Patent Application
20190388853
This application claims the priority of Chinese patent application CN 201710181986.0, entitled “Stirring device for treatment of photoresist settlement and photoresist tank” and filed on Mar. 24, 2017, the entirety of which is incorporated herein by reference.
The present disclosure relates to the technical field of a stirring device, and in particular, to a stirring device for treatment of photoresist settlement and a photoresist tank.
In the manufacture of TFT-LCDs (liquid crystal display devices), a photoresist is required, wherein in the manufacture of a CF (color filter) substrate, necessary RGB photoresist has a strict requirement for the homogeneity of a photoresist amount. The long-distance transportation and the long-period storage of the photoresist may result in the settlement thereof. In a photoresist tank, the amount of photoresist in an upper part is smaller than that in a lower part. Since the CF adopts the negative photoresist (i.e., a part of exposed photoresist will be retained), if the homogeneity of the photoresist is not good, after the procedures of vacuum pumping and preheating, the amounts of retained photoresist may be different due to the volatilization of a solvent in the photoresist, which results in a difference in characteristic values, thereby influencing the quality of the products.
An existing photoresist tank has no design for preventing or treating the photoresist settlement. A commonly adopted treating procedure is to roll or sway the photoresist tank. Since the photoresist tank is heavy, the operation is inconvenient. Moreover, since the photoresist is inflammable and possesses some toxicity, there also exists a safety problem in the operation.
Based on the above defects and problems, the present disclosure provides a stirring device for treatment of photoresist settlement and a photoresist tank.
In order to achieve the above objective, the present disclosure provides a stirring device for treatment of photoresist settlement, comprising:
a sleeve shaft, an inner telescopic shaft, a stirring component, and a rotary rod; wherein,
wherein the rotary rod is mounted on an upper end of the sleeve shaft for driving the sleeve shaft to rotate; the stirring component is mounted on a lower end of the sleeve shaft and rotates with the sleeve shaft; and the inner telescopic shaft is mounted inside of the sleeve shaft and connected to the stirring component for controlling opening and closing of the stirring component.
In the above stirring device for treatment of photoresist settlement, the stirring component comprises two stirring plates having a same structure and being symmetrically arranged,
wherein one end of the stirring plate is in a semicircle shape and another end thereof is in a vertical shape; and a groove is provided on a side of an upper portion of the stirring plate, and is connected to the semicircle shape.
In the above stirring device for treatment of photoresist settlement, the two stirring plates show a horizontal straight line when they are pushed open.
In the above stirring device for treatment of photoresist settlement, the sleeve shaft is in a cask shape.
In the above stirring device for treatment of photoresist settlement, openings are provided on two sides of a lower portion of the sleeve shaft.
In the above stirring device for treatment of photoresist settlement, a movable coupling is mounted on a lower end of the inner telescopic shaft; two connecting plates are arranged in the openings, upper ends of the two connecting plates being connected to the movable coupling respectively, and lower ends of the two connecting plates being connected to the stirring component respectively.
In the above stirring device for treatment of photoresist settlement, the two connecting plates are arranged in an inclined way.
In the above stirring device for treatment of photoresist settlement, height of the sleeve shaft is smaller than that of the inner telescopic shaft.
In the above stirring device for treatment of photoresist settlement, the rotary rod is in a shape of transverse “L.”
A photoresist tank comprises a photoresist exit constructed on a tank body, on which a round mouth for going in and out by the stirring device for treatment of photoresist settlement is also constructed.
In the above technical solutions, the stirring device for treatment of photoresist settlement provided in the present disclosure unfolds the stirring component with the inner telescopic shaft. The rotary rod drives the sleeve shaft to rotate, and the stirring component rotates with the sleeve shaft. Stirring is carried out from a bottom portion of the stirring device upward gradually so that the photoresist is stirred more homogeneous. The stirring device is convenient and efficient for use. A lot of manpower and material resources are saved. The stirring device enables rapid stirring speed and high safeness.
Since the stirring device for treatment of photoresist settlement possesses the above technical effects, the photoresist tank comprising the device should also possess the corresponding technical effects.
As long as the objective of the present disclosure can be achieved, the above technical features can be combined in various suitable manners or substituted by equivalent technical features.
The present disclosure will be described in a more detailed way below based on embodiments and with reference to the accompanying drawings, in which:
In the following, the present disclosure will be further illustrated in combination with the drawings.
a sleeve shaft 13, an inner telescopic shaft 12, a stirring component, and a rotary rod 11,
wherein the rotary rod 11 is mounted on an upper end of the sleeve shaft 13 for driving the sleeve shaft 13 to rotate; the stirring component is mounted on a lower end of the sleeve shaft 13 and rotates with the sleeve shaft 13; and the inner telescopic shaft 12 is arranged inside of the sleeve shaft 13 and connected to the stirring component for controlling opening and closing of the stirring component. The stirring device brings about excellent stirring effects, has a simple structure, enables convenient and efficient operations, and improves the safety performance.
As shown in
As shown in
As shown in
Furthermore, the rotary rod 11 can be further connected to a mechanical arm. Labor force can be saved with the rotation of the rotary rod 11 driven by the mechanical arm.
As shown in
As shown in
Furthermore, a sum of width of the two stirring plates 16 and a diameter of the inner telescopic shaft 12 is smaller than a diameter of the sleeve shaft 13. The two stirring plates 16 and the inner telescopic shaft 12 can be received in the sleeve shaft 13. This is convenient for disassembly and maintenance. For example, the stirring plates 16 can be folded to fit to the inner telescopic shaft 12, such that the inner telescopic shaft 12 can be pulled out directly together with the stirring plates 16 under the circumstance of not pulling out the sleeve shaft 13. This is convenient for use, maintenance, and storage.
Furthermore, two connecting plates 15 are arranged in an inclined way. The two stirring plates 16 are unfolded by the two connecting plates 15. The two stirring plates 16 show a horizontal straight line when being unfolded. The two connecting plates 15 and the two stirring plates 16 show a triangle shape. A support force is more concentrated and the stability is better. The stirring plates 16 of different sizes can be selected based on actual requirements.
As shown in
In one preferred embodiment, an electronic timer can be also mounted on the rotary rod 11, to facilitate checking of the stirring time, and a preferred stirring duration lasts for 3-5 minutes. This can improve the work efficiency.
In specific use, the round opening 21 of the photoresist tank is opened; the stirring device is arranged in the photoresist tank; the inner telescopic shaft 12 is pressed downward to open the two stirring plates 16; the rotary rod 11 drives the sleeve shaft 13 and the stirring plates 16 to rotate; and the stirring plates 16 approach a bottom portion of the photoresist tank. At this moment, manual control is adopted to control stirring of the stirring device upward from the bottom gradually, so as to achieve the objective of homogeneous component of the photoresist. The stirring of the photoresist is thus more homogeneous. The stirring device is convenient and efficient for use, saves a lot of manpower and material resources, and is of rapid stirring speed and high safeness.
The present disclosure is described by referring to the preferred embodiments. Under the condition of not departing from the scope of the present disclosure, any skilled person can make any improvements and replace its components with equivalents. Particularly, as long as there is no structural conflict, all technical features mentioned in all the embodiments can be combined in any manners. The present disclosure is not limited to the specific embodiments disclosed herein but includes all the technical solutions falling within the scope of the claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 201710181986.0 | Mar 2017 | CN | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2017/080236 | 4/12/2017 | WO | 00 |
