STEERING MULTIPLE LIDAR OUTPUT SIGNALS

FIELD

The invention relates to optical devices. In particular, the invention relates to LIDAR systems.

BACKGROUND

LIDAR technologies are being applied to a variety of applications. LIDAR specifications typically specify that LIDAR data be generated for a minimum number of sample regions in a field of view. LIDAR specifications also specify the distance of those sample regions from the LIDAR signal source and a re-fresh rate. The re-fresh rate is the frequency at which the LIDAR data is generated for all of the sample regions in the field of view. The ability of the given LIDAR system to generate the LIDAR data for the sample regions in the field of view becomes more difficult as the distance to the sample regions increases and as the refresh rate increases.

As LIDAR is being adapted to applications such as self-driving-vehicles, it becomes more desirable to generate LIDAR data for larger fields of view, increasing numbers of points, further distances, and at faster re-fresh rates. As a result, there is a need for a LIDAR system that capable of generating LIDAR data for larger numbers of sample regions.

SUMMARY

A LIDAR system has multiple LIDAR chips that each outputs a LIDAR output signal. External optics receive the LIDAR output signals from the LIDAR chips and operate on the LIDAR output signals such that the LIDAR output signals travel away from the external optics in different directions. A steering device receives the LIDAR output signals from the external optics and operates on the LIDAR output signals such that the LIDAR output signals travel away from the steering device in different directions. The system also includes electronics configured to operate the steering device so as to steer each LIDAR output signal to different sample regions in a field of view.

A LIDAR system has a LIDAR chips that outputs a LIDAR output signal. External optics receive the LIDAR output signals from the LIDAR chip and operate on the LIDAR output signal such that the LIDAR output signals travels away from the external optics. A steering device receives the LIDAR output signal from the external optics and operates on the LIDAR output signal such that the LIDAR output signal travels away from the steering device. The system also includes electronics that operate the steering device so as to steer a direction that the LIDAR output signal travels away from the LIDAR system.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a top view of a LIDAR chip.

FIG. 2 is a cross-section of a LIDAR chip according to FIG. 1 constructed from a silicon-on-insulator wafer.

FIG. 3A illustrates the chip of FIG. 1 modified to include multiple different balanced detectors for further refining data generated by the chip.

FIG. 3B provides a schematic of electronics that are suitable for use with the chip of FIG. 3A.

FIG. 3C is a graph of magnitude versus frequency. A solid line on the graph shows results for a Complex Fourier transform performed on output generated from the LIDAR chip of FIG. 3B.

FIG. 4A illustrates a LIDAR system that includes a housing for a LIDAR module. The LIDAR module includes direction-changing optics and a LIDAR chip. The housing includes a cover on a substrate.

FIG. 4B is a topview of the housing shown in FIG. 4A with the cover removed.

FIG. 5 illustrate the LIDAR system of FIG. 4A and FIG. 4B modified to include multiple LIDAR modules in the housing.

DESCRIPTION

The LIDAR system includes one or more LIDAR chips housed in an integrated circuit style packaging. In some instances, the packaging houses multiple different LIDAR chips that each outputs a LIDAR output signal. The LIDAR system also includes optics that receives the LIDAR output signals from the LIDAR chips and steers the LIDAR output signals to different sample regions in a field of view. LIDAR data (distance and/or radial velocity between the source of a LIDAR output signal and a reflecting object) can be generated for each of the sample regions. The concurrent use of multiple different channels to generate LIDAR data accelerates the generation of LIDAR data for a field of view and accordingly allows the LIDAR specifications to be satisfied for applications that require larger fields of view, increased numbers of sample regions, further field of view distances, and/or higher re-fresh rates.

FIG. 1 is a topview of a LIDAR chip that includes a laser cavity. The LIDAR chip can include a Photonic Integrated Circuit (PIC) and can be a Photonic Integrated Circuit chip. The laser cavity includes a light source 10 that can include or consist of a gain medium (not shown) for a laser. The chip also includes a cavity waveguide 12 that receives a light signal from the light source 10. The light source can be positioned in a recess 13 so a facet of the light source is optically aligned with a facet of the cavity waveguide 12 to allow the light source and cavity waveguide 12 to exchange light signals. The cavity waveguide 12 carries the light signal to a partial return device 14. The illustrated partial return device 14 is an optical grating such as a Bragg grating. However, other partial return devices 14 can be used; for instance, mirrors can be used in conjunction with echelle gratings and arrayed waveguide gratings.

The partial return device 14 returns a return portion of the light signal to the cavity waveguide 12 as a return signal. For instance, the cavity waveguide 12 returns the return signal to the light source 10 such that the return portion of the light signal travels through the gain medium. The light source 10 is configured such that at least a portion of the return signal is added to the light signal that is received at the cavity waveguide 12. For instance, the light source 10 can include a highly, fully, or partially reflective device 15 that reflects the return signal received from the gain medium back into the gain medium. As a result, light can resonate between the partial return device 14 and the reflective device 15 so as to form a Distributed Bragg Reflector (DBR) laser cavity. A DBR laser cavity has an inherently narrow-linewidth and a longer coherence length than DFB lasers and accordingly improves performance when an object reflecting the LIDAR output signal from the chip is located further away from the chip.

The partial return device 14 passes a portion of the light signal received from the cavity waveguide 12 to a utility waveguide 16 included on the chip. The portion of the light signal that the utility waveguide 16 receives from the partial return device 14 serves as the output of the laser cavity. The output of the laser cavity serves as an outgoing LIDAR signal on the utility waveguide 16. The utility waveguide 16 terminates at a facet 18 and carries the outgoing LIDAR signal to the facet 18. The facet 18 can be positioned such that the outgoing LIDAR signal traveling through the facet 18 exits the chip and serves as a LIDAR output signal. For instance, the facet 18 can be positioned at an edge of the chip so the outgoing LIDAR signal traveling through the facet 18 exits the chip and serves as a LIDAR output signal that includes or consists of light from the outgoing LIDAR signal.

The LIDAR output signal travels away from the chip and is reflected by objects in the path of the LIDAR signal. The reflected signal travels away from the objects. At least a portion of the reflected signal returns to the facet 18 of the utility waveguide 16 as a LIDAR input signal. The LIDAR chip is configured to receive the LIDAR input signal through the facet 18. The portion of the LIDAR input signal that enters the utility waveguide 16 through the facet 18 serve as an incoming LIDAR signal that is guided by the utility waveguide 16. Accordingly, the incoming LIDAR signal includes or consists of light from the LIDAR input signal, the LIDAR output signal, and the outgoing LIDAR signal.

The utility waveguide 16 can include a tapered portion before the facet 18. For instance, the utility waveguide 16 can include a taper 20 that terminate at the facet 18. The taper 20 can relax the alignment tolerances required for efficient coupling of the utility waveguide 16 to the LIDAR input signal and the outgoing LIDAR signal. Accordingly, the taper 20 can increase the percentage of the LIDAR input signal that is successfully returned to the chip for processing. In some instances, the taper 20 is constructed such that the facet 18 has an area that is more than two, five, or ten times the area of a cross section of a straight portion of the utility waveguide 16. Although FIG. 1 shows the taper 20 as a horizontal taper, the taper 20 can be a horizontal and/or vertical taper. The horizontal and/or vertical taper can be linear and/or curved. In some instances, the taper 20 is an adiabatic taper.

The chip includes a data branch 24 where LIDAR data (the distance and/or radial velocity between a LIDAR chip and an object) is added to optical signals. The data branch includes an optical coupler 26 that moves a portion of the light signals from the utility waveguide 16 into the data branch. For instance, an optical coupler 26 couples a portion of the outgoing LIDAR signal from the utility waveguide 16 onto a reference waveguide 27 as a reference signal. The reference waveguide 27 carries the reference signal to a light-combining component 28.

The optical coupler 26 also couples a portion of the incoming LIDAR signal from the utility waveguide 16 onto a comparative waveguide 30 as a comparative signal. As a result, the comparative signal includes or consists of at least a portion of the light from the incoming LIDAR signal. The comparative signal can exclude light from the reference light signal. The comparative waveguide 30 carries the comparative signal to the light-combining component 28.

The illustrated optical coupler 26 is a result of positioning the utility waveguide 16 sufficiently close to the reference waveguide 27 and the comparative waveguide 30 that light from the utility waveguide 16 is coupled into the reference waveguide 27 and the comparative waveguide 30; however, other signal tapping components can be used to move a portion of the of the light signals from the utility waveguide 16 onto the reference waveguide 27 and the comparative waveguide 30. Examples of suitable signal tapping components include, but are not limited to, y-junctions, multi-mode interference couplers (MMIs), and integrated optical circulators.

The light-combining component 28 combines the comparative signal and the reference signal into a composite signal. The reference signal includes light from the outgoing LIDAR signal. For instance, the reference signal can serve as a sample of the outgoing LIDAR signal. The reference signal can exclude light from the LIDAR output signal, the LIDAR input signal and the incoming LIDAR signal. In contrast, the comparative signal includes or consists of at least a portion of the light from the incoming LIDAR signal, the LIDAR input signal, the LIDAR output signal, and the outgoing LIDAR signal. Additionally, the comparative signal can exclude light from the reference light signal. As a result, the comparative signal can serve as a sample of the LIDAR input signal and/or of the incoming LIDAR signal. Accordingly, the comparative signal has been reflected by an object located off of the chip while the reference signal has not been reflected. When the chip and the reflecting object are moving relative to one another, the comparative signal and the reference signal have different frequencies due to the Doppler effect. As a result, beating occurs between the comparative signal and the reference signal.

The resulting composite sample signal is received at a light sensor. For instance, in the LIDAR system of FIG. 1, the light-combining component 28 also splits the resulting composite sample signal onto a first detector waveguide 36 and a second detector waveguide 38. The first detector waveguide 36 carries a first portion of the composite sample signal to a first light sensor 40 that converts the first portion of the composite sample signal to a first electrical signal. The second detector waveguide 38 carries a second portion of the composite sample signal to a second light sensor 42 that converts the second portion of the composite sample signal to a second electrical signal. Examples of suitable light sensors include germanium photodiodes (PDs), and avalanche photodiodes (APDs).

The light combining component 28, the first light sensor 40 and the second light sensor 42 can be connected as a balanced photodetector that outputs an electrical data signal. For instance, the light combining component 28, the first light sensor 40 and the second light sensor 42 can be connected such that the DC components of the signal photocurrents cancel, improving detection sensitivity. Suitable methods for connecting the first light sensor 40 and the second light sensor 42 as balanced photodetectors includes connecting the first light sensor 40 and the second light sensor 42 in series. In one example, the first light sensor 40 and the second light sensor 42 are both avalanche photodiodes connected in series. Balanced photodetection is desirable for detection of small signal fluctuations.

An example of a suitable light-combining component 28 is a Multi-Mode Interference (MMI) device such as a 2×2 MMI device. Other suitable light-combining components 28 include, but are not limited to, adiabatic splitters, and directional coupler. In some instances, the functions of the illustrated light-combining component 28 are performed by more than one optical component or a combination of optical components.

A single light sensor can replace the first light sensor 40 and the second light sensor 42 and can output the data signal. When a single light sensor replaces the first light sensor 40 and the second light sensor 42, the light-combining component 28 need not include light-splitting functionality. As a result, the illustrated light light-combining component 28 can be a 2×1 light-combining component rather than the illustrated 2×2 light-combining component. For instance, the illustrated light light-combining component can be a 2×1 MMI device. In these instances, the chip includes a single detector waveguide that carries the composite sample signal to the light sensor.

The data branch includes a data optical attenuator 44 positioned along the comparative waveguide 30 such that the data optical attenuator 44 can be operated so as to attenuate the comparative signal on the comparative waveguide 30. The chip also includes an output optical attenuator 46 positioned along the utility waveguide 16 such that the output optical attenuator 46 can be operated so as to attenuate the outgoing LIDAR signal on the utility waveguide 16. Suitable attenuators for the data optical attenuator 44 and/or the output optical attenuator 46 are configured to attenuate intensity of a light signal. Examples of a suitable attenuator configured to attenuate intensity of a light signal include carrier-injection based PIN diodes, electro-absorption modulators, and Mach-Zehnder (MZ) modulators.

The chip also includes a sampling directional coupler 50 that couples a portion of the comparative signal from the comparative waveguide 30 onto a sampling waveguide 52. The coupled portion of the comparative signal serves as a sampling signal. The sampling waveguide 52 carries the sampling signal to a sampling light sensor 54. Although FIG. 1 illustrates a sampling directional coupler 50 moving a portion of the comparative signal onto the sampling waveguide 52, other signal tapping components can be used to move a portion of the comparative signal from the comparative waveguide 30 onto the sampling waveguide 52. Examples of suitable signal tapping components include, but are not limited to, y-junctions, and MMIs.

The chip includes a control branch 55 for controlling operation of the laser cavity. The control branch includes a directional coupler 56 that moves a portion of the outgoing LIDAR signal from the utility waveguide 16 onto a control waveguide 57. The coupled portion of the outgoing LIDAR signal serves as a tapped signal. Although FIG. 1 illustrates a directional coupler 56 moving portion of the outgoing LIDAR signal onto the control waveguide 57, other signal-tapping components can be used to move a portion of the outgoing LIDAR signal from the utility waveguide 16 onto the control waveguide 57. Examples of suitable signal tapping components include, but are not limited to, y-junctions, and MMIs.

The control waveguide 57 carries the tapped signal to an interferometer 58 that splits the tapped signal and then re-combines the different portions of the tapped signal with a phase differential between the portions of the tapped signal. The illustrated interferometer 58 is a Mach-Zehnder interferometer; however, other interferometers can be used.

The interferometer 58 outputs a control light signal on an interferometer waveguide 60. The interferometer waveguide 60 carries the control light signal to a control light sensor 61 that converts the control light signal to an electrical signal that serves as an electrical control signal. The interferometer signal has an intensity that is a function of the frequency of the outgoing LIDAR signal. For instance, a Mach-Zehnder interferometer will output a sinusoidal control light signal with a fringe pattern. Changes to the frequency of the outgoing LIDAR signal will cause changes to the frequency of the control light signal. Accordingly, the frequency of the electrical control signal output from the control light sensor 61 is a function of the change in frequency of the outgoing LIDAR signal. Other detection mechanisms can be used in place of the control light sensor 61. For instance, the control light sensor 61 can be replaced with a balanced photodetector arranged as the light combining component 28, the first light sensor 40 and the second light sensor 42.

Electronics 62 can operate one or more components on the chip. For instance, the electronics 62 can be in electrical communication with and control operation of the light source 10, the data optical attenuator 44, output optical attenuator 46, the first light sensor 40, the second light sensor 42, the sampling light sensor 54, and the control light sensor 61. Although the electronics 62 are shown off the chip, all or a portion of the electronics can be included on the chip. For instance, the chip can include electrical conductors that connect the first light sensor 40 in series with the second light sensor 42.

During operation of the chip, the electronics 62 operate the light source 10 such that the laser cavity outputs the outgoing LIDAR signal. The electronics 62 then operate the chip through a series of cycles. In some instances, each cycle corresponds to a sample region in a field of view. For instance, the LIDAR system can be configured to steer the LIDAR output signal to different sample regions in the field of view and to generate the LIDAR data for all or a portion of the sample regions in the field of view.

The cycles can include one or more different time periods. In some instances, different periods are associated with a different waveform for the outgoing LIDAR signal. For instance, the electronics can add chirp to the frequency of the outgoing LIDAR signal and accordingly to the LIDAR output signal(s). The chirp can be different during adjacent periods in a cycle. For instance, the cycles can include one, two, three, or three or more periods that are each selected from a group consisting of a period where the frequency of the outgoing light signal is increased during the period, the frequency of the outgoing light signal is decreased during the period, and the frequency of the outgoing light signal is held constant during the period. In some instances, the increase or decrease in the frequency during a period is a linear function of time. In some instances, the periods are configured such that the waveform of the outgoing LIDAR signal is different in adjacent periods. For instance, when two periods are adjacent to one another in a cycle and the frequency of the outgoing LIDAR signal is increased in each of the two periods, the rate of increase can be different in the two adjacent periods. As will be described in more detail below, the electronics can employ output from the control branch in order to control the frequency of the outgoing LIDAR signal such that the frequency of the outgoing LIDAR signal as a function of time is known to the electronics.

In one example, a cycle includes at least a first period and a second period. During the first period, the electronics 62 can increase the frequency of the outgoing LIDAR signal and during the second period the electronics 62 can decrease the frequency of the outgoing LIDAR signal. For instance, the laser cavity can be configured to output an outgoing LIDAR signal (and accordingly a LIDAR output signal) with a wavelength of 1550 nm. During the first period, the electronics 62 can increase the frequency of the outgoing LIDAR signal (and accordingly a LIDAR output signal) such that the wavelength decreases from 1550 nm to 1459.98 nm followed by decreasing the frequency of the outgoing LIDAR signal such that the wavelength increases from 1459.98 nm to 1550 nm.

When the outgoing LIDAR signal frequency is increased during the first period, the resulting LIDAR output signal travels away from the chip and then returns to the chip as the incoming LIDAR signal signal. A portion of the incoming LIDAR signal becomes the comparative signal. During the time that the LIDAR output signal and the LIDAR input signal are traveling between the chip and a reflecting object, the frequency of the outgoing LIDAR signal continues to increase. Since a portion of the outgoing LIDAR signal becomes the reference signal, the frequency of the reference signal continues to increase. As a result, the comparative signal enters the light-combining component with a lower frequency than the reference signal concurrently entering the light-combining component. Additionally, the further the reflecting object is located from the chip, the more the frequency of the reference signal increases before the LIDAR input signal returns to the chip. Accordingly, the larger the difference between the frequency of the comparative signal and the frequency of the reference signal, the further the reflecting object is from the chip. As a result, the difference between the frequency of the comparative signal and the frequency of the reference signal is a function of the distance between the chip and the reflecting object.

For the same reasons, when the outgoing LIDAR signal frequency is decreased during the second period, the comparative signal enters the light-combining component with a higher frequency than the reference signal concurrently entering the light-combining component and the difference between the frequency of the comparative signal and the frequency of the reference signal during the second period is also function of the distance between the chip and the reflecting object.

In some instances, the difference between the frequency of the comparative signal and the frequency of the reference signal can also be a function of the Doppler effect because relative movement of the chip and reflecting object can also affect the frequency of the comparative signal. For instance, when the chip is moving toward or away from the reflecting object and/or the reflecting object is moving toward or away from the chip, the Doppler effect can affect the frequency of the comparative signal. Since the frequency of the comparative signal is a function of the speed the reflecting object is moving toward or away from the chip and/or the speed the chip is moving toward or away from the reflecting object, the difference between the frequency of the comparative signal and the frequency of the reference signal is also a function of the speed the reflecting object is moving toward or away from the chip and/or the speed the chip is moving toward or away from the reflecting object. Accordingly, the difference between the frequency of the comparative signal and the frequency of the reference signal is a function of the distance between the chip and the reflecting object and is also a function of the Doppler effect.

The composite sample signal and the data signal each effectively compares the comparative signal and the reference signal. For instance, since the light-combining component combines the comparative signal and the reference signal and these signals have different frequencies, there is beating between the comparative signal and reference signal. Accordingly, the composite sample signal and the data signal have a beat frequency related to the frequency difference between the comparative signal and the reference signal and the beat frequency can be used to determine the difference in the frequency of the comparative signal and the reference signal. A higher beat frequency for the composite sample signal and/or the data signal indicates a higher differential between the frequencies of the comparative signal and the reference signal. As a result, the beat frequency of the data signal is a function of the distance between the chip and the reflecting object and is also a function of the Doppler effect.

As noted above, the beat frequency is a function of two unknowns; the distance between the chip and the reflecting object and the relative velocity of the chip and the reflecting object (i.e., the contribution of the Doppler effect). The change in the frequency difference between the comparative signal and the reference signal (Δf) is given by Δf=2Δvf/c where f is the frequency of the LIDAR output signal and accordingly the reference signal, Δv is the relative velocity of the chip and the reflecting object and c is the speed of light in air. The use of multiple different periods permits the electronics 62 to resolve the two unknowns. For instance, the beat frequency determined for the first period is related to the unknown distance and Doppler contribution and the beat frequency determined for the second period is also related to the unknown distance and Doppler contribution. The availability of the two relationships allows the electronics 62 to resolve the two unknowns. Accordingly, the distance between the chip and the reflecting object can be determined without influence from the Doppler effect. Further, in some instances, the electronics 62 use this distance in combination with the Doppler effect to determine the velocity of the reflecting object toward or away from the chip.

In instances where the relative velocity of target and source is zero or very small, the contribution of the Doppler effect to the beat frequency is essentially zero. In these instances, the Doppler effect does not make a substantial contribution to the beat frequency and the electronics 62 can take only the first period to determine the distance between the chip and the reflecting object.

During operation, the electronics 62 can adjust the frequency of the outgoing LIDAR signal in response to the electrical control signal output from the control light sensor 61. As noted above, the magnitude of the electrical control signal output from the control light sensor 61 is a function of the frequency of the outgoing LIDAR signal. Accordingly, the electronics 62 can adjust the frequency of the outgoing LIDAR signal in response to the magnitude of the control. For instance, while changing the frequency of the outgoing LIDAR signal during one of the periods, the electronics 62 can have a range of suitable values for the electrical control signal magnitude as a function of time. At multiple different times during a period, the electronics 62 can compare the electrical control signal magnitude to the range of values associated with the current time in the period. If the electrical control signal magnitude indicates that the frequency of the outgoing LIDAR signal is outside the associated range of electrical control signal magnitudes, the electronics 62 can operate the light source 10 so as to change the frequency of the outgoing LIDAR signal so it falls within the associated range. If the electrical control signal magnitude indicates that the frequency of the outgoing LIDAR signal is within the associated range of electrical control signal magnitudes, the electronics 62 do not change the frequency of the outgoing LIDAR signal.

During operation, the electronics 62 can adjust the level of attenuation provided by the output optical attenuator 46 in response to the sampling signal from the sampling light sensor 54. For instance, the electronics 62 operate the output optical attenuator 46 so as to increase the level of attenuation in response to the magnitude of the sampling signal being above a first signal threshold and/or decrease the magnitude of the power drop in response to the magnitude of the sampling signal being below a second signal threshold.

In some instances, the electronics 62 adjust the level of attenuation provided by the output optical attenuator 46 to prevent or reduce the effects of back-reflection on the performance of the laser cavity. For instance, the first signal threshold and/or the second signal threshold can optionally be selected to prevent or reduce the effects of back-reflection on the performance of the laser cavity. Back reflection occurs when a portion of the incoming LIDAR signal returns to the laser cavity. In some instances, on the order of 50% of the incoming LIDAR signal returns to the laser cavity. The back reflection can affect performance of the laser cavity when the power of the incoming LIDAR signal entering the partial return device 14 does not decrease below the power of the outgoing LIDAR signal exiting from the partial return device 14 (“power drop”) by more than a minimum power drop threshold. In the illustrated chip, the minimum power drop threshold can be around 35 dB (0.03%). Accordingly, the incoming LIDAR signal can affect the performance of the laser cavity when the power of the incoming LIDAR signal entering the partial return device 14 is not more than 35 dB below the power of the outgoing LIDAR signal exiting from the partial return device 14.

The electronics 62 can operate the output optical attenuator 46 so as to reduce the effect of low power drops, e.g. when the target object is very close or highly reflective or both. As is evident from FIG. 1, operation of the output optical attenuator 46 so as to increase the level of attenuation reduces the power of the incoming LIDAR signal entering the partial return device 14 and also reduces the power of the outgoing LIDAR signal at a location away from the partial return device 14. Since the output optical attenuator 46 is located apart from the partial return device 14, the power of the outgoing LIDAR signal exiting from the partial return device 14 is not directly affected by the operation of the output optical attenuator 46. Accordingly, the operation of the output optical attenuator 46 so as to increase the level of attenuation increases the level of the power drop. As a result, the electronics can employ the optical attenuator 46 so as to tune the power drop.

Additionally, the magnitude of the sampling signal is related to the power drop. For instance, the magnitude of the sampling signal is related to the power of the comparative signal as is evident from FIG. 1. Since the comparative signal includes light from the incoming LIDAR signal and the LIDAR input signal, the magnitude of the sampling signal is related to the power of the incoming LIDAR signal and the magnitude of the LIDAR input signal. This result means the magnitude of the sampling signal is also related to the power of the incoming LIDAR signal. Accordingly, the magnitude of the sampling signal is related to the power drop.

Since the magnitude of the sampling signal is related to the power drop, the electronics 62 can use the magnitude of the sampling signal to operate the output optical attenuator so as to keep the magnitude of the comparative signal power within a target range. For instance, the electronics 62 can operate the output optical attenuator 46 so as to increase the magnitude of the power drop in response to the sampling signal indicating that the magnitude of power drop is at or below a first threshold and/or the electronics 62 can operate the output optical attenuator 46 so as to decrease the magnitude of the power drop in response to the sampling signal indicating that the magnitude of power drop is at or above a second threshold. In some instances, the first threshold is greater than or equal to the minimum power drop threshold. In one example, the electronics 62 operate the output optical attenuator 46 so as to increase the magnitude of the power drop in response to the magnitude of the sampling signal being above a first signal threshold and/or decrease the magnitude of the power drop in response to the magnitude of the sampling signal being below a second signal threshold. The identification of the value(s) for one, two, three, or four variables selected from the group consisting of the first threshold, the second threshold, the first signal threshold, and the second signal threshold can be determined from calibration of the optical chip during set-up of the LIDAR chip system.

Light sensors can become saturated when the power of the composite light signal exceeds a power threshold. When a light sensor becomes saturated, the magnitude of the data signal hits a maximum value that does not increase despite additional increases in the power of the composite light signal above the power threshold. Accordingly, data can be lost when the power of the composite light signal exceeds a power threshold. During operation, the electronics 62 can adjust the level of attenuation provided by the data optical attenuator 44 so the power of the composite light signal is maintained below a power threshold.

As is evident from FIG. 1, the magnitude of the sampling signal is related to the power of the comparative signal. Accordingly, the electronics 62 can operate the data optical attenuator 44 in response to output from the sampling signal. For instance, the electronics 62 can operate the data optical attenuator so as to increase attenuation of the comparative signal when the magnitude of the sampling signal indicates the power of the comparative signal is above an upper comparative signal threshold and/or can operate the data optical attenuator so as to decrease attenuation of the comparative signal when the magnitude of the sampling signal indicates the power of the comparative signal is below a lower comparative signal threshold. For instance, in some instances, the electronics 62 can increase attenuation of the comparative signal when the magnitude of the sampling signal is at or above an upper comparative threshold and/or the electronics 62 decrease attenuation of the comparative signal when the magnitude of the sampling signal is at or below an upper comparative signal threshold.

As noted above, the electronics 62 can adjust the level of attenuation provided by the output optical attenuator 46 in response to the sampling signal. The electronics 62 can adjust the level of attenuation provided by the data optical attenuator 44 in response to the sampling signal in addition or as an alternative to adjusting the level of attenuation provided by the output optical attenuator 46 in response to the sampling signal.

Suitable platforms for the chip include, but are not limited to, silica, indium phosphide, and silicon-on-insulator wafers. FIG. 2 is a cross-section of portion of a chip constructed from a silicon-on-insulator wafer. A silicon-on-insulator (SOI) wafer includes a buried layer 80 between a substrate 82 and a light-transmitting medium 84. In a silicon-on-insulator wafer, the buried layer is silica while the substrate and the light-transmitting medium are silicon. The substrate of an optical platform such as an SOI wafer can serve as the base for the entire chip. For instance, the optical components shown in FIG. 1 can be positioned on or over the top and/or lateral sides of the substrate.

The portion of the chip illustrated in FIG. 2 includes a waveguide construction that is suitable for use with chips constructed from silicon-on-insulator wafers. A ridge 86 of the light-transmitting medium extends away from slab regions 88 of the light-transmitting medium. The light signals are constrained between the top of the ridge and the buried oxide layer.

The dimensions of the ridge waveguide are labeled in FIG. 2. For instance, the ridge has a width labeled w and a height labeled h. A thickness of the slab regions is labeled T. For LIDAR applications, these dimensions are more important than other applications because of the need to use higher levels of optical power than are used in other applications. The ridge width (labeled w) is greater than 1 μm and less than 4 μm, the ridge height (labeled h) is greater than 1 μm and less than 4 μm, the slab region thickness is greater than 0.5 μm and less than 3 μm. These dimensions can apply to straight or substantially straight portions of the waveguide, curved portions of the waveguide and tapered portions of the waveguide(s). Accordingly, these portions of the waveguide will be single mode. However, in some instances, these dimensions apply to straight or substantially straight portions of a waveguide while curved portions of the waveguide and/or tapered portions of the waveguide have dimensions outside of these ranges. For instance, the tapered portions of the utility waveguide 16 illustrated in FIG. 1 can have a width and/or height that is >4 μm and can be in a range of 4 μm to 12 μm. Additionally or alternately, curved portions of a waveguide can have a reduced slab thickness in order to reduce optical loss in the curved portions of the waveguide. For instance, a curved portion of a waveguide can have a ridge that extends away from a slab region with a thickness greater than or equal to 0.0 μm and less than 0.5 μm. While the above dimensions will generally provide the straight or substantially straight portions of a waveguide with a single-mode construction, they can result in the tapered section(s) and/or curved section(s) that are multimode. Coupling between the multi-mode geometry to the single mode geometry can be done using tapers that do not substantially excite the higher order modes. Accordingly, the waveguides can be constructed such that the signals carried in the waveguides are carried in a single mode even when carried in waveguide sections having multi-mode dimensions. The waveguide construction of FIG. 2 is suitable for all or a portion of the waveguides selected from the group consisting of the cavity waveguide 12, utility waveguide 16, reference waveguide 27, comparative waveguide 30, first detector waveguide 36, second detector waveguide 38, sampling waveguide 52, control waveguide 57, and interferometer waveguide 60.

The light source 10 that is interfaced with the utility waveguide 16 can be a gain element that is a component separate from the chip and then attached to the chip. For instance, the light source 10 can be a gain element that is attached to the chip using a flip-chip arrangement.

Use of flip-chip arrangements is suitable when the light source 10 is to be interfaced with a ridge waveguide on a chip constructed from silicon-on-insulator wafer. Examples of suitable interfaces between flip-chip gain elements and ridge waveguides on chips constructed from silicon-on-insulator wafer can be found in U.S. Pat. No. 9,705,278, issued on Jul. 11, 2017 and in U.S. Pat. No. 5,991,484 issued on Nov. 23 1999; each of which is incorporated herein in its entirety. The constructions are suitable for use as the light source 10. When the light source 10 is a gain element, the electronics 62 can change the frequency of the outgoing LIDAR signal by changing the level of electrical current applied to through the gain element.

The attenuators can be a component that is separate from the chip and then attached to the chip. For instance, the attenuator can be included on an attenuator chip that is attached to the chip in a flip-chip arrangement. The use of attenuator chips is suitable for all or a portion of the attenuators selected from the group consisting of the data attenuator and the control attenuator.

As an alternative to including an attenuator on a separate component, all or a portion of the attenuators can be integrated with the chip. For instance, examples of attenuators that are interfaced with ridge waveguides on a chip constructed from a silicon-on-insulator wafer can be found in U.S. Pat. No. 5,908,305, issued on Jun. 1, 1999; each of which is incorporated herein in its entirety. The use of attenuators that are integrated with the chip are suitable for all or a portion of the light sensors selected from the group consisting of the data attenuator and the control attenuator.

Light sensors that are interfaced with waveguides on a chip can be a component that is separate from the chip and then attached to the chip. For instance, the light sensor can be a photodiode, or an avalanche photodiode. Examples of suitable light sensor components include, but are not limited to, InGaAs PIN photodiodes manufactured by Hamamatsu located in Hamamatsu City, Japan, or an InGaAs APD (Avalanche Photo Diode) manufactured by Hamamatsu located in Hamamatsu City, Japan. These light sensors can be centrally located on the chip as illustrated in FIG. 1. Alternately, all or a portion the waveguides that terminate at a light sensor can terminate at a facet 18 located at an edge of the chip and the light sensor can be attached to the edge of the chip over the facet 18 such that the light sensor receives light that passes through the facet 18. The use of light sensors that are a separate component from the chip is suitable for all or a portion of the light sensors selected from the group consisting of the first light sensor 40, the second light sensor 42, the sampling light sensor 54, and the control light sensor 61.

As an alternative to a light sensor that is a separate component, all or a portion of the light sensors can be integrated with the chip. For instance, examples of light sensors that are interfaced with ridge waveguides on a chip constructed from a silicon-on-insulator wafer can be found in Optics Express Vol. 15, No. 21, 13965-13971 (2007); U.S. Pat. No. 8,093,080, issued on Jan. 10, 2012; U.S. Pat. No. 8,242,432, issued Aug. 14, 2012; and U.S. Pat. No. 6,108,8472, issued on Aug. 22, 2000 each of which is incorporated herein in its entirety. The use of light sensors that are integrated with the chip are suitable for all or a portion of the light sensors selected from the group consisting of the first light sensor 40, the second light sensor 42, the sampling light sensor 54, and the control light sensor 61.

Construction of optical gratings that are integrated with a variety of optical device platforms are available. For instance, a Bragg grating can be formed in a ridge waveguides by forming grooves in the top of the ridge and/or in the later sides of the ridge.

In some instances, it is desirable to scan the LIDAR output signal to different sample regions in a field of view and to generate the LIDAR data for all or a portion of the sample regions. The above chip construction is suitable for use with various scanning mechanisms used in LIDAR applications. For instance, the output LIDAR signal can be received by one or more reflecting devices and/or one more collimating devices. The one or more reflecting devices can be configured to re-direct and/or steer the LIDAR output signal so as to provide scanning of the LIDAR output signal. Suitable reflecting devices include, but are not limited to, mirrors such mechanically driven mirrors and Micro Electro Mechanical System (MEMS) mirrors. The one or more collimating devices provide collimation of the LIDAR output signal and can accordingly increase the portion of the LIDAR input signal that is received in the utility waveguide 16. Suitable collimating devices include, but are not limited to, individual lenses and compound lenses.

The chips can be modified so that data branch includes one or more secondary branches and one or more secondary balanced detectors that can be employed to refine the optical data provided to the electronics. The reference signal and the comparative signal can be divided among the different balanced detectors. For instance, FIG. 3A illustrates the above chip modified to include two different balanced detectors. A first splitter 102 divides the reference signal carried on the reference waveguide 27 onto a first reference waveguide 110 and a second reference waveguide 108. The first reference waveguide 110 carries a first portion of the reference signal to the light-combining component 28. The second reference waveguide 108 carries a second portion of the reference signal to a second light-combining component 112.

A second splitter 100 divides the comparative signal carried on the comparative waveguide 30 onto a first comparative waveguide 104 and a second comparative waveguide 106. The first comparative waveguide 104 carries a first portion of the comparative signal to the light-combining component 28. The second comparative waveguide 108 carries a second portion of the comparative signal to the second light-combining component 112.

The light-combining component 28 combines the first portion of the comparative signal and the first portion of the reference signal into composite signal. The light-combining component 28 also splits the composite signal onto the first detector waveguide 36 and the second detector waveguide 38. As noted above, the first detector waveguide 36 carries the first portion of the composite sample signal to the first light sensor 40 which converts the first portion of the composite sample signal to a first electrical signal. The second detector waveguide 38 carries the second portion of the composite sample signal to the second light sensor 42 which converts the second portion of the composite sample signal to a second electrical signal.

The second light-combining component 112 combines the second portion of the comparative signal and the second portion of the reference signal into a second composite signal. The second light-combining component 112 also splits the second composite signal onto a first auxiliary detector waveguide 114 and a second auxiliary detector waveguide 116. The first auxiliary detector waveguide 114 carries a first portion of the second composite signal to a first auxiliary light sensor 118 that converts the first portion of the second composite signal to a first auxiliary electrical signal. The second auxiliary detector waveguide 116 carries a second portion of the second composite signal to a second auxiliary light sensor 120 that converts the second portion of the second composite signal to a second auxiliary electrical signal. Examples of suitable light sensors include germanium photodiodes (PDs), and avalanche photodiodes (APDs).

The first reference waveguide 110 and the second reference waveguide 108 are constructed to provide a phase shift between the first portion of the reference signal and the second portion of the reference signal. For instance, the first reference waveguide 110 and the second reference waveguide 108 can be constructed so as to provide a 90° phase shift between the first portion of the reference signal and the second portion of the reference signal. Accordingly, one of the reference signal portions can be a sinusoidal function and the other reference signal portion can be a cosinusoidal function. In one example, the first reference waveguide 110 and the second reference waveguide 108 are constructed such that the first reference signal portion is a cosine function and the second reference signal portion is a sinusoidal function. Accordingly, the portion of the reference signal in the first composite signal is phase shifted relative to the portion of the reference signal in the second composite signal, however, the portion of the comparative signal in the first composite signal is not phase shifted relative to the portion of the comparative signal in the second composite signal. As a result, the first composite signal and the second composite signal can act as the components of a complex composite signal. For instance, the first composite signal can be an in-phase component of the complex composite signal and the second composite signal can be the quadrature component of the complex composite signal. In these examples a particular relationship is not required between the phase of the portion of the reference signal in the first composite signal and the portion of the comparative signal in the first composite signal and/or between the phase of the portion of the reference signal in the second composite signal and the portion of the comparative signal in the second composite signal.

In one example, the portion of the reference signal in the first composite signal is phase-shifted relative to the portion of the reference signal in the second composite signal but the portion of the comparative signal in the first composite signal is in-phase with the portion of the comparative signal in the second composite signal.

The desired phase shift can be a result of a length differential between the length of the first reference waveguide 110 and the second reference waveguide 108. In some instances, the length differential is on the order of 0.05-0.3 microns in order to achieve the desired phase shift such as a 90° phase shift. The desired length differential can be a function of wavelength.

In some instances, depending on the layout of the LIDAR chip, there are one or more intersections that are each between two waveguides selected from the waveguide group consisting of the first comparative waveguide 104, the second comparative waveguide 106, the first reference waveguide 110 and the second reference waveguide 108. For instance, FIG. 3A illustrates an intersection between the second comparative waveguide 106 and the first reference waveguide 110. The waveguide intersection can affect the effective index of refraction of the intersection waveguides. As a result, one or more dummy waveguides 119 can optionally be added to one or more of the waveguides in the waveguide groups so as to bring each waveguide to the same number of intersections. For instance, in the layout of FIG. 3A, the first comparative waveguide 104 and the second reference waveguide 108 do not have an intersection. As a result, a dummy waveguide 119 is added to the first comparative waveguide 104 and the second reference waveguide 108 so as to provide each waveguide in the waveguide groups with the same number of intersections. Providing each waveguide in the waveguide group with the same number of intersections allows the phase difference between the light signals carried in these waveguides to be controlled. The dummy waveguides can each be constructed such that any light guided within the dummy waveguide is not guided to other components on the LIDAR chip and/or to other waveguides on the LIDAR chip. Accordingly, light guided within the dummy waveguides is not processed by the LIDAR chip. As a result, the dummy waveguides can include two terminal ends as illustrated in FIG. 3A.

The first light sensor 40 and the second light sensor 42 can be connected as a balanced detector and the first auxiliary light sensor 118 and the second auxiliary light sensor 120 can also be connected as a balanced detector. For instance, FIG. 3B provides a schematic of the relationship between the electronics, the first light sensor 40, the second light sensor 42, the first auxiliary light sensor 118, and the second auxiliary light sensor 120. The symbol for a photodiode is used to represent the first light sensor 40, the second light sensor 42, the first auxiliary light sensor 118, and the second auxiliary light sensor 120 but one or more of these sensors can have other constructions.

The electronics connect the first light sensor 40 and the second light sensor 42 as a first balanced detector 124. In particular, the first light sensor 40 and the second light sensor 42 are connected in series. The first balanced detector 124 acts as a light sensor that converts the first composite signal to an electrical signal (a first data signal) carried on a first data line 128. Additionally, the electronics connect the first auxiliary light sensor 118 and the second auxiliary light sensor 120 as a second balanced detector 126. In particular, the first auxiliary light sensor 118 and the second auxiliary light sensor 120 are connected in series. The second balanced detector 124 acts as a light sensor that converts the second composite signal to an electrical signal (a second data signal) carried on a second data line 132.

The first data line 128 carries the first data signal to a transform module 136 and the second data line 132 carries the second data signal to the transform module 136. The transform module is configured to perform a complex transform on a complex signal so as to convert the input from the time domain to the frequency domain. The first data signal can be the real component of the complex signal and the second data signal can be the imaginary component of the complex signal. The transform module can execute the attributed functions using firmware, hardware and software or a combination thereof

The solid line in FIG. 3C provides an example of the output of the transform module when a Complex Fourier transform converts the input from the time domain to the frequency domain. The solid line shows a single frequency peak. The frequency associated with this peak is used by the electronics as the frequency of the LIDAR input signal and/or as the frequency of the incoming LIDAR signal.

The electronics use this frequency for further processing to generate the LIDAR data (distance and/or radial velocity between the reflecting object and the LIDAR chip or LIDAR system). FIG. 3C also includes a second peak illustrated by a dashed line. Prior methods of resolving the frequency of the LIDAR input signal made use of real Fourier transforms rather than the Complex Fourier transform technique disclosed above. These prior methods output both the peak shown by the dashed line and the solid line. As noted above, when using LIDAR applications, it can become difficult to identify the correct peak. Since the above technique for resolving the frequency generates a single solution for the frequency, the inventors have resolved the ambiguity with the frequency solution.

The electronics use the single frequency that would be present in FIG. 3C to determine the distance of the reflecting object from the chip and/or the relative speed of the object and the chip. For instance, the following equation applies during a period where electronics linearly increase the frequency of the outgoing LIDAR signal during the period: +ƒ_ub=−ƒ_d+ατ₀where f_ubis the frequency provided by the transform module, ƒ_drepresents the Doppler shift (ƒ_d=2vƒ_c/_c) where f_cis the frequency of the LIDAR output signal at the start of the period (i.e. t=0), v is the radial velocity between the reflecting object and the LIDAR chip where the direction from the reflecting object toward the chip is assumed to be the positive direction, and c is the speed of light, α represents the rate at which the frequency of the outgoing LIDAR signal is increased or decreased during the period, and τ₀is the roundtrip delay (time between the LIDAR output signal exiting from the LIDAR chip and the associated LIDAR input signal returning to the LIDAR chip) for a stationary reflecting object. The following equation applies during a period where electronics decrease the frequency of the outgoing LIDAR signal: −ƒ_db=−ƒ_d−ατ₀where f_dbis the frequency provided by the transform module. In these two equations, and v and τ₀are unknowns. The radial velocity can then be determined from the Doppler shift and the separation distance can be determined from c*^τ₀/2.

Above, the complex composite signal is described as having an in-phase component and a quadrature component that include out-of-phase portions of the reference signal; however, the unambiguous LIDAR data solution can be achieved by generating other complex composite signals. For instance, the unambiguous LIDAR data solution can be achieved using a complex composite signal where the in-phase component and the quadrature component include out-of-phase portions of the comparative signal. For instance, the first comparative waveguide 104 and the second comparative waveguide 106 can be constructed so as to provide a 90 degree phase shift between the first portion of the comparative signal and the second portion of the comparative signal but the first reference waveguide 110 and the second reference waveguide 108 are constructed such that the first portion of the reference signal and the second portion of the reference signal are in-phase in the composite signals. Accordingly, the portion of the comparative signal in the first composite signal is phase shifted relative to the portion of the comparative signal in the second composite signal, however, the portion of the reference signal in the first composite signal is not phase shifted relative to the portion of the reference signal in the second composite signal.

In the LIDAR chips, a single light sensor can replace the second balanced detector first light sensor 40 and the second light sensor 42 and/or a second light sensor can replace the first auxiliary light sensor 118 and the second auxiliary light sensor 120. When a single light sensor replaces the first light sensor 40 and the second light sensor 42, the light-combining component 28 need not include light-splitting functionality. As a result, the illustrated light light-combining component 28 can be a 2×1 light-combining component rather than the illustrated 2×2 light-combining component. For instance, the illustrated light light-combining component can be a 2×1 MMI device. In these instances, the chip includes a single detector waveguide that carries the composite signal to the light sensor.

When a single light sensor replaces the first auxiliary light sensor 118 and the second auxiliary light sensor 120, second light-combining component 112 need not include light-splitting functionality. As a result, the illustrated second light-combining component 112 can be a 2×1 light-combining component rather than the illustrated 2×1 light-combining component. For instance, the illustrated light light-combining component can be a 2×1 MMI device. In these instances, the chip includes a single detector waveguide that carries the composite signal from the second light-combining component 112 to the light sensor.

Although the laser cavity is shown as being positioned on the chip, all or a portion of the laser cavity can be located off the chip. For instance, the utility waveguide 16 can terminate at a second facet through which the outgoing LIDAR signal can enter the utility waveguide 16 from a laser cavity located off the chip.

The chip can include components in addition to the illustrated components. As one example, optical attenuators (not illustrated) can be positioned along the first detector waveguide 36 and the second detector waveguide 38. The electronics can operate these attenuators so the power of the first portion of the composite sample signal that reaches the first light sensor 40 is the same or about the same as the power of the second portion of the composite sample signal that reaches the second light sensor 42. The electronics can operate the attenuators in response to output from the first light sensor 40 which indicates the power level of the first portion of the composite sample signal and the second light sensor 42 which indicates the power level of the second portion of the composite sample signal.

FIG. 4A illustrates a LIDAR system and includes a cross section of a housing 200 for a LIDAR module 201. The LIDAR module 201 includes direction-changing optics 202 and a LIDAR chip 204. The LIDAR chip 204 can be constructed as disclosed in this application or can have another construction. The housing 200 can include a cover 206 positioned on a substrate 208. In some instances, the cover 206 is positioned on the substrate 208 such that the substrate serves as at least a portion of a side of the housing.

FIG. 4B is a topview of the housing 200 with the cover 206 removed. Suitable substrates 208 include, but are not limited to, Integrated Circuit Boards (ICB), Printed Circuit Boards (PCB), ceramic substrates and glass substrates. The substrate 208 can include electrical conductors 210 for providing electrical communication between the LIDAR chip 204 and the electronics 62. For instance, the electronics 62 can include or consist of an Integrated Circuit Board (ICB) or Printed Circuit Board (PCB) that includes contacts 211 that are each in electrical communication with a different one of the electrical conductors 210. Suitable electrical conductors 210 include, but are not limited to, pins, solder bumps, and wire bonds. In some instances, the contacts 211 are arranged in a connector configured to receive the electrical conductors 210.

The substrate 208 and the LIDAR chip 204 can include contact pads 212. In some instances, the contact pads 212 on the substrate are on an opposite side of the substrate 208 from the electrical conductors 210. The contact pads 212 on the substrate can be in electrical communication with the electrical conductors 210 through one or more mechanisms such as metal traces, Through-Silicon Vias (TSVs), solder bumps and wire bonds. Suitable contact pads 212 include, but are not limited to, deposited aluminum and gold. Techniques such as wire bonding and solder bumping can be used to provide electrical communication between the contact pads 212 on the substrate 208 and contact pads 212 on the LIDAR chip 204. The contact pads 212 located on the LIDAR chip 204 can be in electrical communication with electronics located on the LIDAR chip 204 through mechanisms such as metal traces, Through-Silicon Vias (TSVs), solder bumps and wire bonds. Accordingly, the electronics 62 are in electrical communication with the electronics on the LIDAR chip 204 through the electrical conductors 210 and contact pads 212. Examples of the electronics that can be included on the LIDAR chip include, but are not limited to, one or more fully or partially electrical components selected from the group consisting of attenuators, light sources, amplifiers, light sensors, and all, none, or a portion of the electronics 62 disclosed in the context of FIG. 1 through FIG. 3C. As a result, the electronics 62 can control the electronics on each of the LIDAR chips through the substrate 208.

The cover 206 can include a window 220 in a frame 222. The window 220 is illustrated by the dashed lines while the frame 222 is illustrated by the solid lines. The frame 222 can be opaque, transparent, or partially transparent. Suitable materials for the frame 222 include, but are not limited to, plastics, metals, and ceramics. The window 220 is at least partially transparent to the LIDAR output signals. Suitable materials for the window 220 include, but are not limited to, plastics, glass, ceramics and silicon. The window may be coated with an anti-reflection (AR) coating material. Suitable methods for mounting the window 220 in the frame 222 include, but are not limited to, epoxy, solder, and compression joints. The cover 206 can be bonded to the substrate 208 using techniques that include, but are not limited to, epoxy, mounting screws, and soldering.

The direction-changing optics 202 and the LIDAR chip 204 are mounted on the substrate 208 such that the direction-changing optics 202 receive the LIDAR output signal from the LIDAR chip 204. Suitable methods for mounting the LIDAR chip 204 on the substrate 208 include, but are not limited to, soldering, and epoxy.

The direction-changing optics 202 receive the LIDAR output signal and are configured to re-direct the LIDAR output signal such that the LIDAR output signal travels through the window 220. When the LIDAR output signal exits the LIDAR chip 204 traveling in a direction that is parallel to the plane of the substrate 208, the direction-changing optics 202 can re-direct the LIDAR output signal such that the LIDAR output signal travels in a direction that is nonparallel to the plane of the substrate 208. In some instances, the direction-changing optics 202 re-direct the LIDAR output signal such that the LIDAR output signal travels in a direction that is perpendicular or substantially perpendicular to the plane of the substrate 208. Examples of the plane of the substrate 208 include the upper surface of the substrate 208 of the lower surface of the substrate 208.

Suitable direction-changing optics 202 can include one or more components selected from the group consisting of mirror, and diffractive optical elements. The illustrated direction-changing optics 202 include a mirror 224 positioned on a mount 226. Mirrors may consist of a metal-coated substrate together with a transparent protective overlayer. Suitable substrates for the mirror include, but are not limited to, metals, ceramics and semiconductor materials such as silicon. Suitable metals include aluminum, silver and gold. Suitable transparent protective overlayers include glass, plastics. Suitable mounts include, but are not limited to, plastics, metals, semiconductors and ceramics. Suitable methods for mounting the direction-changing optics 202 on the substrate 208 include, but are not limited to, soldering, and epoxy. Alternatively, the direction-changing optics may be formed of a single element made of plastics, metals, ceramics or semiconductor materials such as silicon, with suitable reflective coatings and in some cases transparent protective overlayers deposited directly on the element using techniques such as electron beam deposition, ion-assisted deposition, or sputtering. Suitable reflective coatings include, but are not limited to, metals such as aluminum, silver and gold. Suitable overlayers include, but are not limited to, glass, deposited dielectrics such as silica, and plastics.

FIG. 4A shows the LIDAR module 201 included in a LIDAR system that includes external optics 230 that receive the LIDAR output signal and direct the LIDAR output signal to a steering device 232. The steering device 232 is configured to change the direction that the LIDAR output signal travels away from the steering device 232. The steering device 232 can be operated by the electronics 62. Accordingly, the electronics 62 can steer the LIDAR output signal to different sample regions in a field of view. The electronics 62 can generate the LIDAR data for all or a portion of the sample regions that receive the LIDAR output signal. In some instances, the external optics are characterized by one, two, or three features selected from the group consisting of being passive in that the external optics do(es) not require electrical input, not requiring electrical input and not providing electrical output, and excluding moving parts. Accordingly, the external optics 230 can include or consist of one or more solid-state devices. Suitable external optics 230 include or consist of, but are not limited to, one or more components selected from the group consisting of lenses and diffractive optical elements. The illustrated external optics 230 is a lens such as a convex lens. In some instances, the steering device 232 is characterized by none, one, or two features selected from the group consisting of being operated by an electrical input and including moving parts. An example of suitable steering devices 232 include, but are not limited to, devices that include one or more mirrors, and/or one or more diffractive optical elements. The illustrated steering device 232 is a mirror. The arrows labeled d1 and d2 in FIG. 4A illustrate movements of the steering device 232 that can steer the LIDAR output signal in two dimensions; however, the steering device 232 can be configured to steer the LIDAR output signal in one dimension. The electronics 62 can operate an actuator (not shown) configured to move the steering device so as to provide the desired steering of the LIDAR output signal. Suitable actuators include, but are not limited to, electromechanical actuators, piezoelectric actuators, and electromagnetic actuators.

FIG. 5 illustrate the LIDAR system of FIG. 4A and FIG. 4B modified so multiple LIDAR modules 201 are positioned in the housing 200. The window 220 can be sized such that the LIDAR output signals from different LIDAR chips 204 can each exit from the housing 200 through the same window 220. Alternately, the housing 200 can include multiple windows 220 arranged such that different LIDAR output signals exit the housing 200 through different windows 220.

The external optics 230 receive the LIDAR output signals from each of the LIDAR modules 201 and direct the LIDAR output signals to the steering device 232. The LIDAR modules 201 can be arranged such that the corresponding rays in different LIDAR output signals have different incident angles on the external optics 230. For instance, in FIG. 5 the corresponding ray from each of the LIDAR output signals is parallel to the focal axis of the external optics 230. The LIDAR modules 201 are arranged such that the corresponding rays are separated by a distance labeled D in FIG. 5. The distance D can also represent the distance between corresponding locations on different LIDAR modules 201 as is also shown in FIG. 5. The separation between the illustrated rays causes the different rays to each have a different angle of incidence on the external optics 230. As a result, the different LIDAR output signals each has a different angle of incidence on the external optics 230 and travels away from the external optics 230 in different directions. Accordingly, the different LIDAR output signals also travel away from the steering device 232 in different directions. As a result, the electronics can operate the steering device 232 such that the different LIDAR output signals are directed to different sample regions in the field of view. The electronics can operate the steering device 232 so as to steer the LIDAR output signals from one group of sample regions in the field of view to one or more other groups of sample regions in the field of view. In some instances, the modules are arranged such that the separation between corresponding rays of adjacent LIDAR output signals for all or a portion of the pairs of adjacent LIDAR output signals is greater than 3 mm, 4 mm, or 5 mm and/or less than 6 mm, 8 mm, or 10 mm. Additionally or alternately, the distance between corresponding locations on different LIDAR modules 201 can be greater than 3 mm, 4 mm, or 5 mm and/or less than 6 mm, 8 mm, or 10 mm.

The arrows labeled d1 and d2 in FIG. 5 illustrate movements of the steering device 232 that can steer the LIDAR output signals in two dimensions; however, the steering device 232 can be configured to steer the LIDAR output signals in one dimension. The electronics 62 can operate an actuator (not shown) configured to move the steering device so as to provide the desired steering of the LIDAR output signal. Suitable actuators include, but are not limited to, electromechanical actuators, piezoelectric actuators, and electromagnetic actuators.

The angle between the directions that adjacent LIDAR output signals travel away from the steering device 232 is labeled θ in FIG. 5. The steering device 232 need only be configured to steer the LIDAR output signals over an angular range that is at least equal to the value of θ′ where θ′ represents the largest θ for the LIDAR system. This angular steering range allows the LIDAR output signals to cover sample regions between adjacent LIDAR output signals.

Although FIG. 5 illustrates the LIDAR modules 201 as periodically positioned in the housing 200, the LIDAR modules 201 need not be periodically spaced in the housing 200.

In some instances, housing 200 has a hermetically sealed reservoir in which the one or more LIDAR modules are positioned. For instance, the cover 206 can sealed to the substrate 208 of FIG. 4A through FIG. 5 to provide the housing 200 with a hermetically sealed reservoir in which the one or more LIDAR modules are positioned. Suitable methods for bonding the cover 206 to the substrate 208 so as to provide a hermetic seal include, but are not limited to, seam welding and soldering.

In FIG. 4A through FIG. 5, a lens serves as the external optics 230. In some instances, the LIDAR chips 204 are arranged such that one or more of the facets are located on the focal plane of the lens as is evident from FIG. 4A where the focal plane is perpendicular to the axis of the external optics 230 as modified by the direction-changing optics. Accordingly, at least one of the LIDAR output signals is collimated between the external optics 230 and the steering device 232. As a result, all or a portion of the LIDAR output signals can be collimated as they travel toward the field of view. In some instances, it may be desirable for one or more of the LIDAR output signals to be focused as they travel toward the field of view. In these instances, the LIDAR chip 204 can be moved further away from the external optics 230 than the focal plane. For instance, the optical pathway from the external optics 230 to the facet of a LIDAR chip 204 that outputs an LIDAR output signal can be further than the optical pathway from the external optics 230 to the focal plane.

In FIG. 4A through FIG. 5, the external optics 230 are shown as a separate component from the housing 200. However, the external optics 230 can be integrated into the housing 200. In some instances, all or a portion of the external optics 230 serves as the window 220 in the frame 222. For instance, a lens serves as the external optics 230 in FIG. 4A through FIG. 5. The lens can be integrated into the housing 200 such that the lens serves as the window 220 in the frame 222.

The optical pathways illustrated in FIG. 4A through FIG. 5 are disclosed in the context of pathways for LIDAR output signals; however, after reflection of the LIDAR output signals by an object, the resulting LIDAR input signals also travel along these pathways in the reverse direction. Accordingly, when the LIDAR chip 204 is constructed according to this application, the resulting LIDAR input signals travel these pathways in the reverse direction, enter the LIDAR chips 204 through the facet, and are then processed by the LIDAR chip 204 as disclosed.

The LIDAR chips 204 in the housing 200 can be configured such that each of the LIDAR output signals has the same wavelength or has different wavelengths. The use of LIDAR output signals with different wavelengths can reduce cross-talk.

The size of the housing 200 disclosed in the context of FIG. 4A through FIG. 5 can be a function of the number of LIDAR chips 204 included in the housing 200. In some instances, if the interior of the fully assembled housing 200 were filled with a solid material, the interior of the housing or the housing 200 and solid material has a volume greater than 10 mm³, 100 mm³, or 1000 mm³and/or less than 5000 mm³, 10000 mm³, or 20000 mm³.

Although the LIDAR chips 204 shown in the LIDAR system of FIG. 4A through FIG. 5 are each shown outputting a single LIDAR output signal, one or more of the LIDAR chips 204 can be configured to output more than one LIDAR output signal.

Suitable electronics 32 can include, but are not limited to, a controller that includes or consists of analog electrical circuits, digital electrical circuits, processors, microprocessors, digital signal processors (DSPs), Application Specific Integrated Circuits (ASICs), Field Programmable Gate Arrays (FPGAs), computers, microcomputers, or combinations suitable for performing the operation, monitoring and control functions described above. In some instances, the controller has access to a memory that includes instructions to be executed by the controller during performance of the operation, control and monitoring functions. Although the electronics are illustrated as a single component in a single location, the electronics can include multiple different components that are independent of one another and/or placed in different locations. Additionally, as noted above, all or a portion of the disclosed electronics can be included on the chip including electronics that are integrated with the chip.

Other embodiments, combinations and modifications of this invention will occur readily to those of ordinary skill in the art in view of these teachings. Therefore, this invention is to be limited only by the following claims, which include all such embodiments and modifications when viewed in conjunction with the above specification and accompanying drawings.

STEERING MULTIPLE LIDAR OUTPUT SIGNALS

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