Claims
- 1. A substrate bias voltage regulator for controlling a substrate bias voltage generator to provide a predetermined substrate bias voltage to a semiconductor substrate, comprising:
- a first field effect transistor having a first electrode and a gate electrode coupled to a first supply voltage, and a second electrode;
- a second field effect transistor having a first electrode coupled to the second electrode of the first transistor, a second electrode connected directly to the substrate, and a gate electrode directly connected to ground without intervening elements, the second transistor developing a control voltage on the first electrode thereof which is related to the deviation from the predetermined substrate bias voltage of the bias voltage developed on the substrate by the substrate bias voltage generator; and
- amplifier means for coupling the control voltage developed on the first electrode of the second transistor to the substrate bias voltage generator to control the operation thereof.
- 2. A substrate bias voltage regulator for controlling a substrate bias voltage generator to provide a predetermined substrate bias voltage to a semiconductor substrate, comprising:
- a first field effect transistor having a first electrode and a gate electrode coupled to a first supply voltage, and a second electrode;
- a second field effect transistor having a first electrode coupled to the second electrode of the first transistor, a gate electrode coupled to a reference terminal, and a second electrode;
- a series field effect transistor having a gate and a first electrode coupled to the second electrode of the second transistor, and a second electrode connected directly to the substrate to sense the substrate voltage, wherein the second transistor develops a control voltage on the first electrode thereof which is related to the deviation from the predetermined substrate bias voltage of the bias voltage developed on the substrate by the substrate bias voltage generator; and
- amplifier means for coupling the control voltage developed on the first electrode of the second transistor to the substrate bias voltage generator to control the operation thereof.
- 3. The substrate bias voltage regulator of claim 1 or claim 2 wherein the amplifier means is further characterized as providing a first voltage when the control voltage developed on the first electrode of the second transistor is higher than a predetermined voltage level.
- 4. The substrate bias voltage regulator of claim 2 wherein the amplifier means further comprises:
- a third field effect transistor having a first electrode and a gate electrode coupled to the first supply voltage, and a second electrode; and
- a fourth field effect transistor having a first electrode coupled to the second electrode of the third transistor, a second electrode coupled to ground, and a gate electrode coupled to the first electrode of the second transistor,the fourth transistor developing an output voltage on the first electrode thereof which is coupled to the substrate bias voltage generator to control the operation thereof.
- 5. The substrate bias voltage regulator of claim 4 wherein the fourth transistor is further characterized as having a threshold voltage equal to the predetermined voltage level of the amplifier means.
- 6. A substrate bias voltage regulator for controlling a substrate bias voltage generator to provide a predetermined substrate bias voltage to a semiconductor substrate, comprising:
- a first field effect transistor having a first current electrode and a gate electrode coupled to a first supply voltage, and a second current electrode;
- a second field effect transistor having a first current electrode coupled to the second current electrode of the first transistor, a second current electrode connected directly to the substrate, and a gate electrode coupled to a reference voltage, the second transistor developing a control voltage on the first electrode thereof which is related to the deviation from the predetermined substrate bias voltage of the bias voltage developed on the substrate by the substrate bias voltage generator;
- a third transistor having a first current electrode coupled to ground, a gate electrode coupled to the first current electrode of the second transistor, and a second current electrode; and
- a fourth transistor coupled between the first supply voltage and the second current electrode of the third transistor, the third transistor developing an output voltage on the second current electrode thereof which is coupled to the substrate bias voltage generator to control the operation thereof.
Parent Case Info
This application is a continuation of application Ser. No. 017,523, filed Mar. 5, 1979, now abandoned.
US Referenced Citations (6)
Continuations (1)
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Number |
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Parent |
17523 |
Mar 1979 |
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