Susceptor for semiconductor substrate processing apparatus

Information

  • Patent Grant
  • D830981
  • Patent Number
    D830,981
  • Date Filed
    Tuesday, May 16, 2017
    7 years ago
  • Date Issued
    Tuesday, October 16, 2018
    6 years ago
  • US Classifications
    Field of Search
    • US
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  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a perspective view of a susceptor for semiconductor substrate processing apparatus, showing our new design;



FIG. 2 is a front elevation view thereof;



FIG. 3 is a rear elevation view thereof;



FIG. 4 is a left side elevation view thereof;



FIG. 5 is a right side elevation view thereof;



FIG. 6 is a top plan view thereof;



FIG. 7 is a bottom plan view thereof;



FIG. 8 is a rear perspective view thereof; and,



FIG. 9 is a sectional view taken along line 9-9 of FIG. 6.


Claims
  • The ornamental design for a susceptor for semiconductor substrate processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
30-2017-0016290 Apr 2017 KR national
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