This STTR Phase I project is to develop processes and optimized integrated structures based on the piezoelectric effect, and complemented by other traditional sources, to enable energy harvesting devices for self-powered sensors and devices. The team has recently developed a piezoelectric composition with the highest ever reported energy density for bulk piezoelectric ceramics. This project will seek to develop and optimize piezoelectric thin film processes using the newly discovered composition.<br/><br/>Successful use of piezoelectrics for energy harvesting from vibration sources can provide a high efficiency and low maintenance power source, particularly at a small scale, for applications that are remote, inaccessible and in darkness.