Claims
- 1. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, a short-circuit electrode formed on said diamond, said single crystal LiNbO.sub.3 layer formed on said short-circuit electrode, and said interdigital transducer formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 1.sup.st -order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- on an orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.11 B.sub.11 C.sub.11 and D.sub.11, and a planar rectangular region with its vertices at points A.sub.12 B.sub.12 C.sub.12 and D.sub.12,
- where
- point A.sub.11 =(0.45,80,140)
- point B.sub.11 =(0.45,100,140)
- point C.sub.11 =(0.45,100,180)
- point D.sub.11 =(0.45,80,180)
- point A.sub.12 =(0.7,70,120)
- point B.sub.12 =(0.7,110,120)
- point C.sub.12 =(0.7,110,180)
- point D.sub.12 =(0.7,60,180), and
- on the orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.13 B.sub.13 C.sub.13 and D.sub.13, and a planar rectangular region with its vertices at points A.sub.14 B.sub.14 C.sub.14 and D.sub.14,
- where
- point A.sub.13 =(0.45,80,0)
- point B.sub.13 =(0.45,90,0)
- point C.sub.13 =(0.45,90,10)
- point D.sub.13 =(0.45,80,20)
- point A.sub.14 =(0.7,60,0)
- point B.sub.14 =(0.7,110,0)
- point C.sub.14 =(0.7,90,40)
- point D.sub.14 =(0.7,80,40).
- 2. A device according to claim 1, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 3. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, a short-circuit electrode formed on said diamond, said single crystal LiNbO.sub.3 layer formed on said short-circuit electrode, and said interdigital transducer formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 2nd-order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- 0.ltoreq..PHI..ltoreq.15 on an orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.21 B.sub.21 C.sub.21 and D.sub.21, and a planar rectangular region with its vertices at points A.sub.22 B.sub.22 C.sub.22 and D.sub.22,
- where
- point A.sub.21 =(0.6,60,40)
- point B.sub.21 =(0.6,110,40)
- point C.sub.21 =(0.6,110,120)
- point D.sub.21 =(0.6,60,120)
- point A.sub.22 =(0.85,50,70)
- point B.sub.22 =(0.85,130,0)
- point C.sub.22 =(0.85,130,180)
- point D.sub.22 =(0.85,50,100),
- 0.ltoreq..PHI..ltoreq.15 on the orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.22 B.sub.22 C.sub.22 and D.sub.22, and a planar rectangular region with its vertices at points A.sub.23 B.sub.23 C.sub.23 and D.sub.23,
- where
- point A.sub.26 =(1.1,40,60)
- point B.sub.23 =(1.1,140,0)
- point C.sub.23 =(1.1,140,180)
- point D.sub.23 =(1.1,40,110),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.24 B.sub.24 C.sub.24 and D.sub.24, and a planar rectangular region with its vertices at points A.sub.25 B.sub.25 C.sub.25 and D.sub.25,
- where
- point A.sub.24 =(0.6,60,30)
- point B.sub.24 =(0.6,120,30)
- point C.sub.24 =(0.6,120,100)
- point D.sub.24 =(0.6,60,100)
- point A.sub.25 =(0.85,50,30)
- point B.sub.25 =(0.85,130,30)
- point C.sub.25 =(0.85,130,110)
- point D.sub.25 =(0.85,50,110), and
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.25 B.sub.25 C.sub.25 and D.sub.25, and a planar rectangular region with its vertices at points A.sub.26 B.sub.26 C.sub.26 and D.sub.26,
- where
- point A.sub.26 =(1.1,40,30)
- point B.sub.26 =(1.1,140,30)
- point C.sub.26 =(1.1,140,120)
- point D.sub.26 =(1.1,40,120).
- 4. A device according to claim 3, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 5. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, said interdigital transducer formed on said diamond, said single crystal LiNbO.sub.3 layer formed on said Interdigital transducer, and a short-circuit electrode formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 1st-order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- 0.ltoreq..PHI..ltoreq.15 on an orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a quadrangular pyramid which has its vertex at a point P.sub.31 and, as its bottom surface, a planar rectangular region with its vertices at points A.sub.31 B.sub.31 C.sub.31 and D.sub.31,
- where
- point P.sub.31 =(0.45,90,150)
- point A.sub.31 =(0.7,70,130)
- point B.sub.31 =(0.7,90,130)
- point C.sub.31 =(0.7,90,180)
- point D.sub.31 =(0.7,70,180), and
- 15.ltoreq..PHI..ltoreq.30 on an orthogonal coordinate system (kh.sub.1 .theta., .psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.32 B.sub.32 C.sub.32 and D.sub.32, and a planar rectangular region with its vertices at points A.sub.33 B.sub.33 C.sub.33 and D.sub.33,
- where
- point A.sub.32 =(0.45,80,130)
- point B.sub.32 =(0.45,100,130)
- point C.sub.32 =(0.45,100,150)
- point D.sub.32 =(0.45,80,150)
- point A.sub.33 =(0.7,70,120)
- point B.sub.33 =(0.7,110,120)
- point C.sub.33 =(0.7,110,160)
- point D.sub.33 =(0.7,70,160).
- 6. A device according to claim 5, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 7. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, said interdigital transducer formed on said diamond, said single crystal LiNbO.sub.3 layer formed on said interdigital transducer, and a short-circuit electrode formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 2.sup.nd -order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- 0.ltoreq..PHI..ltoreq.15 on an orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal regions of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.41 B.sub.41 C.sub.41 and D.sub.41, and a planar rectangular region with its vertices at points A.sub.42 B.sub.42 C.sub.42 and D.sub.42,
- where
- point A.sub.41 =(0.6,70,40)
- point B.sub.41 =(0.6,100,40)
- point C.sub.41 =(0.6,100,110)
- point D.sub.41 =(0.6,70,110)
- point A.sub.42 =(0.85,70,60)
- point B.sub.42 =(0.85,120,0)
- point C.sub.42 =(0.85,120,180)
- point D.sub.42 =(0.85,70,100),
- 0.ltoreq..PHI..ltoreq.15 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedrons which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.42 B.sub.42 C.sub.42 and D.sub.42, and a planar rectangular region with its vertices at points A.sub.43 B.sub.43 C.sub.43 and D.sub.43,
- where
- point A.sub.43 =(1.1,90,0)
- point B.sub.43 =(1.1,130,0)
- point C.sub.43 =(1.1,130,180)
- point D.sub.43 =(1.1,90,180),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.44 B.sub.44 C.sub.44 and D.sub.44, and a planar rectangular region with its vertices at points A.sub.45 B.sub.45 C.sub.45 and D.sub.45,
- where
- point A.sub.44 =(0.6,70,20)
- point B.sub.44 =(0.6,110,20)
- point C.sub.44 =(0.6,100,90)
- point D.sub.44 =(0.6,70,90)
- point A.sub.45 =(0.85,60,10)
- point B.sub.45 =(0.85,120,10)
- point C.sub.45 =(0.85,120,90)
- point D.sub.45 =(0.85,60,90), and
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.45 B.sub.45 C.sub.45 and D.sub.45, and a planar rectangular region with its vertices at points A.sub.46 B.sub.46 C.sub.46 and D.sub.46,
- where
- point A.sub.46 =(1.1,80,10)
- point B.sub.46 =(1.1,120,10)
- point C.sub.46 =(1.1,130,80)
- point D.sub.46 =(1.1,50,80).
- 8. A device according to claim 7, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 9. A surface acoustic wave device comprising;
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, said single crystal LiNbO.sub.3 layer formed on said diamond, and said interdigital transducer formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 1.sup.st -order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- on an orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a quadrangular pyramid which has its vertex at a point P.sub.51 and, as its bottom surface, a planar rectangular region with its vertices at points A.sub.51 B.sub.51 C.sub.51 and D.sub.51,
- where
- point P.sub.51 =(0.6,90,0)
- point A.sub.51 =(0.7,80,0)
- point B.sub.51 =(0.7,110,0)
- point C.sub.51 =(0.7,110,10)
- point D.sub.51 =(0.7,80,10), and
- on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a quadrangular pyramid which has its vertex at a point P.sub.52 and, as its bottom surface, a planar rectangular region with its vertices at points A.sub.52 B.sub.52 C.sub.52 and D.sub.52,
- where
- point P.sub.52 =(0.6,100,0)
- point A.sub.52 =(0.7,90,170)
- point B.sub.52 =(0.7,100,170)
- point C.sub.52 =(0.7,110,180)
- point D.sub.52 =(0.7,80,180).
- 10. A device according to claim 9, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 11. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, said single crystal LiNbO.sub.3 layer formed on said diamond, and said interdigital transducer formed on said LiNbO.sub.3 layer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 2.sup.nd -order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .theta., and .psi. are selected from,
- 0.ltoreq..PHI..ltoreq.15 on an orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.61 B.sub.61 C.sub.61 and D.sub.61, and a planar rectangular region with its vertices at points A.sub.62 B.sub.62 C.sub.62 and D.sub.62,
- where
- point A.sub.61 =(0.85,140,40)
- point B.sub.61 =(0.85,160,40)
- point C.sub.61 =(0.85,160,60)
- point D.sub.61 =(0.85,140,60)
- point A.sub.62 =(1.1,120,30)
- point B.sub.62 =(1.1,170,30)
- point C.sub.62 =(1.1,170,70)
- point D.sub.62 =(1.1,120,70),
- 0.ltoreq..PHI..ltoreq.15 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.63 B.sub.63 C.sub.63 and D.sub.63, and a planar rectangular region with its vertices at points A.sub.64 B.sub.64 C.sub.64 and D.sub.64,
- where
- point A.sub.63 =(0.85,130,130)
- point B.sub.63 =(0.85,160,130)
- point C.sub.63 =(0.85,160,150)
- point D.sub.63 =(0.85,130,150)
- point A.sub.64 =(1.1,100,140)
- point B.sub.64 =(1.1,140,100)
- point C.sub.64 =(1.1,160,160)
- point D.sub.64 =(1.1,130,160),
- 0.ltoreq..PHI..ltoreq.15 on the orthogonal coordinate system (kh.sub.1 .theta.,.psi.), values in internal region of a quadrangular pyramid which has its vertex at a point P.sub.65 and, as its bottom surface, a planar rectangular region with its vertices at points A.sub.65 B.sub.65 C.sub.65 and D.sub.65,
- where
- point P.sub.65 =(0.85,30,90)
- point A.sub.65 =(1.1,20,70)
- point B.sub.65 =(1.1,40,70)
- point C.sub.65 =(1.1,40,110)
- point D.sub.65 =(1.1,20,110),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.66 B.sub.66 C.sub.66 and D.sub.66, and a planar rectangular region with its vertices at points A.sub.67 B.sub.67 C.sub.67 and D.sub.67,
- where
- point A.sub.66 =(0.6,20,150)
- point B.sub.66 =(0.6,40,150)
- point C.sub.66 =(0.6,40,170)
- point D.sub.66 =(0.6,20,170)
- point A.sub.67 =(0.85,50,130)
- point B.sub.67 =(0.85,70,140)
- point C.sub.67 =(0.85,50,160)
- point D.sub.67 =(0.85,20,160),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.67 B.sub.67 C.sub.67 and D.sub.67, and a planar rectangular region with its vertices at points A.sub.68 B.sub.68 C.sub.68 and D.sub.68,
- where
- point A.sub.68 =(1.1,40,120)
- point B.sub.68 =(1.1,90,120)
- point C.sub.68 =(1.1,90,160)
- point D.sub.68 =(1.1,40,160),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.69 B.sub.69 C.sub.69 and D.sub.69, and a planar rectangular region with its vertices at points A.sub.6A B.sub.6A C.sub.6A and D.sub.6A,
- where
- point A.sub.69 =(0.6,140,150)
- point B.sub.69 =(0.6,160,150)
- point C.sub.69 =(0.6,160,160)
- point D.sub.69 =(0.6,140,160)
- point A.sub.6A =(0.85,100,140)
- point B.sub.6A =(0.85,130,130)
- point C.sub.6A =(0.85,160,160)
- point D.sub.6A =(0.85,130,160),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, the planar rectangular region with its vertices at the points A.sub.6A B.sub.6A C.sub.6A and D.sub.6A, and a planar rectangular region with its vertices at points A.sub.6B B.sub.6B C.sub.6B and D.sub.6B,
- where
- point A.sub.6B =(1.1,100,120)
- point B.sub.6B =(1.1,150,120)
- point C.sub.6B =(1.1,150,160)
- point D.sub.6B =(1.1,100,160),
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.6C B.sub.6C C.sub.6C and D.sub.6C, and a planar rectangular region with its vertices at points A.sub.6D B.sub.6D C.sub.6D and D.sub.6D,
- where
- point A.sub.6C =(0.85,150,50)
- point B.sub.6C =(0.85,160,50)
- point C.sub.6C =(0.85,160,60)
- point D.sub.6C =(0.85,150,60)
- point A.sub.6D =(1.1,130,40)
- point B.sub.6D =(1.1,160,40)
- point C.sub.6D =(1.1,160,90)
- point D.sub.6 D=(1.1,130,90), and
- 15.ltoreq..PHI..ltoreq.30 on the orthogonal coordinate system (kh.sub.1,.theta.,.psi.), values in internal region of a quadrangular pyramid which has its vertex at a point P.sub.6E and, as its bottom surface, a planar rectangular region with its vertices at points A.sub.6E B.sub.6E C.sub.6E and D.sub.6E,
- where
- point P.sub.6E =(0.85,30,70)
- point A.sub.6E =(1.1,20,50)
- point B.sub.6E =(1.1,40,50)
- point C.sub.6E =(1.1,40,90)
- point D.sub.6E =(1.1,20,90).
- 12. A device according to claim 11, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
- 13. A surface acoustic wave device comprising:
- diamond;
- a single crystal LiNbO.sub.3 layer formed on a surface of said diamond; and
- an interdigital transducer formed on one of a surface of said LiNbO.sub.3 layer and an interface between said diamond and said LiNbO.sub.3 layer,
- wherein a crystal orientation of said LiNbO.sub.3 layer with respect to an exposed surface of said LiNbO.sub.3 layer and a propagation direction of a surface acoustic wave, and a ratio of a thickness of said LiNbO.sub.3 layer to a wavelength of the surface acoustic wave to be used are selected such that a velocity of the surface acoustic wave to be used becomes 8,000 m/s and an electromechanical coupling coefficient becomes not less than 10%; and
- wherein said device comprises said diamond, said interdigital transducer formed on said diamond, and said single crystal LiNbO.sub.3 layer formed on said interdigital transducer, and uses a surface acoustic wave (wavelength: .lambda.[.mu.m]) in the 2.sup.nd -order mode,
- when an Eulerian angle representation on an orthogonal coordinate system (X,Y,Z) in which a Z-axis is set along a normal direction of said exposed surface of said LiNbO.sub.3 layer, and an X-axis is set along the propagation direction of the surface acoustic wave is represented by (.theta.[.degree.], .PHI.[.degree.], .psi.[.degree.]) with respect to a crystallographic fundamental coordinate system (x,y,z) of said LiNbO.sub.3 layer, the thickness of said LiNbO.sub.3 layer is t.sub.1 [.mu.m], and kh.sub.1 =2.pi.(t.sub.1 /.lambda.),
- the values kh.sub.1, .psi., and .theta. are selected from,
- 15.ltoreq..PHI..ltoreq.30 on an orthogonal coordinate system (k.sub.1,.theta.,.psi.), values in internal region of a hexahedron which has, as its opposing bottom surfaces, a planar rectangular region with its vertices at points A.sub.71 B.sub.71 C.sub.71 and D.sub.71, and a planar rectangular region with its vertices at points A.sub.72 B.sub.72 C.sub.72 and D.sub.72,
- where
- point A.sub.71 =(0.85,50,160)
- point B.sub.71 =(0.85,100,160)
- point C.sub.71 =(0.85,90,170)
- point D.sub.71 =(0.85,50,170)
- point A.sub.72 =(1.1,40,150)
- point B.sub.72 =(1.1,140,150)
- point C.sub.72 =(1.1,140,180)
- point D.sub.72 =(1.1,40,180).
- 14. A device according to claim 13, wherein said diamond is a diamond layer formed on a base material, and when a thickness of said diamond layer is t.sub.2 [.mu.m], and kh.sub.2 =2.pi.(t.sub.2 /.lambda.), the following relation is satisfied:
- kh.sub.2 .gtoreq.4.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8-155024 |
Feb 1996 |
JPX |
|
RELATED APPLICATIONS
This is a Continuation-In-Part application of application Ser. No. 08/790,524 filed on Jan. 29, 1997, now abandoned.
US Referenced Citations (2)
Number |
Name |
Date |
Kind |
5565725 |
Nakahata et al. |
Oct 1996 |
|
5838090 |
Nakahata et al. |
Nov 1998 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
9-219632 |
Jan 1997 |
JPX |
Non-Patent Literature Citations (1)
Entry |
The Transactions of The INstitute of Electronics and Communication Engineers, '86/10 vol. J69-C No. 10, 1986. |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
790524 |
Jan 1997 |
|