SURFACE TOPOGRAPHY DETECTOR AND METHOD FOR USE OF THE SAME

Abstract

A surface topography detector includes a first sensor, a second sensor and a digital control unit. The angle defined between the center axis of the first sensor and the center axis of the second sensor is equal to or less than 90 degrees. The digital control unit is electrically connected with the first sensor and the second sensor and is arranged for controlling the movement of the first sensor and the second sensor and processing the output signals of the first sensor and the second sensor. The surface topography detector can detect a surface with a bigger range of gradient angle accurately.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the present surface topography detector and method for detecting a surface topography of a workpiece can be better understood with reference to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present surface topography detector and method for detecting a surface topography of a workpiece. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.

FIG. 1 is a schematic, plan view of a surface topography detector according to a preferred embodiment of the present invention; and

FIG. 2 is a schematic, plan view of a conventional surface topography detector.

Claims

1. A surface topography detector, comprising: a first sensor with a first central axis;a second sensor with a second central axis, the first sensor and the second sensor being arranged in a manner such that an angle equal to or less than 90 degrees is defined between the first center axis and the second center axis; anda digital control unit electrically connected with the first sensor and the second sensor, the digital control unit being configured for processing output signals from the first sensor and the second sensor and controlling movement of the first sensor and the second sensor.

2. The surface topography detector as claimed in claim 1, wherein the first sensor or the second sensor is an optical interference sensor.

3. The surface topography detector as claimed in claim 1, wherein the first sensor or the second sensor is an inductive transducer.

4. The surface topography detector as claimed in claim 1, wherein the output signals from the first sensor and the second sensor include information on surface topography of a detected location on the workpiece and corresponding positions of the first sensor and the second sensor.

5. A method for detecting a surface topography of a workpiece, comprising the steps of: arranging a first sensor with a first central axis and a second sensor with a second central axis in a manner such that an angle is defined between the first center axis and the second center axis, the angle being equal to or less than 90 degrees;determining detecting locations of the first sensor and the second sensor;detecting the locations on the surface using the first sensor and the second sensor; andprocessing output signals from the first sensor and the second sensor thereby obtaining a detecting result.

6. The method as claimed in claim 5, wherein the first or second sensor is an optical interference sensor.

7. The method as claimed in claim 5, wherein the first or second sensor is an inductive transducer.

8. The method as claimed in claim 5, wherein the output signals of the first sensor and the second sensor include information of surface topography of the workpiece and positions of the first sensor and the second sensor.