Substrate mounting plate for substrate processing apparatus

Information

  • Patent Grant
  • D981970
  • Patent Number
    D981,970
  • Date Filed
    Friday, September 3, 2021
    3 years ago
  • Date Issued
    Tuesday, March 28, 2023
    a year ago
Abstract
Description


FIG. 1 is a front, top and right side perspective view of a substrate mounting plate for substrate processing apparatus showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view.



FIG. 4 is a top plan view thereof;



FIG. 5 is a bottom plan view thereof;



FIG. 6 is a left side elevational view thereof;



FIG. 7 is a right side elevational view thereof; and,



FIG. 8 is a view take along line 8-8 in FIG. 2.


Claims
  • The ornamental design for a substrate mounting plate for substrate processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2021-004536 D Mar 2021 JP national
US Referenced Citations (12)
Number Name Date Kind
D583394 Ota Dec 2008 S
D790041 Jang Jun 2017 S
D797067 Zhang Sep 2017 S
D825505 Hanson Aug 2018 S
D830981 Jeong Oct 2018 S
D868124 Riker Nov 2019 S
D869409 Riker Dec 2019 S
D877101 Johanson Mar 2020 S
D908645 Savandaiah Jan 2021 S
D937329 Riker Nov 2021 S
D940765 Gunther Jan 2022 S
20100108500 Hawrylchak May 2010 A1