Claims
- 1. A surface acoustic wave device comprising:
- a diamond or diamond-like carbon substrate,
- a piezoelectric layer deposited on the diamond or diamond-like carbon substrate,
- interdigital transducers formed on opposite ends of a first surface of said piezoelectric layer,
- a first electrode formed on a middle part of said first surface,
- a semiconductor film deposited on said first surface, thereby covering said interdigital transducers and said first electrode,
- a diamond or diamond-like carbon film deposited on the semiconductor film, on a surface thereof opposite the piezoelectric layer,
- a second electrode formed on a surface of said diamond or diamond-like carbon film opposite said semiconductor film,
- wherein one of said interdigital transducers generates a surface acoustic wave, the surface acoustic wave propagates in the piezoelectric layer and the diamond or diamond-like carbon substrate,
- wherein another of said interdigital transducers converts said surface acoustic wave into electric signals, and
- wherein AC voltage is applied to the first and second electrodes in order to amplify the surface acoustic wave through the interaction between carriers produced by the AC voltage and the surface acoustic wave.
- 2. A Surface acoustic wave device as claimed in claim 1, wherein the piezoelectric material is selected from the group consisting of ZnO, AlN, Pb(Zr,Ti)O.sub.3, (Pb, La) (Zr,Ti)O.sub.3, LiTaO.sub.3, LiNbO.sub.3, SiO.sub.2, Ta.sub.2 O.sub.5, Nb.sub.2 O.sub.5, BeO, Li.sub.2 B.sub.4 O.sub.7, KNbO.sub.3, ZnS, ZnSe and CdS.
- 3. A surface acoustic wave device as claimed in claim 1, wherein the semiconductor material is selected from the group consisting of Si, GaAs, Ge, Se, CdS, CdSe, ZnSe, PbSe, CdTe, ZnTe, PbTe, ZnSb, AlAs, InAs, GaP, InP, AlSb, GaSb and InSb.
Parent Case Info
This application is a continuation-in-part of application Ser. No. 07/767,624, which was filed Sep. 30, 1991, and is now issued as U.S. Pat. No. 5,221,870.
US Referenced Citations (14)
Foreign Referenced Citations (4)
Number |
Date |
Country |
0220910 |
Jan 1990 |
JPX |
2137413 |
May 1990 |
JPX |
2239715 |
Sep 1990 |
JPX |
2299309 |
Dec 1990 |
JPX |
Continuation in Parts (1)
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Number |
Date |
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Parent |
767624 |
Sep 1991 |
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