Number | Name | Date | Kind |
---|---|---|---|
3341794 | Stedman | Sep 1967 | A |
4050313 | Shimada et al. | Sep 1977 | A |
4065971 | Shimazoe et al. | Jan 1978 | A |
4400681 | Brown et al. | Aug 1983 | A |
4904978 | Barth et al. | Feb 1990 | A |
5172205 | French et al. | Dec 1992 | A |
5178016 | Dauenhauer et al. | Jan 1993 | A |
5369544 | Mastrangelo | Nov 1994 | A |
5376853 | Fushimi | Dec 1994 | A |
6122972 | Crider | Sep 2000 | A |
Number | Date | Country |
---|---|---|
679700 | Mar 1992 | CH |
0 269 759 | Jun 1988 | EP |
0 320 299 | Jun 1989 | EP |
0 647 832 | Apr 1995 | EP |
1 354 009 | May 1974 | GB |
1 463 087 | Feb 1977 | GB |
Entry |
---|
A.J. Auberto-Herve, “SOI Materials for ULSI Applications”, Semiconductor International, Oct. 1995. |
“Solid-State Pressure Sensors Handbook”, vol. 16, published by SenSym, Inc., 1998, pp. 8-70 to 8-73, 8-92 and 8-93. |