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2-199622 | Jul 1990 | JPX | |
3-124447 | Apr 1991 | JPX |
Number | Name | Date | Kind |
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3242006 | Gerstenberg | Mar 1966 | |
4636480 | Hillig | Jan 1987 | |
4655830 | Akashi et al. | Apr 1987 | |
4863881 | Ahrens et al. | Sep 1989 |
Number | Date | Country |
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63-201006 | Aug 1988 | JPX |
264365 | Mar 1970 | SUX |
Entry |
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O. Matsumoto et al., "Formation of cubic tautalum nitride by heating hexagonal tautalum nitride in a nitrogen-argon plasma jet," Journal of the Less-Common Metals, 60, No. 1 (Jul. 1978), 147-149. |