The invention relates to a surface acoustic wave sensor which can be checked without the use of wires.
Surface acoustic wave sensors (SAW sensors) which can be checked without the use of wires are nowadays used in many fields, since these sensors can transmit measurement data without the use of wires, and without their own power supply. Sensors such as these have thus already been used for a long time for pressure measurement, acceleration measurement, surface tension measurement and for the measurement of chemical characteristics. Since the measurement results from this surface acoustic wave sensor are temperature-dependent, temperature compensation must be carried out when transmitting the measurement result, in order to make it possible to deduce the actual measured values. One such surface acoustic wave sensor is described in EP-0619 906 B1. This document likewise discloses a method describing how the current temperature of the sensor can be determined from the radio signals that are sent back. The measurement result can be corrected for the temperature influence with the aid of this temperature information. The problem in this document is that two or more SAW sensors are required for the method described there.
The object of the invention is thus to specify a surface acoustic wave sensor in which temperature determination and compensation can be carried out using very simple methods.
The object is achieved by the features in the characterizing part of claim 1.
The essence of the invention is that an edge area of the chip surface which is neither expanded nor compressed when mechanical loads are applied is used to produce a temperature difference signal. Two reflectors are incorporated in this smoothed edge zone of the SAW sensor, a short distance apart, for this purpose. Since these two reflectors are always at the same distance apart from one another irrespective of the mechanical load on the sensor, the temperature of the chip can be deduced directly from the difference signal between these two reflectors. This simple measure means that all that is necessary is to evaluate the time interval between these two signals. This time interval is then directly proportional to the current temperature of the SAW sensor.
Reflectors 6a and 6b are arranged in this edge area 8. The distance between the reflectors 6a and 6b is very largely independent of the external load, and is thus always virtually constant. Practical trials have shown that this smoothed area 8 corresponds approximately to three times the thickness of the substrate material of the SAW sensor. One possible way to enlarge the smoothed edge area 8 is to deliberately omit the adhesive 2, by means of which the surface acoustic wave sensor is applied to the substrate material, in the edge area 8. No forces are transmitted in the area without adhesive 10.
List of Reference Symbols
Number | Date | Country | Kind |
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102111987 | Mar 2002 | DE | national |
Filing Document | Filing Date | Country | Kind |
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PCT/DE03/00777 | 3/12/2003 | WO |