGM resonator can be used provide effective active stabilization over the resonator. For example, a “triplemode” technique based on three WGMs in a resonator can be used to provide stabilization of the WGM frequency better than the fundamental thermodynamic limit.
These three WGMs can be used to suppress both thermorefractive and thermal expansion noise. Let us consider a spherical magnesium fluoride resonator with crystalline axis corresponding to the Z axis of a coordinate frame. The resonator is kept at 176° C. where modes polarized perpendicularly to the Z axis have a negligible thermorefractive effect. We propose to excite TM mode in the XY plane and TE mode in the XZ lane. Both these modes have identical vanishing thermorefraction. A comparison of the frequency difference between these modes (ωRF+Δ{tilde over (ω)}RF2) with the frequency of RF clocks gives averaged resonator temperature because
Δ{tilde over (ω)}RF2˜ω(αlo−αle)ΔTR, (7)
where Δ{tilde over (ω)}RF2 is the variation of the frequency difference between two modes determined by the temperature fluctuations of the resonator, ω is the optical frequency, and αlo (αle) is the thermal expansion coefficient for X and Y (Z) directions. The third mode, TE, is excited in the XY plane. The frequency difference between this mode and the TM mode in the same plane contains information about the temperature in the WGM channel. Both modes are influenced by the thermal expansion in the same way. Using results of the temperature measurements one creates a proper feedback and/or compensation scheme that results in suppression of both thermorefractive and thermal expansion fluctuations for the TM mode family in the XY plane. The relative stability of those modes is determined by expression
It is possible to achieve the following
ΔωTM˜{tilde over (ω)}RF2 if αlo≠αle.
It is also possible to measure the resonator temperature with sensitivity better than the fundamental thermodynamic limit. The measurement sensitivity is limited by Δ{tilde over (ω)}RF2/[ω(αlo−αle)], which can be very small if Δ{tilde over (ω)}RF2 is small enough. Hence, the triple-mode technique results in a possibility of compensation of the thermodynamic noises better than the fundamental thermodynamic limit. The suppression of the fundamental thermorefractive frequency fluctuations of an optical mode can be achieved by locking this mode to an ultrastable optical frequency reference. The advantage of the proposed technique is in the possibility to stabilize optical frequency beyond the thermodynamic limit using a RF reference. This feature will result in creation of stable UV as well as FIR lasers using crystalline WGM resonators.
This an example of a dual-mode stabilization under the active stabilization class. The basic idea of the dual-mode frequency stabilization is to measure the temperature of the resonator using the resonator modes themselves, without use of an external temperature sensor. Frequency difference between two WGMs having different thermorefractive coefficient should be compared with relatively stable RF frequency and the resultant signal should be used for both temperature measurement and temperature compensation. The temperature measurement is also possible if one uses two optical WGMs separated by an octave. An advantage of the dual-mode stabilization technique is its ability to monitor the temperature of the material inside the WGM channel. External sensors show local temperatures and are unable to get such information.
The method of stabilization is applicable to a WGM resonator made of a birefringent medium. The resonator is interrogated with coherent light polarized 45° with respect to the polarization of both the ordinary and extraordinary modes of the resonator. The light is modulated by a tunable RF source. The horizontally polarized component of the light is fed into an ordinarily polarized WGM. The carrier frequency of the laser is locked at the center of the mode. A sideband of the modulated light is fed into and locked to an arbitrary selected extraordinarily polarized mode. It is possible to use two independent lasers locked to two differently polarized modes instead of the single laser and the modulator. The modulation frequency (or the beating frequency of the two lasers) becomes a measure of the frequency difference between the ordinarily and extraordinarily polarized modes. Change of the temperature ΔTm in the WGM channel results in frequency shift ΔωRF of the RF frequency by
ΔωRF1=ω(αno−αne)ΔTm, (C1)
where ω is the optical frequency, and αno (αne) is the thermorefractive coefficient for ordinarily (extraordinarily) polarized light.
Let us estimate the frequency shifts for a z-cut magnesium fluoride resonator interrogated with 1.55 μm light (ω=1.2×1015 rad/s), and assume that the resonator is kept at 74° C., when αne=0 and αno≅4×10−7K−1. We find ΔωRF1/2π=80ΔTm MHz. Monitoring the RF frequency with a modest accuracy of ˜1 kHz per 1 s and subsequently actively stabilizing the temperature results in a significant (better than one part per 10−14 per 1 s integration time) suppression of the thermorefractive frequency fluctuations for the TE mode. The monitoring is simple because the spectral width of WGMs should not exceed several kilohertz for Q>1010 (no mode overlap). Therefore, dual-mode frequency stabilization results in a significant suppression of the photorefractive frequency noise.
The measurement accuracy of the temperature deviation inside the WGM channel can be very high. A simple locking technique is capable of determining the center of the line of a WGM with much better precision than the width of the resonance. For instance, a laser locked to a several kilohertz linewidth WGM can have frequency deviation relatively to the WGM less than 0.1 Hz per 1 s integration time. A good quartz oscillator can have 1 MHz carrier frequency with Allan variance of 10−7 at 1 s integration time. The measurement of ΔωRF1 using the laser and the oscillator gives an ability to monitor the mode channel temperature fluctuations with an accuracy exceeding 1 nK at 1 s integration time.
The accuracy is limited by the incomplete mode overlap and cross-phase modulation noise. An incomplete mode overlap results in somewhat uncorrelated temperature fluctuations for the TE and TM WGMs. This effect is not important if the measurement occurs in the vicinity of the point of zero thermal refractivity for any of the modes. The measurement primarily gives information about the temperature within the channel of the mode with nonzero thermorefractive coefficient. The effect of the cross-phase modulation is of the same order of magnitude as the effect of self-phase modulation, which is negligibly small [38].
Thermal expansion results in nearly identical drift of both TE and TM modes. The relative drifts of the optical frequency as well as the frequency separation between two modes are identical. The overall expansion of the resonator due to a change of the averaged temperature (ΔTR) results in a frequency shift between any two WGMs separated by frequency ωRF given by
ΔωRF2≅ωRFαlΔTR. (C2)
It can be found that ΔωRF2/2π≅10ΔTR for a z-cut magnesium fluoride resonator with ωRF/2π=1 MHz. This drift is small compared with the thermorefractive drift ΔωRF1. It can be difficult to compensate for the random thermal expansion using information on TE-TM frequency detuning. The thermal expansion fluctuations can be suppressed by increasing the thermal conductivity of the setup. Unfortunately the thermal expansion related noise is eliminated only if the thermal conductivity becomes infinitely large. The more conventional way is to compensate for the random deviation of the optical frequency using error signal generated by two optical modes with substantially different thermal expansion coefficients, similar to the dualmode technique described above.
The geometrical approach of compensation for linear expansion is rather labor consuming. An advantage of using WGM resonators for frequency stabilization is the ability to manufacture the resonators practically out of any optically transparent crystal. Novel materials of zero thermal expansion can provide a much simpler conventional dual-mode technique of frequency stabilization. It is known that there are crystals with negative and zero thermal expansion at some specific temperature. Doping changes the properties of these crystals. Hence, it is not impossible to create an optically transparent crystal with zero thermal expansion at room temperature. Application of the stabilization technique discussed above will result in the creation of a WGM resonator possessing an extremely high-frequency stability.
In principle, the dual-mode technique allows for frequency stabilization better than the thermodynamic frequency limit for the both thermorefractive and thermal expansion fluctuations. This is possible in a ring resonator made of a thin crystalline wire where the WGM volume coincides with the volume of the resonator. However, technical implementation of such a resonator is problematic.
In the example in
This technique can be used for stabilization of the temperature inside the WGM channel for resonators made out of symmetric materials. Here modes with different polarizations and the same frequency have the same thermorefractive coefficient αn, but the coefficient itself is frequency dependent. Consider a WGM resonator interacting with bichromatic light having frequency ω and ΔωRF+2ω. A laser with carrier frequency ω is locked to a mode. Then the second-harmonic light is produced by frequency doubling in a nonlinear crystal and it is subsequently frequency shifted with an acousto-optical modulator. The frequency shift ΔωRF is locked to another WGM and is compared with a RF reference. The value of ΔωRF fluctuates due to thermorefractive effect. The fluctuation is described by
Δ{tilde over (ω)}RF1=2ω(αn(ω)−αn(2ω))ΔTm, (C3)
and can be used for measurement of Tm. Because the relative accuracy of measurement of Δ{tilde over (ω)}RF1 can easily reach the subhertz level, the relative frequency of the two WGMs separated by an octave can be stabilized better than one part per 10−14 per 1 s integration time.
While this document contains many specifics, these should not be construed as limitations on the scope of an invention or of what may be claimed, but rather as descriptions of features specific to particular embodiments of the invention. Certain features that are described in this document in the context of separate embodiments can also be implemented in combination in a single embodiment. Conversely, various features that are described in the context of a single embodiment can also be implemented in multiple embodiments separately or in any suitable subcombination. Moreover, although features may be described above as acting in certain combinations and even initially claimed as such, one or more features from a claimed combination can in some cases be excised from the combination, and the claimed combination may be directed to a subcombination or a variation of a subcombination.
Only a few implementations are disclosed. However, it is understood that variations, enhancements and other implementations can be made based on what is described and illustrated in this document.
This document claims the benefit of U.S. Provisional Application No. 60/967,089 entitled “Precise Stabilization of the Optical Frequency of the Whispering Gallery Mode Ethalon Device and Method” and filed Aug. 31, 2007, the disclosure of which is incorporated by reference as part of the specification of this application.
The invention described herein was made in the performance of work under a NASA contract, and is subject to the provisions of Public Law 96-517 (35 USC 202) in which the Contractor has elected to retain title.
Number | Name | Date | Kind |
---|---|---|---|
5204640 | Logan, Jr. | Apr 1993 | A |
5220292 | Bianchini et al. | Jun 1993 | A |
5723856 | Yao et al. | Mar 1998 | A |
5751747 | Lutes et al. | May 1998 | A |
5777778 | Yao | Jul 1998 | A |
5917179 | Yao | Jun 1999 | A |
5929430 | Yao et al. | Jul 1999 | A |
5985166 | Unger et al. | Nov 1999 | A |
6080586 | Baldeschwieler et al. | Jun 2000 | A |
6178036 | Yao | Jan 2001 | B1 |
6203660 | Unger et al. | Mar 2001 | B1 |
6389197 | Iltchenko et al. | May 2002 | B1 |
6417957 | Yao | Jul 2002 | B1 |
6473218 | Maleki et al. | Oct 2002 | B1 |
6476959 | Yao | Nov 2002 | B2 |
6487233 | Maleki et al. | Nov 2002 | B2 |
6488861 | Iltchenko et al. | Dec 2002 | B2 |
6490039 | Maleki et al. | Dec 2002 | B2 |
6535328 | Yao | Mar 2003 | B2 |
6567436 | Yao et al. | May 2003 | B1 |
6580532 | Yao et al. | Jun 2003 | B1 |
6594061 | Huang et al. | Jul 2003 | B2 |
6762869 | Maleki et al. | Jul 2004 | B2 |
6795481 | Maleki et al. | Sep 2004 | B2 |
6798947 | Iltchenko | Sep 2004 | B2 |
6853479 | Ilchenko et al. | Feb 2005 | B1 |
6871025 | Maleki et al. | Mar 2005 | B2 |
6873631 | Yao et al. | Mar 2005 | B2 |
6879752 | Ilchenko et al. | Apr 2005 | B1 |
6901189 | Savchenkov et al. | May 2005 | B1 |
6906309 | Sayyah et al. | Jun 2005 | B2 |
6922497 | Savchenkov et al. | Jul 2005 | B1 |
6928091 | Maleki et al. | Aug 2005 | B1 |
6943934 | Ilchenko et al. | Sep 2005 | B1 |
6987914 | Savchenkov et al. | Jan 2006 | B2 |
7024069 | Savchenkov et al. | Apr 2006 | B2 |
7043117 | Matsko et al. | May 2006 | B2 |
7050212 | Matsko et al. | May 2006 | B2 |
7061335 | Maleki et al. | Jun 2006 | B2 |
7062131 | Ilchenko | Jun 2006 | B2 |
7092591 | Savchenkov et al. | Aug 2006 | B2 |
7133180 | Ilchenko et al. | Nov 2006 | B2 |
7173749 | Maleki et al. | Feb 2007 | B2 |
7184451 | Ilchenko et al. | Feb 2007 | B2 |
7187870 | Ilchenko et al. | Mar 2007 | B2 |
7218662 | Ilchenko et al. | May 2007 | B1 |
7248763 | Kossakovski et al. | Jul 2007 | B1 |
7260279 | Gunn et al. | Aug 2007 | B2 |
7283707 | Maleki et al. | Oct 2007 | B1 |
7356214 | Ilchenko | Apr 2008 | B2 |
7369722 | Yilmaz et al. | May 2008 | B2 |
7389053 | Ilchenko et al. | Jun 2008 | B1 |
7400796 | Kossakovski et al. | Jul 2008 | B1 |
7440651 | Savchenkov et al. | Oct 2008 | B1 |
7460746 | Maleki et al. | Dec 2008 | B2 |
7801189 | Maleki et al. | Sep 2010 | B2 |
20010038651 | Maleki et al. | Nov 2001 | A1 |
20020018611 | Maleki et al. | Feb 2002 | A1 |
20020018617 | Iltchenko et al. | Feb 2002 | A1 |
20020021765 | Maleki et al. | Feb 2002 | A1 |
20020081055 | Painter et al. | Jun 2002 | A1 |
20020085266 | Yao | Jul 2002 | A1 |
20020097401 | Maleki et al. | Jul 2002 | A1 |
20030160148 | Yao et al. | Aug 2003 | A1 |
20040100675 | Matsko et al. | May 2004 | A1 |
20040109217 | Maleki et al. | Jun 2004 | A1 |
20040218880 | Matsko et al. | Nov 2004 | A1 |
20040240781 | Savchenkov et al. | Dec 2004 | A1 |
20050017816 | Ilchenko et al. | Jan 2005 | A1 |
20050063034 | Maleki et al. | Mar 2005 | A1 |
20050074200 | Savchenkov et al. | Apr 2005 | A1 |
20050123306 | Ilchenko et al. | Jun 2005 | A1 |
20050128566 | Savchenkov et al. | Jun 2005 | A1 |
20050175358 | Ilchenko et al. | Aug 2005 | A1 |
20050248823 | Maleki et al. | Nov 2005 | A1 |
20070009205 | Maleki et al. | Jan 2007 | A1 |
20070153289 | Yilmaz et al. | Jul 2007 | A1 |
20080001062 | Gunn et al. | Jan 2008 | A1 |
20080075464 | Maleki et al. | Mar 2008 | A1 |
20080310463 | Maleki et al. | Dec 2008 | A1 |
Number | Date | Country |
---|---|---|
0196936 | Dec 2001 | WO |
2005038513 | Apr 2005 | WO |
2005055412 | Jun 2005 | WO |
2005067690 | Jul 2005 | WO |
2005122346 | Dec 2005 | WO |
2006076585 | Jul 2006 | WO |
2007143627 | Dec 2007 | WO |
Number | Date | Country | |
---|---|---|---|
60967089 | Aug 2007 | US |