STTR: High Sensitivity Materials Analysis

Information

• NSF Award
• 9523182

Owner

• CHARLES EVANS & ASSOCIATES, INC.

• Award Id

  9523182

• Award Effective Date

  9/1/1995 - 29 years ago

• Award Expiration Date

  8/31/1996 - 28 years ago

• Award Amount

  $ 99,952.00

• Award Instrument

  Standard Grant

9523182 Wu This research uill focus on the development of ultrahigh sensitivity chemical analysis of the surface and near-surface regions of solid materials. It will determine the feasibility of developing innovative mass spectrometry techniques based on laser ablation and subsequent nonresonant laser photoionization processes above the surface, coupled with high performance time-of-flight mass spectrometry. Two primary goals of this research are spatial resolution chemical imaging and sub-ppm sensitivity semiconductor surface impurity analysis. The potential applications of this research include a highly improved surface analytical instrumentation and the establishment of a dedicated analytical facility for material characterizations. Markets for this instrumentation include semiconductor manufacturers, environmental testing laboratories, and biological research institutions

• Program Officer

  Darryl G. Gorman

• Min Amd Letter Date

  9/21/1995 - 29 years ago

• Max Amd Letter Date

  9/21/1995 - 29 years ago

• ARRA Amount

• Name

  Charles Evans & Associates

• City

  Redwood City

• State

  CA

• Country

  United States

• Address

  301 Chesapeake Drive

• Postal Code

  940634723

• Phone Number

  4153694567

• First Name

  Kuang

• Last Name

  Wu

• Email Address

  kjwu@cea.com

• Start Date

  9/21/1995 12:00:00 AM

• Name

  Technology Transfer

• Code

  110000