BRIEF DESCRIPTION OF THE DRAWINGS
Many aspects of the present substrate structure and the present method can be better understood with reference to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present substrate structure and the present method.
FIG. 1 is a schematic, cross-sectional view of a substrate structure in accordance with a first embodiment;
FIG. 2 is a schematic, plan view of the substrate structure of FIG. 1;
FIG. 3 is a chart of a function W=f (H) in accordance with the first embodiment;
FIG. 4 is a schematic, plan view of a substrate structure in accordance with a second embodiment;
FIG. 5 is a schematic, cross-sectional view of a substrate structure in accordance with a third embodiment;
FIG. 6 is a chart of a function W=f (H) in accordance with the third embodiment;
FIG. 7 is a schematic, cross-sectional view of a substrate structure in accordance with a fourth embodiment;
FIG. 8 is a chart of a function W=f (H) in accordance with the fourth embodiment;
FIG. 9 is a schematic, cross-sectional view of a substrate structure in accordance with a fifth embodiment;
FIG. 10 is a chart of a function W=f (H) in accordance with the fifth embodiment;
FIG. 11 is a schematic, plan view of a substrate structure in accordance with a sixth embodiment;
FIGS. 12 and 13 are schematic cross-sectional views illustrating successive stages of a method for manufacturing the substrate structure of FIG. 1;
FIGS. 14 to 18 are schematic cross-sectional views illustrating successive stages of another method for manufacturing the substrate structure of FIG. 1;
FIGS. 19 to 22 are schematic cross-sectional views illustrating successive stages of a method for forming a patterned layer using the substrate structure of FIG. 1; and
FIG. 23 is a schematic cross-sectional view of a typical substrate structure.