Claims
- 1. A method for manufacturing a surface acoustic wave device, comprising the steps of:forming a mirror surface inclined at an offset angle θ from a (001) plane of a crystalline substrate with a structure selected from a group consisting of a perovskite structure, a spinel structure, and a rock salt structure, growing, by chemical vapor deposition, a thin piezoelectric crystalline film with the perovskite structure, spinel structure or rock salt structure, on the inclined mirror surface of said crystalline substrate, and forming an electrode having electrode fingers arranged on said thin piezoelectric crystalline film in parallel to each other so that a surface acoustic wave propagates along one direction of crystalline axes of said thin piezoelectric crystalline film.
- 2. A method according to claim 1, wherein said thin piezoelectric crystalline film is composed of KNbO3.
- 3. A method according to claim 2, wherein said crystalline substrate is composed of SrTiO3.
- 4. A method according to claim 3, wherein said offset angle θ is set within a range of −10°<θ<10° (θ≠0°).
- 5. A method according to claim 4, wherein said thin piezoelectric crystalline film crystal is grown with an a-axis oriented in a surface growth layer thereof.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-244524 |
Aug 1999 |
JP |
|
Parent Case Info
This is a divisional of application Ser. No. 09/606,170 filed on Jun. 26, 2000 now U.S. Pat. No. 6,348,754.
US Referenced Citations (9)