The present invention relates to the field of superconducting integrated circuits, especially with application to quantum computing.
All references cited herein are expressly incorporated herein by reference in their entirety, for all purposes.
There has been much attention recently to the use of superconducting integrated circuits for quantum computing, whereby the quantum bits or qubits may comprise Josephson junctions. These quantum computing systems are generally designed to operate at very low temperatures much less than 1 K. These systems further require control and output circuitry, which may also comprise superconducting circuits. See, for example, U.S. Pat. Nos. 7,135,701; 7,335,909; 7,002,174; 7,418,283; 6,838,694; 6,495,854; 6,979,836; 6,803,599; 7,253,654; 2005/0250651; 6,784,451; 6,459,097; 7,932,514; 7,268,576; 6,627,915; 7,800,395; 7,880,529; 7,605,600; 6504172; 8,174,305; 8,102,185; 7,015,499; 6,984,846; 7,687,938; 7,639,035; 8,648,331; 6,960,780; 8,247,799; 8,169,231; 6,897,468; 6,614,047; 8,117,000; 9,111,230; 7,018,852; 6,930,320; 6,900,454; 7,364,923; 6,649,929; 9,177,814; 8,659,007; 8,670,807; 6,573,202; 7,990,662; 8,611,974; 7,969,178; 7,876,145; 7,145,170; 7,843,209; 8,018,244; 9,524,470; 8,654,578; 8,928,391; 8,620,855; 7,858,966; 8,854,074; 9,350,460; 9,947,856; 9,059,305; 9,425,804; 9,633,314; 9,444,430; 7,876,248; 2004/0167036; 9,589,236; 7,479,652; 8,975,912; 9,059,674; 8,872,360; 7,498,832; 9,178,154; 8,294,138; 8,035,540; 8,195,596; 8,421,053; 2018/0137430; 7,932,515; 5,917,322; 8,111,083; 9,355,364; 9,691,962; 8,076,666; and 7,619,437.
A particular need is for amplifier circuits that can amplify the very weak microwave-frequency output signals from the superconducting quantum computing circuits. These amplifiers need to be extremely low in noise and power dissipation, and preferably can operate in the deep cryogenic environment of the quantum computing circuits. Traditional semiconductor transistor amplifiers are less than ideal in this environment. See, for example, U.S. Pat. No. 7,724,083; 2016/0308502; and U.S. Pat. No. 8,861,619.
Other applications for low-noise broadband superconducting microwave amplifiers include frequency multiplexed arrays of superconducting photon detectors and microwave receivers for astronomical systems. See, for example, U.S. Pat. No. 7,253,701; see also O. Noroozian, et al., “Superconducting parametric amplifiers: The next big thing in (Sub)millimeter-wave receivers”, Proc. URSI National Radio Science Meeting (2018), ieeexplore.ieee.org/abstract/document/8299679.
One type of amplifier, known as a parametric amplifier, comprises at least one nonlinear reactive device, such as a nonlinear inductor, and can be used to amplify high-frequency signals. As shown in
While a single-stage parametric amplifier may work well at frequencies that are not too high, a distributed parametric amplifier embedded in a transmission line may exhibit better performance over a broad range of microwave frequencies. This may be called a “traveling-wave parametric amplifier”, or TWPA. A TWPA may comprise a basic cell which may be connected in a linear array of hundreds of cells or more.
An ideal linear transmission line comprises series inductors and shunt capacitors, as shown in
A superconducting Josephson junction is characterized by a lossless supercurrent I=Ic sin(ϕ), where Ic is the critical current, and ϕ is the superconducting phase difference across the junction. The Josephson junction generally comprises a tunnel junction between two superconducting layers (such as niobium or aluminum), separated by a thin insulating layer (such as aluminum oxide) on the 1-nm scale. In the low-current regime for I<Ic, the Josephson junction may be regarded as an ideal lossless nonlinear inductor, with inductance value (for small currents) LJ=ℏ/[2eIc cos(ϕ))]=Φ0/[2πIc cos(ϕ)], where Φ0=h/2e=2.07 pH-mA is the magnetic flux quantum. For example, if Ic=0.1 mA, LJ will be of order 3 pH, depending on the phase bias ϕ.
A Josephson junction can also generate single-flux-quantum (SFQ) voltage pulses for currents above Ic, which provides the basis for rapid-single-flux-quantum (RSFQ) digital logic. However, this regime is outside the scope of the present application, which focuses on small input currents below Ic. (Note that, in some regimes of operation, input signals to the present invention may be above Ic.) Furthermore, a real Josephson junction may also have an effective shunt capacitance and a shunt resistance. There may also be a component of linear inductance associated with the superconducting leads of the Josephson junction. In the present application, the nonlinear inductive component LJ is typically expected to be dominant.
Josephson parametric amplifiers are known in the prior art, both as single-stage amplifiers, and more recently, TWPAs. See, for example, US 2016/0308502; U.S. Pat. Nos. 9,548,742; 9,923,538; 8,878,626; 9,843,312; 9,697,473; 9,806,711; 9,985,614; 2018/0351521; 2017/0077381; U.S. Pat. No. 9,948,254; 2018/0034425; U.S. Pat. No. 9,858,532; 2018/0138987; and 2018/0198427.
See also the following articles in the non-patent literature:
There is another type of superconducting TWPA designed without Josephson junctions, where the nonlinear element comprises a superconducting thin film with nonlinear kinetic inductance. However, this nonlinearity is much weaker than that in a Josephson junction, so that a very long transmission line is needed to obtain sufficient gain, making compact amplifiers very difficult to achieve. See U.S. Pat. No. 8,878,626; also the following non-patent literature:
Two types of Josephson TWPAs have recently been disclosed in the prior art. In the basic Josephson TWPA shown in
An alternative Josephson TWPA is shown in
It is important to note that the phase bias changes the nature of the nonlinearity. Specifically, the second-order nonlinear coefficient is proportional to sin(ϕ), and the third-order coefficient is proportional to cos(ϕ). In greater detail (see A. Zorin, “Josephson traveling wave parametric amplifier with 3-wave mixing”, Phys. Rev. Applied, vol. 6, 034006 (2016)), the junction current I is given by
I(ϕ+δϕ)≈Ic sin(ϕ)(1−δϕ2/2)+Ic cos(ϕ)(δϕ−δϕ3/6),
For the unbiased junction in
In contrast, in the TWPA of
The prior art fails to disclose a compact Josephson TWPA that can achieve high gain, low noise, and wide microwave bandwidth with improved control over tuning, compared to the prior art of either
In order to allow independent control of both second and third-order Josephson nonlinearities, a three-wave mixing “Symmetric Traveling Wave Parametric Amplifier” (STWPA) was developed, based on a new symmetric rf-SQUID (
Basics of the TWPA are presented with three-wave mixing, and the symmetric approach to TWPA design is explained showing its advantages.
A preferred embodiment of such a structure has been simulated, and a preliminary prototype device successfully fabricated and tested. Experimental measurements demonstrated TWPA operation at a temperature of 4.2 K, showing a gain up to 17 dB and a 3-dB bandwidth of 4 GHz. Further improvements in performance are anticipated as the device is further optimized. See, Alessandro Miano, and Oleg A. Mukhanov, “Symmetric Traveling Wave Parametric Amplifier”, IEEE Trans. Appl. Supercond. 2019, arxiv.org/abs/1811.02703 (Applied Superconductivity Conference, October 2018).
As indicated in
A symmetric rf-SQUID was designed in a niobium integrated circuit process with Josephson junctions having critical current density Jc=100 A/cm2 (1 μA/μm2) at T=4.2 K. Typical critical currents Ic were selected to be in the range from 4 to 12 μA, corresponding to junction sizes ˜2-3 μm across. Loop inductances L were selected so that βL≈0.8 for each rf-SQUID, maintaining the non-hysteretic mode. Typical values were L˜30 pH. The small parasitic inductances Lp connecting the two rf-SQUIDs were designed to be as small as possible, typically ˜3 pH or less. A current in a superconducting control line is inductively coupled to the SQUID loop on each side via a mutual inductance M=kL, where k<1. Control current up to 1 mA were used to produce magnetic flux in the loops up to Φ0=2 fWb. Several different devices with different parameters have been designed, but in each case, the device is preferably symmetric, with Ic and L essentially the same on both sides of the device.
Each of the two Josephson junctions in the symmetric rf-SQUID will have its own phase ϕ, loop flux Φ, and control current I. The symmetric and antisymmetric combinations of these parameters are particularly important, for example ϕ+=(ϕ1+ϕ2)/2, ϕ−=(ϕ1−ϕ2)/2, Φ+=(Φ1+Φ2)/2, and Φ−=(Φ1−Φ2)/2.
In order to construct a symmetric TWPA (STWPA) from the symmetric rf-SQUID, N of these SQUIDs must be integrated with appropriate values of capacitance C, to create a nonlinear transmission line with an effective characteristic impedance Z0. The prototype circuits were designed to match Z0=50 ohms, in order to match external I/O lines for testing. For a typical symmetric rf-SQUID with an effective inductance L˜10 pH (which depends somewhat on values of control parameters), a capacitance C˜4 fF is required to achieve Z0=(L/C)0.5=50 ohms.
A repeated cell for the STWPA may comprise a single symmetric rf-SQUID with a capacitive shunt to ground, as shown in
An example of the operation of such a prototype STWPA is shown in
A further illustration of the performance of this device is shown in
The nonlinearity in the STWPA also causes conversion of pump power to the idler frequency fi=fp−fs (if fp>fs) or fs−fp (if fs>fp), reflecting the second-order parametric conversion process (three-wave mixing). This suggests that this device could also be used as a coherent up-down converting RF mixer for weak signals, replacing a more conventional resistive mixer. Such a superconducting parametric mixer would be extremely low in power dissipation, and might even be used at ultra-low temperatures below 1 K, such as for a quantum computing element in a dilution refrigerator.
The present technology also provides a more general method for parametric amplification of weak signals. As shown in
In summary, a system and method are disclosed for a superconducting traveling-wave parametric amplifier (TWPA) with improved control and performance. In a preferred embodiment, the amplifier comprises an integrated array of symmetric rf-SQUIDs in a transmission line structure.
A prototype device was fabricated using niobium superconducting integrated circuits, and confirmed predicted performance, with a maximum gain up to 17 dB and a bandwidth of 4 GHz.
A similar device can be applied as a low-noise, low-dissipation microwave amplifier for output from a superconducting quantum computer, or as a preamplifier, switch, or frequency converter for a sensitive microwave receiver, or as an output amplifier for a frequency-multiplexed superconducting detector array.
It is thus an object of the invention to disclose a traveling-wave parametric amplifier, comprising a plurality of amplifier stages, where each stage comprises a serial inductor and a shunt capacitor, and the successive stages are configured to form a lumped-element microwave transmission line. The amplification is enabled by the property that the serial inductor is a nonlinear function of the total signal in the inductor, which comprises at least two Josephson junctions. The amplifier is configured to have an input port, and output port, and two control ports. The input signal to be amplified is combined with a microwave pump that lies outside the bandwidth of the input signal, and the combination is fed into the input port of the amplifier. The output port is configured to generate an output microwave signal that comprises an amplified replica of the input signal. The control ports are configured to accept two independent low-frequency currents, each of which modulates the nonlinear inductance of the serial inductor of each amplifier stage.
It is also an object to provide a traveling-wave parametric amplifier, comprising: an input port configured to receive a signal comprising a combination of an input microwave signal, and a microwave pump signal having a pump frequency which is outside a bandwidth of the input microwave signal; a plurality of successive repeated amplifier stages configured to form a microwave transmission line, each amplifier stage comprising a shunt capacitor and a serial inductor, an inductance of the serial inductor of each amplifier stage being a nonlinear function of a total signal in the serial inductor; at least two control ports configured to accept at least two control signals, each of which modulates the inductance of the serial inductor of each amplifier stage; and an output port, configured to present an output microwave signal comprising an amplified replica of the microwave input signal. Each serial inductor may comprise at least two Josephson junctions. The Josephson junctions may comprise the superconductors niobium or aluminum. The plurality of successive repeated amplifier stages may be configured to operate at a temperature of 4.2 K or less, e.g., <1 K.
The serial inductor of each amplifier stage may comprise at least one Radio Frequency superconducting quantum interference device (rf-SQUID), comprising a Josephson junction in parallel with an inductive loop. The serial inductor of each amplifier stage may comprise two parallel rf-SQUIDs. The two parallel rf-SQUIDs may be mutually symmetrical, constituting a symmetric rf-SQUID. The inductive loop of each rf-SQUID may be configured to inductively couple magnetic flux from a respective control signal in proximity to the loop.
The serial inductor of each amplifier stage may exhibit a second-order nonlinearity and a third-order nonlinearity, the two control signals being configured to separately control the second-order nonlinearity and the third-order nonlinearity of each amplifier stage.
The traveling-wave parametric amplifier may comprise at least 100 repeated stages of the plurality of successive repeated amplifier stages.
The input port may be configured to receive an input microwave signal having frequency components in the range of 3-10 GHz and a power level of −120 dBm or less. The microwave pump signal may have a pump frequency of about 10 GHz and a pump power level of about −65 dBm. The output port may be configured to present the output microwave signal exhibiting a signal power gain greater than 12 dB with respect to the input microwave signal. Each control signal may comprise an electrical current between about 1 μA and 10 mA, and preferably 100 μA-1 mA.
The input port and/or output port may match a microwave impedance of about 50 ohms. The output port may be further configured to present a frequency-shifted replica of the input signal at a frequency 2fp−fs, where fp is the pump frequency and fs is a component of the input microwave signal.
The plurality of successive repeated amplifier stages may be responsive to the microwave pump signal to increase a power of the output microwave signal by at least 20 dB with respect to an absence of the pump microwave signal.
The input port may be configured to receive signals from superconducting qubits and/or from superconducting photon detectors.
It is a further object that the nonlinear inductor of this TWPA comprises at least one rf-SQUID comprising a Josephson junction in parallel with an inductive loop, or preferably two such rf-SQUIDs connected in parallel. These two rf-SQUIDs may be symmetrical, comprising a symmetric rf-SQUID. Each of the two loops of this symmetrical rf-SQUID is preferably inductively coupled to current from a respective control line in proximity to each loop, which couples magnetic flux into each loop, magnetically tuning its nonlinearity. The nonlinearity may comprise both a second-order and a third-order nonlinearity, which may be separately tuned by the two control lines.
It is a yet further object that this TWPA may be fabricated on a single chip using integrated circuit techniques, and that the Josephson junctions may comprise niobium, for devices designed to operate at 4.2 K, or alternatively they may comprise aluminum, for devices designed to operate at less than 1 K. The number of amplifier stages in the TWPA may be 100 or more.
In a still further object, this TWPA may be designed to match input and output lines with characteristic impedance of about 50 ohms, and for an input signal having frequency components in the range from 3-10 GHz, and a very low input power of −120 dBm or less. The pump power is typically much larger, of order −65 dBm, at a frequency that is outside the input signal band, but which may also be around 10 GHz. The control lines may be designed for control currents of order 1 mA, in order to provide sufficient tunability of the nonlinear inductance of the TWPA. The signal power gain of the TWPA may be greater than 12 dB, and the effect of turning off the pump power may attenuate the output signal power by 20 dB or more.
An additional object describes the TWPA as an output amplifier for weak signals from cryogenic quantum computers or superconducting photon detectors. Alternatively, the TWPA may be used as a frequency-shifted amplifier, whereby the output port further generates a frequency-shifted replica of the input signal at a frequency fp−fs, where fp is the pump frequency and fs is a component of the input signal.
It is also an object to disclose a method of amplifying a weak broadband microwave input signal at cryogenic temperatures, comprising the steps of:
It is also an object to provide a method of amplifying a weak broadband microwave input signal emitted from a device operating at cryogenic temperatures, comprising: providing a series of nonlinear tunable superconducting inductors, each having nonlinear properties tunable using external controls, in a series array, each nonlinear tunable superconducting inductor having an associated shunt capacitor, the series array forming a transmission line that comprises a distributed amplifier with input, output, and control lines; cooling the distributed amplifier to a cryogenic temperature below the critical temperature of the nonlinear tunable superconducting inductors; combining the input signal with a strong microwave pump signal that is offset in frequency from the input signal to form a combined signal; coupling the combined signal into the input port of the distributed amplifier; measuring the output of the distributed amplifier for gain, bandwidth, and distortion; and tuning nonlinearities of the nonlinear tunable superconducting inductors using the control lines to optimize the performance of the distributed amplifier, based on the gain, bandwidth, and distortion.
It is a further object to provide a tunable superconducting microwave inductor, comprising: two radio frequency superconducting quantum interference devices (rf-SQUIDs) in parallel, each rf-SQUID comprising a Josephson junction in parallel with an inductive loop, an inductance value of the tunable superconducting microwave inductor being dependent on an amplitude of a microwave current in the tunable superconducting microwave inductor, comprising a nonlinear function of the amplitude with terms that are at least one of quadratic and cubic in the amplitude; and a control port configured to receive a control current coupling magnetic flux into the inductive loop of each rf-SQUID, to thereby tune the inductance value and the nonlinearity of the inductance value of the tunable superconducting microwave inductor. The tunable superconducting microwave inductor may further comprise a plurality of tunable superconducting microwave inductors, each having an associated capacitor, provided as respective repeated stages in a microwave transmission line configured to function as a traveling-wave parametric amplifier; wherein a gain and a bandwidth of the traveling-wave parametric amplifier is tunable by the control current received at the control port.
Finally, it is yet another object to provide a tunable superconducting microwave inductor, comprising two rf-SQUIDs in parallel, each rf-SQUID comprising a Josephson junction in parallel with an inductive loop, whereby the inductance value of the tunable inductor is dependent on the amplitude of the microwave current in the inductor, comprising a nonlinear function of amplitude with terms that are quadratic and/or cubic in the amplitude, and whereby application of control currents coupling magnetic flux into the inductive loops permits tuning of the inductance value of the tunable inductor and its nonlinearities. This tunable inductor may be combined with a fixed capacitor to form a repeated stage in a microwave transmission line, which can function as a traveling-wave parametric amplifier (TWPA), whereby the gain and bandwidth of the TWPA may be optimized by tuning of the tunable inductors using the control currents.
Other objects will become apparent through a review of the description provided herein.
Superconducting quantum computing demands non-dissipative, quantum-limited cryogenic amplifiers. In order to improve scalability to many qubits, wide-bandwidth amplifiers are required for readout of multiple qubits which can be sensed with a single amplifier. Josephson Parametric Amplifiers (JPAs) were introduced to meet these needs, and proposed in many different designs. As a parametric amplifier, the JPA transfers power from a strong microwave tone (the pump) to a weak one (the signal), as well as to the idle frequency fi=fp−fs (see
An alternative approach is built around a superconducting transmission line, consisting of superconducting inductors and capacitors (see
Recently, the Josephson Traveling Wave Parametric Amplifier (JTWPA) was introduced as a nonlinear transmission line containing Josephson junctions as the nonlinear inductor. Two different approaches were demonstrated in the prior art, as depicted in
The rf-SQUID approach uses external flux bias to a tune the nonlinearity, and can take advantage of more efficient second-order nonlinearity. However, with a single DC flux bias, second and third order nonlinearities cannot be independently tuned, limiting the performance.
To allow independent control of both second and third order Josephson nonlinearities, two independent control currents are needed.
The Symmetric Traveling Wave Parametric Amplifier (STWPA) according to the present technology is based on a new symmetric rf-SQUID scheme. \
Experimental measurements of the first wafer demonstrated the correct TWPA operation at 4.2 K, showing a gain up to 17 dB and a 4 GHz 3 dB bandwidth.
The key to understanding the performance of the STWPA lies in the nonlinear behavior of the symmetric rf-SQUID with two coupling loops. A symmetric rf-SQUID is obtained by shunting two identical rf-SQUIDs. Taking into account a small parasitic inductance Lp connecting the two rf-SQUIDs, the schematic in
ϕ+=(ϕ1+ϕ2)/2,ϕ−=(ϕ1−ϕ2)/2,Φ+=(Φ1+Φ2)/2, and Φ−=(Φ1−Φ2)/2, as:
ϕ++βL(1+k)sin(ϕ+)cos(ϕ−)=2πΦ−/Φ0,
ϕ++βL[(1+k)/(1+α)]sin(ϕ−)cos(ϕ+)=[2π/(1+α)]Φ+/Φ0,
One can further show that for reasonably large values of α, the second-order and third-order nonlinearity parameters are given respectively by β=(βL/2) cos(ϕ−) sin(ϕ+) and γ=(βL/6) cos(ϕ−) cos(ϕ+), which are plotted in
To integrate a symmetric rf-SQUID into a TWPA, it must be coupled to a capacitor C shunted to ground to form a unit cell, which is repeated to form a transmission line. The SQUID inductance is given by Lsym≈L/[2(1+βL cos(ϕ+) cos (ϕ−)]. This also means that the effective characteristic impedance of the TWPA, Z0=(Lsym/C)0.5 is somewhat dependent on these phase parameters. A TWPA that is designed to match 50 ohms for one set of parameters may be slightly mismatched for other parameters.
It is also necessary to cut the small coupling inductance Lp in half to attach the cells together, in order to maintain the symmetry to the device, as shown in
All of the symmetric rf-SQUIDs in a given STWPA are typically essentially identical, and all are flux-biased by the same control currents I1 and I2 along the entire length of the lines. The measurements indicate that the devices as fabricated were in fact sufficiently similar along the full length. The flux bias was tested as a low-frequency, nominally dc control, but it is believed that switching of this flux bias up to at least MHz frequencies should be feasible; and the SQUID itself should be responsive up to much higher frequencies.
The total number of cells is not arbitrary. Since this is a distributed amplifier, additional cells will tend to increase the gain, at least until the pump starts to be depleted. After this point, however, further cells can actually lead to power reduction due to harmonic generation at the signal frequency. Simulations and measurements have confirmed that of order 100-200 cells can provide useful gain, and can also fit on a 5-mm chip, with some meandering as shown in the chip photograph in
In the samples fabricated, the capacitor was based on two layers of superconducting niobium separated by a thin insulating layer of silicon dioxide (SiO2), with dielectric constant of εr=3.9. For example, if the SiO2 layer is d=100 nm thick, the specific capacitance would be C=εrε0/d=0.35 pF/μm2. So, if Lsym=5 pH and C=2 fF (corresponding to an area of 6 μm2), this would correspond to Z0=(Lsym/C)0.5=50 ohms. A key advantage of using a superconductor for both L and C is that resistive loss is extremely small, corresponding to negligible attenuation due to loss.
Regarding the measurements of amplifier gain using the spectrum analyzer, the gain in the signal channel was defined as Gs=Pon/Poff, where Poff and Pon were the signal power (in dBm units) at the output port (connected to the spectrum analyzer) with the amplifier turned off (bias currents and pump off) and with the amplifier on (bias currents and pump on). The OFF-state values could have been affected by some frequency-dependent mismatch, because the STWPA was designed to match an impedance of 50 ohms with the current bias on. However, with the current bias turned off, the inductance and hence the impedance was shifted slightly. The maximum deviation of the OFF-state signal power due to mismatch was then estimated, resulting in a maximum reflection loss of about 2 dB.
Similar behavior is exhibited for a different STWPA sample in
More generally, for the biases corresponding to ϕ+=π/2, across the entire 4 GHz bandwidth, the difference in output signal power between pump ON and OFF was at least 20 dB, at pump OFF, the This mechanism could then be used as a broadband, non-resonant Pump Driven On/Off RF-Switch. This could play a useful role in many applications, where very weak signals need to be accurately controlled.
Moreover, we verified the correct second-order operation by checking the idler frequency fi=fp−fs at the output port, in addition to the signal frequency. The idler was relatively high in power, reaching values between −135 dB and −123 dB. Nonlinear mixing is also generated at the sum of the component frequencies. This means that the STWPA could be potentially useful also as a coherent Up-Down converting rf-Mixer for weak signals, allowing the direct implementation of wave mixing at 4K or even at the mK stage of a dilution refrigerator. This STWPA approach could help the transition to fully superconducting control electronics, replacing room-temperature mixers. Together with the amplifier itself, these may make the STWPA a versatile system that could perform a wide range of operations with the same on-chip circuit.
In addition to the specific systems described in this application,
Other devices, apparatus, systems, methods, features and advantages of the invention will be or will become apparent to one with skill in the art upon examination of the following figures and detailed description. It is intended that all such additional systems, methods, features and advantages be included within this description, be within the scope of the invention, and be protected by the accompanying claims.
The present application is a Continuation of U.S. patent application Ser. No. 16/402,148, filed May 2, 2019, now U.S. Pat. No. 10,998,869, issued May 4, 2021, the entirety of which is expressly incorporated herein by reference.
Number | Name | Date | Kind |
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9768771 | Naaman | Sep 2017 | B2 |
10998869 | Miano | May 2021 | B2 |
20180034425 | Bell | Feb 2018 | A1 |
20190074801 | Tan | Mar 2019 | A1 |
20190229690 | White | Jul 2019 | A1 |
Number | Date | Country |
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105738838 | Jul 2016 | CN |
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Nation, P. D., “Quantum analysis of a nonlinear microwave cavity-embedded dc SQUID displacement detector”, Physical Review B 78, 104516, Sep. 2008, pp. 1-17 (Year: 2008). |
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20210265964 A1 | Aug 2021 | US |
Number | Date | Country | |
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Parent | 16402148 | May 2019 | US |
Child | 17246535 | US |