Support ring for an interlocking process kit for a substrate processing chamber

Abstract

Description

FIG. 1 is a top, front, right isometric view of a support ring for an interlocking process kit for a substrate processing chamber, showing our new design.

FIG. 2 is a bottom, left, back isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a right side elevation view thereof.

FIG. 8 is a left side elevation view thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3 with the enlargements taken from the dashed-dot encircled portions labeled, “FIG. 9,” in FIG. 3.

The even dashed broken lines in FIG. 9 represent unclaimed environment and form no part of the claimed design. The dash-dot lines represent the boundary lines of the enlarged portion view of FIG. 9 shown in FIGS. 3 and 9 and form no part of the claimed design.

Claims

The ornamental design for a support ring for an interlocking process kit for a substrate processing chamber, as shown and described.