Cross-reference to related applications:
Application Ser. No. 29/606,718, filed herewith and entitled “Substrate Processing Unit”; and
Application Ser. No. 29/606,724, filed herewith and entitled “Substrate Processing Unit”.
FIG. 1 is a front, top and right side perspective view of a substrate processing unit according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a reference perspective view thereof showing an example of a potential using condition with a cover.
The broken lines are for illustrative purposes only and form no part of the claimed design.