The present application claims priority under 35 U.S.C. § 119 to Japanese Patent Application No. 2021-155058, filed on Sep. 24, 2021. The contents of this application are incorporated herein by reference in their entirety.
The subject of the present application relates to a substrate processing system and a group management device.
A substrate processing apparatus is known that processes a substrate with a processing liquid. The substrate processing apparatus is installed in a clean room of a factory. The processing liquid is supplied to the substrate processing apparatus from a resource system installed in the factory.
Typically, a plurality of substrate processing apparatuses are installed in a factory. As such, when the substrate processing apparatuses process substrates simultaneously, the processing liquid is supplied to the substrate processing apparatuses simultaneously from the resource system of the factory. However, in this case, the total flow rate of the processing liquid used by the substrate processing apparatuses may exceed a maximum flow rate of the processing liquid at which the resource system is capable of supplying the processing liquid. When the total flow rate of the processing liquid used by the substrate processing apparatuses exceeds the maximum flow rate of the resource system, an alarm is issued from each of the substrate processing apparatuses to stop the substrate processing apparatuses.
According to an aspect of the present disclosure, a substrate processing system includes a plurality of substrate processing apparatuses that each perform processing on a substrate and a group management device that manages the substrate processing apparatuses. The substrate processing apparatuses each include a plane creating section and a first communication section. The plan creating section creates a plan indicating a timing when a processing liquid is used and a flow rate of the processing liquid. The first communication section performs communication with the group management device to transmit the plan to the group management device. The processing liquid is supplied to the substrate processing apparatuses from a single resource system. The group management device includes storage, a second communication section, and a processing section. The storage stores therein a threshold value for the flow rate of the processing liquid supplied from the single resource system. The second communication section performs communication with the substrate processing apparatuses to receive the plans from the respective substrate processing apparatuses. The processing section acquires a total flow rate of the processing liquid to be used by the substrate processing apparatuses based on the plans received by the second communication section and that determines whether or not the total flow rate exceeds the threshold value. In response to determination that the total flow rate exceeds the threshold value, the processing section instructs via the second communication section one substrate processing apparatus of the substrate processing apparatuses to adjust the plan of the one substrate processing apparatus. The plan creating section of an instruction target apparatus creates a plan that causes the total flow rate to be equal to or lower than the threshold value, the instruction target apparatus being the one substrate processing apparatus to which plan adjustment is instructed.
In an embodiment, in instructing the plan adjustment, the processing section transmits the plans of the substrate processing apparatuses or the total flow rate of the processing liquid to the instruction target apparatus via the second communication section. The plan creating section of the instruction target apparatus creates the plan that causes the total flow rate to be equal to or lower than the threshold value based on the plans of the substrate processing apparatuses or the total flow rate of the processing liquid.
In an embodiment, the processing section generates adjustment amount information indicating an adjustment amount based on the plans of the substrate processing apparatuses or the total flow rate of the processing liquid, the adjustment amount indicating an adjustment amount that causes the total flow rate to be equal to or lower than the threshold value. In instructing the plan adjustment, the processing section transmits the adjustment amount information to the instruction target apparatus via the second communication section. The plan created by the plan creating section of the instruction target apparatus is a plan that causes the total flow rate to be equal to or lower than the threshold value based on the adjustment amount information.
In an embodiment, the plan adjusted by the creating section of the instruction target apparatus corresponds to a plan for the substrate before the processing starts.
In an embodiment, the processing section determines the instruction target apparatus based on transmission timings that are timings when the substrate processing apparatuses transmit the respective plans to the group management device.
In an embodiment, the processing section determines a substrate processing apparatus of the substrate processing apparatuses that has a latest transmission timing of the transmission timings of the substrate processing apparatuses to be the instruction target apparatus.
In an embodiment, the plans of the substrate processing apparatuses each indicate a substrate processing period that is a period from a time at which the substrate is brought into a corresponding one substrate processing apparatus of the substrate processing apparatuses from outside to a time at which the substrate is brought out of the corresponding one substrate processing apparatus. The processing section determines the instruction target apparatus based on the substrate processing periods.
In an embodiment, the processing section determines a substrate processing apparatus of the substrate processing apparatuses that has a shortest substrate processing period of the substrate processing periods of the substrate processing apparatuses to be the instruction target apparatus.
In an embodiment, the plans of the substrate processing apparatuses each indicate a processing end timing when the processing of the substrate ends or a substrate bringing-out timing when the substrate is brought out of a corresponding one of the substrate processing apparatuses. The processing section determines the instruction target apparatus based on the processing end timings or the substrate bringing-out timings.
In an embodiment, the processing section determines a substrate processing apparatus of the substrate processing apparatuses that has a latest processing end timing of the processing end timings or a latest substrate bringing-out timing of the substrate bringing-out timings of the substrate processing apparatuses to be the instruction target apparatus.
In an embodiment, the plans of the substrate processing apparatuses each indicate a processing start timing when the processing of the substrate starts or a substrate bringing-in timing when the substrate is brought into a corresponding one of the substrate processing apparatuses from outside. The processing section determines the instruction target apparatus based on the processing start timings or the substrate bringing-in timings.
In an embodiment, the processing section determines a substrate processing apparatus of the substrate processing apparatuses that has a latest processing start timing of the processing start timings or a latest substrate bringing-in timing of the substrate bringing-in timings of the substrate processing apparatuses to be the instruction target apparatus.
According to another aspect of the present disclosure, a group management device manages a plurality of substrate processing apparatuses that each perform processing on a substrate. A processing liquid being supplied to the substrate processing apparatuses from a single resource system. The group management device includes storage, a communication section, and a processing section. The storage stores therein a threshold value for a flow rate of the processing liquid supplied from the single resource system. The communication section configured to perform communication with the substrate processing apparatuses to receive a plan indicating a timing when the processing liquid is used and a flow rate of the processing liquid from each of the substrate processing apparatuses. The processing section acquires a total flow rate of the processing liquid to be used by the substrate processing apparatuses based on the plans received by the communication section and determine whether or not the total flow rate exceeds the threshold value. In response to determination that the total flow rate exceeds the threshold value, the processing section instructs via the communication section one substrate processing apparatus of the substrate processing apparatuses to adjust the plan of the one substrate processing apparatus.
In an embodiment, the processing section generates adjustment amount information indicating an adjustment amount based on the plans of the substrate processing apparatuses or the total flow rate of the processing liquid, the adjustment amount being an amount that causes the total flow rate to be equal to or lower than the threshold value. In instructing plan adjustment, the processing section transmits via the communication section the adjustment amount information to the one substrate processing apparatus to which the plan adjustment is instructed.
The following describes embodiments of a substrate processing system and a group management device, which are the subject matter of the present application, with reference to the accompanying drawings (
To “substrates” in the following embodiments, various substrates are applicable such as semiconductor wafers, glass substrates for photomask use, glass substrates for liquid crystal display use, glass substrates for plasma display use, substrates for field emission display (FED) use, substrates for optical disk use, substrates for magnetic disk use, and substrates for magneto-optical disk use. Although embodiments are described below using as an example a case with a substrate processing system and a group management device used for processing a disk-shaped semiconductor wafer, the embodiments are also applicable to processing of any of the substrates listed above. Furthermore, various substrate with any shape are also applicable.
With reference to
The substrate processing apparatuses 1 each process substrates W (see
More specifically, the group management device 2 manages the substrate processing apparatuses 1 grouped into a plurality of areas A. A plurality of substrate processing apparatuses 1 are installed in each of the areas A.
The processing liquid is supplied to the substrate processing apparatuses 1 installed in the areas A via common lines L from respective common resource systems PF. The group management device 2 sets each area A for a plurality of substrate processing apparatuses 1 to which the processing liquid is supplied from a single resource system PF, and manages the substrate processing apparatuses 1 on a basis of area A by area A.
In the present embodiment, the group management device 2 manages a plurality of substrate processing apparatuses 1 installed in a first area A1 and a plurality of substrate processing apparatuses 1 installed in a second area A2. Although the number of areas A is two in the present embodiment, no particular limitations are placed on the number of the areas A. The number of areas A may be one or three or more.
The resource systems PF include a first resource system PF1 and a second resource system PF2. The first resource system PF1 supplies pure water DIW to the substrate processing apparatuses 1 installed in the first area A1 via a first line L1. Similarly, the second resource system PF2 supplies the pure water DIW to the substrate processing apparatuses 1 installed in the second area A2 via a second line L2. The pure water DIW is deionized water, for example. In the following, an embodiment will be described using a case as an example in which the pure water DIW is supplied from a single resource system PF to the substrate processing apparatuses 1 installed in one area A. The pure water DIW is an example of the “processing liquid”.
The substrate processing system 100 of the present embodiment will be described next with reference to
As illustrated in
Although the number of the substrate processing apparatuses 1 installed in the first area A1 is four in the present embodiment, no particular limitations are loaded on the number of the substrate processing apparatuses 1 installed in a single area A so long as the number is plural. The number of the substrate processing apparatuses 1 installed in a single area A may be two or three, or five or more.
Each of the substrate processing apparatuses 1 transmits a use plan for the pure water DIW to the group management device 2 via the network NW (see
More specifically, the DIW use plan indicates a timing when the pure water DIW is used and a flow rate of the pure water DIW in a plan after the current time. Each of the substrate processing apparatuses 1 creates a DIW use plan and transmits the created DIW use plan to the group management device 2 each time new substrates W are loaded on load ports LP (see
In the present embodiment, each of the substrate processing apparatuses 1 creates a time schedule P of elements of the substrate processing apparatus 1 and transmits the created time schedule P to the group management device 2. The elements of the substrate processing apparatus 1 include an input section 3, an output section 7, a buffer unit BU, a transport mechanism CV, and a processing unit SP, which will be described later with reference to
As illustrated in
Specifically, the group management device 2 generates management information ASC into which the DIW use plans (time schedules P) transmitted from the substrate processing apparatuses 1A to 1D are combined, and manages the substrate processing apparatuses 1A to 1D based on the generated management information ASC. Furthermore, the group management device 2 generates the total flow rate information AFR based on the management information ASC.
When determining that the DIW total flow rate exceeds the threshold value TH as a result of the threshold determination processing, the group management device 2 transmits to one of the substrate processing apparatuses 1A to 1D a readjustment instruction RA instructing adjustment of the DIW use plan thereof. In the following, a substrate processing apparatus 1 to which adjustment of the use plan thereof for using the pure water DIW is instructed may be referred to as “instruction target apparatus”.
Specifically, the group management device 2 specifies based on the management information ASC substrate processing apparatuses 1 that use the pure water DIW in a time zone during which the DIW total flow rate exceeds the threshold value TH. Next, the group management device 2 determines one of the substrate processing apparatuses 1 that use the pure water DIW in the time zone during which the DIW total flow rate exceeds the threshold value TH to be the instruction target apparatus. In the following, processing of determining an instruction target apparatus may be referred to as “determination processing”.
In the example illustrated in
As illustrated in
The substrate processing apparatus 1B transmits the adjusted DIW use plan (time schedule P) to the group management device 2. The group management device 2 updates the DIW use plan (time schedule P) of the substrate processing apparatus 1B to the adjusted DIW use plan (time schedule P), and re-performs the threshold determination processing described with reference to
The substrate processing system 100 and the group management device 2 of the present embodiment will be described next with reference to
As illustrated in
The processing unit SP includes a plurality of tanks TA. In the present embodiment, the tanks TA include two first chemical liquid tanks (a first chemical liquid tank CHB1 and a first chemical liquid tank CHB2), four second chemical liquid tanks (a second chemical liquid tank ONB1, a second chemical liquid tank ONB2, a second chemical liquid tank ONB3, and a second chemical liquid tank ONB4), and two drying tank (a drying tank LPD1 and a drying tank LPD2). That is, the processing unit SP includes eight tanks TA in the present embodiment. Note that the number of the tanks TA is not limited to eight and may be any of one to seven or nine or more.
The transport mechanism CV includes a first transport mechanism CTC and a second transport mechanism WTR. The transport mechanism CV further include a sub-transport mechanism LF1, a sub-transport mechanism LF2, a sub-transport mechanism LF3, a sub-transport mechanism LF4, a sub-transport mechanism LF5, and a sub-transport mechanism LF6. The number of the sub-transport mechanisms is changed according to the number of the tanks TA.
The computer CM1 controls a plurality of accommodation sections 10, the input section 3, the output section 7, the buffer unit BU, the transport mechanism CV, and the processing unit SP.
Each of the accommodation sections 10 accommodates a plurality of substrates W. The substrates W are accommodated in each accommodation section 10 in a horizontal posture. Specifically, each of the accommodation sections 10 accommodates one lot of substrates W. The accommodation sections 10 each are a front opening unified pod (FOUP), for example.
Accommodation sections 10 accommodating non-processed substrates W are loaded at the input section 3. Specifically, the input section 3 includes a plurality of load ports LP. The accommodation sections 10 accommodating the non-processed substrates W are loaded on the load ports LP of the input section 3.
Accommodation sections 10 accommodating processed substrates W are loaded at the output section 7. Specifically, the output section 7 includes a plurality of load ports LP. The accommodation sections 10 accommodating the processed substrates W are loaded on the load ports LP of the output section 7.
The buffer unit BU is disposed adjacent to the input section 3 and the output section 7. The buffer unit BU takes therein the accommodation sections 10 loaded on the input section 3. A shelf (not illustrated) is provided inside the buffer unit BU, and the buffer unit BU loads on the shelf the accommodation sections 10 loaded at the input section 3. The buffer unit BU takes the non-processed substrates W out of the accommodation sections 10 loaded on the shelf and passes the non-processed substrates W to the transport mechanism CV.
The buffer unit BU also takes therein the accommodation sections 10 loaded at the output section 7 and loads the taken accommodation sections 10 on the shelf. The buffer unit BU receives processed substrates W from the transport mechanism CV and accommodates the processed substrates W in the accommodation sections 10 loaded on the shelf. Furthermore, the buffer unit BU outputs the accommodation sections 10 accommodating the processed substrates W to the output section 7.
In detail, the buffer unit BU includes a delivery mechanism 11. The delivery mechanism 11 performs delivery of the accommodation sections 10 between the shelf and the input section 3 and between the shelf and the output section 7. The delivery mechanism 11 also performs delivery of substrates W between the transport mechanism CV and the self. Specifically, the delivery mechanism 11 takes the non-processed substrates W out of two accommodation sections 10 loaded on the shelf and passes the non-processed substrates W to the transport mechanism CV. That is, the delivery mechanism 11 combines two lots of non-processed substrates W into a set and passes the set of the non-processed substrates W to the transport mechanism CV. Also, the delivery mechanism 11 receives two lots of processed substrates W from the transport mechanism CV and accommodates the processed substrates W per lot unit in two accommodation sections 10 loaded on the shelf. In the following the two lots of substrate W may be referred to as “set of substrates W”. One set of substrates W includes 50 substrates W, for example.
The transport mechanism CV brings a set of substrates W into the processing unit SP. Furthermore, the transport mechanism CV brings the set of substrates W out of the processing unit SP. Specifically, the transport mechanism CV brings a set of substrates W into each tank TA of the processing unit SP. Furthermore, the transport mechanism CV brings the set of substrates W out of each tank TA of the processing unit SP. The processing unit SP executes the preprocessing, the cleaning, the etching, and the drying on the set of substrates W. The preprocessing, the cleaning, the etching, and the drying each are an example of “substrate processing”.
More specifically, the delivery mechanism 11 performs delivery of a set of substrates W between the delivery mechanism 11 and the first transport mechanism CTC. The first transport mechanism CTC changes the posture of the set of substrates W received from the delivery mechanism 11 from the horizontal posture to the vertical posture, and passes the set of substrates W to the second transport mechanism WTR. Furthermore, the first transport mechanism CTC receives a set of processed substrates W from the second transport mechanism WTR, changes the posture of the set of processed substrates W from the vertical posture to the horizontal posture, and passes the set of processed substrates W to the delivery mechanism 11.
The second transport mechanism WTR performs delivery of a set of substrates W among the sub-transport mechanism LF1, the sub-transport mechanism LF2, the sub-transport mechanism LF3, the sub-transport mechanism LF4, the sub-transport mechanism LF5, and the sub-transport mechanism LF6. Furthermore, the second transport mechanism WTR brings the set of substrates W into the drying tanks LPD1 and LPD2 and brings the set of substrates W out of the drying tanks LPD1 and LPD2.
The sub-transport mechanism LF1 brings the set of substrates W into the second chemical liquid tank ONB1 and brings the set of substrate W out of the second chemical liquid tank ONB1. The sub-transport mechanism LF2 brings the set of substrates W into the first chemical liquid tank CHB1 and brings the set of substrates W out of the first chemical liquid tank CHB1. The sub-transport mechanism LF3 brings the set of substrates W into the second chemical liquid tank ONB2 and brings the set of substrates W out of the second chemical liquid tank ONB2. The sub-transport mechanism LF4 brings the set of substrates W into the first chemical liquid tank CHB2 and brings the set of substrates W out of the first chemical liquid tank CHB2. The sub-transport mechanism LF5 brings the set of substrates W into the second chemical liquid tank ONB3 and brings the set of substrate W out of the second chemical liquid tank ONB3. The sub-transport mechanism LF6 brings the set of substrates W into the second chemical liquid tank ONB4 and brings the set of substrates W out of the second chemical liquid tank ONB4.
The first chemical liquid tanks CHB1 and CHB2 perform preprocessing with a chemical liquid on the set of substrates W. The preprocessing is processing with the chemical liquid performed before etching (specifically wet etching). In the present embodiment, the preprocessing is processing for removing natural oxide films from the substrates W. In this case, the chemical liquid may be diluted hydrofluoric acid (DHF), for example.
Specifically, the first chemical liquid tanks CHB1 and CHB2 each include a processing tank that reserves the chemical liquid. The sub-transport mechanism LF2 brings a set of substrates W into the first chemical liquid tank CHB1 to immerse the set of substrates W in the chemical liquid reserved in the processing tank. In the manner described above, the preprocessing is performed on the set of substrates W. Thereafter, the sub-transport mechanism LF2 pulls up the set of substrates W from the chemical liquid in the processing tank and brings the set of substrates W out of the first chemical liquid tank CHB1. The sub-transport mechanism LF4 operates in the same manner as above.
The first chemical liquid tanks CHB1 and CHB2 each further include an ultrasonic generator. The ultrasonic generator generates ultrasonic waves to vibrate the chemical liquid reserved in the corresponding processing tank. This can efficiently remove natural oxide films from the substrates W.
In detail, the ultrasonic generator is disposed outside the processing tank. The pure water DIW flows between the ultrasonic generator and the processing tank for propagating the ultrasonic waves to the processing tank. In the following, the pure water DIW for propagating the ultrasonic waves may be referred to as “propagation water DIW”. In the present embodiment, the DIW use plan described with reference to
Note that the chemical liquid in each processing tank of the first chemical liquid tanks CHB1 and CHB2 is reloaded as appropriate. In chemical liquid replacement, the pure water DIW is introduced into the processing tank for cleaning. The DIW use plan described with reference to
The second chemical liquid tanks ONB1 to ONB4 perform cleaning with a rinse liquid and etching with an etching solution, respectively, on one set of substrates W. Specifically, the second chemical liquid tanks ONB1 to ONB4 each include a shower nozzle and a processing tank.
The shower nozzle ejects liquid droplets of the rinse liquid toward a set of substrates W located above the processing tank. In the manner described above, the cleaning with the rinse liquid is performed on the set of substrates W. The rinse liquid contains the pure water DIW. The rinse liquid is the pure water DIW, ozone water, nitrogen water, or hot pure water, for example. The ozone water is a rinse liquid obtained by mixing ozone with the pure water DIW. The nitrogen water is a rinse liquid obtained by mixing nitrogen with the pure water DIW. The hot pure water is a rinse liquid obtained by heating the pure water DIW.
The processing tank reserves the etching solution therein. A set of substrates W is immersed in the etching solution in the processing tank. In the manner described above, the etching with the etching solution is performed on the set of substrates W. The etching solution contains the pure water DIW. Examples of the etching solution include an aqueous solution containing tetramethylammonium hydroxide (TMAH), an aqueous solution containing trimethyl-2-hydroxyethylammonium hydroxide (TMY), and ammonium hydroxide (ammonia water).
The sub-transport mechanism LF1 brings the set of substrates W into the second chemical liquid tank ONB1 to move the set of substrates W above the processing tank. The shower nozzle ejects droplets of the rinse liquid toward the set of substrates W held by the sub-transport mechanism LF1 to clean the set of substrates W with the rinse liquid. As a result, the rinse liquid collects in the processing tank. After the cleaning with the rinse liquid, the rinse liquid in the processing tank is discharged.
After rinse liquid discharge, the etching solution is supplied into the processing tank. As a result, the etching solution is reserved in the processing tank. Once the etching solution is reserved in the processing tank, the sub-transport mechanism LF1 moves the set of substrates W into the processing tank. As a result, the set of substrates W is immersed in the etching solution in the processing tank to be etched. Thereafter, the sub-transport mechanism LF1 pulls the set of substrates W out of the etching solution in the processing tank and brings the set of substrates W out of the second chemical liquid tank ONB1. The etching solution in the processing tank is discharged from the processing tank after the set of substrates W is pulled out of the etching solution.
The second chemical liquid tanks ONB2 to ONB4 and the sub-transport mechanisms LF3, LF5, and LF6 operate in the same manner as the second chemical liquid tank ONB1 and the sub-transport mechanism LF1. Therefore, description thereof is omitted.
In the present embodiment, the DIW use plan described with reference to
Furthermore, the DIW use plan described with reference to
The second chemical liquid tanks ONB1 to ONB4 each further include an ultrasonic generator likewise the first chemical liquid tanks CHB1 and CHB2. In the present embodiment, the DIW use plan described with reference to
The drying tanks LPD1 and LPD2 perform drying on the set of substrates W. In detail, the drying tanks LPD1 and LPD2 each include a gas nozzle and a processing tank.
The gas nozzle ejects steam of an organic solvent toward the set of substrates W located above the processing tank. This can dry the set of substrates W. The steam of the organic solvent is steam of isopropyl alcohol (IPA), for example. The processing tank reserves the pure water DIW. The set of substrates W is immersed in the pure water DIW in the processing tank to be rinsed.
The second transport mechanism WTR brings the set of substrates W into the drying tank LPD1 to immerse the set of substrates W in the pure water DIW reserved in the processing tank. As a result, the set of substrates W is rinsed. Thereafter, the second transport mechanism WTR pulls the set of substrates W out of the pure water DIW in the processing tank. Once the set of substrates W is pulled out of the pure water DIW in the processing tank, the pure water DIW is discharged from the processing tank. After discharge of the pure water DIW from the processing tank, steam of the organic solvent is ejected from the gas nozzle. As a result, the set of substrates W is dried. The second transport mechanism WTR brings the set of dried substrates W out of the drying tank LPD1.
The operation of the drying tank LPD2 and the operation of the second transport mechanism WTR with respect to the drying tank LPD2 are the same as the operation of the drying tank LPD1 and the operation of the second transport mechanism WTR with respect to the drying tank LPD1, respectively. Therefore, description thereof is omitted.
The pure water DIW is supplied to the processing tanks of the drying tanks LPD1 and LPD2 before the second transport mechanism WTR brings the set of substrates W into the drying tanks LPD1 and LPD2. The DIW use plan described with reference to
The substrate processing apparatus 1 will be further described next with reference to
In the present embodiment, the DIW use plan described with reference to
More specifically, the cleaning tank CHCL includes a shower nozzle and a processing tank. The shower nozzle ejects droplets of the pure water DIW toward the hand of the second transport mechanism WTR located above the processing tank. The pure water DIW is reserved in the processing tank. The hand of the second transport mechanism WTR is immersed in the pure water DIW in the processing tank. The DIW use plan described with reference to
The computer CM1 of the substrate processing apparatus 1 will be described next with reference to
The first communication section 51 is wired or connected wirelessly to the network NW. The network NW includes the Internet, a local area network (LAN), and a public telephone network, for example. The first communication section 51 is a communication tool and may be a network interface controller, for example. The first communication section 51 performs communication with the group management device 2 connected to the network NW.
The first communication section 51 transmits the DIW use plan described with reference to
The first storage 52 stores various data and various computer programs therein. The various data includes recipe data. The recipe data indicates a plurality of recipes. Each of the recipes defines processing details and processing procedures for the substrates W, for example. For example, each of the recipes defines a timing when the processing liquid is used in substrate processing by the processing unit SP and a flow rate per unit time of the processing liquid. The timing when the processing liquid is used indicates a time at which use of the processing liquid starts and a time at which the use of the processing liquid ends. That is, the timing when the processing liquid is used indicates a period from a start to an end of use of the processing liquid. The flow rate per unit time of the processing liquid indicates an amount of use per unit time of the processing liquid.
The first storage 52 includes a main storage device. The main storage device is semiconductor memory, for example. The first storage 52 further includes an auxiliary storage device. The auxiliary storage device includes at least one of semiconductor memory and a hard disk drive, for example. The first storage 52 may include a removable medium.
The controller 53 includes a processor. The controller 53 includes as the processor a central processing unit (CPU) or a micro processing unit (MPU), for example. The controller 53 controls operation of each element of the substrate processing apparatus 1 based on the computer programs and the data stored in the first storage 52.
Furthermore, the controller 53 creates the DIW use plan described with reference to
Furthermore, upon receiving the readjustment instruction RA and the management information ASC via the first communication section 51, the controller 53 creates a DIW use plan (time schedule P) that causes the total DIW flow rate to be equal to or lower than the threshold value TH by referring to the management information ASC. In detail, the controller 53 adjusts the DIW use plan (time schedule P) of the substrate processing apparatus 1 by referring to the DIW use plans (time schedules P) of the other substrate processing apparatuses 1 installed in the same area A as described with reference to
The group management device 2 will be described next with reference to
The second communication section 201 is wired or connected wirelessly to the network NW. The second communication section 201 is a communication tool and may be a network interface controller, for example. The second communication section 201 performs communication with each substrate processing apparatus 1 connected to the network NW.
The second communication section 201 receives the DIW use plan described with reference to
The second storage 202 stores various data and various computer programs therein. Each of the various data includes the threshold value TH described with reference to
The processing section 203 includes a processor. The processing section 203 includes a CPU or a MPU as the processor, for example. The processing section 203 executes various processing based on the computer programs and the data stored in the second storage 202. Specifically, the processing section 203 generates the total flow rate information AFR and the management information ASC described with reference to
Processing executed by the processing section 203 of the group management device 2 will be described next with reference to
As depicted in
After generating the total flow rate information AFR in the first area A1, the processing section 203 determines whether or not the DIW total flow rate in the first area A1 exceeds the threshold value TH based on the total flow rate information AFR and the threshold value TH (Step S2).
If the processing section 203 determines that the DIW total flow rate in the first area A1 does not exceeds the threshold value TH (No in Step S2), the processing depicted in
More specifically, the processing section 203 specifies based on the management information ASC a substrate processing apparatus 1 that uses the pure water DIW in a time zone during which the DIW total flow rate exceeds the threshold value TH. The processing section 203 determines (determination processing) one of the substrate processing apparatuses 1 that uses the pure water DIW in the time zone during which the DIW total flow rate exceeds the threshold value TH to be the instruction target apparatus based on a prescribed condition. After execution of the determination processing, the processing section 203 transmits the readjustment instruction RA to the instruction target apparatus via the second communication section 201.
In transmission of the readjustment instruction, the processing section 203 transmits to the instruction target apparatus the management information ASC of the first area A1 (area A in which the instruction target apparatus is installed) via the second communication section 201 in the present embodiment. As a result of transmission, the DIW use plans (time schedules P) of the other substrate processing apparatuses 1 installed in the first area A1 (area A in which the instruction target apparatus is installed) are transmitted to the instruction target apparatus.
Processing executed by the controller 53 of the computer CM1 included in a substrate processing apparatus 1 will be described next with reference to
As depicted in
After adjustment of the DIW use plan (time schedule P), the controller 53 transmits the adjusted DIW use plan (time schedule P) to the group management device 2 via the first communication section 51 (Step S12). The processing depicted in
The determination processing (Step S3 in
Specifically, as depicted in
The processing section 203 determines one of the substrate processing apparatuses 1A to 1D to be an instruction target apparatus based on the reception times at which the DIW use plans have been received from the respective substrate processing apparatuses 1A to 1D (Step S302). The processing depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest transmission timing to be an instruction target apparatus. That is, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest reception time at which the DIW use plan has been received to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively early timing when the time schedule P is created can be executed with priority. As a result, decrease in throughput of the substrate processing apparatus 1 with a relatively early timing when the time schedule P is created can be inhibited.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest transmission timing to be an instruction target apparatus. That is, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest reception time at which the DIW use plan is received to be an instruction target apparatus. In the above configuration, decrease in throughput by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively late timing when the time schedule P is created can be inhibited. As a result, throughputs in the area A in which the instruction target apparatus is installed can be averaged.
In the substrate processing apparatus 1 illustrated in
Specifically, as depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the shortest substrate processing period to be an instruction target apparatus. In the above configuration, throughputs in an area A in which the instruction target apparatus is installed can be averaged.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the longest substrate processing period to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively short substrate processing period can be executed with priority. As a result, decrease in throughput of a substrate processing apparatus 1 with a relatively short substrate processing period can be inhibited.
Specifically, as depicted in
The processing section 203 determines one of the substrate processing apparatuses 1A to 1D to be an instruction target apparatus based on the processing end times (Step S322). The processing depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest processing end timing (processing end time) to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively early processing end timing (processing end time) can be executed with priority. As a result, decrease in throughput of the substrate processing apparatus 1 with a relatively early processing end timing (processing end time) can be inhibited.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest processing end timing (processing end time) to be an instruction target apparatus. In the above configuration, throughputs in an area A in which the instruction target apparatus is installed can be averaged.
Specifically, as illustrated in
The processing section 203 determines one of the substrate processing apparatuses 1A to 1D to be an instruction target apparatus based on the substrate bringing-out times (Step S332). The processing depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest substrate bringing-out timing (substrate bringing-out time) to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively earlier substrate bringing-out timing (substrate bringing-out time) can be executed with priority. As a result, decrease in throughput of the substrate processing apparatus 1 with a relatively earlier substrate bringing-out timing (substrate bringing-out time) can be inhibited.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest substrate bringing-out timing (substrate bringing-out time) to be an instruction target apparatus. In the above configuration, throughputs in an area A in which the instruction target apparatus is installed can be averaged.
Specifically, as depicted in
The processing section 203 determines one of the substrate processing apparatuses 1A to 1D to be an instruction target apparatus based on the processing start times (Step S342). The processing depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest processing start timing (processing start time) to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively early processing start timing (processing start time) can be executed with priority. As a result, decrease in throughput of the substrate processing apparatus 1 with a relatively early processing start timing (processing start time) can be inhibited.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest processing start timing (processing start time) to be an instruction target apparatus. In the above configuration, throughputs in an area A in which the instruction target apparatus is installed can be averaged.
Specifically, as depicted in
The processing section 203 determines one of the substrate processing apparatuses 1A to 1D to be an instruction target apparatus based on the substrate bringing-in times (Step S352). The processing depicted in
For example, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the latest substrate bringing-in timing (substrate bringing-in time) to be an instruction target apparatus. In the above configuration, substrate processing by a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has a relatively earlier substrate bringing-in timing (substrate bringing-in time) can be executed with priority. As a result, decrease in throughput of the substrate processing apparatus 1 with a relatively early substrate bringing-in timing (substrate bringing-in time) can be inhibited.
Alternatively, the processing section 203 may determine a substrate processing apparatus 1 of the substrate processing apparatuses 1A to 1D that has the earliest substrate bringing-in timing (substrate bringing-in time) to be an instruction target apparatus. In the above configuration, throughputs in an area A in which the instruction target apparatus is installed can be averaged.
The time schedule P created by the controller 53 of a substrate processing apparatus 1 will be described next with reference to
The time schedules P1 to P5 each indicate a flow of processing on a set of substrates W. Specifically, the time schedules P1 to P3 and P5 each indicate a plan according to which a set of substrates W passes the first chemical liquid tank CHB2, the second chemical liquid tank ONB2, the second chemical liquid tank ONB4, and the drying tank LPD2 in the stated order. The time schedule P4 indicates a plan according to which a set of substrates W passes the first chemical liquid tank CHB1, the second chemical liquid tank ONB1, the second chemical liquid tank ONB3, and the drying tank LPD1 in the stated order. The flow of the processing defined in each of the time schedules P1 to P5 starts in the stated order.
In the example illustrated in
In the example illustrated in
Adjustment amount calculation processing executed by the controller 53 of a substrate processing apparatus 1 will be described next with reference to
Specifically, the controller 53 of the substrate processing apparatus 1B calculates as the adjustment amount a delay amount (delay time) by which the start time of the time schedule P4 is shifted to time t12 or later. The controller 53 of the substrate processing apparatus 1B creates a time schedule P in which the time schedule P4 and the time schedule P5 are delayed based on the delay amount, and transmits the created time schedule P to the group management device 2. Thereafter, the controller 53 of the substrate processing apparatus 1B re-acquires the readjustment instruction RA and the management information ASC from the group management device 2 to calculate a delay amount that causes the start time of the time schedule P4 to be the time t14 or later. The controller 53 of the substrate processing apparatus 1B creates a time schedule P in which the time schedule P4 and the time schedule P5 are delayed based on the delay amount. As a result, the time schedule P is adjusted as illustrated in
The time schedule P created by the controller 53 of a substrate processing apparatus 1 will be described next with reference to
As illustrated in
The time schedule P1 includes processing steps P1-1 to P1-6. The time schedule P2 includes processing steps P2-1 to P2-6. The time schedule P3 includes processing steps P3-1 to P3-6. The flows of the processing defined in the time schedules P1 to P3 starts in the stated order.
As illustrated in
The processing step P1-1 is a step of combining two lots 1 and 2 of substrates W into a set of the substrates W in the buffer unit BU. The processing step P2-2 is a step of performing preprocessing using the first chemical liquid tank CHB2. The processing step P3-3 is a step of performing cleaning and etching using the second chemical liquid tank ONB2. The processing step P1-4 is a step of performing cleaning and etching using the second chemical liquid tank ONB4. The processing step P1-5 is a step of performing drying using the drying tank LPD2. The processing step P1-6 is a step of performing processing to separate the set of substrates W into the two lots 1 and 2 in the buffer unit BU.
The processing step P2-1 is a step of combining the lots 3 and 4 of substrates W into a set of the substrates W in the buffer unit BU. The processing step P2-2 is a step of performing preprocessing using the first chemical liquid tank CHB1. The processing step P2-3 is a step of performing cleaning and etching using the second chemical liquid tank ONB1. The processing step P2-4 is a step of performing cleaning and etching using the second chemical liquid tank ONB3. The processing step P2-5 is a step of drying using the drying tank LPD1. The processing step P2-6 is a step of performing processing to separate the set of substrates W into the lots 3 and 4 in the buffer unit BU.
The processing step P3-1 is a step of combining lots 5 and 6 of substrates W into a set of the substrates W in the buffer unit BU. The processing step P3-2 is a step of performing preprocessing using the first chemical liquid tank CHB2. The processing step P3-3 is a step of performing cleaning and etching using the second chemical liquid tank ONB2. The processing step P3-4 is a step of performing cleaning and etching using the second chemical liquid tank ONB4. The processing step P3-5 is a step of performing drying using the drying tank LPD2. The processing step P3-6 is a step of performing processing to separate the set of substrates W into the lots 5 and 6 in the buffer unit BU.
In the example illustrated in
In the example illustrated in
In the example illustrated in
The controller 53 of the substrate processing apparatus 1B adjusts a time schedule P, in the time schedules P1 to P3, of which processing does not yet start at the current time tc. That is, the controller 53 of the substrate processing apparatus 1B adjusts a time schedule P for non-processed substrates W. In the example illustrated in
Specifically, the controller 53 of the substrate processing apparatus 1B delays the time schedule P3 so that the time at which the pure water DIW is used in the processing step P3-4 differs from the time at which the pure water DIW is used in the processing step P2-4. As a result, the DIW total flow rate remains equal to or lower than the threshold value TH in all time. Furthermore, delay of the time schedule P3 delays the processing start time of the time schedule P3 from time ts1 to time ts2 and delays the processing end time of the time schedule P3 from time tE1 to time tE2.
Here, the adjustment amount calculation processing executed by the controller 53 of a substrate processing apparatus 1 will be described next with reference to
Embodiments of the present disclosure have been described so far with reference to the drawings (
The drawings schematically illustrate elements of configuration in order to facilitate understanding. Properties such as thickness, length, number, and intervals of each element of configuration illustrated in the drawings may differ from actual properties thereof in order to aid preparation of the drawings. Also, the configuration of each element of configuration described in the above embodiments is merely an example and not intended as specific limitations. Various alterations may be made within a scope not substantially departing from the effects of the present invention.
For example, a configuration in which the DIW use plan (time schedule P) is adjusted so that the total flow rate of the pure water DIW supplied from a single resource system PF remains equal to or lower than the threshold value TH is described in the embodiment described with reference to
Furthermore, in the embodiment described with reference to
The controller 53 of a substrate processing apparatus 1 (instruction target apparatus) calculates an adjustment amount (delay amount) of the DIW use plan (time schedule P) in the embodiment described with reference to
In the embodiment described with reference to
As illustrated in
Substrates W are loaded at the load ports LP. More specifically, the accommodation sections 10 described with reference to
The processing units 301 form a plurality of towers TW (four towers TW in
The fluid cabinet 302 contains the processing liquid. The fluid boxes 303 are each provided for a corresponding one of the towers TW. The processing liquid in the fluid cabinet 302 is supplied to all the processing units 301 included in the towers TW corresponding to the respective fluid boxes 303 via the corresponding fluid boxes 303.
The processing units 301 each process a substrate W by supplying the processing liquid to the substrate W. The processing liquid includes the pure water DIW and the chemical liquid.
The computer CM2 controls operation of each element of the substrate processing apparatus 1E. For example, the computer CM2 controls the load ports LP, the indexer robot IR, the center robot CR, and the processing units 301.
The computer CM2 creates and transmits to the group management device 2 a DIW use plan (time schedule P) likewise the computer CM1 described with reference to
Note that in a case of each of the substrate processing apparatuses 1 being of single-wafer type, the substrate processing period described with reference to
Furthermore, in a case of each of the substrate processing apparatuses 1 being of single-wafer type, the processing end time is a substrate bringing-out time. That is, the processing end timing is a timing when a processed substrate W is loaded on a load port LP by the indexer robot IR. More specifically, the processing end timing is a timing when a processed substrate W is accommodated in an accommodation section 10 loaded on a load ports LP. Similarly, in a case of each of the substrate processing apparatuses 1 being of single-wafer type, the processing start timing is a substrate bringing-in timing. That is, the processing start timing is a timing when a non-processed substrate W loaded on a load port LP is transported into the substrate processing apparatus 1 by the indexer robot IR. More specifically, the processing start timing is a timing when a non-processed substrate W is transported into the substrate processing apparatus 1 by the indexer robot IR from an accommodation section 10 loaded on a load port LP.
Number | Date | Country | Kind |
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2021-155058 | Sep 2021 | JP | national |