The broken lines in
The broken lines in
Number | Name | Date | Kind |
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D406852 | Burkhart et al. | Mar 1999 | S |
D425919 | Burkhart | May 2000 | S |
D490827 | Okugawa | Jun 2004 | S |
D621804 | Sip | Aug 2010 | S |
D664249 | Wang | Jul 2012 | S |
D708651 | Martin | Jul 2014 | S |
D716742 | Jang | Nov 2014 | S |
D723077 | Sakata | Feb 2015 | S |
9490150 | Tzu et al. | Nov 2016 | B2 |
9779971 | Ravi et al. | Oct 2017 | B2 |
D813181 | Okajima | Mar 2018 | S |
D825505 | Hanson | Aug 2018 | S |
D830981 | Jeong | Oct 2018 | S |
20080190367 | Lee et al. | Aug 2008 | A1 |
20110031111 | Kobayashi | Feb 2011 | A1 |
20120329000 | Hirakawa | Dec 2012 | A1 |
20140008349 | Tzu et al. | Jan 2014 | A1 |
20140011153 | Lindley | Jan 2014 | A1 |
20140144901 | Cuvalci et al. | May 2014 | A1 |
20140217665 | Cuvalci et al. | Aug 2014 | A1 |
20160002778 | Ravi et al. | Jan 2016 | A1 |
20180044783 | Sheelavant | Feb 2018 | A1 |
20190131163 | Kuno | May 2019 | A1 |
20190318944 | Fujisawa | Oct 2019 | A1 |
20200343120 | Miyaya et al. | Oct 2020 | A1 |
Number | Date | Country |
---|---|---|
2008-244079 | Oct 2008 | JP |
D1547357 | Apr 2016 | JP |
2007-0017255 | Feb 2007 | KR |
D163540 | Oct 2014 | TW |
D177006 | Jul 2016 | TW |
D193203 | Oct 2018 | TW |
D197827 | Jun 2019 | TW |
Entry |
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“SemiXicon Electrostatic Chuck”. Found online Sep. 29, 2020 at semixicon.com. Reference dated Jun. 17, 2017. Retrieved from https://web.archive.org/web/20170617035614/http://www.semixicon.com/. (Year: 2017). |
“AMAT MCA E-Chuck”. Found online Sep. 29, 2020 at ebay.com. Reference dated May 30, 2017. Retrieved from https://www.ebay.com/itm/AMAT-0010-03774-HEATER-ASSY-300mm-AMAT-MCA-E-Chuck-ESC-/262005122022. (Year: 2017). |
“NTK Ceratec—Electrostatic Chuck”. Found online Sep. 29, 2020 at dksh.com. Reference dated Aug. 7, 2017. Retrieved from https://tineye.com/search/3be6e76355441efd8d67fc67d0912dac27f2b87d?sort=crawl_date&order=asc&page=1. (Year: 2017). |
International Search Report for PCT/US2020/042920, dated Nov. 6, 2020. |
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