Patent Application
20060127830
This disclosure relates to optical devices and systems that use optical devices.
Optical devices and systems are commonly used where manipulation of light is desired. Examples of optical devices include lenses, polarizers, optical filters, antireflection films, optical retarders (e.g., waveplates), and beam splitters (e.g., polarizing and non-polarizing beam splitters). Sub-wavelength structures may be used to control properties of optical beams such as polarization. Articles that are sensitive to the polarization of a beam may include sub-wavelength structure.
In general, in one aspect, the invention features articles that include a first layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ, and a second layer supported by the first layer, the second layer comprising a second material, wherein the first layer is configured to transmit about 50% or more of radiation of wavelength λ having a first polarization state incident on the first layer along a path and to specularly reflect about 80% or more of radiation of wavelength λ having a second polarization state incident on the first layer along the path, the first and second polarization states being orthogonal, and the second layer is configured so that the article specularly reflects about 10% or less of the radiation of wavelength λ having the second polarization incident on the article along the path, where the path intersects the first and second layers.
Embodiments of the articles may include one or more of the following features and/or features of other aspects.
The second layer can include a plurality of portions including the second material, the portions being spaced apart from each other and a center of each adjacent portion being separated by a distance more than about λ (e.g., more than about 2λ, more than about 5λ, more than about 10λ). The second layer can include a plurality of portions including the second material, the portions being spaced apart from each other and a center of each adjacent portion being separated by a distance less than about 50λ. (e.g., less than about 40λ, less than about 30λ, less than about 20λ). The plurality of portions of the second material can extend along a second direction. Portions that include the second material can be rows that extend along the second direction. The rows that include the second material can have a rectangular or trapezoidal profile. The portions including the second material can be periodically spaced in a direction perpendicular to the second direction.
The rows including the second material have a width of about 1 μm or more (e.g., about 2 μm or more, about 5 μm or more). In some embodiments, the rows including the second material have a width of about 10 μm or less (e.g., about 8 μm or less).
The center of adjacent portions can be separated by a distance of about 1 μm or more (e.g., about 2 μm or more, about 3 μm or more, about 4 μm or more, about 5 μm or more). In some embodiments, the center of adjacent portions are separated by a distance of about 50 μm or less (e.g., about 40 μm or less, about 30 μm or less, about 20 μm or less).
The plurality of portions in the second layer can each include a plurality of rows of the second material extending along the first direction, the rows of the second material being spaced apart from each other and a center of each adjacent row being separated by a distance less than λ. The center of each adjacent row of the second material can be separated by a distance of about 400 nm or less (e.g., about 300 nm or less, about 250 nm or less, about 200 nm or less, about 180 nm or less, about 160 nm or less). In some embodiments, the center of each adjacent row of the second material is separated by a distance in a range from about 70 nm to about 300 nm. The rows of the first material in the first layer can be continuous with the rows of the second material in the second layer.
The second layer can have a thickness of about 1,000 nm or less (e.g., about 800 nm or less, about 600 nm or less, about 500 nm or less, about 400 nm or less, about 300 nm or less, about 200 nm or less). In certain embodiments, the second layer has a thickness of about 10 nm or more (e.g., about 20 nm or more, about 30 nm or more, about 40 nm or more, about 50 nm or more, about 60 nm or more, about 70 nm or more, about 80 nm or more).
The first and second materials can be the same or different. The second material can be a dielectric material. In some embodiments, the second material includes at least one material selected from a group including SiO2, SiNx, Si, Al2O3, ZrO2, Ta2O5, TiO2, HfO2, Nb2O5, and MgF2. In certain embodiments, the second material is a metallic material. The second material can include at least one metal selected from the group including Al, Au, Ag, Cr and Cu.
Portions of the second layer between the portions including the second material can include a third material different from the second material. The third material can be a dielectric material. The third material can be a nanolaminate material. In some embodiments, the second material is a metallic material. The third material can have a refractive index at λ that is approximately equal to an effective refractive index of the rows comprising the second material for radiation of wavelength λ having the second polarization state propagating along the axis. In certain embodiments, the second layer is a continuous layer.
The second layer can be configured so that the article specularly reflects about 8% or less (e.g., about 5% or less, about 4% or less, about 3% or less, about 2% or less) of the radiation of wavelength λ having the second polarization incident on the article along the path.
The rows of the first material can be periodically spaced in a direction orthogonal to the first direction.
The first material can be a dielectric material. In some embodiments, the first material includes at least one material selected from a group including SiO2, SiNx, Si, Al2O3, ZrO2, Ta2O5, TiO2, HfO2, Nb2O5, and MgF2. The first material can be a nanolaminate material.
In certain embodiments, the first material is a metallic material. The first layer can include a plurality of rows of a dielectric material extending along the first direction, the rows of the dielectric material alternating with the rows of the first material. The first material can include at least one metal selected from the group including Al, Au, Ag, Cr and Cu.
The rows of the first material can have a width of about 200 nm or less (e.g., about 150 nm or less, about 100 nm or less, about 80 nm or less, about 60 nm or less, about 50 nm or less). In some embodiments, the rows of the first material have width in a range from about 50 nm to about 200 nm. Each adjacent rows of the first material are separated by a trench having a width in a range from about 50 nm to about 300 nm.
The first layer can have a thickness of about 10 nm or more (e.g., about 20 nm or more, about 50 nm or more, about 70 nm or more, about 100 nm or more). In certain embodiments, the first layer has a thickness of about 1,000 nm or less (e.g., about 800 nm or less, about 600 nm or less, about 500 nm or less, about 400 nm or less). The first and second layers can have a combined thickness of about 5 μm or less (e.g., about 3 μm or less, about 2 μm or less, about 1 μm or less, about 800 nm or less, about 500 nm or less).
The article can include a third layer between the first layer and the second layer. The third layer can include the first material. The rows of the first material in the first layer can be continuous with the first material in the third layer. The first and second layers can be separated by a distance of about 5 μm or less (e.g., about 3 μm or less, about 2 μm or less, about 1 μm or less, about 800 nm or less, about 500 nm or less).
The first layer can be a continuous layer.
The rows of the first material can have a rectangular, trapezoidal, oval, or convex hull profile.
The first layer can transmit about 80% or more (e.g., about 90% or more, about 95% or more) of radiation of wavelength λ having the first polarization state incident on the layer along the path. The first the layer can block about 90% or more (e.g., about 95% or more, about 98% or more, about 99% or more) of radiation of wavelength λ having the second polarization state incident on the layer along the path.
The first and second polarization states can be linear polarization states. The first and second polarization states can be TM and TE polarization states, respectively. λ can be between about 150 nm and about 5,000 nm (e.g., between about 400 nm and about 700 nm, between about 1,200 nm and about 1,700 nm).
The first layer can transmit about 50% or more of radiation of wavelength λ having a first polarization state incident on the layer along a path and the layer blocks about 80% or more of radiation of wavelength λ′ having a second polarization state incident on the layer along the path, wherein |λ-λ′| is about 50 nm or more (e.g., about 100 nm or more, about 150 nm or more, about 200 nm or more, about 250 nm or more, about 300 nm or more).
The article can further include a substrate, wherein the first layer is supported by the substrate. The substrate can be a planar substrate. The substrate can include a layer of an inorganic glass material. The article can further include an anti-reflection film supported by the substrate.
In a further aspect, the invention features an apparatus including a Faraday rotator and the article positioned relative to the Faraday rotator so that the path intersects the Faraday rotator. The Faraday rotator can rotate incident radiation having the first polarization state propagating along the path by an amount between about 30° and about 60° (e.g., by about 45°). The apparatus can include a polarizer, wherein the Faraday rotator is positioned between the article and the polarizer. In certain embodiments, the apparatus includes an optical isolator including the Faraday rotator and the article. The apparatus can also include a source (e.g., a laser source) of radiation at λ.
In general, in another aspect, the invention features articles that include a first layer supported by the substrate, the first layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ, wherein the first layer is configured to transmit about 50% or more of radiation of wavelength λ having a first polarization state incident on the first layer along a path and to specularly reflect about 80% or more of radiation of wavelength λ having a second polarization state incident on the first layer along the path, the first and second polarization states being orthogonal, and a second layer supported by the first layer, the second layer including a plurality of rows that include a second material extending along a second direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance more than λ, wherein λ is in a range from about 150 nm to about 5,000 nm.
Embodiments of the articles can include one or more of the following features and/or features of other aspects.
For example, the portions that include the second material can extend along a second direction. The second direction can be parallel to the first direction. The portions can be rows extending along the second direction. The plurality of portions in the second layer each can include a plurality of rows of the first material extending along the first direction, the rows of first material being spaced apart from each other and a center of each adjacent row being separated by a distance less than λ.
In general, in another aspect, the invention features articles that include a first layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ, and a second layer supported by the first layer, the second layer including a plurality of portions that include a second material extending along a second direction, the portions being spaced apart from each other and a center of each adjacent portion being separated by a distance more than λ, wherein the plurality of portions in the second layer each include a plurality of rows of the second material extending along the first direction, the rows of the second material being spaced apart from each other and a center of each adjacent row being separated by a distance less than λ, and wherein λ is in a range from about 150 nm to about 5,000 nm. Embodiments of the articles can include one or more of the features of other aspects.
In general, in a further aspect, the invention features articles that include a first layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ, wherein the first layer is configured to transmit about 50% or more of radiation of wavelength λ having a first polarization state incident on the first layer along a path and to specularly reflect about 80% or more of radiation of wavelength λ having a second polarization state incident on the first layer along the path, the first and second polarization states being orthogonal, and a second layer supported by the first layer, the second layer including a first plurality of rows that include a second material and a second plurality of rows of a third material different from the second material, where rows of the first plurality alternate with rows of the second plurality and a center of each adjacent row of the first plurality is separated by a distance more than λ, wherein λ is in a range from about 150 nm to about 5,000 nm. Embodiments of the articles can include one or more of the features of other aspects.
In general, in another aspect, the invention features articles that include a layer including a plurality of portions that include a metallic material, the plurality of portions being spaced apart from each other so each portion is spaced from an adjacent portion by a distance in a range from about 1 μm to about 50 μm, wherein the metallic material in each portion is arranged in a plurality of rows extending along a first direction, the metallic rows being spaced apart from each other and a center of each row being spaced about 500 nm or less from an adjacent row.
Embodiments of the articles can include one or more of the following features and/or features of other aspects.
For example, spaces between adjacent portions can be filled with a first dielectric material. Spaces between adjacent metallic rows can be filled with a second dielectric material. The first and second dielectric materials can be the same. The first dielectric material can have a refractive index at a wavelength λ that is approximately equal to an effective refractive index of the portions of metallic material for radiation of wavelength λ having being polarized parallel to the first direction, where λ is in a range from about 150 nm to about 5,000 nm. The first dielectric material can be a nanolaminate material.
In general, in a further aspect, the invention features methods that include forming a layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ, and removing portions of the rows of the first material to form a plurality of trenches in the layer, the trenches having a width of about λ or more, where λ is in a range from about 150 nm to about 5,000 nm.
Implementations of the methods can include one or more of the following features and/or features of other aspects.
The method can further include depositing a second material in the plurality of trenches. The second material can be deposited using atomic layer deposition. The first and second materials can be different. The first material can be a metallic material and the second material can be a dielectric material.
The portions of the first layer can be removed by etching (e.g., reactive ion etching) the first layer. The first material can be a metallic material.
The trenches can have a depth less than a thickness of the layer. The trenches can be periodically spaced along at least one direction. The trenches can be periodically spaced along a direction perpendicular to the first direction.
In general, in a further aspect, the invention features articles that include a layer including a plurality of rows of a first material extending along a first direction, the rows being spaced apart from each other and a center of each adjacent row being separated by a distance less than a wavelength λ so that for radiation of wavelength λ propagating along a path through the layer, the layer has a first effective index of refraction, n1, for the radiation having a first polarization state and the layer has second effective index of refraction, n2, for the radiation having a second polarization state orthogonal to the first polarization state, where n1 and n2 are different, and a plurality of trenches formed in a surface of the layer, the trenches extending along a second direction and being spaced apart from each other, where a center of each adjacent trench is separated by a distance more than wavelength λ, and the trenches are filled with a second material having a refractive index, n3, different from n2.
Embodiments of the articles can include one or more of the following features and/or features of other aspects.
For example, the article can be configured so that for radiation having wavelength λ incident on the layer along the path, the article transmits about 50% or more of the incident radiation having the first polarization state along a first direction and transmits about 50% or more of the incident radiation having the second polarization state along one or more directions non-parallel to the first direction. The articles can be configured to diffract about 50% or more of radiation having wavelength λ and the second polarization state incident on the article along the path into one or more non-zero diffraction orders. The article can be configured to diffract about 10% or less (e.g., about 8% or less, about 5% or less) of radiation having wavelength λ and the first polarization state incident on the article along the path into one or more non-zero diffraction orders. The article can be configured to transmit substantially all of the radiation having wavelength λ and the first polarization state incident on the article along the path along the zero order diffraction direction.
The center of each adjacent trench can be separated by a distance of about 2λ or more (e.g., about 3% or more, about 4λ or more, about 5% or more). The center of each adjacent trench can be separated by a distance of about 20λ or less (e.g., about 15λ or less, about 10λ or less).
The center of each adjacent trench can be separated by a distance of about 0.5 μm or more (e.g., about 1 μm or more, about 2 μm or more, about 3 μm or more, about 5 μm or more). In some embodiments, the center of each adjacent trench is separated by a distance of about 20 μm or less (e.g., about 15 μm or less, about 10 μm or less, about 8 μm or less).
The rows of the first material can be periodically spaced in a direction orthogonal to the first direction. The center of each adjacent row of the first material can be separated by a distance of about 400 nm or less (e.g., about 300 nm or less, about 200 nm or less, about 150 nm or less). In some embodiments, the center of each adjacent row of the first material is separated by a distance in a range from about 70 nm to about 300 nm.
The row of the first material can have a rectangular, trapezoidal, oval, or convex hull profile.
The first and second directions can be non-parallel. For example, the first and second directions can be substantially orthogonal to each other.
The layer can be form-birefringent for radiation at wavelength λ and n1 can correspond to either the ordinary or extraordinary refractive index of the layer. n3 can be approximately equal to n1.
The first material can be a dielectric material. In some embodiments, the first material can include at least one material selected from a group that includes SiO2, SiNx, Si, Al2O3, ZrO2, Ta2O5, TiO2, HfO2, Nb2O5, and MgF2. The first material can be a nanolaminate material.
The second material can be a dielectric material. In some embodiments, the second material includes at least one material selected from a group consisting of SiO2, SiNx, Si, Al2O3, ZrO2, Ta2O5, TiO2, HfO2, Nb2O5, and MgF2. The second material can be a nanolaminate material.
The surface including the trenches can have a rectangular, trapezoidal, oval, or convex hull profile.
λ can be in a range from about 150 nm to about 5,000 nm (e.g., from about 400 nm to about 700 nm, from about 1,200 nm to about 1,700 nm).
The layer can include a plurality of rows of a third material extending along the first direction, the rows of the third material alternating with the rows of the first material and the first and third materials being different. The third material can have a refractive index at λ that is different from n1. The third material can be a dielectric material.
The first and second polarization states can be linear polarization states.
The layer can have a thickness, t, that is about 1 μm or less (e.g., e.g., about 800 nm or less, about 600 nm or less, about 500 nm or less, about 400 nm or less). The trenches can have a depth, d, less than a thickness, t, of the layer.
The article can include a substrate that supports the layer. The substrate can be a planar substrate. The substrate can include an inorganic glass material. In some embodiments, the substrate is substantially transparent for radiation having wavelength λ.
The article can include an anti-reflection film supported by the substrate.
In another aspect, the invention features apparatus that include a first element comprising an article and a second element comprising an article wherein the elements are configured so that the apparatus splits an incident beam at wavelength λ into a pair of beams that emerge from the apparatus spatially separated from one another and propagating along substantially parallel paths. The pair of beams can be substantially polarized orthogonal to each other.
In general, in a further aspect, the invention features articles that include a layer including a plurality of rows of a composite material alternating with rows of a second material, the rows of the composite material and the rows of the second material being arranged to form a diffraction grating, where the diffraction grating has a period greater than a wavelength λ and the composite material is form-birefringent for radiation at wavelength λ.
Embodiments of the articles can include one or more of the following features and/or features of other aspects. For example, the second material can have a refractive index at λ approximately equal to either the ordinary or extraordinary refractive index of the composite material at λ.
In general, in another aspect, the invention features articles that include a polarizing beam splitter including a layer of a material that is form birefringent for radiation having a wavelength λ, wherein the polarizing beam splitter is configured so that for radiation having wavelength λ incident on the polarizing beam splitter along a path, the polarizing beam splitter transmits about 50% or more of the incident radiation having a first polarization state along a first direction and transmits about 50% or more of the incident radiation having a second polarization state along one or more directions non-parallel to the first direction, where the first and second polarization states are orthogonal.
Embodiments of the articles can include one or more of the following features and/or features of other aspects.
The polarizing beam splitter can transmit about 80% or more of the incident radiation having the first polarization state along the first direction. The polarizing beam splitter can transmit about 80% or more of the incident radiation having the second polarization state along the one or more directions non-parallel to the first direction. The polarizing beam splitter can transmit about 80% or more of the incident radiation having the second polarization state along a single of the directions non-parallel to the first direction.
The layer of the material can be in the form of a diffraction grating for radiation having wavelength λ. The first direction can correspond to zeroth order diffraction of the diffraction grating. The one or more directions non-parallel to the first direction can correspond to non-zero order diffraction of the diffraction grating.
Among other advantages, embodiments can provide wire-grid polarizers that have reduced specular reflectivity of block state radiation. The reduction in specular reflectivity of block state radiation can be achieved without substantially affecting the polarizer's transmission of the pass state radiation. In some embodiments, the wire-grid polarizers can operate in the visible portion of the electromagnetic spectrum. The wire-grid polarizers can be broadband polarizers.
Embodiments also include transmissive polarizing beam splitters formed using a form-birefringent medium. The polarizing beam splitters operate by transmitting orthogonal polarization components of an incident beam along different paths.
Embodiments such as wire-grid polarizers and/or transmissive polarizing beam splitters can have a relatively compact form-factor, being formed as thin films on a substrate. Embodiments include monolithic layers having diffractive and/or sub-wavelength structure, providing mechanically robust devices. Furthermore, additional layers can be formed over the monolithic layers, providing compound devices. Large numbers of small components may be efficiently manufactured by, e.g., forming a large area device and dicing it into many smaller devices.
Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Other features and advantages of the invention will be apparent from the description and drawings, and from the claims.
FIGS. 11A-I show steps in the manufacture of a sub-wavelength structured layer.
Like reference symbols in the various drawings indicate like elements.
The disclosure generally relates to articles that are sensitive to and can be used to control properties of electromagnetic (EM) radiation, such as the polarization and/or direction of beams incident on the articles. Examples of EM radiation include the visible region of the EM spectrum, the infrared region, the microwave region, the radiowave region, and/or other regions. In some embodiments, the articles can be sensitive to and/or can be used to control the properties of incident radiation in more than one region of the EM spectrum. In general, the articles can be used to control properties of incident radiation at one or more wavelengths (including a wavelength λ), and typically include structural features that diffract light at λ, as well as sub-wavelength structural features. Generally, the structural features that diffract light at λ are of similar size or larger than λ. In embodiments, surfaces with diffractive structural features may be covered with a material that reduces the optical effects of the diffractive structural features for at least one polarization state of incident radiation at λ.
Referring to
Diffractive layer 16 includes alternating portions 15 and 18 which form a diffractive structure for radiation at λ. Portions 20 and 22 extend from layer 14 into portions 15 of layer 16. Thus, portions 15 also have sub-wavelength structure and are anisotropic for incident radiation at λ. Portions 18, on the other hand, are formed from a material that is isotropic at λ and also transmissive at λ. As a result, optical properties (e.g., refractive index) of portions 18 are the same for pass and block state radiation.
The composition of portions 15 and 18 are selected so that the refractive index of portions 18, n18, is substantially the same as the refractive index of portions 15 for pass state radiation at λ (referred to as nP), but differs from the refractive index of portions 15 for block state radiation at λ (referred to as nB). As a result, the super-wavelength structure of layer 16 does not substantially affect incident pass state radiation, but does affect incident block state radiation at λ.
Generally, reflective polarizer 10 blocks a relatively large amount of incident radiation at λ having the block state polarization by reflecting and/or absorbing block state radiation. For example, reflective polarizer 10 can reflect about 80% or more (e.g., about 90% or more, about 95% or more, about 98% or more, about 99% or more) of incident radiation at λ having the block polarization state. When reflective polarizer 10 reflects a relatively large amount block state radiation, absorption of the block state radiation is relatively low. For example, block state absorption by polarizer 10 can be about 10% or less (e.g., about 5% or less, about 4% or less, about 3% or less, about 2% or less, about 1% or less).
Due to the diffractive structure, layer 16 substantially diffracts and/or scatters reflected block state radiation. This can result in a substantially diffuse reflection of block state radiation with reflective polarizer 10 specularly reflecting a relatively small amount of block state radiation at λ. For example, reflective polarizer can specularly reflect about 20% or less (e.g., about 15% or less, about 10% or less, about 8% or less, about 5% or less, about 3% or less, about 2% or less, about 1% or less) of the block state radiation.
In certain embodiments, reflective polarizer 10 can absorb a relatively large amount of the incident radiation at λ having the block polarization state. For example, reflective polarizer 10 can absorb about 30% or more (e.g., about 40% or more, about 50% or more) of the block state polarization. High absorption of block state radiation can occur, for example, where the material forming portions 22 has relatively high absorption at λ (e.g., absorbs about 40% or more incident radiation at λ, about 50% or more incident radiation at λ).
In some embodiments, reflective polarizer 10 polarizes radiation at more than one wavelength, such as for a continuous band of wavelengths. For example, reflective polarizer 10 can polarize radiation for a band of wavelengths about 50 nm or more in width (e.g., about 100 nm wide or more, about 200 nm wide or more, about 300 nm wide or more). In certain embodiments, reflective polarizer 10 polarizes incident radiation across substantially the entire visible portion of the electromagnetic spectrum (e.g., for λ from about 400 nm to about 700 nm). Alternatively, reflective polarizer 10 can polarize radiation for substantially the entire near infrared portion of the electromagnetic spectrum (e.g., from about 700 nm to 2,000 nm). In certain embodiments, reflective polarizer 100 polarizes radiation for substantially the entire visible and near infrared portions of the electromagnetic spectrum (e.g., from about 400 nm to about 2,000 nm).
Furthermore, while reflective polarizer 10 has been described as polarizing incident radiation propagating parallel to the z-axis (e.g., normally incident on the surface of polarizer 10), polarizer 10 can polarize radiation at λ for radiation at non-normal angles of incidence (i.e., for radiation incident on reflective polarizer 10 propagating at an angle θ with respect to the z-axis, where θ is non-zero). In certain embodiments, reflective polarizer 10 can polarize radiation incident at more than one angle of incidence, such as for a range of incident angles. For example, in some embodiments, reflective polarizer 10 polarizes radiation incident within a cone of incident angles for θ of about 10° or more (e.g., about 15° or more, about 20° or more). Note that for non-normal incidence, the pass state corresponds to radiation polarized parallel to the x-z plane, while the block state corresponds to radiation polarized orthogonal to the x-z plane.
Reflective polarizer 10 can have a relatively high extinction ratio, ET, for transmitted radiation at λ. For transmitted radiation, the extinction ratio refers to the ratio of pass state intensity at λ to the block state intensity transmitted by reflective polarizer 10. ET can be, for example, about 30:1 or more (e.g., about 50:1 or more, about 100:1 or more, about 150:1 or more) at λ. In certain embodiments where block state transmission is relatively low, ET can be very high, such as about 1000:1 or more.
Turning now to the structure of reflective polarizer 10, portions 20 and 22 extend along the y-direction, forming a periodic structure consisting of a series of alternating rows of materials that are substantially transmissive at λ and materials that are substantially not transmissive at λ. The rows corresponding to portions 20 have a width Λ20 in the x-direction, while the rows corresponding to portions 22 have a width Λ22 in the x-direction. The sub-wavelength grating period, Λ, equal to Λ20+Λ22, is smaller than λ and as a result radiation of wavelength λ interacts with sub-wavelength grating layer 14 without encountering significant high-order diffraction that can occur when radiation interacts with periodic structures. For reflective polarizers that operate in the visible portion of the EM spectrum, grating layer 14 is an example of a nanostructured layer.
In general, Λ20 can be about 0.2 λ or less (e.g., about 0.1 λ or less, about 0.05 λ or less, about 0.04 λ or less, about 0.03 λ or less, about 0.02 λ or less, 0.01 λ or less). For example, in some embodiments, Λ20 is about 200 nm or less (e.g., about 150 nm or less, about 100 nm or less, about 80 nm or less, about 70 nm or less, about 60 nm or less, about 50 nm or less, about 40 nm or less, about 30 nm or less). Similarly, Λ22 can be about 0.2 λ or less (e.g., about 0.1 λ or less, about 0.05 λ or less, about 0.04 λ or less, about 0.03 λ or less, about 0.02 λ or less, 0.01 λ or less). For example, in some embodiments, Λ22 is about 200 nm or less (e.g., about 150 nm or less, about 100 nm or less, about 80 nm or less, about 70 nm or less, about 60 nm or less, about 50 nm or less, about 40 nm or less, about 30 nm or less). Λ20 and Λ22 can be the same as each other or different.
In general, Λ is less than λ, such as about 0.5% or less (e.g., about 0.3 λ or less, about 0.2 λ or less, about 0.1 λ or less, about 0.08 λ or less, about 0.05 λ or less, about 0.04 λ or less, about 0.03 λ or less, about 0.02 λ or less, 0.01 λ or less). In some embodiments, A is about 500 nm or less (e.g., about 300 nm or less, about 200 nm or less, about 150 nm or less, about 130 nm or less, about 100 nm or less, about 80 nm or less, about 60 nm or less, about 50 nm or less, about 40 nm or less).
The duty cycle of sub-wavelength grating layer 14, given by the ratio Λ22/Λ, can vary as desired. In some embodiments, the duty cycle is about 50% or less (e.g., about 40% or less, about 30% or less, about 20% or less). Alternatively, in certain embodiments, the duty cycle is more than about 50% (e.g., about 60% or more, about 70% or more, about 80% or more).
The thickness, h14, of sub-wavelength grating layer 14 measured along the z-axis can vary as desired. In general, the thickness of sub-wavelength layer 14 is selected based on the desired optical properties of sub-wavelength grating layer 14 at λ, and the effect of layer thickness on various optical properties is discussed below. In some embodiments, h14 can be about 50 nm or more (e.g., about 75 nm or more, about 100 nm or more, about 125 nm or more, about 150 nm or more, about 200 nm or more, about 250 nm or more, about 300 nm or more, about 400 nm or more, about 500 nm or more, about 1,000 or more, such as about 2,000 nm).
The aspect ratio of grating layer thickness, h14, to Λ20 and/or d to Λ22 can be relatively high. For example h14:Λ111 and/or h14:Λ112 can be about 2:1 or more (e.g., about 3:1 or more, about 4:1 or more, about 5:1 or more, about 8:1 or more, about 10:1 or more).
Regarding the specific structure of diffractive layer 16, portions 15 and 18 also extend along the y-direction, forming a periodic structure consisting of a series of alternating rows, where adjacent rows have different optical properties. As discussed above, portions 18 are formed from a material that has a refractive index, n18, substantially equal to the refractive index of portions 15 for the pass state radiation at λ. |n18-nP| can be, for example, about 0.001 or less (e.g., about 0.0001 or less, about 0.0002 or less, about 0.0001 or less, about 0.00005 or less, about 0.00001 or less).
More generally, in embodiments, |n18-nP| can be about 0.03 or less (e.g., about 0.2 or less, about 0.1 or less, about 0.05 or less, about 0.01 or less).
The rows corresponding to portions 15 have a width W15 in the x-direction, while the rows corresponding to portions 18 have a width W18 in the x-direction. The diffractive grating period, W, equal to W15+W18, is on the order of or larger than about λ and as a result layer 16 diffracts incident block state radiation of wavelength λ.
In general, W15 is about 0.2 λ or more (e.g., about 0.5 λ or more, about λ or more, about 2 λ or more, about 5 λ or more). In some embodiments, W15 is about 200 nm or more (e.g., about 400 nm or more, about 500 m or more, about 750 nm or more, about 1,000 nm or more, about 1,500 nm or more, about 2,000 nm or more). Similarly, W18 can be about 0.2 λ or more (e.g., about 0.5 λ or more, about λ or more, about 2 λ or more, about 5 λ or more). In some embodiments, W18 is about 200 nm or more (e.g., about 400 nm or more, about 500 nm or more, about 750 nm or more, about 1,000 mm or more, about 1,500 nm or more, about 2,000 nm or more). W15 and W18 can be the same as each other or different.
In general, W is on the order of or larger than about λ, such as about 1.5 λ or more (e.g., about 2 λ or more, about 3 λ or more, about 4 λ or more, about 5 λ or more, about 10 λ or more, about 20 λ or more, about 30 λ). In embodiments, Λ is about 400 nm or more (e.g., about 500 nm or more, about 600 nm or more, about 750 nm or more, about 1,000 nm or more, about 1,500 nm or more, about 2,000 nm or more, about 3,000 nm or more, about 4,000 nm or more, about 5,000 m or more, about 6,000 nm or more, about 8,000 nm or more, about 10,000 nm or more, about 15,000 or more).
The duty cycle of diffractive layer, given by the ratio W15/W, can vary. In some embodiments, the duty cycle is less than about 50% (e.g., about 40% or less, about 30% or less, about 20% or less). Alternatively, in certain embodiments, the duty cycle is more than about 50% (e.g., about 60% or more, about 70% or more, about 80% or more).
The thickness, h16, of diffractive layer 16 measured along the z-axis can vary as desired. Generally, the thickness of diffractive layer 16 is selected based on the desired optical properties of diffractive layer 16 at λ. In some embodiments, h16 can be about 50 nm or more (e.g., about 75 nm or more, about 100 nm or more, about 125 nm or more, about 150 nm or more, about 200 nm or more, about 250 nm or more, about 300 nm or more, about 400 nm or more, about 500 nm or more, about 1,000 or more, such as about 2,000 nm).
The aspect ratio of diffractive layer thickness, h16, to W15 can be relatively high. For example h16/W15 can be about 2:1 or more (e.g., about 3:1 or more, about 4:1 or more, about 5:1 or more, about 8:1 or more, about 10:1 or more).
Together, sub-wavelength grating layer 14 and diffractive layer 16 have a combined thickness that is relatively thin. For example, the combined thickness of layers 14 and 16 may be about 5 μm or less (e.g., about 2 μm or less, about 1 μm or less, about 500 nm or less).
The composition of portions 20 and 22 are selected so that polarizer 10 has desired polarizing properties, while the composition of portions 18 are selected so that the portions have a desired refractive index at λ (e.g., so that n18 is substantially the same as nP).
The compositions of portions 18, 20, and 22 are also selected based compatibility with the processes used to manufacture polarizer 10 and their compatibility with the materials used to form other portions of polarizer 10.
Portions 18, 20, and/or 22 can include inorganic and/or organic materials. Examples of inorganic materials include metals, semiconductors, and inorganic dielectric materials (e.g., glass). Examples of organic materials include organic polymers. As discussed previously, in some embodiments, portions 18 and 20 are formed from materials that are substantially transmissive at λ and can include one or more dielectric materials, such as dielectric oxides (e.g., metal oxides), fluorides (e.g., metal fluorides), sulphides, and/or nitrides (e.g., metal nitrides). Examples of oxides include SiO2, Al2O3, Nb2O5, TiO2, ZrO2, HfO2, SnO2, ZnO, ErO2, Sc2O3, and Ta2O5. Examples of fluorides include MgF2. Other examples include ZnS, SiNx, SiOyNx, AlN, TiN, and HfN.
Portions 22 are formed from a material that is substantially non-transmissive at λ. In certain embodiments, portions 22 include a metal, such as Au, Ag, Al, Cr, and Cu. Portions 22 can be formed from more than one metal (e.g., portions 22 can be formed from a metal alloy).
A one millimeter thick sample of a substantially transmissive material transmits about 80% or more (e.g., about 90% or more, about 95% or more, about 98% or more, about 99% or more) of radiation at λ normally incident thereon. Examples of substantially transmissive materials for visible and infrared wavelengths include various dielectric materials, such as SiO2.
A one millimeter thick sample of a substantially non-transmissive material transmits about 1% or less (e.g., about 0.5% or less, about 0.1% or less, about 0.01% or less, about 0.001% or less) of radiation at λ normally incident thereon. Substantially non-transmissive materials include materials that reflect and/or absorb a relatively large amount of radiation at λ. Examples of non-transmissive materials for visible and infrared wavelengths include various metals, such as Al, Au, Ag, Cr, and Cu. Al and Ag are examples of materials that have high reflectance across the visible portion of the electromagnetic spectrum, while Au and Cu have high reflectance for the yellow and red portions of the spectrum, while absorbing relatively more of the shorter visible wavelengths (e.g., the green and blue wavelengths).
In some embodiments, the compositions of portions 18, 20 and/or 22 have a relatively low absorption at λ, so that sub-wavelength grating layer 14 has a relatively low absorption at λ. For example, sub-wavelength grating layer 14 can absorb about 10% or less (e.g., about 5% or less, about 3% or less, about 2% or less, about 1% or less) of radiation at λ incident on reflective polarizer 10 propagating along axis 101.
Portions 18, 20 and/or 22 can be formed from a single material or from multiple different materials. In some embodiments, one or more of portions 18, 20, and 22 are formed from a nanolaminate material, which refers to materials that are composed of layers of at least two different materials and the layers of at least one of the materials are extremely thin (e.g., between one and about 10 monolayers thick). Optically, nanolaminate materials have a locally homogeneous index of refraction that depends on the refractive index of its constituent materials. Varying the amount of each constituent material can vary the refractive index of a nanolaminate. Examples of nanolaminate portions include portions composed of SiO2 monolayers and TiO2 monolayers, SiO2 monolayers and Ta2O5 monolayers, or Al2O3 monolayers and TiO2 monolayers
Generally, portions 18, 20. and/or 22 can include crystalline, semi-crystalline, and/or amorphous materials. Typically, an amorphous material is optically isotropic and may transmit radiation better than materials that are partially or mostly crystalline. As an example, in some embodiments, both portions 18 and/or 20 are formed from amorphous materials, such as amorphous dielectric materials (e.g., amorphous TiO2 or SiO2), while portions 22 are formed from a crystalline or semi-crystalline material (e.g., crystalline or semi-crystalline Si).
In general, the structure and composition of sub-wavelength grating layer 14 and diffractive layer 16 are selected based on the desired optical performance of reflective polarizer 10. Structural parameters that affect the optical performance of linear polarizer 10 include, for example, h14, h16, Λ, Λ111, and Λ112, W, W15, W18. Typically, varying a single parameter affects multiple different performance parameters. For example, the overall transmission of the polarizer at λ can be varied by changing the relative thickness of portions formed from a transmissive material, e.g., Λ20, to the thickness or portions formed from a non-transmissive material, e.g., Λ22. However, while a higher ratio Λ20/Λ22 may provide relatively higher transmission of the pass state polarization, it also results in higher transmission of the block state polarization, which decreases ET. As a result, optimizing the polarizer's performance involves trade offs between different performance parameters and the polarizer's structure and composition is varied depending on the desired performance for the polarizer's end use application.
In general, to effectively polarize radiation at wavelength λ, the period Λ of the sub-wavelength grating layer should be shorter than λ, such as about λ/4 or less (e.g., about λ/6 or less, about λ/10 or less). Moreover, for effective broadband performance, Λ should be shorter than the shortest wavelength in the wavelength band. For a broadband polarizer in the visible spectrum, for example, Λ should be less than about 300 nm, such as about 200 nm or less (e.g., about 150 nm or less, about 130 nm or less, about 110 nm or less, about 100 nm or less, about 90 nm or less, about 80 nm or less). Furthermore, to effectively reduce specular reflection of the block state, the period W of the diffractive layer should be in a range from about λ to about 20λ (e.g., from about λ to about 10λ).
Typically, the reflectance of sub-wavelength grating layer 14 for block state radiation can be increased by forming at least some of the portions from a material having a relatively high reflectance at λ. The reflectance of the polarize can also be increased by increasing the relative size of the portions of reflective material relative to the portions of transmissive material. In other words, a larger duty cycle can provide increased reflectance at λ. However, this can also reduce pass state transmission. Conversely, the transmission of sub-wavelength grating layer 14 can be increased by reducing the duty cycle. Typically, the duty cycle is in the range of about 20% to about 80%.
In some embodiments, ET can be increased by increasing the depth of sub-wavelength grating layer 14, h14. Increasing h14 can provide increased ET without substantially reducing the amount of pass state transmission.
Furthermore, the extent to which block state radiation is specularly or diffusely reflected can be varied by modifying the thickness and/or duty cycle of diffractive layer 16.
Theoretical models can be used to assess the performance of the sub-wavelength and/or diffractive layers and to determine structure and composition that will provide desired optical performance. For example, the performance of sub-wavelength grating polarizers can be modeled using coupled-wave analysis as described by J. J. Kuta et al. in the article entitled “Coupled-wave analysis of lamellar metal transmission gratings for the visible and the infrared,” J. Opt. Soc. Am. A, Vol. 12, No. 5, pp. 1118-1127 (1995). Theory relating to the performance of diffractive gratings is discussed, for example, in Diffraction Gratings and Applications, by E. G Loewen and Evgeny Popov, Marcel Dekker, Inc., New York (1997).
Referring now to substrate 12, in general, the substrate provides mechanical support to polarizer 10. Substrate 12 can be formed from any material compatible with the manufacturing processes used to produce retarder 12 that can support the other layers. In certain embodiments, substrate 12 is transparent at wavelength λ, transmitting substantially all radiation impinging thereon at wavelength λ (e.g., transmitting about 90% or more, about 95% or more, about 97% or more, about 99% or more, about 99.5% or more). In certain embodiments, substrate 12 is formed from a glass, such as BK7 (available from Abrisa Corporation), borosilicate glass (e.g., pyrex available from Corning), aluminosilicate glass (e.g., C1737 available from Corning), or quartz/fused silica. In some embodiments, substrate 12 can be formed from a crystalline material, such as a non-linear optical crystal (e.g., LiNbO3 or a magneto-optical rotator, such as garnett) or a crystalline (or semicrystalline) semiconductor (e.g., Si, InP, or GaAs). Substrate 12 can also be formed from an organic material, such as a polymer (e.g., a plastic).
While reflective polarizer 10 substantially blocks one polarization state of incident light, certain articles that include sub-wavelength and diffractive structure substantially transmit both polarization states. Referring to
The substantially transmissive material forming portions 22 has a different refractive index at λ from the material forming portions 20. For example, |n20-n22| can be about 0.01 or more (e.g., about 0.02 or more, about 0.05 or more, about 0.1 or more, about 0.15 or more, about 0.2 or more, about 0.25 or more, about 0.3 or more), wherein n20 and n22 are the refractive indices of the materials forming portions 20 and 22, respectively.
As a result of the sub-wavelength structure, layer 14 is form-birefringent for radiation at λ with the radiation polarized in the x-z plane having a different refractive index from radiation polarized perpendicular to the x-z plane. As for reflective polarizer 10, portions 18 are formed from a material having a refractive index approximately equal to the refractive index of portions 15 for radiation polarized perpendicular to the x-z plane. Thus, the diffractive structure of layer 16 diffracts radiation polarized perpendicular to the x-z plane into non-zero order diffracted states (depicted as 204 in
In general, the diffracted state radiation can be diffracted into one or more non-zero order diffracted states (e.g., into the ±1, ±2, ±3 . . . diffracted states). The angular dispersion of the non-zero order diffracted states, corresponding to an angle ωi for each state (where i corresponds to the diffraction order and=±1, ±2, ±3 . . . ), can vary depending on the structure and composition of the diffractive layer. In some embodiments, diffracted state radiation can be dispersed into relatively high angles. For example, ωi can be about 20° or more (e.g., about 30° or more, about 45° or more). Alternatively, in certain embodiments, ωi can be relatively small (e.g., about 10° or less, about 5° or less, such as about 3°).
In some embodiments, transmissive polarizer 200 directs a relatively large amount of the incident diffracted state polarization in a single direction (e.g., into the +1 or −1 diffracted order). For example, transmissive polarizer 200 can direct about 50% or more (e.g., about 60% or more, about 70% or more, about 80% or more, about 90% or more, about 95% or more, about 98% or more, about 99% or more) of the diffracted state polarization in a single direction. In some embodiments, the structure of transmissive polarizer 200 is arranged so that the polarizer is at blazing conditions at the wavelength λ. Blazing is discussed, for example, by D. A. Buralli and G. M. Morris in the article, “Effects of diffraction efficiency on the modulation transfer function of diffractive lenses,” Appl. Opt. 31, 4389-4396, (1992).
While nP is substantially the same as n18 in the reflective polarizer and transmissive polarizer described above, in certain embodiments nP and n18 need not be the same. For example, in some embodiments diffraction of pass state radiation may be desired, in which case portions 18 can be formed from a material that has a different refractive index than nP. In some embodiments of reflective polarizers, specular reflection of block state radiation in addition to diffraction of pass state radiation may be desired. Accordingly, portions 18 can be formed from a material that has a refractive index substantially equal to nB at λ.
Furthermore, while the material used to form portions 18 is optically isotropic for reflective polarizer 10 described above, anisotropic materials can also be used. For example, in some embodiments, portions 18 can be formed from materials that are birefringent at λ. Examples include using form birefringent materials (e.g., materials with sub-wavelength structure), liquid crystalline materials, and/or anisotropic crystalline materials).
In polarizers 10 and 200, elongated rows 20 and 22 have a rectangular profile. More generally, these rows can have profiles with different shapes. For example, in some embodiments, elongated rows 20 and 22 can have a trapezoidal, triangular (also referred to as “saw-tooth”), or curved (e.g., oval, convex hull or sinusoidal) profile.
Similarly, the diffractive layer can also have a non-rectangular profile. For example, in some embodiments, diffractive layer 16 can have a trapezoidal, triangular, or curved (e.g., oval, convex hull or sinusoidal) profile. An example of a transmission-only polarizer having a diffractive layer with a triangular profile is shown in
In the polarizers described above, the rows forming the diffractive and sub-wavelength structure extend parallel to each other. In general, however, the relative orientation of the sub-wavelength and diffractive structures can vary as desired. In some embodiments, for example, the rows forming the diffractive and sub-wavelength structure can extend along orthogonal directions. For example, referring to
Furthermore, sub-wavelength grating layers can include more than two alternating portions. For example, layer 314 includes a periodic structure that includes three repeating portions 320, 321, and 322. In general, sub-wavelength grating layers can include periodic structures that have more than three portions (e.g., four repeating portions, five repeating portions, six repeating portions). For example, one or more portions may be included for enhancing adhesion between the other portions. For example, Cr portions may be used to enhance adhesion of a structure that includes Au portions and SiO2 portions. As another example, one or more portions may be used to adjust the dispersion properties of the grating. For example, portions of dielectric materials with different dispersion properties can be used to modify the dispersion properties of the grating.
In some embodiments, the diffractive layer may be periodic in two dimensions. For example,
In some embodiments, the boundaries between different portions in the diffractive structured layer may be curved. For example, referring to
While sub-wavelength grating layer 14 in polarizers 10 and 200 is periodic in the x-direction with period Λ, more generally, other structures can also be used. For example, the period of the sub-wavelength grating layer may vary in different portions of the layer (e.g., the grating can be a chirped grating). Alternatively, the spacing between adjacent portions in layer 14 can vary randomly.
Similarly, diffractive layer 16 can have a varying period (e.g., a chirped grating structure). In some embodiments, portions 18 can be randomly distributed through the layer. For example, portions 18 can be distributed so that layer 16 substantially scatters, rather than diffracts, incident block/diffracted state radiation.
While the polarizers described above include a sub-wavelength grating layer in addition to a layer that has both sub-wavelength and diffractive structures, in some embodiments, polarizers can be formed without the sub-wavelength layer (e.g., without layer 14 in polarizers 10 and 200). Moreover, in general, embodiments of polarizers can include one or more layers in addition to the sub-wavelength and diffractive layers. For example, referring to
Etch stop layer 720 is formed from a material resistant to etching processes used to etch a material(s) from which the sub-wavelength layer is formed (see discussion below). The material(s) forming etch stop layer 720 should also be compatible with substrate 712 and with the materials forming sub-wavelength grating layer 714. Examples of materials that can form etch stop layer 720 include HfO2, SiO2, Ta2O5, TiO2, SiNx, or metals (e.g., Cr, Ti, Ni).
The thickness of etch stop layer 720 can be varied as desired. Typically, etch stop layer 720 is sufficiently thick to prevent significant etching of substrate 712, but should not be so thick as to adversely impact the optical performance of polarizer 700 significantly. In some embodiments, etch stop layer is about 500 nm or less (e.g., about 250 nm or less, about 100 nm or less, about 75 nm or less, about 50 nm or less, about 40 nm or less, about 30 nm or less, about 20 nm or less).
Cap layer 722 is typically formed from the same material(s) as portions 718 and provides a surface 721 onto which additional layers, such as the layers forming antireflection film 724, can be deposited. Surface 721 can be substantially planar.
Antireflection films 724 and 726 can reduce the reflectance of pass state radiation of wavelength λ impinging on and exiting polarizer 700. Antireflection film 724 and 726 generally include one or more layers of different refractive index. As an example, one or both of antireflection films 724 and 726 can be formed from four alternating high and low index layers. The high index layers can be formed from TiO2 or Ta2O5 and the low index layers can be formed from SiO2 or MgF2. The antireflection films can be broadband antireflection films or narrowband antireflection films.
In some embodiments, polarizer 700 has a reflectance of about 20% or less (e.g., about 10% or less, about 5% or less, about 2% or less, about 1% or less, about 0.5% or less, about 0.2% or less, about 0.1% or less, about 0.02% or less) of radiation impinging thereon at wavelength λ for pass state polarization.
Referring to
While the rows forming the sub-wavelength structure in the sub-wavelength layer in polarizers 10 and 200 are continuous with the sub-wavelength structure in the diffractive layer, other structures are also possible. In some embodiments, such as in polarizer 800, the sub-wavelength structure in sub-wavelength layer is discontinuous with the sub-wavelength structure in the diffractive layer. Moreover, the sub-wavelength structure in the diffractive layer can have a different orientation, period, duty cycle, and/or composition than the sub-wavelength structure in the sub-wavelength grating layer.
For example, referring to
In some embodiments, polarizers can include more than one diffractive layer. For example, referring to
The relative spatial arrangement of the portions forming diffractive layers 1016 and 1026 may vary as desired. For example, as shown in
Turning now to the fabrication of polarizers, in general, a variety of techniques can be used to form such structures. In some embodiments, a sub-wavelength grating layer can be prepared initially, and subsequently a diffractive grating structure can be formed in the sub-wavelength grating layer by etching trenches into the surface of the sub-wavelength grating layer. Material can be deposited onto the diffractive grating structure to fill in the trenches corresponding to portions 18. FIGS. 11A-I show different phases of an example of a preparation process for a sub-wavelength structured layer. The procedures may be repeated, albeit using a mask corresponding to a diffractive grating structure, to form the diffractive grating structure in the sub-wavelength grating layer.
Referring to
Referring to
Referring to
In certain embodiments intermediate layer 1210 is formed from a metal, such as aluminum. Metal layers can be formed by evaporation (e.g., thermal evaporation), for example. In embodiments, metal layers are formed by evaporating the metal onto surface 1131 at relatively fast rates, such as about 5 Angstroms per second or more (e.g., about 10 Angstroms per second or more, about 12 Angstroms per second or more, about 15 Angstroms per second or more), for example. Fast deposition rates can improve the purity of the metal layer by reducing the amount of impurities (such as oxygen) that can incorporate into the film as it is deposited.
In some embodiments, the substrate can be cooled prior to and/or during metal deposition. For example, the substrate can be cooled to about 0° C. or less (e.g., about −20° C. or less, about −50° C. or less). Cooling the substrate can increase the size of metal grains formed on the substrate during deposition. Without wishing to be bound by theory, it is believed that lower substrate temperature can reduce the kinetic energy of the metal clusters that tend to prevent the clusters from forming larger grains. Larger metal grain size may be beneficial by providing improved optical characteristics, such as higher reflectance compared to metal layers composed of smaller grains. Moreover, grating layers having short periods can be more easily formed from metal layers having larger grain sizes.
Evaporation can also be performed under relatively high vacuums, such as vacuums of about 10−6 Torr or less (e.g., about 5×10−7 Torr or less, about 2×10−7 Torr or less). High vacuum deposition can also improve the purity of the metal layer by reducing the amount of impurities (such as oxygen) present in the vicinity of the deposited layer as it is formed, thereby reducing the amount of impurities that are incorporated in the film.
In some embodiments, substrate 1140 is positioned relatively far from the source of the deposited metal in the deposition chamber (e.g., about 12 inches or more, about 15 inches or more, about 20 inches or more, about 24 inches or more). This can increase the uniformity of the deposited material across surface 1131 relative to systems in which the source is positioned closer to the substrate.
In general, the thickness of intermediate layer 1210 is selected based on the desired thickness of sub-wavelength structured layer 1110.
Intermediate layer 1210 is processed to provide portions 1112 of grating layer 1110 using lithographic techniques. For example, portions 1112 can be formed from intermediate layer 1210 using electron beam lithography or photolithography (e.g., using a photomask or using holographic techniques).
In some embodiments, portions 1112 are formed using nano-imprint lithography. Referring to
Referring to
In some embodiments, an etch mask is formed on the surface of intermediate layer 1210 prior to depositing resist layer 1220. Etch masks are provided to prevent etching of layer 1210 by the etchant used to remove portions of the resist layer. Certain oxide materials (e.g., SiO2) are examples of materials suitable for masking intermediate layer 1210 from certain etchants (e.g., reactive ion etchants). For example, a layer of SiO2 can be used to mask a metal layer from a chlorine-based reactive ion etchant. Etch mask layers can be relatively thin (e.g., about 100 nm or less, 50 nm or less, such as in a range from about 20 nm to about 25 nm).
Etching can be performed using commercially-available equipment, such as a TCP® 9600DFM (available from Lam Research, Fremont, Calif.).
More than one etch step can be used. For example, in some embodiments, a two-step etch is used. An example of a two step etching process for Al is as follows. The first etch is performed using a gas mixture composed of BCl3 (e.g., at about 90 sccm), Cl2 (e.g., at about 30 sccm), N2 (e.g., at about 10 sccm), He (e.g., at about 10 Torr) for backside cooling. The radio frequency (RF) power is about 500 W and the chamber pressure about 5 mtorr. The second etch is performed using Cl2 (e.g., at about 56 sccm), HCl (e.g., at about 14 sccm), N2 (e.g., at about 35 sccm), H2 (e.g., at about 10 Torr) for back side cooling. The RF power is about 300 W and the chamber pressure is about 7 mtorr. For a typical 150 nm deep aluminum etching, the first etching time can be about 4 seconds and the second etching time can be about 15 seconds.
In certain embodiments, a post-etching passivation step can be employed to provide a passivation layer on the surface of the etched layer. Post-etching passivation can be done, for example, by exposing the etched layer to an oxidant to produce an oxide layer at the surface of the etched layer. Post-etch passivation of an etched Al layer, for example, can be performed by exposing the etched layer to water vapor at an elevated temperature (e.g., at about 200° C. or more, about 250° C. or more, about 300° C. or more).
Referring to
In some embodiments, cap layer 1120 can be removed prior to forming the diffractive layer. Cap layer can be planarized or removed by polishing (e.g., chemical mechanical polishing), ion milling, or etching the surface of the cap layer. Once the cap layer is removed, the diffractive grating layer can be formed by etching a diffractive structure into sub-wavelength structured layer 1110, and filling the trenches of diffractive structure with an isotropic material. Alternatively, a second sub-wavelength structured layer can be formed the exposed surface of layer 1110 or on the surface of cap layer 1120. The diffractive layer can be formed in the second sub-wavelength structured layer as described.
Methods can include other processes in addition to those described. For example, in some embodiments, directional deposition process can be used to deposited one or more materials onto a trench wall in an etched material. Directional deposition can be achieved by evaporation (e.g., electron beam or thermal evaporation) or sputtering while orienting the substrate at a non-normal angle with respect to the deposition material source. Material deposited on top of trench walls can be removed in a subsequent step (e.g., using etching or chemical mechanical polishing).
In some embodiments, multiple polarizers can be prepared simultaneously by forming a relatively a large structure comprising sub-wavelength structures and diffractive structures on a single substrate, which is then diced into individual units. For example, a structure can be formed on a substrate that has a single-side surface area about 10 square inches or more (e.g., a circular substrate with a four inch, six inch, or eight inch diameter substrate). After forming the structure, the substrate can be diced into multiple units of smaller size (e.g., having a single-side surface area of about one square inch or less).
In embodiments, polarizers may be combined with one or more optical components and/or incorporated into a variety of different devices and systems. As an example, a polarizer may be fabricated with a cap layer having a surface adjacent to the diffractive grating layer that is highly reflective of radiation at a wavelength λ. The polarizer may be configured to transmit radiation polarized in one direction, such as TM-polarized radiation, and to block radiation polarized in an orthogonal direction, such as TE-polarized radiation. By fabricating the polarizer with a reflective cap layer, TM-polarized radiation is transmitted by the polarizer, reflects from the surface of the cap layer, and then passes back through the polarizer in the opposite direction and emerges from the same interface that radiation originally entered the polarizer. The addition of a reflective cap layer converts the polarizer from a transmission-only polarizer to a reflection-only polarizer.
In certain applications, a polarizer may be constructed atop an optically non-reciprocal substrate such as, for example, a rotation garnet. Polarizers fabricated in this way may be used in beam isolation applications to replace standard polarizers in, for example, Faraday rotators.
Polarizers may also be used to spatially separate orthogonal polarization components of an incident radiation beam. Polarizers performing this function may be referred to as walk-off polarizers.
A radiation beam 1258 incident along the z-direction and including TM- and TE-polarized components is directed to a surface 1270 of polarizer 1200. Layers 1266 and 1268 are configured to transmit TM-polarized radiation in a direction that is substantially unchanged, i.e., parallel the z-direction. TE-polarized radiation is diffracted by layer 1266 at an angle θ to the z-axis. Layer 1268, having a structure and composition similar to layer 1266 but positioned in the opposite sense with respect to the TE-polarized radiation, diffracts the TE-polarized beam so that the beam emerges from surface 1272 of polarizer 1260 propagating nominally along the z-direction, but spatially displaced from the TM-polarized beam. The separation of the two beams, s, exiting the device can vary depending on the thickness of the substrate, T, in addition to diffraction angle θ. In embodiments, walk-off polarizer 1200 can include antireflection films 1230 and 1240 to reduce reflection of incident radiation from the polarizer.
Referring to
Referring to
As mentioned previously, in certain applications, wire-grid polarizers can be used as components in optical isolators. Optical isolators are passive, non-reciprocal devices that typically utilize magneto-optic polarization rotation to isolate a radiation source from reflections in an optical system. In conventional optical isolators, polarization rotation is performed using a Faraday rotator using, for example, Yttrium Iron Garnet (YIG) or Terbium Gallium Garnet (TGG) single crystals. These, among other Faraday media have the ability, when in an appropriate magnetic field, to rotate the plane of linearly polarized light by an amount proportional to the crystals length. YIG crystal is used for wavelengths from about 1,100 to about 2,100 nm. TGG is typically used in free space optical isolators for wavelengths between about 500 nm to about 1,100 nm.
Referring to
Optical isolator 1500 is configured to reduce specular reflection of radiation polarized parallel to the x-axis for radiation at λ incident on the optical isolator propagating along path 1512. The amount of reflected radiation polarized parallel to the x-axis is reduced as follows. First, radiation polarized parallel to the x-axis is in the block state of polarizer 1510, so specular reflection of this polarization state from polarizer 1510 is relatively small (e.g., about 2% or less, about 1% or less). Block state polarization transmitted by polarizer 1510 propagates along path 1514 and is rotated by 45° during its passage through Faraday rotator 1530. Thus, this radiation emerges from Faraday rotator 1530 along path 1516 polarized in the block state of second polarizer 1520. Specular reflection of block state radiation from polarizer 1520 is relatively small (e.g., about 2% or less, about 1% or less), so only a small amount of block state radiation is reflected by polarizer 1520 back towards Faraday rotator 1530. Faraday rotator 1530 rotates block state radiation reflected by polarizer 1520 so that it emerges from Faraday rotator 1530 polarized parallel to the y-axis, and is passed by polarizer 1510.
Radiation polarized parallel to the y-axis propagating along path 1512 is substantially transmitted by polarizer 1510, rotated by 45° by Faraday rotator 1530, and substantially transmitted by polarizer 1530 along path 1518. Thus, optical isolator 1500 substantially transmits radiation at λ polarized parallel to the y-axis incident on the isolator along path 1512, while reflecting substantially no radiation polarized parallel to the x-axis.
While polarizers 1510 and 1520 are shown as physically separated from Faraday rotator 1530 (e.g., as a free space optical isolator), other constructions are also possible. For example, in some embodiments, one or both of the polarizers can be physically attached to a surface of the Faraday rotator. For example, one or both of the polarizers can be bonded to a corresponding surface of the Faraday rotator. In some embodiments, a polarizer can be formed on one or more surfaces of the Faraday rotator. For example, a YIG crystal can be used as a substrate for a polarizer.
Furthermore, while both polarizers 1510 and 1520 are wire-grid polarizers with both sub-wavelength and diffractive structure, in general, one of the polarizers can be a different type of polarizer. For example, one of the polarizers can be an absorptive polarizer or a reflective polarizer (e.g., a wire-grid polarizer without diffractive structure).
Isolators, such as isolator 1500, can be used in a variety of different devices. For example, referring to
Various structures and devices that utilize these structures can be used for systems involving high power laser beam delivery systems. For example, devices and structures can be used in short-pulse and/or high repetition rate laser beam isolation at UV or visible spectrum.
A polarizer is prepared by first depositing an approximately 50 nm thick etch-stop layer of HfO2 and approximately 450 nm thick SiO2 onto a surface of a BK7 substrate by ion-assisted e-beam evaporation (IAD). Next, the SiO2 layer is patterned into a 200 nm-period grating by imprint lithography and reactive ion etching (RIE), using CHF3 and O2. The SiO2 layer is etched through its entire thickness, down to the HfO2 interface. In a subsequent process step, a 3 nm wide chromium (Cr) layer is deposited onto one side of the SiO2 trench walls. A 22 nm wide gold layer is the deposited onto the chromium layers. The chromium and gold layers are deposited using e-beam evaporation in which the substrate is oriented at approximately 22° with respect to the metal source. The depth of the chromium/gold portions extend about 450 nm in thickness along and over the SiO2 grating trench walls.
After gold deposition, a SiO2 layer is deposited over the grating structure using atomic layer deposition (ALD), providing an approximately 105 nm thick planarization layer over the grating layer. The ALD process corresponds to the process described by J. Wang et al., in the article, “High-performance optical retarders based on all-dielectric immersion gratings,” Optics Lett., 30, 1864-1866, (2005). The SiO2 planarization layer is etched back to the top surface of the grating layer using RIEr. Ion milling is used to remove gold and chromium that deposits on top of the trench walls. Subsequently, the grating layer is a monolithic layer having a thickness of approximately 370 nm and having sub-wavelength structure for wavelengths in the 1,200 nm to 1,700 nm range.
By using the same process as described above, a second layer of the above sub-wavelength structure, approximately 260 nm in thickness, is formed on top of the first layer. Periodic parallel trenches are etched into the monolithic sub-wavelength structured layer using a photolithographic exposure and reactive-ion etch. These trenches have a depth of approximately 260 nm and a width of approximately 2.4 μm wide. The trenches are separated by rows of material having the sub-wavelength grating structure that are approximately 2.4 μm wide. The trenches extend in a direction substantially orthogonal to the gold rows in the sub-wavelength structure. The trenches are filled with AlSiOx having a refractive index of approximately 1.56 in the 1,200 nm to 1,700 nm wavelength range, providing a monolithic grating layer having a diffractive structure in that wavelength range. The AlSiOx is deposited as a nanolaminate material in the trenches using ALD. The structure is then planarized using chemical mechanical polishing resulting in a layer of AlSiOx having a thickness of approximately 105 nm with a substantially planar surface on top of the second layer of sub-wavelength structure, providing, in addition, a monolithic grating layer having diffractive structure for light in the 1,200 nm to 1,700 nm range. A layer of HfO2, approximately 105 nm thick, is deposited onto the AlSiOx layer using IAD e-beam evaporation. Finally, a layer of SiO2, approximately 330 nm thick, is deposited onto the layer of HfO2.
The surface of the BK7 substrate opposite the grating layer is coated with an antireflection film. The antireflection film is composed of a first Ta2O5 layer, 70 nm thick, adjacent the substrate surface, a first SiO2 layer 70 nm thick adjacent the first Ta2O5 layer, a second Ta2O5 layer 209 nm thick adjacent the first SiO2 layer, and a second SiO2 layer 262 nm thick. The coatings are formed using the same method as for the etch stop layer.
The performance of the polarizer is illustrated in
The data shown in
Other embodiments are in the claims.
This application claims priority under 35 U.S.C. § 119(e)(1) to U.S. Provisional Application No. 60/636,303, entitled “MULTILAYER STRUCTURES FOR POLARIZATION AND BEAM CONTROL,” and filed on Dec. 15, 2004, the entire contents of which are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| 60636303 | Dec 2004 | US |
