Claims
- 1. A substrate for an ink jet print head that uses thermal energy to eject ink, said substrate comprising:
a film structure having a plurality of films laminated over said substrate, the plurality of films including a first electric wire film, a heater film and a second electric wire film formed one upon the other in that order over said substrate, a combination of the heater film and the second electric wire film allowing the thermal energy to be generated; wherein an electrode pad portion, which is formed at a part of said film structure to make electrical connection to other than said substrate through a ball bump, is formed by an exposed part of the first electric wire film, and a thickness of the first electric wire film is larger than that of the second electric wire film.
- 2. A substrate as claimed in claim 1, wherein said film structure has a protective film over the heater film and the second electric wire film.
- 3. A substrate as claimed in claim 2, wherein the first electric wire film is made from aluminum or aluminum alloy and has a thickness of 4,000 Å or more.
- 4. An ink jet print head which uses thermal energy to eject ink, comprising:
a substrate making said ink jet print head, said substrate including: a film structure having a plurality of films laminated over said substrate, the plurality of films including a first electric wire film, a heater film and a second electric wire film formed one upon the other in that order over said substrate, a combination of the heater film and the second electric wire film allowing the thermal energy to be generated; wherein an electrode pad portion, which is formed at a part of said film structure to make electrical connection to other than said substrate through a ball bump, is formed by an exposed part of the first electric wire film, and a thickness of the first electric wire film is larger than that of the second electric wire film.
- 5. An ink jet print head as claimed in claim 4, wherein said film structure has a protective film over the heater film and the second electric wire film.
- 6. An ink jet print head as claimed in claim 5, wherein the first electric wire film is made from aluminum or aluminum alloy and has a thickness of 4,000 Å or more.
- 7. A method of manufacturing an ink jet print head which uses thermal energy to eject ink, said method comprising the steps of:
forming a substrate, the substrate constituting the ink jet print head and having a film structure, the film structure having at least a first electric wire film, an interlayer insulating film, a heater film, a second electric wire film and a protective film laminated one upon the other in that order over the substrate, a combination of the heater film and the second electric wire film allowing the thermal energy to be generated; wherein, in an electrode pad portion formed by a part of the step of forming the film structure of the substrate and adapted to make electrical connection to other than the substrate through a ball bump, the interlayer insulating film is removed to expose the first electric wire film and to make an exposed part of the surface first electric wire film be a part to which the ball bump are joined.
- 8. A method of manufacturing an ink jet print head which uses thermal energy to eject ink, the method comprising the steps of:
forming a substrate, the substrate constituting the ink jet print head and having a film structure, the film structure having at least a first electric wire film, an interlayer insulating film, a heater film, a second electric wire film and a protective film laminated one upon the other in that order over the substrate, a combination of the heater film and the second electric wire film allowing the thermal energy to be generated; wherein, in an electrode pad portion formed by a part of the step of forming the film structure of the substrate and adapted to make electrical connection to other than the substrate through a ball bump, after the interlayer insulating film is patterned to form a window therein, the heater film and the second electric wire film are deposited one upon the other and then removed to expose the first electric wire film and to make an exposed part of the surface first electric wire film be a part to which the ball bump are joined.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2000-209101 |
Jul 2000 |
JP |
|
Parent Case Info
[0001] This application is based on Patent Application No. 2000-209101 filed Jul. 10, 2000 in Japan, the content of which is incorporated hereinto by reference.